JP5643629B2 - 流体吐出装置の防湿 - Google Patents
流体吐出装置の防湿 Download PDFInfo
- Publication number
- JP5643629B2 JP5643629B2 JP2010276098A JP2010276098A JP5643629B2 JP 5643629 B2 JP5643629 B2 JP 5643629B2 JP 2010276098 A JP2010276098 A JP 2010276098A JP 2010276098 A JP2010276098 A JP 2010276098A JP 5643629 B2 JP5643629 B2 JP 5643629B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- protective layer
- fluid
- moisture
- ejection device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
- B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
- B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
- B05B17/0607—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
- B05B17/0653—Details
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14491—Electrical connection
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
- B41J2202/03—Specific materials used
Landscapes
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- Coating Apparatus (AREA)
Description
Claims (4)
- 流体流のための複数の流体通路及び前記複数の流体通路に流体連結された複数のノズルを有する基板と、
前記基板の上部に配置され、圧電層と電極とトレースとを有し、前記複数の流体通路内の流体が前記複数のノズルから吐出されるようにする複数のアクチュエータと、
前記複数のアクチュエータの前記トレースの上下及び互いに隣接する前記トレースの間にSU−8により形成された内側保護層と、
前記複数のアクチュエータの前記圧電層及び前記電極の上のみに前記SU−8よりも固有透湿度が低い材料により形成された外側保護層と、
を備える流体吐出装置。 - 前記外側保護層は前記内側保護層よりも湿気の拡散速度が低い、請求項1に記載の流体吐出装置。
- 前記基板に固定され、前記基板に隣接する室を画成する、ハウジング構成部を更に備え、
前記複数のアクチュエータは前記室内にあり、
前記室内に吸湿層を更に備え、
前記吸湿層は前記外側保護層及び前記内側保護層よりも吸湿力が高い、
請求項1又は2に記載の流体吐出装置。 - 複数の集積回路要素を更に備え、
前記複数の集積回路要素は前記室内にある、
請求項3に記載の流体吐出装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/637,654 | 2009-12-14 | ||
US12/637,654 US8454132B2 (en) | 2009-12-14 | 2009-12-14 | Moisture protection of fluid ejector |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011121369A JP2011121369A (ja) | 2011-06-23 |
JP5643629B2 true JP5643629B2 (ja) | 2014-12-17 |
Family
ID=44141827
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010276098A Active JP5643629B2 (ja) | 2009-12-14 | 2010-12-10 | 流体吐出装置の防湿 |
Country Status (3)
Country | Link |
---|---|
US (2) | US8454132B2 (ja) |
JP (1) | JP5643629B2 (ja) |
CN (1) | CN102145580B (ja) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
ITMI20111034A1 (it) * | 2011-06-08 | 2012-12-09 | Telecom Italia Spa | Dispositivo per la stampa a getto d'inchiostro di una superficie |
JP6044080B2 (ja) * | 2011-07-06 | 2016-12-14 | 株式会社リコー | インクジェット式記録ヘッド、インクジェット式記録装置、インクジェット式記録ヘッドの製造装置 |
CN102629668A (zh) * | 2011-10-10 | 2012-08-08 | 京东方科技集团股份有限公司 | 一种oled器件封装方法、oled器件及显示装置 |
JP5647648B2 (ja) * | 2012-06-20 | 2015-01-07 | 富士フイルム株式会社 | 回路装置及びインクジェットヘッドアッセンブリ |
JP6057063B2 (ja) * | 2012-09-11 | 2017-01-11 | セイコーエプソン株式会社 | 液体噴射ヘッド及び液体噴射装置 |
DE102013000064A1 (de) * | 2013-01-08 | 2014-07-10 | Lothar Saiger | Verfahren zur Reinigung und / oder Desinfektion von medizinischen/zahnmedizinischen Instrumenten und zahnärztlichen Abdrücken. Wesentliche Bauteile die bei der Anwendung dieses Verfahrens eingesetzt werden können: Verteilerblock zur Verteilung der Medien und Grundkörper mit Düsen. Verfahren zur Herstellung von Düsen und/oder deren Zuleitung |
JP2015220399A (ja) * | 2014-05-20 | 2015-12-07 | 株式会社リコー | 圧電素子、圧電素子の製造方法、インクジェット記録ヘッド及びインクジェット記録装置 |
JP6249050B2 (ja) * | 2016-06-15 | 2017-12-20 | セイコーエプソン株式会社 | 液体噴射ヘッドおよび液体噴射装置 |
TW201838829A (zh) * | 2017-02-06 | 2018-11-01 | 愛爾蘭商滿捷特科技公司 | 用於全彩頁寬列印的噴墨列印頭 |
IT201700019431A1 (it) * | 2017-02-21 | 2018-08-21 | St Microelectronics Srl | Dispositivo microfluidico mems di stampa ad attuazione piezoelettrica |
JP7006262B2 (ja) * | 2017-12-27 | 2022-01-24 | セイコーエプソン株式会社 | 液体吐出ヘッドおよび液体吐出装置 |
JP6714881B2 (ja) * | 2018-09-27 | 2020-07-01 | セイコーエプソン株式会社 | 液体噴射ヘッドおよび液体噴射装置 |
GB2579041A (en) * | 2018-11-15 | 2020-06-10 | Xaar Technology Ltd | Electrical component |
WO2021112866A1 (en) * | 2019-12-06 | 2021-06-10 | Hewlett-Packard Development Company, L.P. | Recirculation fluid ejection device |
Family Cites Families (29)
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US6543884B1 (en) * | 1996-02-07 | 2003-04-08 | Hewlett-Packard Company | Fully integrated thermal inkjet printhead having etched back PSG layer |
EP1118467B1 (en) * | 1996-04-10 | 2006-01-25 | Seiko Epson Corporation | Ink jet recording head |
JP3589560B2 (ja) | 1998-01-27 | 2004-11-17 | 株式会社リコー | インクジェットヘッド及びその製造方法 |
US6132032A (en) * | 1999-08-13 | 2000-10-17 | Hewlett-Packard Company | Thin-film print head for thermal ink-jet printers |
US6252290B1 (en) | 1999-10-25 | 2001-06-26 | Chartered Semiconductor Manufacturing Ltd. | Method to form, and structure of, a dual damascene interconnect device |
JP2002331663A (ja) * | 2001-03-08 | 2002-11-19 | Seiko Epson Corp | インクジェット式記録ヘッド及びインクジェット式記録装置 |
US6450622B1 (en) * | 2001-06-28 | 2002-09-17 | Hewlett-Packard Company | Fluid ejection device |
US6820963B2 (en) | 2001-12-13 | 2004-11-23 | Hewlett-Packard Development Company, L.P. | Fluid ejection head |
JP4058966B2 (ja) * | 2002-03-11 | 2008-03-12 | 松下電器産業株式会社 | 強誘電体素子の形成方法 |
JP4209144B2 (ja) * | 2002-06-21 | 2009-01-14 | パナソニック株式会社 | 圧電アクチュエータ、インクジェットヘッド及びインクジェット式記録装置 |
US7052117B2 (en) | 2002-07-03 | 2006-05-30 | Dimatix, Inc. | Printhead having a thin pre-fired piezoelectric layer |
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JP2004066571A (ja) * | 2002-08-05 | 2004-03-04 | Ricoh Co Ltd | 液滴吐出ヘッド、インクカートリッジ及び画像記録装置 |
CA2563775C (en) | 2004-04-20 | 2014-08-26 | Visualsonics Inc. | Arrayed ultrasonic transducer |
JP2006044222A (ja) | 2004-06-11 | 2006-02-16 | Fuji Xerox Co Ltd | インクジェット記録ヘッド及びインクジェット記録装置 |
US7344228B2 (en) | 2004-08-02 | 2008-03-18 | Fujifilm Dimatix, Inc. | Actuator with reduced drive capacitance |
TWI343323B (en) * | 2004-12-17 | 2011-06-11 | Fujifilm Dimatix Inc | Printhead module |
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JP4259509B2 (ja) * | 2004-12-27 | 2009-04-30 | セイコーエプソン株式会社 | 静電アクチュエータ、液滴吐出ヘッド、液滴吐出装置及び静電デバイス並びにそれらの製造方法 |
WO2007005857A1 (en) | 2005-07-01 | 2007-01-11 | Fujifilm Dimatix, Inc. | Non-wetting coating on a fluid ejector |
JP2007015341A (ja) * | 2005-07-11 | 2007-01-25 | Fuji Xerox Co Ltd | 液滴吐出ヘッド及びその製造方法、並びに液滴吐出装置 |
JP2007135297A (ja) * | 2005-11-09 | 2007-05-31 | Seiko Epson Corp | アクチュエータ装置、液体噴射ヘッド及び液体噴射装置並びにアクチュエータ装置の製造方法 |
JP2007281031A (ja) * | 2006-04-03 | 2007-10-25 | Seiko Epson Corp | アクチュエータ装置及び液体噴射ヘッド並びに液体噴射装置 |
JP2007276184A (ja) * | 2006-04-04 | 2007-10-25 | Matsushita Electric Ind Co Ltd | インクジェットヘッド及びインクジェット式記録装置 |
KR20080060003A (ko) * | 2006-12-26 | 2008-07-01 | 삼성전자주식회사 | 잉크젯 프린트 헤드의 제조방법 |
JP4826511B2 (ja) * | 2007-03-08 | 2011-11-30 | 富士ゼロックス株式会社 | 液滴吐出ヘッド及び液滴吐出装置 |
JP5265163B2 (ja) * | 2007-09-27 | 2013-08-14 | 富士フイルム株式会社 | 圧電デバイスおよび液体吐出ヘッド |
WO2009143354A2 (en) | 2008-05-23 | 2009-11-26 | Fujifilm Corporation | Insulated film use in a mems device |
FR2984334B1 (fr) * | 2011-12-15 | 2018-01-12 | Albea Services | Produit plastique partiellement metallise et procede de fabrication |
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2009
- 2009-12-14 US US12/637,654 patent/US8454132B2/en active Active
-
2010
- 2010-12-10 JP JP2010276098A patent/JP5643629B2/ja active Active
- 2010-12-10 CN CN201010588944.7A patent/CN102145580B/zh active Active
-
2013
- 2013-05-10 US US13/891,827 patent/US9067228B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
US8454132B2 (en) | 2013-06-04 |
US20110139901A1 (en) | 2011-06-16 |
US9067228B2 (en) | 2015-06-30 |
JP2011121369A (ja) | 2011-06-23 |
US20130248618A1 (en) | 2013-09-26 |
CN102145580B (zh) | 2015-09-23 |
CN102145580A (zh) | 2011-08-10 |
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