JP5785116B2 - Ｐｚｔプリントヘッド加工用侵入型フィルとしてのフォトレジスト材料の使用方法 - Google Patents

Ｐｚｔプリントヘッド加工用侵入型フィルとしてのフォトレジスト材料の使用方法 Download PDF

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Publication number
JP5785116B2
JP5785116B2 JP2012045240A JP2012045240A JP5785116B2 JP 5785116 B2 JP5785116 B2 JP 5785116B2 JP 2012045240 A JP2012045240 A JP 2012045240A JP 2012045240 A JP2012045240 A JP 2012045240A JP 5785116 B2 JP5785116 B2 JP 5785116B2
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JP
Japan
Prior art keywords
diaphragm
photosensitive
piezoelectric elements
interstitial layer
photoresist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2012045240A
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English (en)
Japanese (ja)
Other versions
JP2012201114A (ja
JP2012201114A5 (enExample
Inventor
マーク・エイ・セルラ
ピーター・ジェイ・ニストロム
コック−イー・ロー
ジョン・ピー・メイヤーズ
ゲイリー・ディー・レディング
ユェンジャア・チャン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xerox Corp
Original Assignee
Xerox Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xerox Corp filed Critical Xerox Corp
Publication of JP2012201114A publication Critical patent/JP2012201114A/ja
Publication of JP2012201114A5 publication Critical patent/JP2012201114A5/ja
Application granted granted Critical
Publication of JP5785116B2 publication Critical patent/JP5785116B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/17—Ink jet characterised by ink handling
    • B41J2/175—Ink supply systems ; Circuit parts therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B41J2/1634—Manufacturing processes machining laser machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP2012045240A 2011-03-23 2012-03-01 Ｐｚｔプリントヘッド加工用侵入型フィルとしてのフォトレジスト材料の使用方法 Expired - Fee Related JP5785116B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US13/069,732 US8550601B2 (en) 2011-03-23 2011-03-23 Use of photoresist material as an interstitial fill for PZT printhead fabrication
US13/069,732 2011-03-23

Publications (3)

Publication Number Publication Date
JP2012201114A JP2012201114A (ja) 2012-10-22
JP2012201114A5 JP2012201114A5 (enExample) 2015-04-16
JP5785116B2 true JP5785116B2 (ja) 2015-09-24

Family

ID=46855317

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012045240A Expired - Fee Related JP5785116B2 (ja) 2011-03-23 2012-03-01 Ｐｚｔプリントヘッド加工用侵入型フィルとしてのフォトレジスト材料の使用方法

Country Status (4)

Country Link
US (1) US8550601B2 (enExample)
JP (1) JP5785116B2 (enExample)
KR (1) KR101778507B1 (enExample)
CN (1) CN102689518B (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8727508B2 (en) * 2011-11-10 2014-05-20 Xerox Corporation Bonded silicon structure for high density print head
US8826539B2 (en) * 2012-05-16 2014-09-09 Xerox Corporation Method for flex circuit bonding without solder mask for high density electrical interconnect
CN104417065B (zh) * 2013-09-10 2016-03-02 珠海赛纳打印科技股份有限公司 喷墨头制造方法、喷墨头及打印设备
CN105934346B (zh) * 2014-01-29 2017-09-08 惠普发展公司，有限责任合伙企业 流体引导组件
CN103879147B (zh) * 2014-03-13 2016-05-25 武汉大学 一种印刷电子专用打印喷头

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04185445A (ja) * 1990-11-20 1992-07-02 Ricoh Co Ltd インクジェットヘッド
US6209994B1 (en) * 1997-09-17 2001-04-03 Seiko Epson Corporation Micro device, ink-jet printing head, method of manufacturing them and ink-jet recording device
JPH11192701A (ja) * 1997-09-17 1999-07-21 Seiko Epson Corp マイクロデバイス、インクジェット式記録ヘッド及びこれらの製造方法並びにインクジェット式記録装置
KR100396559B1 (ko) * 2001-11-05 2003-09-02 삼성전자주식회사 일체형 잉크젯 프린트헤드의 제조 방법
US7959266B2 (en) * 2007-03-28 2011-06-14 Xerox Corporation Self aligned port hole opening process for ink jet print heads
US8082641B2 (en) * 2007-06-01 2011-12-27 Xerox Corporation Method of manufacturing a ductile polymer-piezoelectric material composite

Also Published As

Publication number Publication date
JP2012201114A (ja) 2012-10-22
CN102689518B (zh) 2015-05-13
US8550601B2 (en) 2013-10-08
CN102689518A (zh) 2012-09-26
KR101778507B1 (ko) 2017-09-26
KR20120109348A (ko) 2012-10-08
US20120242758A1 (en) 2012-09-27

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