KR101381300B1 - 반도체 장치 특성 추출, 생성, 시각화, 및 모니터링 방법들 - Google Patents

반도체 장치 특성 추출, 생성, 시각화, 및 모니터링 방법들 Download PDF

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KR101381300B1
KR101381300B1 KR1020107004612A KR20107004612A KR101381300B1 KR 101381300 B1 KR101381300 B1 KR 101381300B1 KR 1020107004612 A KR1020107004612 A KR 1020107004612A KR 20107004612 A KR20107004612 A KR 20107004612A KR 101381300 B1 KR101381300 B1 KR 101381300B1
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KR20100046240A (ko
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아쇽 쿨카린
치엔-후이 첸 (아담)
세실리아 캠포치아로
리차드 왈링포드
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브라이언 더프
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케이엘에이-텐코어 코오포레이션
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers

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  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
KR1020107004612A 2007-07-30 2008-07-30 반도체 장치 특성 추출, 생성, 시각화, 및 모니터링 방법들 Active KR101381300B1 (ko)

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US11/830,485 2007-07-30
US11/830,485 US8611639B2 (en) 2007-07-30 2007-07-30 Semiconductor device property extraction, generation, visualization, and monitoring methods
PCT/US2008/071587 WO2009018337A1 (en) 2007-07-30 2008-07-30 Semiconductor device property extraction, generation, visualization, and monitoring methods

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KR20100046240A KR20100046240A (ko) 2010-05-06
KR101381300B1 true KR101381300B1 (ko) 2014-04-04

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US (1) US8611639B2 (enExample)
JP (1) JP5662146B2 (enExample)
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IL (1) IL203250A (enExample)
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US10068324B2 (en) 2015-12-07 2018-09-04 Samsung Electronics Co., Ltd. 3D profiling system of semiconductor chip and method for operating the same
US12158869B2 (en) 2022-01-05 2024-12-03 Samsung Electronics Co., Ltd. Method of obtaining and imputing missing data and measurement system using the same

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