CN101460782A - 具有安全、监测及控制特征的热衰减反应装置 - Google Patents

具有安全、监测及控制特征的热衰减反应装置 Download PDF

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Publication number
CN101460782A
CN101460782A CNA2005800394784A CN200580039478A CN101460782A CN 101460782 A CN101460782 A CN 101460782A CN A2005800394784 A CNA2005800394784 A CN A2005800394784A CN 200580039478 A CN200580039478 A CN 200580039478A CN 101460782 A CN101460782 A CN 101460782A
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CN
China
Prior art keywords
controller
fuel
mentioned
sensor
sealing cover
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CNA2005800394784A
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English (en)
Chinese (zh)
Inventor
H·-M·R·秋
丹尼尔·O·克拉科
肖恩·W·克瑞福德
杰伊·J·荣格
尤斯塞夫·A·劳德
罗伯特·韦梅伦
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Applied Materials Inc
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Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of CN101460782A publication Critical patent/CN101460782A/zh
Pending legal-status Critical Current

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G5/00—Incineration of waste; Incinerator constructions; Details, accessories or control therefor
    • F23G5/50—Control or safety arrangements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
    • F23G7/065—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23K—FEEDING FUEL TO COMBUSTION APPARATUS
    • F23K5/00—Feeding or distributing other fuel to combustion apparatus
    • F23K5/002—Gaseous fuel
    • F23K5/005—Gaseous fuel from a central source to a plurality of burners
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23N—REGULATING OR CONTROLLING COMBUSTION
    • F23N5/00—Systems for controlling combustion
    • F23N5/24—Preventing development of abnormal or undesired conditions, i.e. safety arrangements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23N—REGULATING OR CONTROLLING COMBUSTION
    • F23N5/00—Systems for controlling combustion
    • F23N5/24—Preventing development of abnormal or undesired conditions, i.e. safety arrangements
    • F23N5/242—Preventing development of abnormal or undesired conditions, i.e. safety arrangements using electronic means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23N—REGULATING OR CONTROLLING COMBUSTION
    • F23N2227/00—Ignition or checking
    • F23N2227/02—Starting or ignition cycles
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23N—REGULATING OR CONTROLLING COMBUSTION
    • F23N2227/00—Ignition or checking
    • F23N2227/04—Prepurge
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23N—REGULATING OR CONTROLLING COMBUSTION
    • F23N2229/00—Flame sensors
    • F23N2229/02—Pilot flame sensors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23N—REGULATING OR CONTROLLING COMBUSTION
    • F23N2231/00—Fail safe
    • F23N2231/06—Fail safe for flame failures
    • F23N2231/08—Fail safe for flame failures for pilot flame failures
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23N—REGULATING OR CONTROLLING COMBUSTION
    • F23N2231/00—Fail safe
    • F23N2231/18—Detecting fluid leaks
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23N—REGULATING OR CONTROLLING COMBUSTION
    • F23N5/00—Systems for controlling combustion
    • F23N5/02—Systems for controlling combustion using devices responsive to thermal changes or to thermal expansion of a medium
    • F23N5/08—Systems for controlling combustion using devices responsive to thermal changes or to thermal expansion of a medium using light-sensitive elements
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00—Capture or disposal of greenhouse gases
    • Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
    • Y02T50/00—Aeronautics or air transport
    • Y02T50/60—Efficient propulsion technologies, e.g. for aircraft

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Environmental & Geological Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Incineration Of Waste (AREA)
  • Regulation And Control Of Combustion (AREA)
  • Control Of Combustion (AREA)
  • Treating Waste Gases (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
CNA2005800394784A 2004-11-18 2005-11-17 具有安全、监测及控制特征的热衰减反应装置 Pending CN101460782A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/991,740 US7682574B2 (en) 2004-11-18 2004-11-18 Safety, monitoring and control features for thermal abatement reactor
US10/991,740 2004-11-18

Publications (1)

Publication Number Publication Date
CN101460782A true CN101460782A (zh) 2009-06-17

Family

ID=36386539

Family Applications (1)

Application Number Title Priority Date Filing Date
CNA2005800394784A Pending CN101460782A (zh) 2004-11-18 2005-11-17 具有安全、监测及控制特征的热衰减反应装置

Country Status (8)

Country Link
US (1) US7682574B2 (enExample)
EP (1) EP1825196A2 (enExample)
JP (2) JP5692955B2 (enExample)
KR (1) KR101341529B1 (enExample)
CN (1) CN101460782A (enExample)
IL (1) IL183266A0 (enExample)
TW (1) TWI335406B (enExample)
WO (1) WO2006083356A2 (enExample)

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CN105209826A (zh) * 2013-05-20 2015-12-30 爱德华兹有限公司 燃烧监测
CN110392596A (zh) * 2017-02-10 2019-10-29 Eim研发有限公司 用于气体销毁的方法和装置
CN114173885A (zh) * 2019-06-25 2022-03-11 基础解决方案有限公司 自燃化学品的消除系统和使用方法
CN116618190A (zh) * 2023-07-21 2023-08-22 福建德尔科技股份有限公司 一种制备六氟化钨的离心控制系统及控制方法

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CN105209826A (zh) * 2013-05-20 2015-12-30 爱德华兹有限公司 燃烧监测
JP2016526143A (ja) * 2013-05-20 2016-09-01 エドワーズ リミテッド 燃焼モニタリング
CN105209826B (zh) * 2013-05-20 2019-05-31 爱德华兹有限公司 燃烧监测
CN110392596A (zh) * 2017-02-10 2019-10-29 Eim研发有限公司 用于气体销毁的方法和装置
CN110392596B (zh) * 2017-02-10 2021-05-25 Eim研发有限公司 用于气体销毁的方法和装置
CN114173885A (zh) * 2019-06-25 2022-03-11 基础解决方案有限公司 自燃化学品的消除系统和使用方法
CN114173885B (zh) * 2019-06-25 2023-12-22 基础解决方案有限公司 自燃化学品的消除系统和使用方法
CN116618190A (zh) * 2023-07-21 2023-08-22 福建德尔科技股份有限公司 一种制备六氟化钨的离心控制系统及控制方法
CN116618190B (zh) * 2023-07-21 2023-10-03 福建德尔科技股份有限公司 一种制备六氟化钨的离心控制系统及控制方法

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KR20070088709A (ko) 2007-08-29
WO2006083356A2 (en) 2006-08-10
JP2011173117A (ja) 2011-09-08
US20060104878A1 (en) 2006-05-18
US7682574B2 (en) 2010-03-23
IL183266A0 (en) 2007-09-20
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WO2006083356A9 (en) 2009-03-05
JP5692955B2 (ja) 2015-04-01

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