JP5626785B2 - 半導体素子搭載用リードフレームおよびその製造方法 - Google Patents
半導体素子搭載用リードフレームおよびその製造方法 Download PDFInfo
- Publication number
- JP5626785B2 JP5626785B2 JP2010215586A JP2010215586A JP5626785B2 JP 5626785 B2 JP5626785 B2 JP 5626785B2 JP 2010215586 A JP2010215586 A JP 2010215586A JP 2010215586 A JP2010215586 A JP 2010215586A JP 5626785 B2 JP5626785 B2 JP 5626785B2
- Authority
- JP
- Japan
- Prior art keywords
- etching
- lead frame
- semiconductor element
- mounting
- plating layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000004065 semiconductor Substances 0.000 title claims description 54
- 238000004519 manufacturing process Methods 0.000 title claims description 17
- 238000005530 etching Methods 0.000 claims description 95
- 238000007747 plating Methods 0.000 claims description 52
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 44
- 229910052802 copper Inorganic materials 0.000 claims description 42
- 239000010949 copper Substances 0.000 claims description 42
- 238000000034 method Methods 0.000 claims description 20
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 12
- 239000003112 inhibitor Substances 0.000 claims description 10
- 229910052757 nitrogen Inorganic materials 0.000 claims description 6
- 150000002894 organic compounds Chemical class 0.000 claims description 6
- 230000002093 peripheral effect Effects 0.000 claims description 5
- 229910052751 metal Inorganic materials 0.000 description 20
- 239000002184 metal Substances 0.000 description 20
- 229920005989 resin Polymers 0.000 description 16
- 239000011347 resin Substances 0.000 description 16
- 239000000463 material Substances 0.000 description 14
- 238000007789 sealing Methods 0.000 description 12
- -1 imidazole compound Chemical class 0.000 description 6
- 238000011161 development Methods 0.000 description 5
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 4
- 229910021578 Iron(III) chloride Inorganic materials 0.000 description 4
- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 description 4
- 229920002120 photoresistant polymer Polymers 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 239000007921 spray Substances 0.000 description 4
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 239000003822 epoxy resin Substances 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 229920000647 polyepoxide Polymers 0.000 description 3
- 229910000679 solder Inorganic materials 0.000 description 3
- KAESVJOAVNADME-UHFFFAOYSA-N Pyrrole Chemical compound C=1C=CNC=1 KAESVJOAVNADME-UHFFFAOYSA-N 0.000 description 2
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 239000003513 alkali Substances 0.000 description 2
- 150000003851 azoles Chemical class 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- RAXXELZNTBOGNW-UHFFFAOYSA-N imidazole Natural products C1=CNC=N1 RAXXELZNTBOGNW-UHFFFAOYSA-N 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- XZGLNCKSNVGDNX-UHFFFAOYSA-N 5-methyl-2h-tetrazole Chemical compound CC=1N=NNN=1 XZGLNCKSNVGDNX-UHFFFAOYSA-N 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000007429 general method Methods 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 125000005842 heteroatom Chemical group 0.000 description 1
- 150000002460 imidazoles Chemical class 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 125000004433 nitrogen atom Chemical group N* 0.000 description 1
- 229910017464 nitrogen compound Inorganic materials 0.000 description 1
- 150000002830 nitrogen compounds Chemical class 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 229910000029 sodium carbonate Inorganic materials 0.000 description 1
- 230000037303 wrinkles Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32245—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/4501—Shape
- H01L2224/45012—Cross-sectional shape
- H01L2224/45015—Cross-sectional shape being circular
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/45144—Gold (Au) as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/45147—Copper (Cu) as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
- H01L2224/48247—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73265—Layer and wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/12—Passive devices, e.g. 2 terminal devices
- H01L2924/1204—Optical Diode
- H01L2924/12044—OLED
Description
次に外部接続端子面として形成しためっきをエッチング用マスクとして前記銅材をエッチングし、半導体素子搭載部および外部接続端子部を各々電気的に独立させ、最後にパッケージの大きさに切断し個々のパッケージを完成する。
さらに、エッチング時に、フォトレジストの開口幅を狭くすることで、相対的にエッチング量を大きくするような加工方法も可能であるが、ハーフエッチング量の半分程度以下のレジスト開口幅にする必要があり、この場合は配線のデザインに制約が出ることとなる。
前記アゾールはさらにイミダゾール系化合物、トリアゾール系化合物またはテトラゾール系化合物が望ましい。
この時、エッチング液としては、第二銅イオンが70〜110g/リットル、第一銅イオンが5g/リットル以下、塩酸が30〜55g/リットル、添加剤として、例えばテトラゾール系化合物として0.1〜50g/リットルの組成となる。
本発明の半導体素子搭載用リードフレームの製造方法は、厚さ100〜200μmの銅板の表裏面に所定形状のめっき層を形成し、表面側に形成した前記めっき層を覆うレジストマスクを形成し、裏面側は銅板の全面を覆うレジストマスクを形成し、表面側よりエッチング抑制剤として銅と親和性のある窒素を含んだ有機化合物を含有するエッチング液を用いてハーフエッチング加工を行い、銅板の深さ方向に銅板を貫通しないように50〜100μm溶解除去して空間部を形成するとともに、空間部の側面には深さ10〜30μmの窪みを形成し空間部の上端周縁にこの窪み深さに対応する張り出し長さの庇状の突出部が形成されるようにする。
エッチング液は、エッチング抑制剤を含んだエッチング液を用いる。これにより、銅材表面からエッチング加工が進み、形成される端子部の上方側面に抑制剤が吸着されることで端子部上部(銅材の表面近傍)のエッチングが抑制され、庇型の突出部を得ることが出来る。
また、エッチング液は、第一銅濃度1g/リットル、第二銅濃度95g/リットル、塩酸45g/リットル、添加剤として5−メチル−1H−テトラゾールを3g/リットルを添加したものが例えば使用できる。
次に裏面側に形成しためっきをエッチングマスクとして、銅材をエッチング加工することで、端子部が独立する。そして、ダイシングなどの方法で個々のパッケージサイズに切断する。
このようにして、封止樹脂にハーフエッチングした部分が食い込む形状を有する端子部となったパッケージが得られる。
金属板10として、厚さ0.125mmの銅系合金材(古河電工製EFTEC64−T)を用いて、両面にドライフィルムレジスト(旭化成製2558)をラミネートした。
2 ハーフエッチングの深さ(縦方向)
3 窪み深さ(端子部の横方向の凹部)
4 端子部
5 めっき層の周囲に露出している金属板の表面
10 金属板
11 めっき層
12 めっき層形成の為のレジストマスク
13 エッチング用のレジストマスク
21 半導体素子
22 ボンディングワイヤ
23 樹脂
Claims (4)
- 銅板をハーフエッチング加工して形成された空間部のエッチング開始側の上端周縁は、前記空間部の側面に形成された10〜30μmの窪み深さに対応する張り出し長さの庇状の突出部を有し、エッチング開始側の前記銅板表面にめっき層を有することを特徴とする半導体素子搭載用リードフレーム。
- 前記空間部のエッチング開始側の前記めっき層周縁に前記銅板表面が幅5〜30μmの大きさで露出していることを特徴とする請求項1に記載の半導体素子搭載用リードフレーム。
- 厚さ100〜200μmの銅板の表裏面に所定形状のめっき層を形成し、表面側には前記形成しためっき層を覆うレジストマスクを形成し、裏面側には銅板の全面を覆うレジストマスクを形成し、前記表面側よりエッチング抑制剤として銅と親和性のある窒素を含んだ有機化合物を含有するエッチング液を用いてハーフエッチング加工を行い、前記銅板の深さ方向に銅板を貫通しないように50〜100μm溶解除去して空間部を形成するとともに、前記空間部の側面には深さ10〜30μmの窪みを形成し前記空間部の上端周縁にこの窪み深さに対応する張り出し長さの庇状の突出部が形成されるようにしたことを特徴とする半導体素子搭載用リードフレームの製造方法。
- 前記空間部のエッチング開始側の前記めっき層周縁に前記銅板表面が幅5〜30μmの大きさで露出されるようにしたことを特徴とする請求項3に記載の半導体素子搭載用リードフレームの製造方法。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010215586A JP5626785B2 (ja) | 2010-09-27 | 2010-09-27 | 半導体素子搭載用リードフレームおよびその製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010215586A JP5626785B2 (ja) | 2010-09-27 | 2010-09-27 | 半導体素子搭載用リードフレームおよびその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2012069886A JP2012069886A (ja) | 2012-04-05 |
JP5626785B2 true JP5626785B2 (ja) | 2014-11-19 |
Family
ID=46166746
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010215586A Active JP5626785B2 (ja) | 2010-09-27 | 2010-09-27 | 半導体素子搭載用リードフレームおよびその製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP5626785B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10622286B2 (en) | 2017-01-17 | 2020-04-14 | Ohkuchi Materials Co., Ltd. | Lead frame and method for manufacturing the same |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5954871B2 (ja) * | 2012-09-04 | 2016-07-20 | Shマテリアル株式会社 | 半導体装置の製造方法並びにそれに用いられる半導体素子搭載用基板とその製造方法 |
JP6083740B2 (ja) * | 2013-03-12 | 2017-02-22 | Shマテリアル株式会社 | 半導体素子搭載用リードフレームの製造方法 |
JP5979495B2 (ja) * | 2013-03-19 | 2016-08-24 | Shマテリアル株式会社 | 半導体素子搭載用基板の製造方法 |
JP6455931B2 (ja) * | 2015-06-11 | 2019-01-23 | 大口マテリアル株式会社 | Ledパッケージ及び多列型led用リードフレーム、並びにそれらの製造方法 |
JP6455932B2 (ja) * | 2015-06-16 | 2019-01-23 | 大口マテリアル株式会社 | Ledパッケージ及び多列型led用リードフレーム、並びにそれらの製造方法 |
JP6508529B2 (ja) * | 2015-11-30 | 2019-05-08 | 大口マテリアル株式会社 | Ledパッケージ及び多列型led用リードフレーム、並びにそれらの製造方法 |
JP6777365B2 (ja) * | 2016-12-09 | 2020-10-28 | 大口マテリアル株式会社 | リードフレーム |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3521758B2 (ja) * | 1997-10-28 | 2004-04-19 | セイコーエプソン株式会社 | 半導体装置の製造方法 |
JP3780122B2 (ja) * | 1999-07-07 | 2006-05-31 | 株式会社三井ハイテック | 半導体装置の製造方法 |
JP2009164232A (ja) * | 2007-12-28 | 2009-07-23 | Mitsui High Tec Inc | 半導体装置及びその製造方法並びにリードフレーム及びその製造方法 |
JP2009302095A (ja) * | 2008-06-10 | 2009-12-24 | Seiko Epson Corp | 半導体装置及び半導体装置の製造方法 |
JP2010027678A (ja) * | 2008-07-15 | 2010-02-04 | Seiko Epson Corp | 半導体装置の製造方法、基板及びその製造方法 |
-
2010
- 2010-09-27 JP JP2010215586A patent/JP5626785B2/ja active Active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10622286B2 (en) | 2017-01-17 | 2020-04-14 | Ohkuchi Materials Co., Ltd. | Lead frame and method for manufacturing the same |
Also Published As
Publication number | Publication date |
---|---|
JP2012069886A (ja) | 2012-04-05 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5626785B2 (ja) | 半導体素子搭載用リードフレームおよびその製造方法 | |
US8956919B2 (en) | Structure for multi-row leadframe and semiconductor package thereof and manufacture method thereof | |
TWI591775B (zh) | 樹脂密封型半導體裝置及其製造方法 | |
JP6653139B2 (ja) | リードフレーム及びその製造方法 | |
JP2013247199A (ja) | リードフレーム及びその製造方法 | |
JP4599399B2 (ja) | 化学的に向上させたパッケージシンギュレーション法 | |
JP3879410B2 (ja) | リードフレームの製造方法 | |
JP2020053420A (ja) | リードフレーム及びリードフレームの製造方法 | |
JP4620584B2 (ja) | 回路部材の製造方法 | |
JP2017163106A (ja) | リードフレーム集合基板及び半導体装置集合体 | |
JP6828959B2 (ja) | リードフレームおよびその製造方法 | |
JP6138496B2 (ja) | 半導体素子搭載用基板及び半導体装置 | |
CN114695303A (zh) | 引线框架、引线框架的制造方法以及半导体装置 | |
JP5954871B2 (ja) | 半導体装置の製造方法並びにそれに用いられる半導体素子搭載用基板とその製造方法 | |
JP6644978B2 (ja) | 半導体素子搭載用基板及び半導体装置、並びにそれらの製造方法 | |
JP6418398B2 (ja) | 半導体素子搭載用基板及び半導体装置、並びにそれらの製造方法 | |
JP2012146782A (ja) | 半導体素子搭載用リードフレームの製造方法 | |
JP3884552B2 (ja) | 半導体装置とそれに用いられる回路部材および半導体装置の製造方法 | |
JP5943386B2 (ja) | リードフレーム及びその製造方法 | |
JP2000332146A (ja) | 樹脂封止型半導体装置とそれに用いられる回路部材およびそれらの製造方法 | |
JP4730262B2 (ja) | 半導体装置用ノンリードタイプのリードフレームの製造方法 | |
JP2016213261A (ja) | 半導体素子搭載用基板及び半導体装置、並びにそれらの製造方法 | |
KR101001874B1 (ko) | 반도체 패키지용 다열형 리드리스 프레임 및 이를 이용한 반도체 패키지의 제조방법 | |
KR100963578B1 (ko) | 다열 리드 프레임 및 그 제조방법 | |
JP2011014691A (ja) | リードフレーム及び半導体装置の製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20121109 |
|
A711 | Notification of change in applicant |
Free format text: JAPANESE INTERMEDIATE CODE: A712 Effective date: 20131220 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20140305 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20140407 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20140617 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20140812 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20140902 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20140924 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5626785 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |