JP2010535430A5 - - Google Patents
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- JP2010535430A5 JP2010535430A5 JP2010520152A JP2010520152A JP2010535430A5 JP 2010535430 A5 JP2010535430 A5 JP 2010535430A5 JP 2010520152 A JP2010520152 A JP 2010520152A JP 2010520152 A JP2010520152 A JP 2010520152A JP 2010535430 A5 JP2010535430 A5 JP 2010535430A5
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- 238000000034 method Methods 0.000 claims description 233
- 230000007547 defect Effects 0.000 claims description 66
- 230000008569 process Effects 0.000 claims description 42
- 238000012544 monitoring process Methods 0.000 claims description 37
- 230000009897 systematic effect Effects 0.000 claims description 37
- 238000013461 design Methods 0.000 claims description 35
- 230000002596 correlated effect Effects 0.000 claims description 33
- 230000000875 corresponding effect Effects 0.000 claims description 30
- 238000007689 inspection Methods 0.000 claims description 27
- 230000007246 mechanism Effects 0.000 claims description 21
- 238000010219 correlation analysis Methods 0.000 claims description 8
- 230000002950 deficient Effects 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 description 94
- 230000003287 optical effect Effects 0.000 description 21
- 238000001514 detection method Methods 0.000 description 12
- 230000001629 suppression Effects 0.000 description 6
- 239000002131 composite material Substances 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- 238000012360 testing method Methods 0.000 description 4
- 230000001939 inductive effect Effects 0.000 description 3
- 238000013459 approach Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000004886 process control Methods 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US11/830,485 | 2007-07-30 | ||
| US11/830,485 US8611639B2 (en) | 2007-07-30 | 2007-07-30 | Semiconductor device property extraction, generation, visualization, and monitoring methods |
| PCT/US2008/071587 WO2009018337A1 (en) | 2007-07-30 | 2008-07-30 | Semiconductor device property extraction, generation, visualization, and monitoring methods |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2010535430A JP2010535430A (ja) | 2010-11-18 |
| JP2010535430A5 true JP2010535430A5 (enExample) | 2014-10-30 |
| JP5662146B2 JP5662146B2 (ja) | 2015-01-28 |
Family
ID=40042596
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010520152A Active JP5662146B2 (ja) | 2007-07-30 | 2008-07-30 | 半導体デバイス特徴の抽出、生成、視覚化、ならびに監視方法 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US8611639B2 (enExample) |
| JP (1) | JP5662146B2 (enExample) |
| KR (1) | KR101381300B1 (enExample) |
| IL (1) | IL203250A (enExample) |
| WO (1) | WO2009018337A1 (enExample) |
Families Citing this family (100)
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-
2007
- 2007-07-30 US US11/830,485 patent/US8611639B2/en active Active
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2008
- 2008-07-30 JP JP2010520152A patent/JP5662146B2/ja active Active
- 2008-07-30 WO PCT/US2008/071587 patent/WO2009018337A1/en not_active Ceased
- 2008-07-30 KR KR1020107004612A patent/KR101381300B1/ko active Active
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2010
- 2010-01-11 IL IL203250A patent/IL203250A/en active IP Right Grant
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