JP5627399B2 - 保護層付き基板の製造方法および基板加工方法 - Google Patents

保護層付き基板の製造方法および基板加工方法 Download PDF

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Publication number
JP5627399B2
JP5627399B2 JP2010248547A JP2010248547A JP5627399B2 JP 5627399 B2 JP5627399 B2 JP 5627399B2 JP 2010248547 A JP2010248547 A JP 2010248547A JP 2010248547 A JP2010248547 A JP 2010248547A JP 5627399 B2 JP5627399 B2 JP 5627399B2
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Japan
Prior art keywords
protective layer
substrate
film
manufacturing
resin layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2010248547A
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English (en)
Japanese (ja)
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JP2012096512A5 (cg-RX-API-DMAC7.html
JP2012096512A (ja
Inventor
剛矢 宇山
剛矢 宇山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2010248547A priority Critical patent/JP5627399B2/ja
Priority to US13/271,279 priority patent/US9004666B2/en
Priority to KR20110111100A priority patent/KR101489547B1/ko
Priority to DE102011117498.6A priority patent/DE102011117498B4/de
Publication of JP2012096512A publication Critical patent/JP2012096512A/ja
Publication of JP2012096512A5 publication Critical patent/JP2012096512A5/ja
Application granted granted Critical
Publication of JP5627399B2 publication Critical patent/JP5627399B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41C—PROCESSES FOR THE MANUFACTURE OR REPRODUCTION OF PRINTING SURFACES
    • B41C1/00—Forme preparation
    • B41C1/10—Forme preparation for lithographic printing; Master sheets for transferring a lithographic image to the forme
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP2010248547A 2010-11-05 2010-11-05 保護層付き基板の製造方法および基板加工方法 Active JP5627399B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2010248547A JP5627399B2 (ja) 2010-11-05 2010-11-05 保護層付き基板の製造方法および基板加工方法
US13/271,279 US9004666B2 (en) 2010-11-05 2011-10-12 Process for producing substrate and substrate processing method
KR20110111100A KR101489547B1 (ko) 2010-11-05 2011-10-28 기판 제조 방법 및 기판 가공 방법
DE102011117498.6A DE102011117498B4 (de) 2010-11-05 2011-11-02 Verfahren zum fertigen eines substrats

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010248547A JP5627399B2 (ja) 2010-11-05 2010-11-05 保護層付き基板の製造方法および基板加工方法

Publications (3)

Publication Number Publication Date
JP2012096512A JP2012096512A (ja) 2012-05-24
JP2012096512A5 JP2012096512A5 (cg-RX-API-DMAC7.html) 2013-12-19
JP5627399B2 true JP5627399B2 (ja) 2014-11-19

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010248547A Active JP5627399B2 (ja) 2010-11-05 2010-11-05 保護層付き基板の製造方法および基板加工方法

Country Status (4)

Country Link
US (1) US9004666B2 (cg-RX-API-DMAC7.html)
JP (1) JP5627399B2 (cg-RX-API-DMAC7.html)
KR (1) KR101489547B1 (cg-RX-API-DMAC7.html)
DE (1) DE102011117498B4 (cg-RX-API-DMAC7.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6230279B2 (ja) * 2013-06-06 2017-11-15 キヤノン株式会社 液体吐出ヘッドの製造方法
US9919526B2 (en) * 2013-11-29 2018-03-20 Canon Kabushiki Kaisha Method for manufacturing liquid discharge head
WO2017029831A1 (ja) * 2015-08-17 2017-02-23 富士フイルム株式会社 タッチパネル用積層体

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4688053A (en) * 1985-07-13 1987-08-18 Canon Kabushiki Kaisha Liquid jet recording head having a layer of a resin composition curable with an active energy ray
US5700316A (en) * 1996-03-29 1997-12-23 Xerox Corporation Acoustic ink compositions
EP1010532B1 (en) * 1996-04-04 2002-12-18 Sony Corporation Printer and the manufacturing method
JPH10264425A (ja) * 1997-03-25 1998-10-06 Tohoku Ricoh Co Ltd 感熱記録装置および感熱製版装置
US6473966B1 (en) 1999-02-01 2002-11-05 Casio Computer Co., Ltd. Method of manufacturing ink-jet printer head
US6375313B1 (en) * 2001-01-08 2002-04-23 Hewlett-Packard Company Orifice plate for inkjet printhead
JP4054583B2 (ja) 2001-02-28 2008-02-27 キヤノン株式会社 インクジェットプリントヘッドの製造方法
JP2002368071A (ja) * 2001-06-11 2002-12-20 Ulvac Japan Ltd 処理用基板
US6786576B2 (en) * 2002-01-17 2004-09-07 Masao Mitani Inkjet recording head with minimal ink drop ejecting capability
JP3960084B2 (ja) * 2002-03-06 2007-08-15 セイコーエプソン株式会社 ヘッド駆動装置及び方法、液滴吐出装置、ヘッド駆動プログラム、並びにデバイス製造方法及びデバイス
JP3578162B2 (ja) * 2002-04-16 2004-10-20 セイコーエプソン株式会社 パターンの形成方法、パターン形成装置、導電膜配線、デバイスの製造方法、電気光学装置、並びに電子機器
JP4182921B2 (ja) * 2004-06-08 2008-11-19 セイコーエプソン株式会社 ノズルプレートの製造方法
WO2006006682A1 (ja) 2004-07-15 2006-01-19 Ricoh Company, Ltd. 液体吐出ヘッド及びその製造方法、画像形成装置、液体吐出ヘッドのノズル部材、撥インク膜形成方法、液体吐出ヘッド、カートリッジ、及び液体吐出記録装置
JP2006137065A (ja) * 2004-11-11 2006-06-01 Sony Corp 液体吐出ヘッドの製造方法
JP2006297652A (ja) * 2005-04-18 2006-11-02 Canon Inc 静電チャック
JP4881081B2 (ja) 2005-07-25 2012-02-22 キヤノン株式会社 液体吐出ヘッドの製造方法
JP2007062291A (ja) * 2005-09-01 2007-03-15 Seiko Epson Corp 液滴吐出ヘッドの製造方法、液滴吐出ヘッドおよび液滴吐出装置
US20070182777A1 (en) * 2006-02-08 2007-08-09 Eastman Kodak Company Printhead and method of forming same
JP2008213199A (ja) 2007-03-01 2008-09-18 Matsushita Electric Ind Co Ltd 熱収縮性積層フィルム、熱収縮性積層フィルムの製造方法、容器、容器の製造方法
JP5317712B2 (ja) 2008-01-22 2013-10-16 株式会社半導体エネルギー研究所 半導体装置及び半導体装置の作製方法
JP5305691B2 (ja) 2008-02-27 2013-10-02 キヤノン株式会社 液体吐出ヘッドおよびその製造方法
JP5361231B2 (ja) 2008-03-26 2013-12-04 キヤノン株式会社 インクジェット記録ヘッド及び電子デバイス
JP5315975B2 (ja) * 2008-12-19 2013-10-16 セイコーエプソン株式会社 ノズル基板、液滴吐出ヘッド及び液滴吐出装置並びにこれらの製造方法
JP4775470B2 (ja) * 2009-03-26 2011-09-21 ブラザー工業株式会社 ノズルプレートの製造方法
US8787723B2 (en) 2009-04-30 2014-07-22 Hitachi Chemical Company, Ltd. Resin composition for forming optical waveguide, resin film for forming optical waveguide, and optical waveguide

Also Published As

Publication number Publication date
US20120113200A1 (en) 2012-05-10
DE102011117498A1 (de) 2012-05-10
US9004666B2 (en) 2015-04-14
KR101489547B1 (ko) 2015-02-03
JP2012096512A (ja) 2012-05-24
DE102011117498B4 (de) 2017-09-07
KR20120048486A (ko) 2012-05-15

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