JP5854693B2 - 液体吐出ヘッドの製造方法 - Google Patents

液体吐出ヘッドの製造方法 Download PDF

Info

Publication number
JP5854693B2
JP5854693B2 JP2011173927A JP2011173927A JP5854693B2 JP 5854693 B2 JP5854693 B2 JP 5854693B2 JP 2011173927 A JP2011173927 A JP 2011173927A JP 2011173927 A JP2011173927 A JP 2011173927A JP 5854693 B2 JP5854693 B2 JP 5854693B2
Authority
JP
Japan
Prior art keywords
mold
metal layer
flow path
layer
plating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2011173927A
Other languages
English (en)
Japanese (ja)
Other versions
JP2012148553A5 (enExample
JP2012148553A (ja
Inventor
小山　修司
修司 小山
松本　圭司
圭司 松本
哲朗 本田
哲朗 本田
圭介 岸本
圭介 岸本
弘司 笹木
弘司 笹木
健太 古澤
健太 古澤
純 山室
純 山室
謙児 藤井
謙児 藤井
宇 横山
宇 横山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2011173927A priority Critical patent/JP5854693B2/ja
Publication of JP2012148553A publication Critical patent/JP2012148553A/ja
Publication of JP2012148553A5 publication Critical patent/JP2012148553A5/ja
Application granted granted Critical
Publication of JP5854693B2 publication Critical patent/JP5854693B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/17—Ink jet characterised by ink handling
    • B41J2/175—Ink supply systems ; Circuit parts therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1604—Production of bubble jet print heads of the edge shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B41J2/1634—Manufacturing processes machining laser machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1635—Manufacturing processes dividing the wafer into individual chips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B41J2/1639—Manufacturing processes molding sacrificial molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D3/00—Electroplating: Baths therefor
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D3/00—Electroplating: Baths therefor
    • C25D3/02—Electroplating: Baths therefor from solutions
    • C25D3/38—Electroplating: Baths therefor from solutions of copper
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Physics & Mathematics (AREA)
  • Electrochemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP2011173927A 2010-09-01 2011-08-09 液体吐出ヘッドの製造方法 Expired - Fee Related JP5854693B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011173927A JP5854693B2 (ja) 2010-09-01 2011-08-09 液体吐出ヘッドの製造方法

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
JP2010195708 2010-09-01
JP2010195708 2010-09-01
JP2010285146 2010-12-21
JP2010285146 2010-12-21
JP2010293023 2010-12-28
JP2010293023 2010-12-28
JP2011173927A JP5854693B2 (ja) 2010-09-01 2011-08-09 液体吐出ヘッドの製造方法

Publications (3)

Publication Number Publication Date
JP2012148553A JP2012148553A (ja) 2012-08-09
JP2012148553A5 JP2012148553A5 (enExample) 2014-09-25
JP5854693B2 true JP5854693B2 (ja) 2016-02-09

Family

ID=45695208

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011173927A Expired - Fee Related JP5854693B2 (ja) 2010-09-01 2011-08-09 液体吐出ヘッドの製造方法

Country Status (4)

Country Link
US (1) US8429820B2 (enExample)
JP (1) JP5854693B2 (enExample)
KR (1) KR101430292B1 (enExample)
CN (1) CN102381032B (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5921186B2 (ja) * 2011-12-26 2016-05-24 キヤノン株式会社 インクジェットヘッド基板の加工方法
JP2013244654A (ja) * 2012-05-25 2013-12-09 Canon Inc インクジェットヘッド基板の加工方法
JP5980020B2 (ja) * 2012-07-10 2016-08-31 キヤノン株式会社 液体吐出ヘッド用基板の製造方法
JP6000831B2 (ja) * 2012-11-30 2016-10-05 キヤノン株式会社 液体吐出ヘッドの製造方法
JP6068684B2 (ja) 2013-02-28 2017-01-25 ヒューレット−パッカード デベロップメント カンパニー エル．ピー．Ｈｅｗｌｅｔｔ‐Ｐａｃｋａｒｄ Ｄｅｖｅｌｏｐｍｅｎｔ Ｃｏｍｐａｎｙ， Ｌ．Ｐ． 流体流れ構造の成形
US10821729B2 (en) 2013-02-28 2020-11-03 Hewlett-Packard Development Company, L.P. Transfer molded fluid flow structure
BR112015020862B1 (pt) 2013-02-28 2021-05-25 Hewlett-Packard Development Company, L.P. barra de impressão moldada
CN105189122B (zh) 2013-03-20 2017-05-10 惠普发展公司，有限责任合伙企业 具有暴露的前表面和后表面的模制芯片条
JP6323991B2 (ja) * 2013-05-27 2018-05-16 キヤノン株式会社 液体吐出ヘッド及びその製造方法
US9599893B2 (en) * 2014-09-25 2017-03-21 Canon Kabushiki Kaisha Production process for optically shaped product and production process for liquid discharge head
JP6552660B1 (ja) * 2018-02-28 2019-07-31 キヤノン株式会社 液体吐出ヘッド用基板の製造方法

Family Cites Families (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4894664A (en) * 1986-04-28 1990-01-16 Hewlett-Packard Company Monolithic thermal ink jet printhead with integral nozzle and ink feed
US4882595A (en) * 1987-10-30 1989-11-21 Hewlett-Packard Company Hydraulically tuned channel architecture
US6019457A (en) * 1991-01-30 2000-02-01 Canon Information Systems Research Australia Pty Ltd. Ink jet print device and print head or print apparatus using the same
JP3372739B2 (ja) * 1996-01-12 2003-02-04 キヤノン株式会社 液体噴射記録ヘッドの製造方法
US6000787A (en) * 1996-02-07 1999-12-14 Hewlett-Packard Company Solid state ink jet print head
JP3417230B2 (ja) * 1996-09-25 2003-06-16 信越化学工業株式会社 型取り母型用光硬化性液状シリコーンゴム組成物
US6045214A (en) * 1997-03-28 2000-04-04 Lexmark International, Inc. Ink jet printer nozzle plate having improved flow feature design and method of making nozzle plates
US6120135A (en) * 1997-07-03 2000-09-19 Lexmark International, Inc. Printhead having heating element conductors arranged in spaced apart planes and including heating elements having a substantially constant cross-sectional area in the direction of current flow
US6375309B1 (en) * 1997-07-31 2002-04-23 Canon Kabushiki Kaisha Liquid discharge apparatus and method for sequentially driving multiple electrothermal converting members
RU2143343C1 (ru) * 1998-11-03 1999-12-27 Самсунг Электроникс Ко., Лтд. Микроинжектор и способ изготовления микроинжектора
KR100325521B1 (ko) * 1998-12-10 2002-04-17 윤종용 유체 분사 장치의 제조 방법 및 그에 의해 제조되는 유체 분사장치
US6482574B1 (en) * 2000-04-20 2002-11-19 Hewlett-Packard Co. Droplet plate architecture in ink-jet printheads
IT1320392B1 (it) 2000-06-05 2003-11-26 Olivetti Lexikon Spa Processo di fabbricazione di una testina di stampa monolitica conugelli tronco-conici.
KR100397604B1 (ko) * 2000-07-18 2003-09-13 삼성전자주식회사 버블 젯 방식의 잉크 젯 프린트 헤드 및 그 제조방법
US6419346B1 (en) * 2001-01-25 2002-07-16 Hewlett-Packard Company Two-step trench etch for a fully integrated thermal inkjet printhead
KR20030012061A (ko) * 2001-07-30 2003-02-12 주식회사 루트스 잉크젯 프린트헤드의 잉크 공급로 형성 방법
KR100552662B1 (ko) * 2001-10-29 2006-02-20 삼성전자주식회사 다중 배열 구조를 가진 고밀도 잉크 젯 프린트 헤드
KR100400015B1 (ko) * 2001-11-15 2003-09-29 삼성전자주식회사 잉크젯 프린트헤드 및 그 제조방법
KR100459905B1 (ko) * 2002-11-21 2004-12-03 삼성전자주식회사 두 개의 잉크챔버 사이에 배치된 히터를 가진 일체형잉크젯 프린트헤드 및 그 제조방법
ITTO20021100A1 (it) * 2002-12-19 2004-06-20 Olivetti Jet Spa Testina di stampa a getto d'inchiostro perfezionata e relativo processo di fabbricazione
ITTO20021099A1 (it) * 2002-12-19 2004-06-20 Olivetti I Jet Spa Processo di rivestimento protettivo di microcircuiti idraulici rispetto a liquidi aggressivi. particolarmente per una testina di stampa a getto d'inchiostro.
KR100517515B1 (ko) 2004-01-20 2005-09-28 삼성전자주식회사 모놀리틱 잉크젯 프린트헤드의 제조방법
US7144103B2 (en) * 2004-05-05 2006-12-05 Eastman Kodak Company Beveled charge structure
KR100560721B1 (ko) * 2004-08-23 2006-03-13 삼성전자주식회사 금속 챔버층을 구비하는 잉크젯 헤드의 제조방법 및 그에의하여 제조된 잉크젯 헤드
JP4854464B2 (ja) * 2005-10-20 2012-01-18 キヤノン株式会社 液体吐出ヘッドおよびその製造方法
JP4937061B2 (ja) * 2007-09-20 2012-05-23 富士フイルム株式会社 液体吐出ヘッドの流路基板の製造方法
KR100974948B1 (ko) * 2008-09-04 2010-08-10 삼성전기주식회사 잉크젯 헤드 제조방법
KR20110032253A (ko) * 2009-09-22 2011-03-30 삼성전자주식회사 잉크젯 프린트헤드 및 그 제조방법

Also Published As

Publication number Publication date
KR20120022660A (ko) 2012-03-12
US8429820B2 (en) 2013-04-30
CN102381032B (zh) 2014-06-04
JP2012148553A (ja) 2012-08-09
KR101430292B1 (ko) 2014-08-18
CN102381032A (zh) 2012-03-21
US20120047738A1 (en) 2012-03-01

Similar Documents

Publication Publication Date Title
JP5854693B2 (ja) 液体吐出ヘッドの製造方法
US8438729B2 (en) Method of producing liquid discharge head
JP2003145780A (ja) インクジェットプリントヘッドの製造方法
JP2005178364A (ja) インクジェット記録ヘッドの製造方法、インクジェット記録ヘッドおよびインクジェットカートリッジ
JP5762200B2 (ja) 液体吐出ヘッド用基板の製造方法
JP4455287B2 (ja) インクジェット記録ヘッドの製造方法
JP5328542B2 (ja) 記録素子基板及びインクジェットヘッド並びにその製造方法
US20080024559A1 (en) Fluid ejection device
JP2008179045A (ja) インクジェット記録ヘッド及びその製造方法、半導体デバイス及びその製造方法
JP5541733B2 (ja) 吐出口部材の製造方法および液体吐出ヘッドの製造方法
US8858812B2 (en) Processing method for an ink jet head substrate
JP2011016350A (ja) 液体吐出ヘッド用基板の製造方法
JP5065453B2 (ja) 液体吐出ヘッド用基板及びその製造方法及び、液体吐出ヘッド用基板を用いた液体吐出ヘッド及びその製造方法
JP5980020B2 (ja) 液体吐出ヘッド用基板の製造方法
US7117597B2 (en) Method of manufacturing liquid discharge head
US8499453B2 (en) Method of manufacturing liquid discharge head, and method of manufacturing discharge port member
US20100149280A1 (en) Substrate for ink ejection heads, ink ejection head, method ofmanufacturing substrate, and method of manufacturing ink ejection head
JP5701014B2 (ja) 吐出素子基板の製造方法
JP4822353B2 (ja) 液体吐出ヘッド及びその製造方法
JP6323991B2 (ja) 液体吐出ヘッド及びその製造方法
JP2012121168A (ja) 液体吐出ヘッド及びその製造方法
JP2008120075A (ja) インクジェット記録ヘッドおよびその製造方法
JP4310296B2 (ja) 液体吐出ヘッドの製造方法
JP2014094504A (ja) シリコン基板の加工方法及び液体吐出ヘッド用基板の製造方法

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20140808

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20140808

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20150514

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20150519

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20150721

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20151110

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20151208

R151 Written notification of patent or utility model registration

Ref document number: 5854693

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R151

LAPS Cancellation because of no payment of annual fees