KR101778507B1 - Ｐｚｔ 프린트헤드 제조를 위한 간극 충전재로서의 감광 재료의 사용 - Google Patents

Ｐｚｔ 프린트헤드 제조를 위한 간극 충전재로서의 감광 재료의 사용 Download PDF

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Publication number
KR101778507B1
KR101778507B1 KR1020120029183A KR20120029183A KR101778507B1 KR 101778507 B1 KR101778507 B1 KR 101778507B1 KR 1020120029183 A KR1020120029183 A KR 1020120029183A KR 20120029183 A KR20120029183 A KR 20120029183A KR 101778507 B1 KR101778507 B1 KR 101778507B1
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KR
South Korea
Prior art keywords
diaphragm
piezoelectric elements
gap layer
photoresist
circuit board
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1020120029183A
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English (en)
Korean (ko)
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KR20120109348A (ko
Inventor
마크 에이. 셀룰러
피터 제이. 니스트롬
콕-이 로
존 피. 마이어스
게리 디. 레딩
유안지아 장
Original Assignee
제록스 코포레이션
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 제록스 코포레이션 filed Critical 제록스 코포레이션
Publication of KR20120109348A publication Critical patent/KR20120109348A/ko
Application granted granted Critical
Publication of KR101778507B1 publication Critical patent/KR101778507B1/ko
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/17—Ink jet characterised by ink handling
    • B41J2/175—Ink supply systems ; Circuit parts therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B41J2/1634—Manufacturing processes machining laser machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
KR1020120029183A 2011-03-23 2012-03-22 Ｐｚｔ 프린트헤드 제조를 위한 간극 충전재로서의 감광 재료의 사용 Expired - Fee Related KR101778507B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US13/069,732 2011-03-23
US13/069,732 US8550601B2 (en) 2011-03-23 2011-03-23 Use of photoresist material as an interstitial fill for PZT printhead fabrication

Publications (2)

Publication Number Publication Date
KR20120109348A KR20120109348A (ko) 2012-10-08
KR101778507B1 true KR101778507B1 (ko) 2017-09-26

Family

ID=46855317

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020120029183A Expired - Fee Related KR101778507B1 (ko) 2011-03-23 2012-03-22 Ｐｚｔ 프린트헤드 제조를 위한 간극 충전재로서의 감광 재료의 사용

Country Status (4)

Country Link
US (1) US8550601B2 (enExample)
JP (1) JP5785116B2 (enExample)
KR (1) KR101778507B1 (enExample)
CN (1) CN102689518B (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8727508B2 (en) * 2011-11-10 2014-05-20 Xerox Corporation Bonded silicon structure for high density print head
US8826539B2 (en) * 2012-05-16 2014-09-09 Xerox Corporation Method for flex circuit bonding without solder mask for high density electrical interconnect
CN104417065B (zh) * 2013-09-10 2016-03-02 珠海赛纳打印科技股份有限公司 喷墨头制造方法、喷墨头及打印设备
CN105934346B (zh) * 2014-01-29 2017-09-08 惠普发展公司，有限责任合伙企业 流体引导组件
CN103879147B (zh) * 2014-03-13 2016-05-25 武汉大学 一种印刷电子专用打印喷头

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6209994B1 (en) 1997-09-17 2001-04-03 Seiko Epson Corporation Micro device, ink-jet printing head, method of manufacturing them and ink-jet recording device
US20080299396A1 (en) 2007-06-01 2008-12-04 Xerox Corporation Ductile polymer-piezoelectric material composite for ink jet printheads

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04185445A (ja) * 1990-11-20 1992-07-02 Ricoh Co Ltd インクジェットヘッド
JPH11192701A (ja) * 1997-09-17 1999-07-21 Seiko Epson Corp マイクロデバイス、インクジェット式記録ヘッド及びこれらの製造方法並びにインクジェット式記録装置
KR100396559B1 (ko) * 2001-11-05 2003-09-02 삼성전자주식회사 일체형 잉크젯 프린트헤드의 제조 방법
US7959266B2 (en) * 2007-03-28 2011-06-14 Xerox Corporation Self aligned port hole opening process for ink jet print heads

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6209994B1 (en) 1997-09-17 2001-04-03 Seiko Epson Corporation Micro device, ink-jet printing head, method of manufacturing them and ink-jet recording device
US20080299396A1 (en) 2007-06-01 2008-12-04 Xerox Corporation Ductile polymer-piezoelectric material composite for ink jet printheads

Also Published As

Publication number Publication date
JP5785116B2 (ja) 2015-09-24
KR20120109348A (ko) 2012-10-08
CN102689518A (zh) 2012-09-26
US8550601B2 (en) 2013-10-08
CN102689518B (zh) 2015-05-13
JP2012201114A (ja) 2012-10-22
US20120242758A1 (en) 2012-09-27

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