JP5780760B2 - ブリッジにおけるgmrセンサの整合 - Google Patents

ブリッジにおけるgmrセンサの整合 Download PDF

Info

Publication number
JP5780760B2
JP5780760B2 JP2010530006A JP2010530006A JP5780760B2 JP 5780760 B2 JP5780760 B2 JP 5780760B2 JP 2010530006 A JP2010530006 A JP 2010530006A JP 2010530006 A JP2010530006 A JP 2010530006A JP 5780760 B2 JP5780760 B2 JP 5780760B2
Authority
JP
Japan
Prior art keywords
elements
dummy
bridge circuit
sensor
bridge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2010530006A
Other languages
English (en)
Japanese (ja)
Other versions
JP2011501153A (ja
JP2011501153A5 (enExample
Inventor
ドゥーグ,マイケル・シー
テイラー,ウィリアム・ピー
Original Assignee
アレグロ・マイクロシステムズ・エルエルシー
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by アレグロ・マイクロシステムズ・エルエルシー filed Critical アレグロ・マイクロシステムズ・エルエルシー
Publication of JP2011501153A publication Critical patent/JP2011501153A/ja
Publication of JP2011501153A5 publication Critical patent/JP2011501153A5/ja
Application granted granted Critical
Publication of JP5780760B2 publication Critical patent/JP5780760B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00Arrangements or instruments for measuring magnetic variables
    • G01R33/02Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09Magnetoresistive devices
    • G01R33/093Magnetoresistive devices using multilayer structures, e.g. giant magnetoresistance sensors
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y25/00Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R15/00Details of measuring arrangements of the types provided for in groups G01R17/00 - G01R29/00, G01R33/00 - G01R33/26 or G01R35/00
    • G01R15/14Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks
    • G01R15/20Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks using galvano-magnetic devices, e.g. Hall-effect devices, i.e. measuring a magnetic field via the interaction between a current and a magnetic field, e.g. magneto resistive or Hall effect devices
    • G01R15/205Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks using galvano-magnetic devices, e.g. Hall-effect devices, i.e. measuring a magnetic field via the interaction between a current and a magnetic field, e.g. magneto resistive or Hall effect devices using magneto-resistance devices, e.g. field plates

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Measuring Magnetic Variables (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
JP2010530006A 2007-10-22 2008-09-08 ブリッジにおけるgmrセンサの整合 Active JP5780760B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/876,048 2007-10-22
US11/876,048 US7795862B2 (en) 2007-10-22 2007-10-22 Matching of GMR sensors in a bridge
PCT/US2008/075556 WO2009055151A1 (en) 2007-10-22 2008-09-08 Matching of gmr sensors in a bridge

Publications (3)

Publication Number Publication Date
JP2011501153A JP2011501153A (ja) 2011-01-06
JP2011501153A5 JP2011501153A5 (enExample) 2011-06-02
JP5780760B2 true JP5780760B2 (ja) 2015-09-16

Family

ID=40111021

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010530006A Active JP5780760B2 (ja) 2007-10-22 2008-09-08 ブリッジにおけるgmrセンサの整合

Country Status (4)

Country Link
US (2) US7795862B2 (enExample)
JP (1) JP5780760B2 (enExample)
DE (1) DE112008002741T5 (enExample)
WO (1) WO2009055151A1 (enExample)

Families Citing this family (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8269308B2 (en) * 2008-03-19 2012-09-18 Stats Chippac, Ltd. Semiconductor device with cross-talk isolation using M-cap and method thereof
US8242776B2 (en) * 2008-03-26 2012-08-14 Everspin Technologies, Inc. Magnetic sensor design for suppression of barkhausen noise
JP5440837B2 (ja) * 2009-03-26 2014-03-12 Tdk株式会社 信号伝達装置
DE112010006016B4 (de) * 2010-11-18 2014-11-06 Mitsubishi Electric Corp. Rotationswinkel-Erfassungsvorrichtung
DE102011104307B4 (de) * 2011-06-16 2013-09-26 Austriamicrosystems Ag Anordnung und Verfahren zum Betreiben eines Sensors, insbesondere eines Brückensensors, und eine Sensoranordnung
CN102385043B (zh) * 2011-08-30 2013-08-21 江苏多维科技有限公司 Mtj三轴磁场传感器及其封装方法
CN102426344B (zh) * 2011-08-30 2013-08-21 江苏多维科技有限公司 三轴磁场传感器
US8952686B2 (en) * 2011-10-25 2015-02-10 Honeywell International Inc. High current range magnetoresistive-based current sensor
WO2013085547A1 (en) * 2011-12-05 2013-06-13 Advanced Microsensors Corporation Magnetic field sensing apparatus and methods
US9322889B2 (en) 2011-12-30 2016-04-26 Nve Corporation Low hysteresis high sensitivity magnetic field sensor
JP6222897B2 (ja) * 2012-06-22 2017-11-01 旭化成エレクトロニクス株式会社 多軸磁気センサ、および、その製造方法
US8779824B2 (en) 2012-12-17 2014-07-15 Qualcomm Incorporated Clock distribution using MTJ sensing
US9754997B2 (en) * 2012-12-20 2017-09-05 Mark B. Johnson Magnetic tunnel junction based reconfigurable processing system and components
US9865650B2 (en) * 2012-12-20 2018-01-09 Mark B. Johnson Magnetic tunnel junction based logic circuits
CN103267955B (zh) * 2013-05-28 2016-07-27 江苏多维科技有限公司 单芯片桥式磁场传感器
EP2853905B1 (en) * 2013-09-30 2018-09-19 Airbus Defence and Space Limited Phase angle measurement using residue number system analogue-to-digital conversion
CN103645449B (zh) * 2013-12-24 2015-11-25 江苏多维科技有限公司 一种用于高强度磁场的单芯片参考桥式磁传感器
JP2015121448A (ja) * 2013-12-24 2015-07-02 株式会社デンソー 磁気検出装置及びその製造方法
US10649043B2 (en) * 2014-04-28 2020-05-12 Infineon Technologies Ag Magnetic field sensor device configured to sense with high precision and low jitter
DE102014106543A1 (de) * 2014-05-09 2015-11-12 Asm Assembly Systems Gmbh & Co. Kg Gurtförderer für einen Bestückautomaten sowie Bestückautomat
US9519034B2 (en) * 2014-05-15 2016-12-13 Everspin Technologies, Inc. Bipolar chopping for 1/F noise and offset reduction in magnetic field sensors
EP3062120A1 (en) * 2015-02-26 2016-08-31 BIOTRONIK SE & Co. KG Magnetic field sensor arrangement
US10036785B2 (en) 2016-07-18 2018-07-31 Allegro Microsystems, Llc Temperature-compensated magneto-resistive sensor
US10921373B2 (en) * 2017-11-29 2021-02-16 Allegro Microsystems, Llc Magnetic field sensor able to identify an error condition
JP7062935B2 (ja) * 2017-12-14 2022-05-09 富士電機株式会社 電流センサ、電流センサの製造方法および半導体装置
US10948555B2 (en) 2019-05-23 2021-03-16 Allegro Microsystems, Llc Magnetic field sensor and magnetoresistance element structure having at least two magnetoresistance elements disposed in a proximate arrangement
US11933641B2 (en) 2020-01-15 2024-03-19 Honeywell International Inc. Position detection apparatus, method, and system utilizing an array of magnetic sensors each comprising a sensor signal conditioning circuit
US11187764B2 (en) 2020-03-20 2021-11-30 Allegro Microsystems, Llc Layout of magnetoresistance element
US11262422B2 (en) 2020-05-08 2022-03-01 Allegro Microsystems, Llc Stray-field-immune coil-activated position sensor
US11493361B2 (en) 2021-02-26 2022-11-08 Allegro Microsystems, Llc Stray field immune coil-activated sensor
US11953565B2 (en) 2021-03-23 2024-04-09 Allegro Microsystems, Llc Electrical offset compensating in a bridge using more than four magnetoresistance elements
US12078695B2 (en) 2021-04-12 2024-09-03 Analog Devices International Unlimited Company Magnetic field sensor with overcurrent detection
US12146928B2 (en) * 2021-04-12 2024-11-19 Analog Devices International Unlimited Company Magnetic field sensor with overcurrent detection
EP4130772B1 (en) 2021-08-05 2025-07-23 Allegro MicroSystems, LLC Magnetoresistive element having compensated temperature coefficient of tmr
US12248039B2 (en) 2023-08-08 2025-03-11 Allegro Microsystems, Llc Interleaving sub-arrays of magnetoresistance elements based on reference directions to compensate for bridge offset
US12467990B2 (en) 2023-08-30 2025-11-11 Allegro Microsystems, Llc Magnetoresistance signal path compensation

Family Cites Families (130)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3858189A (en) * 1972-12-29 1974-12-31 Ibm Magneto resistive signal multiplier for sensing magnetic bubble domains
US3860965A (en) 1973-10-04 1975-01-14 Ibm Magnetoresistive read head assembly having matched elements for common mode rejection
US4035785A (en) * 1975-12-31 1977-07-12 International Business Machines Corporation Bubble domain sensor-error detector
US4078230A (en) * 1976-02-02 1978-03-07 Rockwell International Corporation Multi-segment detector
US4159537A (en) * 1978-05-01 1979-06-26 Burroughs Corporation Bubble detector-dynamic level signal shifting
US4343026A (en) 1980-07-09 1982-08-03 Spin Physics, Inc. Magnetoresistive head employing field feedback
CH651701A5 (de) 1980-12-24 1985-09-30 Landis & Gyr Ag Kompensierter messwandler.
CH651671A5 (de) * 1980-12-24 1985-09-30 Landis & Gyr Ag Anordnung zur messung elektrischer leistung oder energie.
US4432069A (en) 1981-01-29 1984-02-14 Intel Corporation Multiplexed magnetic bubble detectors
DE3426784A1 (de) 1984-07-20 1986-01-30 Bosch Gmbh Robert Magnetoresistiver sensor zur abgabe von elektrischen signalen
CA1248222A (en) 1984-08-27 1989-01-03 Yutaka Souda Magnetic transducer head utilizing magnetoresistance effect
JPS62158306U (enExample) * 1986-03-31 1987-10-07
US4860432A (en) * 1986-09-02 1989-08-29 Alps Electric Co., Ltd. Method of manufacturing a magnetoresistive sensor
CH669852A5 (enExample) 1986-12-12 1989-04-14 Lem Liaisons Electron Mec
KR910004261B1 (ko) 1987-04-09 1991-06-25 후지쓰 가부시끼가이샤 자전 변환 소자를 이용한 검지기
DE3854457T2 (de) 1987-07-07 1996-02-29 Nippon Denso Co Stromdetektoranordnung mit ferromagnetischem Magnetwiderstandselement.
JPS6431019A (en) * 1987-07-27 1989-02-01 Nikon Corp Magnetic head for magnetic encoder provided with heating element
US4823075A (en) 1987-10-13 1989-04-18 General Electric Company Current sensor using hall-effect device with feedback
CH674089A5 (enExample) 1987-10-16 1990-04-30 Lem Liaisons Electron Mec
DE3843087C2 (de) 1987-12-21 2001-09-13 Tdk Corp Magnetfeldsensor
US5227721A (en) 1987-12-25 1993-07-13 Sharp Kabushiki Kaisha Superconductive magnetic sensor having self induced magnetic biasing
US5041780A (en) 1988-09-13 1991-08-20 California Institute Of Technology Integrable current sensors
US4847584A (en) 1988-10-14 1989-07-11 Honeywell Inc. Magnetoresistive magnetic sensor
JPH0332451U (enExample) * 1989-08-04 1991-03-29
JPH03296616A (ja) * 1990-04-16 1991-12-27 Japan Servo Co Ltd 磁気センサ
JPH05126865A (ja) 1991-10-22 1993-05-21 Hitachi Ltd 電流検出装置あるいは電流検出方法
DE4212737C1 (en) 1992-04-16 1993-07-08 Leica Mikroskopie Und Systeme Gmbh Compact bridge-connected sensor - has thin-film resistors on substrate
US5260653A (en) 1992-06-03 1993-11-09 Eastman Kodak Company Thin film very high sensitivity magnetoresistive magnetometer having temperature compensation and simple domain stability
US5617071A (en) 1992-11-16 1997-04-01 Nonvolatile Electronics, Incorporated Magnetoresistive structure comprising ferromagnetic thin films and intermediate alloy layer having magnetic concentrator and shielding permeable masses
DE4243358A1 (de) * 1992-12-21 1994-06-23 Siemens Ag Magnetowiderstands-Sensor mit künstlichem Antiferromagneten und Verfahren zu seiner Herstellung
DE4300605C2 (de) 1993-01-13 1994-12-15 Lust Electronic Systeme Gmbh Sensorchip
US6021065A (en) 1996-09-06 2000-02-01 Nonvolatile Electronics Incorporated Spin dependent tunneling memory
US6002553A (en) 1994-02-28 1999-12-14 The United States Of America As Represented By The United States Department Of Energy Giant magnetoresistive sensor
US5583725A (en) * 1994-06-15 1996-12-10 International Business Machines Corporation Spin valve magnetoresistive sensor with self-pinned laminated layer and magnetic recording system using the sensor
US5500590A (en) 1994-07-20 1996-03-19 Honeywell Inc. Apparatus for sensing magnetic fields using a coupled film magnetoresistive transducer
DE4436876A1 (de) 1994-10-15 1996-04-18 Lust Antriebstechnik Gmbh Sensorchip
US5561368A (en) 1994-11-04 1996-10-01 International Business Machines Corporation Bridge circuit magnetic field sensor having spin valve magnetoresistive elements formed on common substrate
US5570034A (en) 1994-12-29 1996-10-29 Intel Corporation Using hall effect to monitor current during IDDQ testing of CMOS integrated circuits
US5929636A (en) 1996-05-02 1999-07-27 Integrated Magnetoelectronics All-metal giant magnetoresistive solid-state component
DE19619806A1 (de) * 1996-05-15 1997-11-20 Siemens Ag Magnetfeldempfindliche Sensoreinrichtung mit mehreren GMR-Sensorelementen
US5831426A (en) * 1996-08-16 1998-11-03 Nonvolatile Electronics, Incorporated Magnetic current sensor
DE19650078A1 (de) 1996-12-03 1998-06-04 Inst Mikrostrukturtechnologie Sensorelement zur Bestimmung eines Magnetfeldes oder eines Stromes
US5877705A (en) 1997-04-22 1999-03-02 Nu-Metrics, Inc. Method and apparatus for analyzing traffic and a sensor therefor
EP0927361A1 (en) * 1997-06-13 1999-07-07 Koninklijke Philips Electronics N.V. Sensor comprising a wheatstone bridge
US6404191B2 (en) 1997-08-08 2002-06-11 Nve Corporation Read heads in planar monolithic integrated circuit chips
US5952825A (en) 1997-08-14 1999-09-14 Honeywell Inc. Magnetic field sensing device having integral coils for producing magnetic fields
US6300617B1 (en) 1998-03-04 2001-10-09 Nonvolatile Electronics, Incorporated Magnetic digital signal coupler having selected/reversal directions of magnetization
JP3623367B2 (ja) * 1998-07-17 2005-02-23 アルプス電気株式会社 巨大磁気抵抗効果素子を備えたポテンショメータ
JP3623366B2 (ja) * 1998-07-17 2005-02-23 アルプス電気株式会社 巨大磁気抵抗効果素子を備えた磁界センサおよびその製造方法と製造装置
US6809515B1 (en) 1998-07-31 2004-10-26 Spinix Corporation Passive solid-state magnetic field sensors and applications therefor
TW434411B (en) 1998-10-14 2001-05-16 Tdk Corp Magnetic sensor apparatus, current sensor apparatus and magnetic sensing element
JP2000174358A (ja) 1998-12-02 2000-06-23 Toyota Motor Corp 磁気抵抗素子を用いた磁気センサ
TW534999B (en) 1998-12-15 2003-06-01 Tdk Corp Magnetic sensor apparatus and current sensor apparatus
EP1067391B1 (en) 1999-01-21 2004-10-06 TDK Corporation Current sensor
US6331773B1 (en) * 1999-04-16 2001-12-18 Storage Technology Corporation Pinned synthetic anti-ferromagnet with oxidation protection layer
JP3583649B2 (ja) 1999-04-27 2004-11-04 Tdk株式会社 薄膜磁気ヘッドおよびその製造方法ならびに磁気抵抗効果装置
DE10017374B4 (de) 1999-05-25 2007-05-10 Siemens Ag Magnetische Koppeleinrichtung und deren Verwendung
DE60037790T2 (de) 1999-06-18 2009-01-08 Koninklijke Philips Electronics N.V. Magnetisches messsystem mit irreversibler charakteristik, sowie methode zur erzeugung, reparatur und verwendung eines solchen systems
JP3696448B2 (ja) 1999-09-02 2005-09-21 矢崎総業株式会社 電流検出器
JP2001084535A (ja) 1999-09-16 2001-03-30 Tdk Corp 薄膜磁気ヘッドの製造方法および磁気抵抗効果装置の製造方法
US6445171B2 (en) 1999-10-29 2002-09-03 Honeywell Inc. Closed-loop magnetoresistive current sensor system having active offset nulling
US6462541B1 (en) 1999-11-12 2002-10-08 Nve Corporation Uniform sense condition magnetic field sensor using differential magnetoresistance
DE10009944A1 (de) * 2000-03-02 2001-09-13 Forschungszentrum Juelich Gmbh Anordnung zum Messen eines Magnetfeldes und Verfahren zum Herstellen einer Anordnung zum Messen eines Magnetfeldes
JP3596600B2 (ja) 2000-06-02 2004-12-02 ヤマハ株式会社 磁気センサ及び同磁気センサの製造方法
DE10028640B4 (de) 2000-06-09 2005-11-03 Institut für Physikalische Hochtechnologie e.V. Wheatstonebrücke, beinhaltend Brückenelemente, bestehend aus einem Spin-Valve-System, sowie ein Verfahren zu deren Herstellung
US6429640B1 (en) 2000-08-21 2002-08-06 The United States Of America As Represented By The Secretary Of The Air Force GMR high current, wide dynamic range sensor
US6583617B2 (en) 2000-08-24 2003-06-24 Kemp Corporation Barkhausen noise measurement probe with magnetoresistive sensor and cylindrical magnetic shield
JP2002131342A (ja) 2000-10-19 2002-05-09 Canon Electronics Inc 電流センサ
JP2002163808A (ja) 2000-11-22 2002-06-07 Tdk Corp 磁気抵抗効果装置およびその製造方法ならびに薄膜磁気ヘッドおよびその製造方法
JP3971934B2 (ja) 2001-03-07 2007-09-05 ヤマハ株式会社 磁気センサとその製法
DE10159607B4 (de) 2001-03-09 2010-11-18 Siemens Ag Analog/Digital-Signalwandlereinrichtung mit galvanischer Trennung in ihrem Singalübertragungsweg
JP3284130B1 (ja) 2001-04-25 2002-05-20 ティーディーケイ株式会社 磁気抵抗効果装置およびその製造方法、薄膜磁気ヘッドおよびその製造方法、ヘッドジンバルアセンブリならびにハードディスク装置
JP3260740B1 (ja) 2001-04-25 2002-02-25 ティーディーケイ株式会社 磁気抵抗効果装置の製造方法および薄膜磁気ヘッドの製造方法
JP5019681B2 (ja) * 2001-04-26 2012-09-05 ルネサスエレクトロニクス株式会社 薄膜磁性体記憶装置
JP2002353418A (ja) 2001-05-30 2002-12-06 Sony Corp 磁気抵抗効果素子および磁気メモリ装置
US6946834B2 (en) 2001-06-01 2005-09-20 Koninklijke Philips Electronics N.V. Method of orienting an axis of magnetization of a first magnetic element with respect to a second magnetic element, semimanufacture for obtaining a sensor, sensor for measuring a magnetic field
DE10128150C1 (de) 2001-06-11 2003-01-23 Siemens Ag Magnetoresistives Sensorsystem
JP4164626B2 (ja) 2001-06-15 2008-10-15 サンケン電気株式会社 ホ−ル素子を備えた電流検出装置
US6693826B1 (en) * 2001-07-30 2004-02-17 Iowa State University Research Foundation, Inc. Magnetic memory sensing method and apparatus
DE10140043B4 (de) * 2001-08-16 2006-03-23 Siemens Ag Schichtensystem mit erhöhtem magnetoresistiven Effekt sowie Verwendung desselben
DE10155423B4 (de) 2001-11-12 2006-03-02 Siemens Ag Verfahren zur homogenen Magnetisierung eines austauschgekoppelten Schichtsystems eines magneto-resistiven Bauelements, insbesondere eines Sensor-oder Logikelements
JP2003179283A (ja) 2001-12-12 2003-06-27 Tokai Rika Co Ltd 磁気センサ
US6667682B2 (en) 2001-12-26 2003-12-23 Honeywell International Inc. System and method for using magneto-resistive sensors as dual purpose sensors
DE10202287C1 (de) 2002-01-22 2003-08-07 Siemens Ag Verfahren zur Herstellung einer monolithischen Brückenschaltung bestehend aus mehreren, als magneto-resistive Elemente ausgebildeten Brückengliedern und eine hiernach hergestellte monolithische Brückenschaltung
DE10222395B4 (de) 2002-05-21 2010-08-05 Siemens Ag Schaltungseinrichtung mit mehreren TMR-Sensorelementen
US6781359B2 (en) 2002-09-20 2004-08-24 Allegro Microsystems, Inc. Integrated current sensor
US7054114B2 (en) 2002-11-15 2006-05-30 Nve Corporation Two-axis magnetic field sensor
US7259545B2 (en) 2003-02-11 2007-08-21 Allegro Microsystems, Inc. Integrated sensor
JP4290494B2 (ja) * 2003-07-08 2009-07-08 株式会社ルネサステクノロジ 半導体記憶装置
US7049545B2 (en) 2003-09-23 2006-05-23 Illinois Tool Works Inc. MIG welding machine having 115V inverter
US7071074B2 (en) 2003-09-24 2006-07-04 Infineon Technologies Ag Structure and method for placement, sizing and shaping of dummy structures
JP4055005B2 (ja) 2003-10-10 2008-03-05 ヤマハ株式会社 磁気センサの製造方法
US6967798B2 (en) 2003-12-19 2005-11-22 Komag, Inc. Magnetic recording disk having DTR patterned CSS zone
WO2005064357A2 (en) * 2003-12-23 2005-07-14 Koninklijke Philips Electronics N.V. Flux guides for magnetic field sensors and memories
DE102004003369A1 (de) 2004-01-22 2005-08-18 Siemens Ag Magnetisches Bauelement mit hoher Grenzfrequenz
CN100541222C (zh) * 2004-02-19 2009-09-16 三菱电机株式会社 磁场检测器以及使用该磁场检测器的检测器件
JP4433820B2 (ja) 2004-02-20 2010-03-17 Tdk株式会社 磁気検出素子およびその形成方法ならびに磁気センサ、電流計
DE102004009267B3 (de) 2004-02-26 2005-09-22 Siemens Ag Ausleseeinrichtung wenigstens eines magnetoresistiven Elementes
DE102004062474A1 (de) * 2004-03-23 2005-10-13 Siemens Ag Vorrichtung zur potenzialfreien Strommessung
DE102004038847B3 (de) 2004-08-10 2005-09-01 Siemens Ag Einrichtung zur potenzialfreien Messung eines in einer elektrischen Leiterbahn fließenden Stromes
DE102005037905A1 (de) 2004-08-18 2006-03-09 Siemens Ag Magnetfeldsensor zum Messen eines Gradienten eines magnetischen Feldes
DE102004040079B3 (de) 2004-08-18 2005-12-22 Siemens Ag Magnetfeldsensor
DE102004043737A1 (de) * 2004-09-09 2006-03-30 Siemens Ag Vorrichtung zum Erfassen des Gradienten eines Magnetfeldes und Verfahren zur Herstellung der Vorrichtung
JP4360998B2 (ja) 2004-10-01 2009-11-11 Tdk株式会社 電流センサ
TW200630632A (en) * 2004-10-11 2006-09-01 Koninkl Philips Electronics Nv Non-linear magnetic field sensors and current sensors
US7777607B2 (en) 2004-10-12 2010-08-17 Allegro Microsystems, Inc. Resistor having a predetermined temperature coefficient
US7504824B2 (en) 2004-10-21 2009-03-17 International Business Machines Corporation Magnetic sensor with offset magnetic field
JP4105142B2 (ja) 2004-10-28 2008-06-25 Tdk株式会社 電流センサ
JP2006126087A (ja) 2004-10-29 2006-05-18 Nidec Sankyo Corp 磁気抵抗素子
US7253613B2 (en) * 2004-11-02 2007-08-07 Denso Corporation Rotation detecting device
DE102004053551A1 (de) 2004-11-05 2006-05-18 Siemens Ag Vorrichtung zum Erfassen eines beweglichen oder bewegbaren elektrisch und/oder magnetisch leitenden Teiles
JP4105145B2 (ja) 2004-11-30 2008-06-25 Tdk株式会社 電流センサ
JP4105147B2 (ja) 2004-12-06 2008-06-25 Tdk株式会社 電流センサ
JP4408901B2 (ja) * 2004-12-15 2010-02-03 富士通株式会社 磁気メモリ装置及びその読み出し方法
JP4131869B2 (ja) 2005-01-31 2008-08-13 Tdk株式会社 電流センサ
DE102006008257B4 (de) 2005-03-22 2010-01-14 Siemens Ag Magnetoresistives Mehrschichtensystem vom Spin Valve-Typ mit einer magnetisch weicheren Elektrode aus mehreren Schichten und dessen Verwendung
DE102006021774B4 (de) 2005-06-23 2014-04-03 Siemens Aktiengesellschaft Stromsensor zur galvanisch getrennten Strommessung
JP4466487B2 (ja) 2005-06-27 2010-05-26 Tdk株式会社 磁気センサおよび電流センサ
DE102005038655B3 (de) 2005-08-16 2007-03-22 Siemens Ag Magnetfeldsensitive Sensoreinrichtung
DE102005040539B4 (de) 2005-08-26 2007-07-05 Siemens Ag Magnetfeldsensitive Sensoreinrichtung
JP2007064851A (ja) 2005-08-31 2007-03-15 Tdk Corp コイル、コイルモジュールおよびその製造方法、ならびに電流センサおよびその製造方法
JP4415923B2 (ja) 2005-09-30 2010-02-17 Tdk株式会社 電流センサ
JP4298691B2 (ja) 2005-09-30 2009-07-22 Tdk株式会社 電流センサおよびその製造方法
JP4224483B2 (ja) 2005-10-14 2009-02-12 Tdk株式会社 電流センサ
DE102005052688A1 (de) 2005-11-04 2007-05-24 Siemens Ag Magnetfeldsensor mit einer Messbrücke mit MR-Sensor
US7741221B2 (en) 2005-12-14 2010-06-22 Freescale Semiconductor, Inc. Method of forming a semiconductor device having dummy features
JP2007218700A (ja) 2006-02-15 2007-08-30 Tdk Corp 磁気センサおよび電流センサ
DE102006007770A1 (de) 2006-02-20 2007-08-30 Siemens Ag Sensoreinrichtung zur Erfassung einer Magnetfeldgröße
DE102006028698B3 (de) 2006-06-22 2007-12-13 Siemens Ag OMR-Sensor und Anordnung aus solchen Sensoren
US7639005B2 (en) * 2007-06-15 2009-12-29 Advanced Microsensors, Inc. Giant magnetoresistive resistor and sensor apparatus and method

Also Published As

Publication number Publication date
JP2011501153A (ja) 2011-01-06
US7859255B2 (en) 2010-12-28
DE112008002741T5 (de) 2010-11-25
US20090102464A1 (en) 2009-04-23
WO2009055151A1 (en) 2009-04-30
US7795862B2 (en) 2010-09-14
US20100283458A1 (en) 2010-11-11

Similar Documents

Publication Publication Date Title
JP5780760B2 (ja) ブリッジにおけるgmrセンサの整合
US11199424B2 (en) Reducing angle error in a magnetic field angle sensor
TWI719574B (zh) 磁阻元件、磁阻結構及三維磁場感測器
US7619407B2 (en) Gear tooth sensor with single magnetoresistive bridge
JP6403326B2 (ja) 電流センサ
JP4513804B2 (ja) 磁界検出器、これを用いた電流検出装置、位置検出装置および回転検出装置
CN102590768B (zh) 一种磁电阻磁场梯度传感器
CN105785290B (zh) 磁场传感器
JP7246400B2 (ja) 磁場角度センサに関する角度誤差を低減するためのシステム及び方法
CN103389479B (zh) 提高的动态范围传感器
US20150185297A1 (en) Device, magnetic sensor device and method
US9810748B2 (en) Tunneling magneto-resistor device for sensing a magnetic field
JP2006105693A (ja) 電流センサ
CN111426994A (zh) 使用垂直各向异性的杂散场鲁棒xmr传感器
CN112305472B (zh) 可复位的闭合回路多匝磁性传感器
CN110837066B (zh) 磁场感测装置
US11175353B2 (en) Position sensor with compensation for magnet movement and related position sensing method
CN111465868A (zh) 具有补偿交叉轴效应的磁阻磁场传感器桥
CN214585084U (zh) 一种磁传感器及基于磁传感器的无损检测装置
JP7482215B2 (ja) 磁場角度センサにおける角度誤差の低減
TWI711833B (zh) 磁場感測裝置
Cadugan Allegro ICs based on giant magnetoresistance (GMR)
JP2014219350A (ja) 磁気センサ及び磁場成分演算方法

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20110415

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20110415

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20121214

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20130226

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20130527

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20140219

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20140519

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20141225

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20150316

RD04 Notification of resignation of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7424

Effective date: 20150508

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20150615

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20150714

R150 Certificate of patent or registration of utility model

Ref document number: 5780760

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

S531 Written request for registration of change of domicile

Free format text: JAPANESE INTERMEDIATE CODE: R313531

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250