JP2012189440A5 - - Google Patents

Download PDF

Info

Publication number
JP2012189440A5
JP2012189440A5 JP2011053019A JP2011053019A JP2012189440A5 JP 2012189440 A5 JP2012189440 A5 JP 2012189440A5 JP 2011053019 A JP2011053019 A JP 2011053019A JP 2011053019 A JP2011053019 A JP 2011053019A JP 2012189440 A5 JP2012189440 A5 JP 2012189440A5
Authority
JP
Japan
Prior art keywords
spectrum
stray light
acquired
measurement
component
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2011053019A
Other languages
English (en)
Japanese (ja)
Other versions
JP5769453B2 (ja
JP2012189440A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP2011053019A external-priority patent/JP5769453B2/ja
Priority to JP2011053019A priority Critical patent/JP5769453B2/ja
Priority to TW101104843A priority patent/TWI526679B/zh
Priority to US13/397,681 priority patent/US8941829B2/en
Priority to KR1020120023733A priority patent/KR101890944B1/ko
Priority to CN201210063704.4A priority patent/CN102680097B/zh
Publication of JP2012189440A publication Critical patent/JP2012189440A/ja
Publication of JP2012189440A5 publication Critical patent/JP2012189440A5/ja
Publication of JP5769453B2 publication Critical patent/JP5769453B2/ja
Application granted granted Critical
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

JP2011053019A 2011-03-10 2011-03-10 分光特性測定方法および分光特性測定装置 Active JP5769453B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2011053019A JP5769453B2 (ja) 2011-03-10 2011-03-10 分光特性測定方法および分光特性測定装置
TW101104843A TWI526679B (zh) 2011-03-10 2012-02-15 分光特性檢測方法
US13/397,681 US8941829B2 (en) 2011-03-10 2012-02-16 Spectral characteristic measurement method and spectral characteristic measurement apparatus that corrects for stray light
KR1020120023733A KR101890944B1 (ko) 2011-03-10 2012-03-08 분광 특성 측정 방법 및 분광 특성 측정 장치
CN201210063704.4A CN102680097B (zh) 2011-03-10 2012-03-12 分光特性测量方法以及分光特性测量装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011053019A JP5769453B2 (ja) 2011-03-10 2011-03-10 分光特性測定方法および分光特性測定装置

Publications (3)

Publication Number Publication Date
JP2012189440A JP2012189440A (ja) 2012-10-04
JP2012189440A5 true JP2012189440A5 (enExample) 2014-04-03
JP5769453B2 JP5769453B2 (ja) 2015-08-26

Family

ID=46795289

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011053019A Active JP5769453B2 (ja) 2011-03-10 2011-03-10 分光特性測定方法および分光特性測定装置

Country Status (5)

Country Link
US (1) US8941829B2 (enExample)
JP (1) JP5769453B2 (enExample)
KR (1) KR101890944B1 (enExample)
CN (1) CN102680097B (enExample)
TW (1) TWI526679B (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5484537B2 (ja) * 2012-09-03 2014-05-07 大塚電子株式会社 分光特性測定装置および分光特性測定方法
JP6136356B2 (ja) * 2013-02-25 2017-05-31 セイコーエプソン株式会社 測定装置
US9423302B2 (en) * 2014-09-02 2016-08-23 Shimadzu Corporation Spectroscopic analysis device, spectroscopic analysis method and program for spectroscopic analysis device
JP6964972B2 (ja) * 2016-10-20 2021-11-10 キヤノン株式会社 画像形成装置
US11953475B2 (en) * 2018-04-16 2024-04-09 Shimadzu Corporation Absorbance detector and liquid chromatograph
JP2020201038A (ja) * 2019-06-05 2020-12-17 株式会社島津製作所 Ｘ線分析装置及びピークサーチ方法
KR20240056522A (ko) * 2021-09-15 2024-04-30 트리나미엑스 게엠베하 분광계 디바이스 교정 방법
WO2023228450A1 (ja) * 2022-05-27 2023-11-30 浜松ホトニクス株式会社 分光測定装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4526470A (en) * 1982-03-05 1985-07-02 Beckman Instruments, Inc. Stray light measurement and compensation
US5428558A (en) * 1993-12-17 1995-06-27 The Perkin-Elmer Corporation Correction of spectra for stray radiation
EP0729017B1 (en) * 1995-02-25 1998-07-08 Hewlett-Packard GmbH Method for measurement and compensation of stray light in a spectrometer
JPH1130552A (ja) * 1997-07-10 1999-02-02 Otsuka Denshi Kk 迷光補正方法
JP4372314B2 (ja) 2000-06-21 2009-11-25 大塚電子株式会社 スペクトル測定装置
US6801309B1 (en) * 2001-10-16 2004-10-05 Therma-Wave, Inc. Detector array with scattered light correction
JP5012323B2 (ja) 2007-08-27 2012-08-29 コニカミノルタオプティクス株式会社 ポリクロメータおよびその迷光の補正方法
JP2009222690A (ja) 2008-03-19 2009-10-01 Soma Kogaku:Kk 分光測定器及び分光測定方法
JP5150939B2 (ja) * 2008-10-15 2013-02-27 大塚電子株式会社 光学特性測定装置および光学特性測定方法

Similar Documents

Publication Publication Date Title
JP2012189440A5 (enExample)
WO2013189724A3 (en) Method of determining focus, inspection apparatus, patterning device, substrate and device manufacturing method
JP2010117343A5 (enExample)
WO2013005945A3 (ko) 표면증강라만산란 분광용 기판 제조방법 및 그 방법에 의해 제조된 기판
WO2010126698A3 (en) Modeling critical-dimension (cd) scanning-electron-microscopy (cd-sem) cd extraction
WO2012096678A3 (en) Gst film thickness monitoring
WO2016022336A3 (en) Systems and methods of machine vision assisted additive fabrication
WO2010037472A3 (en) Method and system for determining a lithographic process parameter
WO2012048156A3 (en) Method of determining an asymmetric property of a structure
JP2013543108A5 (enExample)
JP2014526795A5 (ja) プリント基板、および磁界／電流センサ
WO2012015694A3 (en) Detection of layer clearing using spectral monitoring
WO2013043831A3 (en) Process aware metrology
JP2013078464A5 (enExample)
WO2011126328A3 (ko) 이미지 센서에서 발생되는 잡음을 제거하기 위한 장치 및 방법
JP2015536356A5 (enExample)
WO2015010850A3 (en) Wide-band acoustic holography
JP2018532119A5 (enExample)
WO2012134764A3 (en) Methods and apparatus for optimization of inspection speed by generation of stage speed profile and selection of care areas for automated wafer inspection
WO2011106527A3 (en) Method for noise filtering based on confidence interval evaluation
WO2011037438A3 (ko) 드라이필름 포토레지스트
WO2017064555A9 (en) Methods and devices for diagnosing ocular surface inflammation anddry eye disease
BRPI0818847A2 (pt) Processo de determinação da sensibilidade dos componentes eletrônicos frente a partículas.
EP3032457A3 (en) Driver assistance for a vehicle
JP2015111089A5 (enExample)