JP5673592B2 - 配線基板及びその製造方法 - Google Patents
配線基板及びその製造方法 Download PDFInfo
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- JP5673592B2 JP5673592B2 JP2012089573A JP2012089573A JP5673592B2 JP 5673592 B2 JP5673592 B2 JP 5673592B2 JP 2012089573 A JP2012089573 A JP 2012089573A JP 2012089573 A JP2012089573 A JP 2012089573A JP 5673592 B2 JP5673592 B2 JP 5673592B2
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L24/82—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected by forming build-up interconnects at chip-level, e.g. for high density interconnects [HDI]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/04105—Bonding areas formed on an encapsulation of the semiconductor or solid-state body, e.g. bonding areas on chip-scale packages
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/18—High density interconnect [HDI] connectors; Manufacturing methods related thereto
- H01L2224/19—Manufacturing methods of high density interconnect preforms
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/18—High density interconnect [HDI] connectors; Manufacturing methods related thereto
- H01L2224/23—Structure, shape, material or disposition of the high density interconnect connectors after the connecting process
- H01L2224/24—Structure, shape, material or disposition of the high density interconnect connectors after the connecting process of an individual high density interconnect connector
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/18—High density interconnect [HDI] connectors; Manufacturing methods related thereto
- H01L2224/23—Structure, shape, material or disposition of the high density interconnect connectors after the connecting process
- H01L2224/24—Structure, shape, material or disposition of the high density interconnect connectors after the connecting process of an individual high density interconnect connector
- H01L2224/241—Disposition
- H01L2224/24151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/24221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/24225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/24226—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation the HDI interconnect connecting to the same level of the item at which the semiconductor or solid-state body is mounted, e.g. the item being planar
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73267—Layer and HDI connectors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/82—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected by forming build-up interconnects at chip-level, e.g. for high density interconnects [HDI]
- H01L2224/82009—Pre-treatment of the connector or the bonding area
- H01L2224/8203—Reshaping, e.g. forming vias
- H01L2224/82047—Reshaping, e.g. forming vias by mechanical means, e.g. severing, pressing, stamping
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/91—Methods for connecting semiconductor or solid state bodies including different methods provided for in two or more of groups H01L2224/80 - H01L2224/90
- H01L2224/92—Specific sequence of method steps
- H01L2224/922—Connecting different surfaces of the semiconductor or solid-state body with connectors of different types
- H01L2224/9222—Sequential connecting processes
- H01L2224/92242—Sequential connecting processes the first connecting process involving a layer connector
- H01L2224/92244—Sequential connecting processes the first connecting process involving a layer connector the second connecting process involving a build-up interconnect
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/153—Connection portion
- H01L2924/1531—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
- H01L2924/15313—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a land array, e.g. LGA
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- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
Description
上述した本実施形態は、電子部品を含む構成であるけれども、本発明が適用される実施形態はこれに限られるものではない。具体的には、イオン化傾向の小さい金属を配置する効果は、電子部品を構成する端子電極のみに限定されるものではない。具体的には、図10に示す状態において、ビア導体42よりもイオン化傾向の小さい金属を、ビア導体42の上面及び側面に設けることで、隣接するビア導体42間の絶縁性向上に資することができる。特に、完成状態における配線基板の最表層電極よりも、吸湿する絶縁体で覆われている内側層電極の方がより絶縁性向上の効果を期待できる。
2:端子電極
10:基体
11:絶縁層
12:ビア導体
13:配線層
14:絶縁層
20:基板
31:絶縁層
32:導体層
33:導体マスク
41:導体層
42:ビア導体
43:配線層
100:電子部品内蔵基板
201:第1金属層(第2層)、
202:第2金属層(エッチストッパ層)
203:第3金属層(最表層)
V:ビアホール(開口)
P1:機能層
P2:パッシベーション膜
Claims (5)
- 基板と、
前記基板上に載置されたベアチップ状態の半導体ICと、を備える配線基板であって、
前記半導体ICの端子は複数の金属層を有しており、前記複数の金属層は前記半導体ICを前記基板上に載置した後に形成される絶縁層で覆われ、且つ、前記複数の金属層は最も外側に配置される最表層及び該最表層よりも下層側に位置しCuを含む第2層の少なくとも2層を有し、前記最表層は、前記第2層よりもイオン化傾向が小さいことを特徴とする配線基板。 - 前記最表層は、NiB合金を含むものである、請求項1記載の配線基板。
- ベアチップ状態の半導体ICを基板上に載置する載置工程と、
前記基板上に載置された前記半導体ICの端子を覆うように絶縁層を形成する絶縁層形成工程と、
前記端子の一部が露出するように前記絶縁層に開口を形成する開口形成工程と、
前記端子と電気的に接続するように少なくとも前記開口の内部にビア導体を形成する配線層形成工程と、を備える配線基板の製造方法であって、
前記端子は、複数の金属層を有しており、且つ、前記複数の金属層は最も外側に配置される最表層及び該最表層よりも下層側に位置しCuを含む第2層の少なくとも2層を有し、前記最表層は、前記第2層よりもイオン化傾向が小さい、配線基板の製造方法。 - 前記最表層は、NiB合金を含むものである、請求項3記載の配線基板の製造方法。
- 前記開口形成工程においては、ウェットブラスト処理により前記開口を形成する、請求項3又は4に記載の配線基板の製造方法。
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JP2013219247A JP2013219247A (ja) | 2013-10-24 |
JP5673592B2 true JP5673592B2 (ja) | 2015-02-18 |
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Families Citing this family (1)
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JP7363158B2 (ja) * | 2019-07-24 | 2023-10-18 | Tdk株式会社 | 電子部品内蔵基板及びその製造方法 |
Family Cites Families (9)
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JPS61142438U (ja) * | 1985-02-25 | 1986-09-03 | ||
JPH1154919A (ja) * | 1997-08-04 | 1999-02-26 | Toagosei Co Ltd | 多層プリント配線板およびその製造方法 |
JP3894770B2 (ja) * | 2001-10-29 | 2007-03-22 | 京セラ株式会社 | 多層配線基板及びその製造方法 |
JP4034772B2 (ja) * | 2004-09-16 | 2008-01-16 | Tdk株式会社 | 多層基板及びその製造方法 |
JP4817771B2 (ja) * | 2005-09-09 | 2011-11-16 | 株式会社フジクラ | 多層プリント配線板の製造方法 |
WO2007058603A1 (en) * | 2005-11-18 | 2007-05-24 | Replisaurus Technologies Ab | Method of forming a multilayer structure |
JP2008166479A (ja) * | 2006-12-28 | 2008-07-17 | Kobe Steel Ltd | 配線基板、および、配線の形成方法 |
JP5488783B2 (ja) * | 2009-01-30 | 2014-05-14 | Tdk株式会社 | 電子部品内蔵基板及びその製造方法 |
JP5560775B2 (ja) * | 2009-05-20 | 2014-07-30 | 富士通株式会社 | 回路基板及びその製造方法 |
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