CN102683575B - 压电元件及包括压电元件的压电致动器和振动波马达 - Google Patents

压电元件及包括压电元件的压电致动器和振动波马达 Download PDF

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Publication number
CN102683575B
CN102683575B CN201210057521.1A CN201210057521A CN102683575B CN 102683575 B CN102683575 B CN 102683575B CN 201210057521 A CN201210057521 A CN 201210057521A CN 102683575 B CN102683575 B CN 102683575B
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CN
China
Prior art keywords
electrode
piezoelectric
piezoelectric element
layer
electrode portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201210057521.1A
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English (en)
Chinese (zh)
Other versions
CN102683575A (zh
Inventor
丸山裕
岛田亮
稻田丰
松本匡史
伊藤优
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Niterra Co Ltd
Original Assignee
Canon Inc
Nihon Ceratec Co Ltd
Taiheiyo Cement Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc, Nihon Ceratec Co Ltd, Taiheiyo Cement Corp filed Critical Canon Inc
Publication of CN102683575A publication Critical patent/CN102683575A/zh
Application granted granted Critical
Publication of CN102683575B publication Critical patent/CN102683575B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
    • H10N30/053—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes by integrally sintering piezoelectric or electrostrictive bodies and electrodes
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/106—Langevin motors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H10N30/503—Piezoelectric or electrostrictive devices having a stacked or multilayer structure having a non-rectangular cross-section in a plane orthogonal to the stacking direction, e.g. polygonal or circular in top view
    • H10N30/505—Piezoelectric or electrostrictive devices having a stacked or multilayer structure having a non-rectangular cross-section in a plane orthogonal to the stacking direction, e.g. polygonal or circular in top view the cross-section being annular
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/871—Single-layered electrodes of multilayer piezoelectric or electrostrictive devices, e.g. internal electrodes

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
CN201210057521.1A 2011-03-10 2012-03-07 压电元件及包括压电元件的压电致动器和振动波马达 Expired - Fee Related CN102683575B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2011052510A JP5786224B2 (ja) 2011-03-10 2011-03-10 圧電素子、圧電素子を有する圧電アクチュエータおよび振動波モータ
JP2011-052510 2011-03-10

Publications (2)

Publication Number Publication Date
CN102683575A CN102683575A (zh) 2012-09-19
CN102683575B true CN102683575B (zh) 2014-12-10

Family

ID=46794890

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201210057521.1A Expired - Fee Related CN102683575B (zh) 2011-03-10 2012-03-07 压电元件及包括压电元件的压电致动器和振动波马达

Country Status (3)

Country Link
US (1) US8614536B2 (enExample)
JP (1) JP5786224B2 (enExample)
CN (1) CN102683575B (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014170926A (ja) * 2013-02-08 2014-09-18 Canon Inc 振動体、その製造方法、及び振動型駆動装置
JP6323863B2 (ja) * 2013-12-24 2018-05-16 日本特殊陶業株式会社 圧電素子、圧電アクチュエータおよび圧電素子の製造方法
CN109417357B (zh) * 2016-06-30 2021-02-05 株式会社尼康 振动波马达及光学设备
CN107070297B (zh) * 2017-04-14 2019-03-29 哈尔滨工业大学 叠层式弯曲型压电陶瓷驱动器
USD1049063S1 (en) * 2019-12-23 2024-10-29 Tdk Corporation Vibration element for an actuator
US11545615B2 (en) * 2020-09-09 2023-01-03 Baker Hughes Oilfield Operations Llc Method for manufacturing piezoelectric instrumentation devices with 3D structures using additive manufacturing

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5770916A (en) * 1995-01-31 1998-06-23 Canon Kabushiki Kaisha Laminated piezoelectric element and vibration wave actuator
CN1064940C (zh) * 1995-12-20 2001-04-25 株式会社村田制作所 压电陶瓷组合物

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63156378A (ja) * 1986-12-20 1988-06-29 Toyota Motor Corp 圧電積層体の製造方法
JP3103165B2 (ja) 1991-10-15 2000-10-23 太平洋セメント株式会社 圧電体の製造方法
US5814919A (en) * 1995-04-28 1998-09-29 Canon Kabushiki Kaisha Electro-mechanical energy conversion element and a vibration wave actuator using the electro-mechanical energy conversion element
US6404104B1 (en) * 1997-11-27 2002-06-11 Canon Kabushiki Kaisha Vibration type actuator and vibration type driving apparatus
JP2001253772A (ja) * 2000-03-10 2001-09-18 Kyocera Corp 圧電磁器組成物及びその製造方法
JP4854831B2 (ja) 2000-03-17 2012-01-18 太平洋セメント株式会社 積層型圧電アクチュエータ
JP2001352768A (ja) * 2000-06-05 2001-12-21 Canon Inc 積層電気−機械エネルギー変換素子および振動波駆動装置
JP2003111450A (ja) 2001-10-01 2003-04-11 Canon Inc 電気−機械エネルギー変換素子を振動源とする振動体、この振動体を駆動源とする振動波駆動装置、振動波駆動装置を有する駆動システムおよびこの振動体を搬送源とする搬送装置
JP2004002069A (ja) * 2002-05-30 2004-01-08 Tdk Corp 圧電磁器の製造方法および圧電素子の製造方法
DE102005061528B8 (de) * 2005-12-22 2010-06-10 Siemens Ag Piezokeramisches Bauteil mit Bleizirkonattitanat mit Eisen-Wolfram-Dotierung, Verfahren zum Herstellen des piezokeramischen Bauteils und seine Verwendung
JP4942461B2 (ja) * 2006-11-21 2012-05-30 京セラ株式会社 セラミック電子部品及び噴射装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5770916A (en) * 1995-01-31 1998-06-23 Canon Kabushiki Kaisha Laminated piezoelectric element and vibration wave actuator
CN1064940C (zh) * 1995-12-20 2001-04-25 株式会社村田制作所 压电陶瓷组合物

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
JP昭63-156378A 1988.06.29 *

Also Published As

Publication number Publication date
CN102683575A (zh) 2012-09-19
US8614536B2 (en) 2013-12-24
JP5786224B2 (ja) 2015-09-30
JP2012191733A (ja) 2012-10-04
US20120228998A1 (en) 2012-09-13

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Effective date of registration: 20150910

Address after: Tokyo, Japan

Patentee after: Canon Kabushiki Kaisha

Patentee after: NIHON CERATEC Co.,Ltd.

Address before: Tokyo, Japan

Patentee before: Canon Kabushiki Kaisha

Patentee before: TAIHEIYO CEMENT Corp.

Patentee before: NIHON CERATEC Co.,Ltd.

TR01 Transfer of patent right

Effective date of registration: 20170313

Address after: Tokyo, Japan

Patentee after: Canon Kabushiki Kaisha

Patentee after: NGK SPARK PLUG Co.,Ltd.

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Patentee before: Canon Kabushiki Kaisha

Patentee before: NIHON CERATEC Co.,Ltd.

TR01 Transfer of patent right
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Granted publication date: 20141210

CF01 Termination of patent right due to non-payment of annual fee