JP5750632B2 - 基板へのシート貼付装置 - Google Patents

基板へのシート貼付装置 Download PDF

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JP5750632B2
JP5750632B2 JP2010166499A JP2010166499A JP5750632B2 JP 5750632 B2 JP5750632 B2 JP 5750632B2 JP 2010166499 A JP2010166499 A JP 2010166499A JP 2010166499 A JP2010166499 A JP 2010166499A JP 5750632 B2 JP5750632 B2 JP 5750632B2
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separator
sticking
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JP2012028591A5 (enrdf_load_stackoverflow
JP2012028591A (ja
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奈保樹 植村
奈保樹 植村
植田　義明
義明 植田
全広 松本
全広 松本
泰啓 田口
泰啓 田口
庸浩 刀根
庸浩 刀根
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Takatori Corp
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JP2010166499A 2010-07-23 2010-07-23 基板へのシート貼付装置 Active JP5750632B2 (ja)

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JP2010166499A JP5750632B2 (ja) 2010-07-23 2010-07-23 基板へのシート貼付装置

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JP2010166499A JP5750632B2 (ja) 2010-07-23 2010-07-23 基板へのシート貼付装置

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JP2012028591A JP2012028591A (ja) 2012-02-09
JP2012028591A5 JP2012028591A5 (enrdf_load_stackoverflow) 2013-12-19
JP5750632B2 true JP5750632B2 (ja) 2015-07-22

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Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6027324B2 (ja) * 2012-03-15 2016-11-16 リンテック株式会社 シート貼付装置およびシート貼付方法
JP5937404B2 (ja) * 2012-04-04 2016-06-22 日東電工株式会社 保護テープ剥離方法および保護テープ剥離装置
JP6006048B2 (ja) * 2012-08-31 2016-10-12 リンテック株式会社 シート貼付装置及び貼付方法
JP6672099B2 (ja) * 2016-07-25 2020-03-25 株式会社ディスコ 加工装置
TWI685905B (zh) * 2017-07-12 2020-02-21 日商新川股份有限公司 接合裝置和接合方法
JP7157527B2 (ja) * 2017-12-18 2022-10-20 株式会社ディスコ 拡張装置
JP7292889B2 (ja) * 2019-02-01 2023-06-19 株式会社エム・シー・ケー 剥離装置及び剥離方法
JP7599982B2 (ja) * 2021-02-09 2024-12-16 株式会社ディスコ シート貼着装置
CN113548511B (zh) * 2021-06-05 2023-06-06 山东华滋自动化技术股份有限公司 一种微针眼贴加工设备及其加工方法
CN119626974B (zh) * 2025-02-13 2025-06-20 深圳市汉诺精密科技有限公司 一种xy双驱平台

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3714813B2 (ja) * 1999-01-21 2005-11-09 株式会社 日立インダストリイズ フィルム貼付方法
JP2009194064A (ja) * 2008-02-13 2009-08-27 Takatori Corp 基板への接着フィルム貼付け装置及び貼付け方法

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