JP5750632B2 - 基板へのシート貼付装置 - Google Patents

基板へのシート貼付装置 Download PDF

Info

Publication number
JP5750632B2
JP5750632B2 JP2010166499A JP2010166499A JP5750632B2 JP 5750632 B2 JP5750632 B2 JP 5750632B2 JP 2010166499 A JP2010166499 A JP 2010166499A JP 2010166499 A JP2010166499 A JP 2010166499A JP 5750632 B2 JP5750632 B2 JP 5750632B2
Authority
JP
Japan
Prior art keywords
sheet
separator
sticking
substrate
adhesive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2010166499A
Other languages
English (en)
Japanese (ja)
Other versions
JP2012028591A (ja
JP2012028591A5 (https=
Inventor
奈保樹 植村
奈保樹 植村
植田　義明
義明 植田
全広 松本
全広 松本
泰啓 田口
泰啓 田口
庸浩 刀根
庸浩 刀根
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Takatori Corp
Original Assignee
Takatori Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Takatori Corp filed Critical Takatori Corp
Priority to JP2010166499A priority Critical patent/JP5750632B2/ja
Publication of JP2012028591A publication Critical patent/JP2012028591A/ja
Publication of JP2012028591A5 publication Critical patent/JP2012028591A5/ja
Application granted granted Critical
Publication of JP5750632B2 publication Critical patent/JP5750632B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2010166499A 2010-07-23 2010-07-23 基板へのシート貼付装置 Active JP5750632B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010166499A JP5750632B2 (ja) 2010-07-23 2010-07-23 基板へのシート貼付装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010166499A JP5750632B2 (ja) 2010-07-23 2010-07-23 基板へのシート貼付装置

Publications (3)

Publication Number Publication Date
JP2012028591A JP2012028591A (ja) 2012-02-09
JP2012028591A5 JP2012028591A5 (https=) 2013-12-19
JP5750632B2 true JP5750632B2 (ja) 2015-07-22

Family

ID=45781165

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010166499A Active JP5750632B2 (ja) 2010-07-23 2010-07-23 基板へのシート貼付装置

Country Status (1)

Country Link
JP (1) JP5750632B2 (https=)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6027324B2 (ja) * 2012-03-15 2016-11-16 リンテック株式会社 シート貼付装置およびシート貼付方法
JP5937404B2 (ja) * 2012-04-04 2016-06-22 日東電工株式会社 保護テープ剥離方法および保護テープ剥離装置
JP6006048B2 (ja) * 2012-08-31 2016-10-12 リンテック株式会社 シート貼付装置及び貼付方法
JP6672099B2 (ja) * 2016-07-25 2020-03-25 株式会社ディスコ 加工装置
TWI685905B (zh) * 2017-07-12 2020-02-21 日商新川股份有限公司 接合裝置和接合方法
JP7157527B2 (ja) * 2017-12-18 2022-10-20 株式会社ディスコ 拡張装置
JP7292889B2 (ja) * 2019-02-01 2023-06-19 株式会社エム・シー・ケー 剥離装置及び剥離方法
JP7599982B2 (ja) * 2021-02-09 2024-12-16 株式会社ディスコ シート貼着装置
CN113548511B (zh) * 2021-06-05 2023-06-06 山东华滋自动化技术股份有限公司 一种微针眼贴加工设备及其加工方法
JP7841977B2 (ja) * 2022-07-22 2026-04-07 株式会社ディスコ 保護シート配設方法、及び保護シート配設装置
CN119626974B (zh) * 2025-02-13 2025-06-20 深圳市汉诺精密科技有限公司 一种xy双驱平台

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3714813B2 (ja) * 1999-01-21 2005-11-09 株式会社 日立インダストリイズ フィルム貼付方法
JP2009194064A (ja) * 2008-02-13 2009-08-27 Takatori Corp 基板への接着フィルム貼付け装置及び貼付け方法

Also Published As

Publication number Publication date
JP2012028591A (ja) 2012-02-09

Similar Documents

Publication Publication Date Title
JP5750632B2 (ja) 基板へのシート貼付装置
JP6247075B2 (ja) 保護テープ剥離方法および保護テープ剥離装置
TWI417987B (zh) 黏著帶貼附方法及利用該方法的黏著帶貼附裝置
TWI614826B (zh) 黏著帶、黏著帶貼附方法及黏著帶貼附裝置
CN103367220B (zh) 保护带剥离方法和保护带剥离装置
JP2011077443A (ja) 粘着テープ貼付け装置
TW200303047A (en) Method of cutting a protective tape and protective tape applying apparatus using the same method
JP7240440B2 (ja) 粘着テープ貼付け方法および粘着テープ貼付け装置
TW202215515A (zh) 加工裝置
JP4941944B2 (ja) 基板への接着テープの貼り付け方法及び貼り付け装置
JP2012028591A5 (https=)
WO2006001289A1 (ja) シート剥離装置及び剥離方法
JP2010080838A (ja) シート貼付装置及び貼付方法
JP6007071B2 (ja) 刃型、接着シート製造装置、剥離方法および接着シート製造方法
JP2009246067A5 (https=)
JP7290814B2 (ja) 接着テープの剥離装置及び剥離方法
WO2004079817A1 (ja) 保護テープの貼付・剥離方法
JP6298381B2 (ja) 基板貼合せ方法および基板貼合せ装置
JP6216750B2 (ja) シート剥離装置および剥離方法
JP6395573B2 (ja) 基板への接着テープ貼り付け装置及び貼り付け方法
JP4953738B2 (ja) 粘着テープ切断方法およびこれを用いた粘着テープ貼付け装置
JP2006140251A (ja) シート切断方法及びマウント方法
JP7392964B2 (ja) 基板の接着テープ貼り替え装置及び貼り替え方法
JP4787713B2 (ja) シート貼付装置及び貼付方法
JP2014063945A (ja) シート剥離装置及び剥離方法、並びに、シート貼替装置及び貼替方法

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20130626

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20131029

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20140317

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20140324

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20140509

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20141028

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20141113

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20150326

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20150407

R150 Certificate of patent or registration of utility model

Ref document number: 5750632

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250