JP5692955B2 - 熱除害反応器の安全、モニタリング及び制御機構 - Google Patents

熱除害反応器の安全、モニタリング及び制御機構 Download PDF

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Publication number
JP5692955B2
JP5692955B2 JP2007543373A JP2007543373A JP5692955B2 JP 5692955 B2 JP5692955 B2 JP 5692955B2 JP 2007543373 A JP2007543373 A JP 2007543373A JP 2007543373 A JP2007543373 A JP 2007543373A JP 5692955 B2 JP5692955 B2 JP 5692955B2
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Prior art keywords
reaction chamber
thermal
thermal reaction
controller
flame
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Expired - Fee Related
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JP2007543373A
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English (en)
Japanese (ja)
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JP2008520435A (ja
JP2008520435A5 (enExample
Inventor
ホーマン ロドニー チウ
ホーマン ロドニー チウ
ダニエル オー クラーク
ダニエル オー クラーク
ショーン ダブリュウ クロフォード
ショーン ダブリュウ クロフォード
ジェ ジェイ ジョン
ジェ ジェイ ジョン
ユセフ エー ロルドジェ
ユセフ エー ロルドジェ
ロバート ベルムイレン
ロバート ベルムイレン
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Applied Materials Inc
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Applied Materials Inc
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Publication of JP2008520435A5 publication Critical patent/JP2008520435A5/ja
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G5/00—Incineration of waste; Incinerator constructions; Details, accessories or control therefor
    • F23G5/50—Control or safety arrangements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
    • F23G7/065—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23K—FEEDING FUEL TO COMBUSTION APPARATUS
    • F23K5/00—Feeding or distributing other fuel to combustion apparatus
    • F23K5/002—Gaseous fuel
    • F23K5/005—Gaseous fuel from a central source to a plurality of burners
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23N—REGULATING OR CONTROLLING COMBUSTION
    • F23N5/00—Systems for controlling combustion
    • F23N5/24—Preventing development of abnormal or undesired conditions, i.e. safety arrangements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23N—REGULATING OR CONTROLLING COMBUSTION
    • F23N5/00—Systems for controlling combustion
    • F23N5/24—Preventing development of abnormal or undesired conditions, i.e. safety arrangements
    • F23N5/242—Preventing development of abnormal or undesired conditions, i.e. safety arrangements using electronic means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23N—REGULATING OR CONTROLLING COMBUSTION
    • F23N2227/00—Ignition or checking
    • F23N2227/02—Starting or ignition cycles
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23N—REGULATING OR CONTROLLING COMBUSTION
    • F23N2227/00—Ignition or checking
    • F23N2227/04—Prepurge
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23N—REGULATING OR CONTROLLING COMBUSTION
    • F23N2229/00—Flame sensors
    • F23N2229/02—Pilot flame sensors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23N—REGULATING OR CONTROLLING COMBUSTION
    • F23N2231/00—Fail safe
    • F23N2231/06—Fail safe for flame failures
    • F23N2231/08—Fail safe for flame failures for pilot flame failures
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23N—REGULATING OR CONTROLLING COMBUSTION
    • F23N2231/00—Fail safe
    • F23N2231/18—Detecting fluid leaks
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23N—REGULATING OR CONTROLLING COMBUSTION
    • F23N5/00—Systems for controlling combustion
    • F23N5/02—Systems for controlling combustion using devices responsive to thermal changes or to thermal expansion of a medium
    • F23N5/08—Systems for controlling combustion using devices responsive to thermal changes or to thermal expansion of a medium using light-sensitive elements
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00—Capture or disposal of greenhouse gases
    • Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
    • Y02T50/00—Aeronautics or air transport
    • Y02T50/60—Efficient propulsion technologies, e.g. for aircraft

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Environmental & Geological Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Incineration Of Waste (AREA)
  • Regulation And Control Of Combustion (AREA)
  • Control Of Combustion (AREA)
  • Treating Waste Gases (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP2007543373A 2004-11-18 2005-11-17 熱除害反応器の安全、モニタリング及び制御機構 Expired - Fee Related JP5692955B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/991,740 US7682574B2 (en) 2004-11-18 2004-11-18 Safety, monitoring and control features for thermal abatement reactor
US10/991,740 2004-11-18
PCT/US2005/042201 WO2006083356A2 (en) 2004-11-18 2005-11-17 Safety, monitoring and control system for thermal reactor

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2011022179A Division JP2011173117A (ja) 2004-11-18 2011-02-03 熱除害反応器の安全、モニタリング及び制御機構

Publications (3)

Publication Number Publication Date
JP2008520435A JP2008520435A (ja) 2008-06-19
JP2008520435A5 JP2008520435A5 (enExample) 2013-10-10
JP5692955B2 true JP5692955B2 (ja) 2015-04-01

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Family Applications (2)

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JP2007543373A Expired - Fee Related JP5692955B2 (ja) 2004-11-18 2005-11-17 熱除害反応器の安全、モニタリング及び制御機構
JP2011022179A Pending JP2011173117A (ja) 2004-11-18 2011-02-03 熱除害反応器の安全、モニタリング及び制御機構

Family Applications After (1)

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JP2011022179A Pending JP2011173117A (ja) 2004-11-18 2011-02-03 熱除害反応器の安全、モニタリング及び制御機構

Country Status (8)

Country Link
US (1) US7682574B2 (enExample)
EP (1) EP1825196A2 (enExample)
JP (2) JP5692955B2 (enExample)
KR (1) KR101341529B1 (enExample)
CN (1) CN101460782A (enExample)
IL (1) IL183266A0 (enExample)
TW (1) TWI335406B (enExample)
WO (1) WO2006083356A2 (enExample)

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TW200624721A (en) 2006-07-16
WO2006083356A3 (en) 2009-01-08
KR101341529B1 (ko) 2014-01-02
EP1825196A2 (en) 2007-08-29
KR20070088709A (ko) 2007-08-29
WO2006083356A2 (en) 2006-08-10
JP2011173117A (ja) 2011-09-08
US20060104878A1 (en) 2006-05-18
CN101460782A (zh) 2009-06-17
US7682574B2 (en) 2010-03-23
IL183266A0 (en) 2007-09-20
JP2008520435A (ja) 2008-06-19
TWI335406B (en) 2011-01-01
WO2006083356A9 (en) 2009-03-05

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