JP5662146B2 - 半導体デバイス特徴の抽出、生成、視覚化、ならびに監視方法 - Google Patents

半導体デバイス特徴の抽出、生成、視覚化、ならびに監視方法 Download PDF

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JP5662146B2
JP5662146B2 JP2010520152A JP2010520152A JP5662146B2 JP 5662146 B2 JP5662146 B2 JP 5662146B2 JP 2010520152 A JP2010520152 A JP 2010520152A JP 2010520152 A JP2010520152 A JP 2010520152A JP 5662146 B2 JP5662146 B2 JP 5662146B2
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クルカーニ・アショック
チェン・チエン−フエイ（アダム）
キャンポチアロ・セシリア
ワリングフォード・リチャード
チャン・ヤング
ダフィー・ブライアン
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KLA Corp
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
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  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP2010520152A 2007-07-30 2008-07-30 半導体デバイス特徴の抽出、生成、視覚化、ならびに監視方法 Active JP5662146B2 (ja)

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Application Number Priority Date Filing Date Title
US11/830,485 2007-07-30
US11/830,485 US8611639B2 (en) 2007-07-30 2007-07-30 Semiconductor device property extraction, generation, visualization, and monitoring methods
PCT/US2008/071587 WO2009018337A1 (en) 2007-07-30 2008-07-30 Semiconductor device property extraction, generation, visualization, and monitoring methods

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JP2010535430A JP2010535430A (ja) 2010-11-18
JP2010535430A5 JP2010535430A5 (enExample) 2014-10-30
JP5662146B2 true JP5662146B2 (ja) 2015-01-28

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US (1) US8611639B2 (enExample)
JP (1) JP5662146B2 (enExample)
KR (1) KR101381300B1 (enExample)
IL (1) IL203250A (enExample)
WO (1) WO2009018337A1 (enExample)

Cited By (1)

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Publication number Priority date Publication date Assignee Title
US12354254B2 (en) 2021-07-19 2025-07-08 Onto Innovation Inc. Low contrast non-referential defect detection

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WO2009018337A1 (en) 2009-02-05
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US8611639B2 (en) 2013-12-17
IL203250A (en) 2015-03-31
US20090037134A1 (en) 2009-02-05
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