CN102680097B - 分光特性测量方法以及分光特性测量装置 - Google Patents
分光特性测量方法以及分光特性测量装置 Download PDFInfo
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- CN102680097B CN102680097B CN201210063704.4A CN201210063704A CN102680097B CN 102680097 B CN102680097 B CN 102680097B CN 201210063704 A CN201210063704 A CN 201210063704A CN 102680097 B CN102680097 B CN 102680097B
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- light
- spectrum
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- 238000000034 method Methods 0.000 title claims abstract description 115
- 238000005259 measurement Methods 0.000 title claims abstract description 100
- 230000007246 mechanism Effects 0.000 title claims abstract description 35
- 238000001228 spectrum Methods 0.000 claims abstract description 195
- 230000008569 process Effects 0.000 claims abstract description 82
- 238000001514 detection method Methods 0.000 claims abstract description 41
- 230000035945 sensitivity Effects 0.000 claims abstract description 20
- 238000013213 extrapolation Methods 0.000 claims abstract description 17
- 238000012937 correction Methods 0.000 claims description 68
- 230000003287 optical effect Effects 0.000 claims description 51
- 238000001914 filtration Methods 0.000 claims 1
- 230000003071 parasitic effect Effects 0.000 description 161
- 239000000203 mixture Substances 0.000 description 35
- 230000006870 function Effects 0.000 description 34
- 230000000875 corresponding effect Effects 0.000 description 25
- 238000013214 routine measurement Methods 0.000 description 20
- 238000010586 diagram Methods 0.000 description 14
- 238000012545 processing Methods 0.000 description 9
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- 238000005516 engineering process Methods 0.000 description 3
- 230000009471 action Effects 0.000 description 2
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/30—Measuring the intensity of spectral lines directly on the spectrum itself
- G01J3/36—Investigating two or more bands of a spectrum by separate detectors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0291—Housings; Spectrometer accessories; Spatial arrangement of elements, e.g. folded path arrangements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0218—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using optical fibers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0232—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using shutters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0262—Constructional arrangements for removing stray light
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/027—Control of working procedures of a spectrometer; Failure detection; Bandwidth calculation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/2803—Investigating the spectrum using photoelectric array detector
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Spectrometry And Color Measurement (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011-053019 | 2011-03-10 | ||
| JP2011053019A JP5769453B2 (ja) | 2011-03-10 | 2011-03-10 | 分光特性測定方法および分光特性測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102680097A CN102680097A (zh) | 2012-09-19 |
| CN102680097B true CN102680097B (zh) | 2015-12-02 |
Family
ID=46795289
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210063704.4A Active CN102680097B (zh) | 2011-03-10 | 2012-03-12 | 分光特性测量方法以及分光特性测量装置 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US8941829B2 (enExample) |
| JP (1) | JP5769453B2 (enExample) |
| KR (1) | KR101890944B1 (enExample) |
| CN (1) | CN102680097B (enExample) |
| TW (1) | TWI526679B (enExample) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5484537B2 (ja) * | 2012-09-03 | 2014-05-07 | 大塚電子株式会社 | 分光特性測定装置および分光特性測定方法 |
| JP6136356B2 (ja) * | 2013-02-25 | 2017-05-31 | セイコーエプソン株式会社 | 測定装置 |
| US9423302B2 (en) * | 2014-09-02 | 2016-08-23 | Shimadzu Corporation | Spectroscopic analysis device, spectroscopic analysis method and program for spectroscopic analysis device |
| JP6964972B2 (ja) * | 2016-10-20 | 2021-11-10 | キヤノン株式会社 | 画像形成装置 |
| US11953475B2 (en) * | 2018-04-16 | 2024-04-09 | Shimadzu Corporation | Absorbance detector and liquid chromatograph |
| JP2020201038A (ja) * | 2019-06-05 | 2020-12-17 | 株式会社島津製作所 | Ｘ線分析装置及びピークサーチ方法 |
| KR20240056522A (ko) * | 2021-09-15 | 2024-04-30 | 트리나미엑스 게엠베하 | 분광계 디바이스 교정 방법 |
| WO2023228450A1 (ja) * | 2022-05-27 | 2023-11-30 | 浜松ホトニクス株式会社 | 分光測定装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5428558A (en) * | 1993-12-17 | 1995-06-27 | The Perkin-Elmer Corporation | Correction of spectra for stray radiation |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4526470A (en) * | 1982-03-05 | 1985-07-02 | Beckman Instruments, Inc. | Stray light measurement and compensation |
| EP0729017B1 (en) * | 1995-02-25 | 1998-07-08 | Hewlett-Packard GmbH | Method for measurement and compensation of stray light in a spectrometer |
| JPH1130552A (ja) * | 1997-07-10 | 1999-02-02 | Otsuka Denshi Kk | 迷光補正方法 |
| JP4372314B2 (ja) | 2000-06-21 | 2009-11-25 | 大塚電子株式会社 | スペクトル測定装置 |
| US6801309B1 (en) * | 2001-10-16 | 2004-10-05 | Therma-Wave, Inc. | Detector array with scattered light correction |
| JP5012323B2 (ja) | 2007-08-27 | 2012-08-29 | コニカミノルタオプティクス株式会社 | ポリクロメータおよびその迷光の補正方法 |
| JP2009222690A (ja) | 2008-03-19 | 2009-10-01 | Soma Kogaku:Kk | 分光測定器及び分光測定方法 |
| JP5150939B2 (ja) * | 2008-10-15 | 2013-02-27 | 大塚電子株式会社 | 光学特性測定装置および光学特性測定方法 |
-
2011
- 2011-03-10 JP JP2011053019A patent/JP5769453B2/ja active Active
-
2012
- 2012-02-15 TW TW101104843A patent/TWI526679B/zh not_active IP Right Cessation
- 2012-02-16 US US13/397,681 patent/US8941829B2/en not_active Expired - Fee Related
- 2012-03-08 KR KR1020120023733A patent/KR101890944B1/ko active Active
- 2012-03-12 CN CN201210063704.4A patent/CN102680097B/zh active Active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5428558A (en) * | 1993-12-17 | 1995-06-27 | The Perkin-Elmer Corporation | Correction of spectra for stray radiation |
Also Published As
| Publication number | Publication date |
|---|---|
| JP5769453B2 (ja) | 2015-08-26 |
| CN102680097A (zh) | 2012-09-19 |
| US8941829B2 (en) | 2015-01-27 |
| KR101890944B1 (ko) | 2018-08-22 |
| TW201245676A (en) | 2012-11-16 |
| JP2012189440A (ja) | 2012-10-04 |
| US20120229803A1 (en) | 2012-09-13 |
| KR20120103480A (ko) | 2012-09-19 |
| TWI526679B (zh) | 2016-03-21 |
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| C06 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |