JP5854184B2 - 液体噴射ヘッド、液体噴射装置、圧電素子、超音波センサー及び赤外センサー - Google Patents
液体噴射ヘッド、液体噴射装置、圧電素子、超音波センサー及び赤外センサー Download PDFInfo
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Description
かかる態様では、膜厚が3μm以下であり、鉄酸マンガン酸ビスマス及びチタン酸バリウムを含むペロブスカイト型化合物を含有する圧電材料からなり、(110)面に優先配向し、且つ、この(110)面に由来するX線の回折ピークの半値幅が0.24°以上0.28°以下である圧電体層とすることにより、低鉛化、すなわち鉛含有量が低く且つ比誘電率が高い圧電体層を有する液体噴射ヘッドとなる。
図1は、本発明の実施形態1に係る液体噴射ヘッドの一例であるインクジェット式記録ヘッドの概略構成を示す分解斜視図であり、図2は、図1の平面図及びそのA−A′線断面図である。
(0.60<x<1、0<y<0.40、好ましくは、0.70≦x≦0.80、0.20≦y≦0.30であり、x+y=1、0.01<a<0.10である。)
まず、シリコン基板の表面に熱酸化により膜厚400nmのSiO2膜を形成した。次に、SiO2膜上にRFスパッタ法により膜厚100nmのTiAlN膜を形成した。次に、TiAlN膜上にDCスパッタ法により膜厚100nmのIr膜及び膜厚30nmのIrO2膜を順に形成し、その上に蒸着法により(111)に配向したPt膜を形成し、第1電極60とした。
前駆体溶液にSiの化合物を添加せず、0.75Bi(Fe0.95Mn0.05)O3−0.25BaTiO3のペロブスカイト型化合物からなる圧電材料で構成された圧電体層70となるようにした以外は、実施例1と同様にして、圧電素子300を形成した。
Bi、Fe、Mn、Ba、Tiの金属化合物の混合割合を変更して、0.80Bi(Fe0.95Mn0.05)O3−0.20BaTiO3のペロブスカイト型化合物からなる圧電材料で構成された圧電体層70となるようにした以外は、実施例2と同様にして、圧電素子300を形成した。
Bi、Fe、Mn、Ba、Tiの金属化合物の混合割合を変更して、0.70Bi(Fe0.95Mn0.05)O3−0.30BaTiO3のペロブスカイト型化合物からなる圧電材料で構成された圧電体層70となるようにした以外は、実施例2と同様にして、圧電素子300を形成した。
Bi、Fe、Mn、Ba、Ti、Siの金属化合物の混合割合を変更して、0.60Bi(Fe0.95Mn0.05)O3−0.40BaTiO3のペロブスカイト型化合物と、このペロブスカイト型化合物に対して2モル%のSiO2とを有する圧電材料で構成された圧電体層70となるようにした以外は、実施例1と同様にして、圧電素子300を形成した。
前駆体溶液にSiの化合物を添加せず、0.60Bi(Fe0.95Mn0.05)O3−0.40BaTiO3のペロブスカイト型化合物からなる圧電材料で構成された圧電体層70となるようにした以外は、比較例1と同様にして、圧電素子300を形成した。
実施例1〜4及び比較例1〜2の各圧電素子300について、東陽テクニカ社製「FCE−1A」で、φ=400μmの電極パターンを使用し、周波数1kHz、3V〜60Vの三角波を印加して、P(分極量)−V(電圧)の関係を求めた。実施例1のヒステリシスを図3に、実施例2のヒステリシスを図4に、実施例3のヒステリシスを図5に、実施例4のヒステリシスを図6に、比較例1のヒステリシスを図7に、比較例2のヒステリシスを図8に示す。なお、図3〜図8に示すように、実施例1〜4及び比較例1〜2の圧電体層は強誘電体であった。
実施例1〜4及び比較例1〜2の圧電素子300の圧電体層70について、アジレント社製インピーダンスアナライザー「HP4294A」を用い1kHz、振幅141mVの条件で25℃〜300℃における比誘電率εrを測定した。結果を図9に示す。図9に示すように、実施例1〜4の圧電体層70は、比較例1〜2と比べて比誘電率εrが顕著に高く、比誘電率εrが320以上であった。具体的には、25℃での比誘電率は、図9に示すように、実施例1は370、実施例2は355、実施例3は325、実施例4は415であるのに対し、比較例1は205、比較例2は140であった。
実施例1〜4及び比較例1〜2の圧電素子について、Bruker AXS社製の「D8 Discover」を用い、X線源にCuKα線を使用し、室温で、圧電体層の粉末X線回折パターンをφ=ψ=0°で求めた。実施例1の結果を図10に、実施例2の結果を図11に、実施例3の結果を図12に、実施例4の結果を図13に、比較例1の結果を図14に、比較例2の結果を図15に示す。また、2次元検出画像の一例を、実施例1について図16に示す。
以上、本発明の一実施形態を説明したが、本発明の基本的構成は上述したものに限定されるものではない。例えば、圧電特性を良好にする等のために、Ni、Co、Cr、Sc、V等をさらに有する圧電材料からなる圧電体層としてもよい。
Claims (7)
- 圧電体層と、前記圧電体層に設けられた電極とを具備する圧電素子であって、
前記圧電体層は、鉄酸マンガン酸ビスマス及びチタン酸バリウムを含むペロブスカイト型化合物を含有する圧電材料からなり、
(110)面に優先配向し、且つ、この(110)面に由来するX線の回折ピークの半値幅が0.24以上0.28°以下であり、
前記圧電体層の厚みは0.3〜1.5μmであり、前記ペロブスカイト型化合物は、下記一般式(1)で表されることを特徴とする圧電素子。
xBi(Fe 1−a ,Mn a )O 3 −yBaTiO 3 (1)
(0.60<x<1、0<y<0.40、x+y=1、0.01<a<0.10である) - 前記圧電体層は、SiO2をさらに含むことを特徴とする請求項1に記載する圧電素子。
- 前記圧電体層は前記ペロブスカイト型化合物に対して0.5モル%以上5モル%以下のSiO2を含むことを特徴とする請求項2に記載する圧電素子。
- 請求項1〜3のいずれか一項に記載する圧電素子を具備することを特徴とする液体噴射ヘッド。
- 請求項4に記載する液体噴射ヘッドを具備することを特徴とする液体噴射装置。
- 請求項1〜3のいずれか一項に記載の圧電素子を具備することを特徴とする超音波センサー。
- 請求項1〜3のいずれか一項に記載の圧電素子を具備することを特徴とする赤外センサー。
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EP11156104.9A EP2363901B1 (en) | 2010-03-02 | 2011-02-25 | Liquid ejection head, liquid ejection device, and piezoelectric element |
CN201110050740.2A CN102189796B (zh) | 2010-03-02 | 2011-03-01 | 液体喷射头、液体喷射装置以及压电元件 |
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