JP5728533B2 - 蒸発材料の製造方法 - Google Patents
蒸発材料の製造方法 Download PDFInfo
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- JP5728533B2 JP5728533B2 JP2013137853A JP2013137853A JP5728533B2 JP 5728533 B2 JP5728533 B2 JP 5728533B2 JP 2013137853 A JP2013137853 A JP 2013137853A JP 2013137853 A JP2013137853 A JP 2013137853A JP 5728533 B2 JP5728533 B2 JP 5728533B2
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- 239000000463 material Substances 0.000 title claims description 162
- 238000001704 evaporation Methods 0.000 title claims description 91
- 238000004519 manufacturing process Methods 0.000 title claims description 29
- 230000008020 evaporation Effects 0.000 claims description 60
- 229910052761 rare earth metal Inorganic materials 0.000 claims description 59
- 150000002910 rare earth metals Chemical class 0.000 claims description 59
- 229910052751 metal Inorganic materials 0.000 claims description 48
- 239000002184 metal Substances 0.000 claims description 48
- 229910045601 alloy Inorganic materials 0.000 claims description 30
- 239000000956 alloy Substances 0.000 claims description 30
- 238000002844 melting Methods 0.000 claims description 26
- 230000008018 melting Effects 0.000 claims description 26
- 239000000758 substrate Substances 0.000 claims description 21
- 239000011261 inert gas Substances 0.000 claims description 16
- 229910052692 Dysprosium Inorganic materials 0.000 claims description 14
- 239000003870 refractory metal Substances 0.000 claims description 13
- 229910052771 Terbium Inorganic materials 0.000 claims description 12
- 229910052750 molybdenum Inorganic materials 0.000 claims description 10
- 229910052715 tantalum Inorganic materials 0.000 claims description 10
- 229910052721 tungsten Inorganic materials 0.000 claims description 9
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 8
- 239000000155 melt Substances 0.000 claims description 8
- 239000011733 molybdenum Substances 0.000 claims description 8
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 8
- 238000007654 immersion Methods 0.000 claims description 7
- 229910052758 niobium Inorganic materials 0.000 claims description 7
- 239000010955 niobium Substances 0.000 claims description 7
- 229910052719 titanium Inorganic materials 0.000 claims description 7
- 239000010936 titanium Substances 0.000 claims description 7
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 7
- 239000010937 tungsten Substances 0.000 claims description 7
- 229910052720 vanadium Inorganic materials 0.000 claims description 7
- KBQHZAAAGSGFKK-UHFFFAOYSA-N dysprosium atom Chemical compound [Dy] KBQHZAAAGSGFKK-UHFFFAOYSA-N 0.000 claims description 6
- GZCRRIHWUXGPOV-UHFFFAOYSA-N terbium atom Chemical compound [Tb] GZCRRIHWUXGPOV-UHFFFAOYSA-N 0.000 claims description 6
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 claims description 6
- 229910052689 Holmium Inorganic materials 0.000 claims description 5
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 5
- KJZYNXUDTRRSPN-UHFFFAOYSA-N holmium atom Chemical compound [Ho] KJZYNXUDTRRSPN-UHFFFAOYSA-N 0.000 claims description 5
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims description 5
- 239000011162 core material Substances 0.000 description 54
- 238000002360 preparation method Methods 0.000 description 41
- 239000007789 gas Substances 0.000 description 39
- 238000010438 heat treatment Methods 0.000 description 38
- 238000005520 cutting process Methods 0.000 description 10
- 238000000034 method Methods 0.000 description 10
- 125000006850 spacer group Chemical group 0.000 description 9
- 239000010408 film Substances 0.000 description 8
- 239000013078 crystal Substances 0.000 description 7
- 238000004804 winding Methods 0.000 description 7
- 238000001816 cooling Methods 0.000 description 6
- QJVKUMXDEUEQLH-UHFFFAOYSA-N [B].[Fe].[Nd] Chemical compound [B].[Fe].[Nd] QJVKUMXDEUEQLH-UHFFFAOYSA-N 0.000 description 5
- 238000007598 dipping method Methods 0.000 description 5
- 229910001172 neodymium magnet Inorganic materials 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 238000007872 degassing Methods 0.000 description 4
- 238000005096 rolling process Methods 0.000 description 4
- 239000007787 solid Substances 0.000 description 4
- 238000000137 annealing Methods 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 230000005484 gravity Effects 0.000 description 3
- 239000011810 insulating material Substances 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- 230000000630 rising effect Effects 0.000 description 3
- 238000007751 thermal spraying Methods 0.000 description 3
- 238000011282 treatment Methods 0.000 description 3
- 229910052779 Neodymium Inorganic materials 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 229910052733 gallium Inorganic materials 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 238000004080 punching Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 230000004308 accommodation Effects 0.000 description 1
- 230000001174 ascending effect Effects 0.000 description 1
- 230000015271 coagulation Effects 0.000 description 1
- 238000005345 coagulation Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 230000005415 magnetization Effects 0.000 description 1
- 238000001883 metal evaporation Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
- 239000011364 vaporized material Substances 0.000 description 1
- RUDFQVOCFDJEEF-UHFFFAOYSA-N yttrium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[Y+3].[Y+3] RUDFQVOCFDJEEF-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22D—CASTING OF METALS; CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES
- B22D23/00—Casting processes not provided for in groups B22D1/00 - B22D21/00
- B22D23/04—Casting by dipping
-
- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
- C21D1/68—Temporary coatings or embedding materials applied before or during heat treatment
- C21D1/72—Temporary coatings or embedding materials applied before or during heat treatment during chemical change of surfaces
-
- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D6/00—Heat treatment of ferrous alloys
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C2/00—Hot-dipping or immersion processes for applying the coating material in the molten state without affecting the shape; Apparatus therefor
- C23C2/04—Hot-dipping or immersion processes for applying the coating material in the molten state without affecting the shape; Apparatus therefor characterised by the coating material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
- H01F41/0253—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing permanent magnets
- H01F41/0293—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing permanent magnets diffusion of rare earth elements, e.g. Tb, Dy or Ho, into permanent magnets
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12361—All metal or with adjacent metals having aperture or cut
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Thermal Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Physical Vapour Deposition (AREA)
- Hard Magnetic Materials (AREA)
- Manufacturing Cores, Coils, And Magnets (AREA)
- Manufacture And Refinement Of Metals (AREA)
- Laminated Bodies (AREA)
Description
1a 芯材
1b 網目(透孔)
10a 基材
10b 凝固体
W 線材
Dy (希土類金属)
M1、M2 ディップ装置
Claims (5)
- 希土類金属または希土類金属の合金を融解し、この溶湯に、円柱状または角柱状であって単位体積当たりの熱容量が2〜3MJ/km3の耐火金属製の基材を前記融解温度より低い温度に保持した状態で浸漬し、引き上げることで、前記基材の表面に希土類金属または希土類金属の合金からなる凝固体を形成する工程と、
前記基材から凝固体を脱離する工程と、
前記脱離した凝固体を板状に加工する工程とを含み、
前記希土類金属または希土類金属の合金がセットされた融解炉内を真空引きし、当該希土類金属または希土類金属の合金を加熱して融解させ、当該希土類金属または希土類金属の合金が昇華し始めると、融解炉内の圧力が15〜105kPaの範囲となるように不活性ガスを導入することを特徴とする蒸発材料の製造方法。 - 前記基材の溶湯への浸漬時間を増減させ、前記凝固体の厚さを制御することを特徴とする請求項1記載の蒸発材料の製造方法。
- 前記溶湯への浸漬の際の前記基材の温度を変えて前記凝固体の厚さを制御することを特徴とする請求項1または請求項2記載の蒸発材料の製造方法。
- 前記希土類金属は、テルビウム、ディスプロシウム及びホルミウムの中から選択されたものであることを特徴とする請求項1〜請求項3のいずれか1項に記載の蒸発材料の製造方法。
- 前記耐火金属は、ニオブ、モリブデン、タンタル、チタン、バナジウム及びタングステンの中から選択されたものであることを特徴とする請求項1〜請求項4のいずれか1項に記載の蒸発材料の製造方法。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013137853A JP5728533B2 (ja) | 2008-10-08 | 2013-07-01 | 蒸発材料の製造方法 |
Applications Claiming Priority (5)
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---|---|---|---|
JP2008261772 | 2008-10-08 | ||
JP2008261772 | 2008-10-08 | ||
JP2008271904 | 2008-10-22 | ||
JP2008271904 | 2008-10-22 | ||
JP2013137853A JP5728533B2 (ja) | 2008-10-08 | 2013-07-01 | 蒸発材料の製造方法 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010532803A Division JP5348670B2 (ja) | 2008-10-08 | 2009-10-06 | 蒸発材料 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2013237929A JP2013237929A (ja) | 2013-11-28 |
JP5728533B2 true JP5728533B2 (ja) | 2015-06-03 |
Family
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Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010532803A Expired - Fee Related JP5348670B2 (ja) | 2008-10-08 | 2009-10-06 | 蒸発材料 |
JP2013137853A Active JP5728533B2 (ja) | 2008-10-08 | 2013-07-01 | 蒸発材料の製造方法 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
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JP2010532803A Expired - Fee Related JP5348670B2 (ja) | 2008-10-08 | 2009-10-06 | 蒸発材料 |
Country Status (8)
Country | Link |
---|---|
US (2) | US20110189498A1 (ja) |
JP (2) | JP5348670B2 (ja) |
KR (2) | KR101373270B1 (ja) |
CN (1) | CN102177271B (ja) |
DE (1) | DE112009002354T5 (ja) |
RU (1) | RU2490367C2 (ja) |
TW (1) | TWI471875B (ja) |
WO (1) | WO2010041416A1 (ja) |
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WO2010041416A1 (ja) | 2008-10-08 | 2010-04-15 | 株式会社アルバック | 蒸発材料及び蒸発材料の製造方法 |
JP5747543B2 (ja) * | 2011-02-14 | 2015-07-15 | 日立金属株式会社 | Rh拡散源およびそれを用いたr−t−b系焼結磁石の製造方法 |
CN103258633B (zh) * | 2013-05-30 | 2015-10-28 | 烟台正海磁性材料股份有限公司 | 一种R-Fe-B系烧结磁体的制备方法 |
US20150158083A1 (en) * | 2013-12-06 | 2015-06-11 | Howard A. Fromson | Immersion Casting |
CN103985534B (zh) * | 2014-05-30 | 2016-08-24 | 厦门钨业股份有限公司 | 对R-T-B系磁体进行Dy扩散的方法、磁体和扩散源 |
CN104907572B (zh) * | 2015-07-16 | 2017-11-10 | 浙江中杭新材料科技有限公司 | 一种钕铁硼磁材料的制备方法 |
CN105063550B (zh) * | 2015-08-20 | 2017-11-28 | 包头天和磁材技术有限责任公司 | 渗透装置及方法 |
CN105177598A (zh) * | 2015-10-15 | 2015-12-23 | 杭州科德磁业有限公司 | 钕铁硼磁体晶界扩散重稀土工艺 |
CN107871602A (zh) * | 2016-09-26 | 2018-04-03 | 厦门钨业股份有限公司 | 一种R‑Fe‑B系稀土烧结磁铁的晶界扩散方法、HRE扩散源及其制备方法 |
CN106670430B (zh) * | 2016-12-28 | 2019-04-26 | 新冶高科技集团有限公司 | 热等静压浸渍系统、方法和碳/金属复合材料 |
CA3051259A1 (en) * | 2017-01-27 | 2018-08-02 | Andrew J. Birnbaum | Method and apparatus for volumetric manufacture of composite objects |
CN110106334B (zh) | 2018-02-01 | 2021-06-22 | 福建省长汀金龙稀土有限公司 | 一种连续进行晶界扩散和热处理的装置以及方法 |
WO2019148918A1 (zh) | 2018-02-01 | 2019-08-08 | 福建省长汀金龙稀土有限公司 | 一种连续进行晶界扩散和热处理的装置以及方法 |
CN109735687B (zh) * | 2018-10-18 | 2021-05-04 | 福建省长汀金龙稀土有限公司 | 一种连续进行晶界扩散和热处理的装置以及方法 |
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JP5117220B2 (ja) | 2007-10-31 | 2013-01-16 | 株式会社アルバック | 永久磁石の製造方法 |
WO2010041416A1 (ja) | 2008-10-08 | 2010-04-15 | 株式会社アルバック | 蒸発材料及び蒸発材料の製造方法 |
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2009
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- 2009-10-06 RU RU2011118203/02A patent/RU2490367C2/ru active
- 2009-10-06 CN CN200980140043.7A patent/CN102177271B/zh active Active
- 2009-10-06 DE DE112009002354T patent/DE112009002354T5/de not_active Ceased
- 2009-10-06 JP JP2010532803A patent/JP5348670B2/ja not_active Expired - Fee Related
- 2009-10-06 KR KR1020137023178A patent/KR101456837B1/ko active IP Right Grant
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Also Published As
Publication number | Publication date |
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CN102177271A (zh) | 2011-09-07 |
US9434002B2 (en) | 2016-09-06 |
JP5348670B2 (ja) | 2013-11-20 |
TW201019350A (en) | 2010-05-16 |
US20110189498A1 (en) | 2011-08-04 |
RU2490367C2 (ru) | 2013-08-20 |
WO2010041416A1 (ja) | 2010-04-15 |
JP2013237929A (ja) | 2013-11-28 |
RU2011118203A (ru) | 2012-11-20 |
KR101373270B1 (ko) | 2014-03-11 |
KR20130101167A (ko) | 2013-09-12 |
KR20110074573A (ko) | 2011-06-30 |
CN102177271B (zh) | 2014-05-21 |
TWI471875B (zh) | 2015-02-01 |
DE112009002354T5 (de) | 2012-01-19 |
JPWO2010041416A1 (ja) | 2012-03-01 |
KR101456837B1 (ko) | 2014-11-04 |
US20140027083A1 (en) | 2014-01-30 |
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