TWI335406B - Thermal abatement system - Google Patents
Thermal abatement system Download PDFInfo
- Publication number
- TWI335406B TWI335406B TW094140667A TW94140667A TWI335406B TW I335406 B TWI335406 B TW I335406B TW 094140667 A TW094140667 A TW 094140667A TW 94140667 A TW94140667 A TW 94140667A TW I335406 B TWI335406 B TW I335406B
- Authority
- TW
- Taiwan
- Prior art keywords
- sensor
- fuel
- reaction chamber
- controller
- thermal
- Prior art date
Links
- 239000000446 fuel Substances 0.000 claims description 79
- 238000006243 chemical reaction Methods 0.000 claims description 49
- 230000005855 radiation Effects 0.000 claims description 26
- 239000002912 waste gas Substances 0.000 claims description 25
- 239000007789 gas Substances 0.000 description 58
- 238000000034 method Methods 0.000 description 23
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 23
- 230000008569 process Effects 0.000 description 15
- 239000004065 semiconductor Substances 0.000 description 12
- 239000003570 air Substances 0.000 description 10
- 238000002485 combustion reaction Methods 0.000 description 10
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 10
- 230000004888 barrier function Effects 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 8
- 238000012544 monitoring process Methods 0.000 description 8
- 239000007800 oxidant agent Substances 0.000 description 8
- 238000004891 communication Methods 0.000 description 6
- 239000000356 contaminant Substances 0.000 description 6
- DIOQZVSQGTUSAI-UHFFFAOYSA-N decane Chemical compound CCCCCCCCCC DIOQZVSQGTUSAI-UHFFFAOYSA-N 0.000 description 6
- 230000001590 oxidative effect Effects 0.000 description 6
- 239000000126 substance Substances 0.000 description 6
- 235000012431 wafers Nutrition 0.000 description 6
- 238000000354 decomposition reaction Methods 0.000 description 5
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- 239000000203 mixture Substances 0.000 description 4
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- 229910052787 antimony Inorganic materials 0.000 description 3
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 3
- 230000008859 change Effects 0.000 description 3
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- 239000003345 natural gas Substances 0.000 description 3
- 238000000746 purification Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
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- 239000002737 fuel gas Substances 0.000 description 2
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- 231100001261 hazardous Toxicity 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
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- 150000002894 organic compounds Chemical class 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 231100000614 poison Toxicity 0.000 description 2
- WOCIAKWEIIZHES-UHFFFAOYSA-N ruthenium(iv) oxide Chemical compound O=[Ru]=O WOCIAKWEIIZHES-UHFFFAOYSA-N 0.000 description 2
- 230000035807 sensation Effects 0.000 description 2
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- 239000003440 toxic substance Substances 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 241000282326 Felis catus Species 0.000 description 1
- 102100031577 High affinity copper uptake protein 1 Human genes 0.000 description 1
- 101710196315 High affinity copper uptake protein 1 Proteins 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 239000000443 aerosol Substances 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 229910000420 cerium oxide Inorganic materials 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000003750 conditioning effect Effects 0.000 description 1
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- 238000005520 cutting process Methods 0.000 description 1
- DIOQZVSQGTUSAI-NJFSPNSNSA-N decane Chemical class CCCCCCCCC[14CH3] DIOQZVSQGTUSAI-NJFSPNSNSA-N 0.000 description 1
- 238000011161 development Methods 0.000 description 1
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- 230000000694 effects Effects 0.000 description 1
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- 239000002360 explosive Substances 0.000 description 1
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- 239000010419 fine particle Substances 0.000 description 1
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- 150000004678 hydrides Chemical class 0.000 description 1
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- 239000002440 industrial waste Substances 0.000 description 1
- 230000000977 initiatory effect Effects 0.000 description 1
- 150000002484 inorganic compounds Chemical class 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000015654 memory Effects 0.000 description 1
- QKCGXXHCELUCKW-UHFFFAOYSA-N n-[4-[4-(dinaphthalen-2-ylamino)phenyl]phenyl]-n-naphthalen-2-ylnaphthalen-2-amine Chemical compound C1=CC=CC2=CC(N(C=3C=CC(=CC=3)C=3C=CC(=CC=3)N(C=3C=C4C=CC=CC4=CC=3)C=3C=C4C=CC=CC4=CC=3)C3=CC4=CC=CC=C4C=C3)=CC=C21 QKCGXXHCELUCKW-UHFFFAOYSA-N 0.000 description 1
- 150000002902 organometallic compounds Chemical class 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 230000001376 precipitating effect Effects 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000004886 process control Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000002689 soil Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 241000894007 species Species 0.000 description 1
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- 239000003381 stabilizer Substances 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000011282 treatment Methods 0.000 description 1
- JOHWNGGYGAVMGU-UHFFFAOYSA-N trifluorochlorine Chemical compound FCl(F)F JOHWNGGYGAVMGU-UHFFFAOYSA-N 0.000 description 1
- 238000010977 unit operation Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
- F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G5/00—Incineration of waste; Incinerator constructions; Details, accessories or control therefor
- F23G5/50—Control or safety arrangements
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
- F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
- F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
- F23G7/065—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23K—FEEDING FUEL TO COMBUSTION APPARATUS
- F23K5/00—Feeding or distributing other fuel to combustion apparatus
- F23K5/002—Gaseous fuel
- F23K5/005—Gaseous fuel from a central source to a plurality of burners
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23N—REGULATING OR CONTROLLING COMBUSTION
- F23N5/00—Systems for controlling combustion
- F23N5/24—Preventing development of abnormal or undesired conditions, i.e. safety arrangements
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23N—REGULATING OR CONTROLLING COMBUSTION
- F23N5/00—Systems for controlling combustion
- F23N5/24—Preventing development of abnormal or undesired conditions, i.e. safety arrangements
- F23N5/242—Preventing development of abnormal or undesired conditions, i.e. safety arrangements using electronic means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2258/00—Sources of waste gases
- B01D2258/02—Other waste gases
- B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23N—REGULATING OR CONTROLLING COMBUSTION
- F23N2227/00—Ignition or checking
- F23N2227/02—Starting or ignition cycles
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23N—REGULATING OR CONTROLLING COMBUSTION
- F23N2227/00—Ignition or checking
- F23N2227/04—Prepurge
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23N—REGULATING OR CONTROLLING COMBUSTION
- F23N2229/00—Flame sensors
- F23N2229/02—Pilot flame sensors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23N—REGULATING OR CONTROLLING COMBUSTION
- F23N2231/00—Fail safe
- F23N2231/06—Fail safe for flame failures
- F23N2231/08—Fail safe for flame failures for pilot flame failures
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23N—REGULATING OR CONTROLLING COMBUSTION
- F23N2231/00—Fail safe
- F23N2231/18—Detecting fluid leaks
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23N—REGULATING OR CONTROLLING COMBUSTION
- F23N5/00—Systems for controlling combustion
- F23N5/02—Systems for controlling combustion using devices responsive to thermal changes or to thermal expansion of a medium
- F23N5/08—Systems for controlling combustion using devices responsive to thermal changes or to thermal expansion of a medium using light-sensitive elements
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
- Y02C20/00—Capture or disposal of greenhouse gases
- Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
- Y02T50/00—Aeronautics or air transport
- Y02T50/60—Efficient propulsion technologies, e.g. for aircraft
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Environmental & Geological Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Incineration Of Waste (AREA)
- Regulation And Control Of Combustion (AREA)
- Control Of Combustion (AREA)
- Treating Waste Gases (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/991,740 US7682574B2 (en) | 2004-11-18 | 2004-11-18 | Safety, monitoring and control features for thermal abatement reactor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200624721A TW200624721A (en) | 2006-07-16 |
| TWI335406B true TWI335406B (en) | 2011-01-01 |
Family
ID=36386539
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW094140667A TWI335406B (en) | 2004-11-18 | 2005-11-18 | Thermal abatement system |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US7682574B2 (enExample) |
| EP (1) | EP1825196A2 (enExample) |
| JP (2) | JP5692955B2 (enExample) |
| KR (1) | KR101341529B1 (enExample) |
| CN (1) | CN101460782A (enExample) |
| IL (1) | IL183266A0 (enExample) |
| TW (1) | TWI335406B (enExample) |
| WO (1) | WO2006083356A2 (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI632324B (zh) * | 2013-05-20 | 2018-08-11 | 英商愛德華有限公司 | 燃燒監測 |
| TWI817017B (zh) * | 2019-06-27 | 2023-10-01 | 德商達斯環境專家有限責任公司 | 用於產生針對程序氣體燃燒之火焰的燃燒器及具有燃燒器之廢氣處理裝置 |
Families Citing this family (38)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7771514B1 (en) | 2004-02-03 | 2010-08-10 | Airgard, Inc. | Apparatus and method for providing heated effluent gases to a scrubber |
| US7682574B2 (en) | 2004-11-18 | 2010-03-23 | Applied Materials, Inc. | Safety, monitoring and control features for thermal abatement reactor |
| US8095240B2 (en) * | 2004-11-18 | 2012-01-10 | Applied Materials, Inc. | Methods for starting and operating a thermal abatement system |
| GB0509163D0 (en) * | 2005-05-05 | 2005-06-15 | Boc Group Plc | Gas combustion apparatus |
| DE102006027882B4 (de) * | 2005-09-02 | 2009-04-30 | Clean Systems Korea Inc., Seongnam | Wäscher zum Behandeln von Halbleiter-Abgas |
| JP2009530819A (ja) | 2006-03-16 | 2009-08-27 | アプライド マテリアルズ インコーポレイテッド | 電子デバイス製造システムにおける圧力制御方法及び装置 |
| US7611684B2 (en) * | 2006-08-09 | 2009-11-03 | Airgard, Inc. | Effluent gas scrubber and method of scrubbing effluent gasses |
| KR101560705B1 (ko) * | 2007-05-25 | 2015-10-16 | 어플라이드 머티어리얼스, 인코포레이티드 | 전자 디바이스 제조 시스템들을 조립하고 작동시키는 방법들 및 장치 |
| WO2008147523A1 (en) * | 2007-05-25 | 2008-12-04 | Applied Materials, Inc. | Cogeneration abatement system for electronic device manufacturing |
| US20090018688A1 (en) * | 2007-06-15 | 2009-01-15 | Applied Materials, Inc. | Methods and systems for designing and validating operation of abatement systems |
| TW200933093A (en) * | 2007-10-24 | 2009-08-01 | Applied Materials Inc | Methods and apparatus for starting and operating a thermal abatement system |
| US8668868B2 (en) * | 2007-10-26 | 2014-03-11 | Applied Materials, Inc. | Methods and apparatus for smart abatement using an improved fuel circuit |
| CN101939713B (zh) * | 2008-02-05 | 2013-05-22 | 应用材料公司 | 运作电子装置制造系统的方法与设备 |
| CN101939079B (zh) * | 2008-02-05 | 2013-06-12 | 应用材料公司 | 用于处理来自制程的可燃性废气的系统及方法 |
| CN102089857A (zh) * | 2008-07-11 | 2011-06-08 | 应用材料公司 | 用于减弱电子装置制造过程排出物的方法和设备 |
| US7854792B2 (en) * | 2008-09-17 | 2010-12-21 | Airgard, Inc. | Reactive gas control |
| US20100119984A1 (en) * | 2008-11-10 | 2010-05-13 | Fox Allen G | Abatement system |
| AU2013208273B2 (en) * | 2012-01-10 | 2015-11-26 | Hzo, Inc. | Methods, apparatuses and systems for monitoring for exposure of electronic devices to moisture and reacting to exposure of electronic devices to moisture |
| US10029957B2 (en) * | 2012-08-21 | 2018-07-24 | Uop Llc | Methane conversion apparatus and process using a supersonic flow reactor |
| US10160697B2 (en) * | 2012-08-21 | 2018-12-25 | Uop Llc | Methane conversion apparatus and process using a supersonic flow reactor |
| US9707530B2 (en) * | 2012-08-21 | 2017-07-18 | Uop Llc | Methane conversion apparatus and process using a supersonic flow reactor |
| US9689615B2 (en) * | 2012-08-21 | 2017-06-27 | Uop Llc | Steady state high temperature reactor |
| US9656229B2 (en) * | 2012-08-21 | 2017-05-23 | Uop Llc | Methane conversion apparatus and process using a supersonic flow reactor |
| CN102941049B (zh) * | 2012-10-31 | 2014-07-23 | 中国石油化工股份有限公司 | 通过尾气流量监测预防反应器失控的装置及方法 |
| GB2516267B (en) * | 2013-07-17 | 2016-08-17 | Edwards Ltd | Head assembly |
| WO2016182648A1 (en) * | 2015-05-08 | 2016-11-17 | Applied Materials, Inc. | Method for controlling a processing system |
| WO2018037253A1 (en) * | 2016-08-24 | 2018-03-01 | Fuchs Petrolub Se | Test apparatus and method for testing dust suppression systems |
| SG11201906205UA (en) | 2017-01-06 | 2019-08-27 | Alzeta Corp | Systems and methods for improved waste gas abatement |
| AU2018217436B2 (en) * | 2017-02-10 | 2022-10-20 | E I M Research Pty Ltd | Method and apparatus for gas destruction |
| US20180306445A1 (en) * | 2017-04-22 | 2018-10-25 | Emerson Electric Co. | Igniter failure detection assemblies for furnaces, and corresponding methods of detecting igniter failure |
| US10690057B2 (en) * | 2017-04-25 | 2020-06-23 | General Electric Company | Turbomachine combustor end cover assembly with flame detector sight tube collinear with a tube of a bundled tube fuel nozzle |
| GB2579788B (en) | 2018-12-13 | 2021-06-30 | Edwards Ltd | Abatement apparatus |
| CN118226176A (zh) * | 2019-06-19 | 2024-06-21 | 泰克元有限公司 | 测试腔室 |
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- 2004-11-18 US US10/991,740 patent/US7682574B2/en not_active Expired - Fee Related
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2005
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- 2005-11-17 KR KR1020077013756A patent/KR101341529B1/ko not_active Expired - Fee Related
- 2005-11-17 WO PCT/US2005/042201 patent/WO2006083356A2/en not_active Ceased
- 2005-11-17 CN CNA2005800394784A patent/CN101460782A/zh active Pending
- 2005-11-17 EP EP05856992A patent/EP1825196A2/en not_active Withdrawn
- 2005-11-18 TW TW094140667A patent/TWI335406B/zh not_active IP Right Cessation
-
2007
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2011
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI632324B (zh) * | 2013-05-20 | 2018-08-11 | 英商愛德華有限公司 | 燃燒監測 |
| TWI817017B (zh) * | 2019-06-27 | 2023-10-01 | 德商達斯環境專家有限責任公司 | 用於產生針對程序氣體燃燒之火焰的燃燒器及具有燃燒器之廢氣處理裝置 |
Also Published As
| Publication number | Publication date |
|---|---|
| TW200624721A (en) | 2006-07-16 |
| WO2006083356A3 (en) | 2009-01-08 |
| KR101341529B1 (ko) | 2014-01-02 |
| EP1825196A2 (en) | 2007-08-29 |
| KR20070088709A (ko) | 2007-08-29 |
| WO2006083356A2 (en) | 2006-08-10 |
| JP2011173117A (ja) | 2011-09-08 |
| US20060104878A1 (en) | 2006-05-18 |
| CN101460782A (zh) | 2009-06-17 |
| US7682574B2 (en) | 2010-03-23 |
| IL183266A0 (en) | 2007-09-20 |
| JP2008520435A (ja) | 2008-06-19 |
| WO2006083356A9 (en) | 2009-03-05 |
| JP5692955B2 (ja) | 2015-04-01 |
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