JP5769453B2 - 分光特性測定方法および分光特性測定装置 - Google Patents

分光特性測定方法および分光特性測定装置 Download PDF

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Publication number
JP5769453B2
JP5769453B2 JP2011053019A JP2011053019A JP5769453B2 JP 5769453 B2 JP5769453 B2 JP 5769453B2 JP 2011053019 A JP2011053019 A JP 2011053019A JP 2011053019 A JP2011053019 A JP 2011053019A JP 5769453 B2 JP5769453 B2 JP 5769453B2
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Japan
Prior art keywords
spectrum
light
stray light
measurement
wavelength
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JP2011053019A
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English (en)
Japanese (ja)
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JP2012189440A (ja
JP2012189440A5 (enExample
Inventor
弘幸 佐野
弘幸 佐野
都一 田口
都一 田口
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Otsuka Electronics Co Ltd
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Otsuka Electronics Co Ltd
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Filing date
Publication date
Application filed by Otsuka Electronics Co Ltd filed Critical Otsuka Electronics Co Ltd
Priority to JP2011053019A priority Critical patent/JP5769453B2/ja
Priority to TW101104843A priority patent/TWI526679B/zh
Priority to US13/397,681 priority patent/US8941829B2/en
Priority to KR1020120023733A priority patent/KR101890944B1/ko
Priority to CN201210063704.4A priority patent/CN102680097B/zh
Publication of JP2012189440A publication Critical patent/JP2012189440A/ja
Publication of JP2012189440A5 publication Critical patent/JP2012189440A5/ja
Application granted granted Critical
Publication of JP5769453B2 publication Critical patent/JP5769453B2/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0291—Housings; Spectrometer accessories; Spatial arrangement of elements, e.g. folded path arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/30—Measuring the intensity of spectral lines directly on the spectrum itself
    • G01J3/36—Investigating two or more bands of a spectrum by separate detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0218—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using optical fibers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0232—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using shutters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0262—Constructional arrangements for removing stray light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/027—Control of working procedures of a spectrometer; Failure detection; Bandwidth calculation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2803—Investigating the spectrum using photoelectric array detector

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)
JP2011053019A 2011-03-10 2011-03-10 分光特性測定方法および分光特性測定装置 Active JP5769453B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2011053019A JP5769453B2 (ja) 2011-03-10 2011-03-10 分光特性測定方法および分光特性測定装置
TW101104843A TWI526679B (zh) 2011-03-10 2012-02-15 分光特性檢測方法
US13/397,681 US8941829B2 (en) 2011-03-10 2012-02-16 Spectral characteristic measurement method and spectral characteristic measurement apparatus that corrects for stray light
KR1020120023733A KR101890944B1 (ko) 2011-03-10 2012-03-08 분광 특성 측정 방법 및 분광 특성 측정 장치
CN201210063704.4A CN102680097B (zh) 2011-03-10 2012-03-12 分光特性测量方法以及分光特性测量装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011053019A JP5769453B2 (ja) 2011-03-10 2011-03-10 分光特性測定方法および分光特性測定装置

Publications (3)

Publication Number Publication Date
JP2012189440A JP2012189440A (ja) 2012-10-04
JP2012189440A5 JP2012189440A5 (enExample) 2014-04-03
JP5769453B2 true JP5769453B2 (ja) 2015-08-26

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JP2011053019A Active JP5769453B2 (ja) 2011-03-10 2011-03-10 分光特性測定方法および分光特性測定装置

Country Status (5)

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US (1) US8941829B2 (enExample)
JP (1) JP5769453B2 (enExample)
KR (1) KR101890944B1 (enExample)
CN (1) CN102680097B (enExample)
TW (1) TWI526679B (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5484537B2 (ja) * 2012-09-03 2014-05-07 大塚電子株式会社 分光特性測定装置および分光特性測定方法
JP6136356B2 (ja) * 2013-02-25 2017-05-31 セイコーエプソン株式会社 測定装置
US9423302B2 (en) * 2014-09-02 2016-08-23 Shimadzu Corporation Spectroscopic analysis device, spectroscopic analysis method and program for spectroscopic analysis device
JP6964972B2 (ja) * 2016-10-20 2021-11-10 キヤノン株式会社 画像形成装置
US11953475B2 (en) * 2018-04-16 2024-04-09 Shimadzu Corporation Absorbance detector and liquid chromatograph
JP2020201038A (ja) * 2019-06-05 2020-12-17 株式会社島津製作所 Ｘ線分析装置及びピークサーチ方法
KR20240056522A (ko) * 2021-09-15 2024-04-30 트리나미엑스 게엠베하 분광계 디바이스 교정 방법
WO2023228450A1 (ja) * 2022-05-27 2023-11-30 浜松ホトニクス株式会社 分光測定装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4526470A (en) * 1982-03-05 1985-07-02 Beckman Instruments, Inc. Stray light measurement and compensation
US5428558A (en) * 1993-12-17 1995-06-27 The Perkin-Elmer Corporation Correction of spectra for stray radiation
EP0729017B1 (en) * 1995-02-25 1998-07-08 Hewlett-Packard GmbH Method for measurement and compensation of stray light in a spectrometer
JPH1130552A (ja) * 1997-07-10 1999-02-02 Otsuka Denshi Kk 迷光補正方法
JP4372314B2 (ja) 2000-06-21 2009-11-25 大塚電子株式会社 スペクトル測定装置
US6801309B1 (en) * 2001-10-16 2004-10-05 Therma-Wave, Inc. Detector array with scattered light correction
JP5012323B2 (ja) 2007-08-27 2012-08-29 コニカミノルタオプティクス株式会社 ポリクロメータおよびその迷光の補正方法
JP2009222690A (ja) 2008-03-19 2009-10-01 Soma Kogaku:Kk 分光測定器及び分光測定方法
JP5150939B2 (ja) * 2008-10-15 2013-02-27 大塚電子株式会社 光学特性測定装置および光学特性測定方法

Also Published As

Publication number Publication date
CN102680097A (zh) 2012-09-19
US8941829B2 (en) 2015-01-27
KR101890944B1 (ko) 2018-08-22
CN102680097B (zh) 2015-12-02
TW201245676A (en) 2012-11-16
JP2012189440A (ja) 2012-10-04
US20120229803A1 (en) 2012-09-13
KR20120103480A (ko) 2012-09-19
TWI526679B (zh) 2016-03-21

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