JP5786224B2 - 圧電素子、圧電素子を有する圧電アクチュエータおよび振動波モータ - Google Patents

圧電素子、圧電素子を有する圧電アクチュエータおよび振動波モータ Download PDF

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Publication number
JP5786224B2
JP5786224B2 JP2011052510A JP2011052510A JP5786224B2 JP 5786224 B2 JP5786224 B2 JP 5786224B2 JP 2011052510 A JP2011052510 A JP 2011052510A JP 2011052510 A JP2011052510 A JP 2011052510A JP 5786224 B2 JP5786224 B2 JP 5786224B2
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Japan
Prior art keywords
electrode
piezoelectric
piezoelectric element
layer
electrode portion
Prior art date
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Expired - Fee Related
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JP2011052510A
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English (en)
Japanese (ja)
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JP2012191733A (ja
JP2012191733A5 (enExample
Inventor
丸山　裕
裕 丸山
亮 島田
亮 島田
稲田　豊
豊 稲田
匡史 松本
匡史 松本
優 伊藤
優 伊藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
NTK Ceratec Co Ltd
Original Assignee
Canon Inc
Nihon Ceratec Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc, Nihon Ceratec Co Ltd filed Critical Canon Inc
Priority to JP2011052510A priority Critical patent/JP5786224B2/ja
Priority to US13/408,564 priority patent/US8614536B2/en
Priority to CN201210057521.1A priority patent/CN102683575B/zh
Publication of JP2012191733A publication Critical patent/JP2012191733A/ja
Publication of JP2012191733A5 publication Critical patent/JP2012191733A5/ja
Application granted granted Critical
Publication of JP5786224B2 publication Critical patent/JP5786224B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/106—Langevin motors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
    • H10N30/053—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes by integrally sintering piezoelectric or electrostrictive bodies and electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H10N30/503—Piezoelectric or electrostrictive devices having a stacked or multilayer structure having a non-rectangular cross-section in a plane orthogonal to the stacking direction, e.g. polygonal or circular in top view
    • H10N30/505—Piezoelectric or electrostrictive devices having a stacked or multilayer structure having a non-rectangular cross-section in a plane orthogonal to the stacking direction, e.g. polygonal or circular in top view the cross-section being annular
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/871—Single-layered electrodes of multilayer piezoelectric or electrostrictive devices, e.g. internal electrodes

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP2011052510A 2011-03-10 2011-03-10 圧電素子、圧電素子を有する圧電アクチュエータおよび振動波モータ Expired - Fee Related JP5786224B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2011052510A JP5786224B2 (ja) 2011-03-10 2011-03-10 圧電素子、圧電素子を有する圧電アクチュエータおよび振動波モータ
US13/408,564 US8614536B2 (en) 2011-03-10 2012-02-29 Piezoelectric element, and piezoelectric actuator and vibration wave motor including piezoelectric element
CN201210057521.1A CN102683575B (zh) 2011-03-10 2012-03-07 压电元件及包括压电元件的压电致动器和振动波马达

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011052510A JP5786224B2 (ja) 2011-03-10 2011-03-10 圧電素子、圧電素子を有する圧電アクチュエータおよび振動波モータ

Publications (3)

Publication Number Publication Date
JP2012191733A JP2012191733A (ja) 2012-10-04
JP2012191733A5 JP2012191733A5 (enExample) 2014-04-17
JP5786224B2 true JP5786224B2 (ja) 2015-09-30

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JP2011052510A Expired - Fee Related JP5786224B2 (ja) 2011-03-10 2011-03-10 圧電素子、圧電素子を有する圧電アクチュエータおよび振動波モータ

Country Status (3)

Country Link
US (1) US8614536B2 (enExample)
JP (1) JP5786224B2 (enExample)
CN (1) CN102683575B (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014170926A (ja) * 2013-02-08 2014-09-18 Canon Inc 振動体、その製造方法、及び振動型駆動装置
JP6323863B2 (ja) * 2013-12-24 2018-05-16 日本特殊陶業株式会社 圧電素子、圧電アクチュエータおよび圧電素子の製造方法
US11043910B2 (en) * 2016-06-30 2021-06-22 Nikon Corporation Vibration wave motor and optical device
CN107070297B (zh) * 2017-04-14 2019-03-29 哈尔滨工业大学 叠层式弯曲型压电陶瓷驱动器
USD1049063S1 (en) * 2019-12-23 2024-10-29 Tdk Corporation Vibration element for an actuator
US11545615B2 (en) * 2020-09-09 2023-01-03 Baker Hughes Oilfield Operations Llc Method for manufacturing piezoelectric instrumentation devices with 3D structures using additive manufacturing

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63156378A (ja) * 1986-12-20 1988-06-29 Toyota Motor Corp 圧電積層体の製造方法
JP3103165B2 (ja) 1991-10-15 2000-10-23 太平洋セメント株式会社 圧電体の製造方法
JP3432321B2 (ja) * 1995-01-31 2003-08-04 太平洋セメント株式会社 積層セラミックス圧電体素子
US5814919A (en) * 1995-04-28 1998-09-29 Canon Kabushiki Kaisha Electro-mechanical energy conversion element and a vibration wave actuator using the electro-mechanical energy conversion element
JP3198906B2 (ja) * 1995-12-20 2001-08-13 株式会社村田製作所 圧電体磁器組成物
US6404104B1 (en) * 1997-11-27 2002-06-11 Canon Kabushiki Kaisha Vibration type actuator and vibration type driving apparatus
JP2001253772A (ja) * 2000-03-10 2001-09-18 Kyocera Corp 圧電磁器組成物及びその製造方法
JP4854831B2 (ja) 2000-03-17 2012-01-18 太平洋セメント株式会社 積層型圧電アクチュエータ
JP2001352768A (ja) * 2000-06-05 2001-12-21 Canon Inc 積層電気−機械エネルギー変換素子および振動波駆動装置
JP2003111450A (ja) 2001-10-01 2003-04-11 Canon Inc 電気−機械エネルギー変換素子を振動源とする振動体、この振動体を駆動源とする振動波駆動装置、振動波駆動装置を有する駆動システムおよびこの振動体を搬送源とする搬送装置
JP2004002069A (ja) * 2002-05-30 2004-01-08 Tdk Corp 圧電磁器の製造方法および圧電素子の製造方法
DE102005061528B8 (de) * 2005-12-22 2010-06-10 Siemens Ag Piezokeramisches Bauteil mit Bleizirkonattitanat mit Eisen-Wolfram-Dotierung, Verfahren zum Herstellen des piezokeramischen Bauteils und seine Verwendung
JP4942461B2 (ja) * 2006-11-21 2012-05-30 京セラ株式会社 セラミック電子部品及び噴射装置

Also Published As

Publication number Publication date
CN102683575A (zh) 2012-09-19
CN102683575B (zh) 2014-12-10
US20120228998A1 (en) 2012-09-13
JP2012191733A (ja) 2012-10-04
US8614536B2 (en) 2013-12-24

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