KR101341529B1 - 열 경감 반응기 시스템 및 장치 - Google Patents

열 경감 반응기 시스템 및 장치 Download PDF

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Publication number
KR101341529B1
KR101341529B1 KR1020077013756A KR20077013756A KR101341529B1 KR 101341529 B1 KR101341529 B1 KR 101341529B1 KR 1020077013756 A KR1020077013756 A KR 1020077013756A KR 20077013756 A KR20077013756 A KR 20077013756A KR 101341529 B1 KR101341529 B1 KR 101341529B1
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South Korea
Prior art keywords
delete delete
controller
fuel
thermal
reaction chamber
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Expired - Fee Related
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KR1020077013756A
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English (en)
Korean (ko)
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KR20070088709A (ko
Inventor
호-만 로드니 치우
다니엘 오. 클락
숀 더블유. 크로포드
제이 제이. 정
유스세프 에이. 롤드지
로버트 버뮬렌
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어플라이드 머티어리얼스, 인코포레이티드
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Publication of KR20070088709A publication Critical patent/KR20070088709A/ko
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G5/00—Incineration of waste; Incinerator constructions; Details, accessories or control therefor
    • F23G5/50—Control or safety arrangements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
    • F23G7/065—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23K—FEEDING FUEL TO COMBUSTION APPARATUS
    • F23K5/00—Feeding or distributing other fuel to combustion apparatus
    • F23K5/002—Gaseous fuel
    • F23K5/005—Gaseous fuel from a central source to a plurality of burners
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23N—REGULATING OR CONTROLLING COMBUSTION
    • F23N5/00—Systems for controlling combustion
    • F23N5/24—Preventing development of abnormal or undesired conditions, i.e. safety arrangements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23N—REGULATING OR CONTROLLING COMBUSTION
    • F23N5/00—Systems for controlling combustion
    • F23N5/24—Preventing development of abnormal or undesired conditions, i.e. safety arrangements
    • F23N5/242—Preventing development of abnormal or undesired conditions, i.e. safety arrangements using electronic means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23N—REGULATING OR CONTROLLING COMBUSTION
    • F23N2227/00—Ignition or checking
    • F23N2227/02—Starting or ignition cycles
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23N—REGULATING OR CONTROLLING COMBUSTION
    • F23N2227/00—Ignition or checking
    • F23N2227/04—Prepurge
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23N—REGULATING OR CONTROLLING COMBUSTION
    • F23N2229/00—Flame sensors
    • F23N2229/02—Pilot flame sensors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23N—REGULATING OR CONTROLLING COMBUSTION
    • F23N2231/00—Fail safe
    • F23N2231/06—Fail safe for flame failures
    • F23N2231/08—Fail safe for flame failures for pilot flame failures
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23N—REGULATING OR CONTROLLING COMBUSTION
    • F23N2231/00—Fail safe
    • F23N2231/18—Detecting fluid leaks
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23N—REGULATING OR CONTROLLING COMBUSTION
    • F23N5/00—Systems for controlling combustion
    • F23N5/02—Systems for controlling combustion using devices responsive to thermal changes or to thermal expansion of a medium
    • F23N5/08—Systems for controlling combustion using devices responsive to thermal changes or to thermal expansion of a medium using light-sensitive elements
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00—Capture or disposal of greenhouse gases
    • Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
    • Y02T50/00—Aeronautics or air transport
    • Y02T50/60—Efficient propulsion technologies, e.g. for aircraft

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Environmental & Geological Engineering (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Treating Waste Gases (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Regulation And Control Of Combustion (AREA)
  • Control Of Combustion (AREA)
  • Incineration Of Waste (AREA)
KR1020077013756A 2004-11-18 2005-11-17 열 경감 반응기 시스템 및 장치 Expired - Fee Related KR101341529B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/991,740 2004-11-18
US10/991,740 US7682574B2 (en) 2004-11-18 2004-11-18 Safety, monitoring and control features for thermal abatement reactor
PCT/US2005/042201 WO2006083356A2 (en) 2004-11-18 2005-11-17 Safety, monitoring and control system for thermal reactor

Publications (2)

Publication Number Publication Date
KR20070088709A KR20070088709A (ko) 2007-08-29
KR101341529B1 true KR101341529B1 (ko) 2014-01-02

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020077013756A Expired - Fee Related KR101341529B1 (ko) 2004-11-18 2005-11-17 열 경감 반응기 시스템 및 장치

Country Status (8)

Country Link
US (1) US7682574B2 (enExample)
EP (1) EP1825196A2 (enExample)
JP (2) JP5692955B2 (enExample)
KR (1) KR101341529B1 (enExample)
CN (1) CN101460782A (enExample)
IL (1) IL183266A0 (enExample)
TW (1) TWI335406B (enExample)
WO (1) WO2006083356A2 (enExample)

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CN101460782A (zh) 2009-06-17
US20060104878A1 (en) 2006-05-18
EP1825196A2 (en) 2007-08-29
WO2006083356A3 (en) 2009-01-08
IL183266A0 (en) 2007-09-20
US7682574B2 (en) 2010-03-23
JP5692955B2 (ja) 2015-04-01
JP2008520435A (ja) 2008-06-19
TWI335406B (en) 2011-01-01
WO2006083356A2 (en) 2006-08-10
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WO2006083356A9 (en) 2009-03-05
JP2011173117A (ja) 2011-09-08

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