JP5611297B2 - 測定プローブ - Google Patents
測定プローブ Download PDFInfo
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- JP5611297B2 JP5611297B2 JP2012198868A JP2012198868A JP5611297B2 JP 5611297 B2 JP5611297 B2 JP 5611297B2 JP 2012198868 A JP2012198868 A JP 2012198868A JP 2012198868 A JP2012198868 A JP 2012198868A JP 5611297 B2 JP5611297 B2 JP 5611297B2
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- probe
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/004—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points
- G01B7/008—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points using coordinate measuring machines
- G01B7/012—Contact-making feeler heads therefor
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
- Machine Tool Sensing Apparatuses (AREA)
- Surgical Instruments (AREA)
- Cold Cathode And The Manufacture (AREA)
- Magnetic Heads (AREA)
- Investigating Or Analysing Biological Materials (AREA)
Description
Claims (7)
- 位置決定装置用のプローブであって、
プローブ本体と、
加工対象物に接触するスタイラスと、
前記本体と前記スタイラスとを接続するひずみ感受性構造体であって、軸を有し、そして、前記スタイラスが加工対象物に接触するとき前記軸に対して曲げられる少なくとも1つの部材を含む、ひずみ感受性構造体と、
前記曲げられる部材の両側に、その曲げに基づくそれぞれの信号を提供するように、取り付けられた一対のひずみ検出要素と、そして、
該一対のひずみ検出要素から前記信号を受け、そして、該信号間の差に応じた出力信号を生み出すようにそれら信号を処理する回路と
を備え、
前記少なくとも1つの曲げられる部材は長方形の横断面を有し、該少なくとも1つの曲げられる部材は前記長方形の横断面の対向する2つの短い縁部に関係する2つの対向する短面部を有し、前記一対のひずみ検出要素は前記2つの短面部のそれぞれに取り付けられ、該2つの短面部は、該少なくとも1つの曲げられる部材への力の作用方向に対して略直角の方向に延在するように配置される、
ことを特徴とするプローブ。 - 横方向部材は、全横断面が十字形であるように、前記少なくとも1つの曲げられる部材の前記長方形の横断面の面積を増大させることを特徴とする請求項1に記載のプローブ。
- 前記回路は、差動増幅器を備えることを特徴とする請求項1または2に記載のプローブ。
- 前記プローブ本体に対して径方向に延在する複数の曲げられる部材を備える請求項1から3のいずれかに記載のプローブ。
- 3つの曲げられる部材を備える請求項4に記載のプローブ。
- 前記複数の曲げられる部材は1つの面内に実質的に延在することを特徴とする請求項4または5に記載のプローブ。
- 前記少なくとも1つの曲げられる部材は、薄い長方形の横断面を有する、請求項1から6のいずれかに記載のプローブ。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB0506158.5A GB0506158D0 (en) | 2005-03-24 | 2005-03-24 | Measurement probe |
GB0506158.5 | 2005-03-24 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008502486A Division JP5308811B2 (ja) | 2005-03-24 | 2006-03-24 | 測定プローブ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2013040949A JP2013040949A (ja) | 2013-02-28 |
JP5611297B2 true JP5611297B2 (ja) | 2014-10-22 |
Family
ID=34566496
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008502486A Active JP5308811B2 (ja) | 2005-03-24 | 2006-03-24 | 測定プローブ |
JP2012198868A Active JP5611297B2 (ja) | 2005-03-24 | 2012-09-10 | 測定プローブ |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008502486A Active JP5308811B2 (ja) | 2005-03-24 | 2006-03-24 | 測定プローブ |
Country Status (8)
Country | Link |
---|---|
US (1) | US7603789B2 (ja) |
EP (2) | EP1866602B1 (ja) |
JP (2) | JP5308811B2 (ja) |
CN (1) | CN101142461B (ja) |
AT (2) | ATE556294T1 (ja) |
DE (1) | DE602006011861D1 (ja) |
GB (1) | GB0506158D0 (ja) |
WO (1) | WO2006100508A1 (ja) |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB0508388D0 (en) | 2005-04-26 | 2005-06-01 | Renishaw Plc | Surface sensing device with optical sensor |
GB0509394D0 (en) * | 2005-05-10 | 2005-06-15 | Renishaw Plc | Dimensional measurement probe |
GB0512138D0 (en) | 2005-06-15 | 2005-07-20 | Renishaw Plc | Method of determining measurement probe orientation |
GB0804467D0 (en) | 2008-03-11 | 2008-04-16 | Renishaw Plc | Touch trigger measurement probe |
EP3620762A1 (en) | 2009-06-30 | 2020-03-11 | Hexagon Technology Center GmbH | Coordinate measurement machine with vibration detection |
US8374670B2 (en) * | 2010-01-22 | 2013-02-12 | Biosense Webster, Inc. | Catheter having a force sensing distal tip |
IT1403845B1 (it) * | 2010-10-29 | 2013-11-08 | Marposs Spa | Sonda di tastaggio e relativo metodo di controllo |
IT1402715B1 (it) * | 2010-10-29 | 2013-09-18 | Marposs Spa | Sonda di tastaggio |
CN102169159A (zh) * | 2011-01-04 | 2011-08-31 | 豪勉科技股份有限公司 | 具应变规的点测装置 |
DE102011079738A1 (de) * | 2011-07-25 | 2013-01-31 | Dr. Johannes Heidenhain Gmbh | Tastkopf |
US9528824B2 (en) * | 2015-03-31 | 2016-12-27 | Mitutoyo Corporation | Tactile probing system |
JP6611168B2 (ja) * | 2015-04-07 | 2019-11-27 | 株式会社ミツトヨ | プローブ測定力調整装置 |
US9851818B2 (en) | 2015-10-19 | 2017-12-26 | Microsoft Technology Licensing, Llc | Handheld input apparatus |
US9886092B2 (en) | 2015-10-19 | 2018-02-06 | Microsoft Technology Licensing, Llc | Haptics for a handheld input apparatus |
JP6216400B2 (ja) * | 2016-02-26 | 2017-10-18 | 株式会社ミツトヨ | 測定プローブ |
JP6212148B2 (ja) * | 2016-02-26 | 2017-10-11 | 株式会社ミツトヨ | 測定プローブ |
US10663274B2 (en) | 2017-01-27 | 2020-05-26 | Faro Technologies, Inc | Articulated arm coordinate measuring machine |
KR101874828B1 (ko) | 2017-09-26 | 2018-07-05 | 주식회사 광익기술단 | 콘크리트 구조물의 공용내하력 측정장치 및 측정방법 |
EP3460384A1 (en) * | 2017-09-26 | 2019-03-27 | Renishaw PLC | Measurement probe |
KR102338467B1 (ko) * | 2020-08-05 | 2021-12-10 | 고택성 | 측정 프로브 |
EP4148372A1 (en) | 2021-09-09 | 2023-03-15 | Renishaw PLC | Measurement probe |
Family Cites Families (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4934375Y1 (ja) * | 1973-06-16 | 1974-09-18 | ||
US4136458A (en) * | 1976-10-01 | 1979-01-30 | The Bendix Corporation | Bi-axial probe |
JPS5733301A (en) * | 1980-08-08 | 1982-02-23 | Mitsutoyo Mfg Co Ltd | Copying probe for coordinate measuring machine |
DE3279249D1 (en) | 1981-06-30 | 1989-01-05 | Renishaw Plc | Probe for measuring workpieces |
JPS6020102A (ja) * | 1983-07-14 | 1985-02-01 | Kawaguchiko Seimitsu Kk | 歪ゲ−ジ式測長器 |
US4553001A (en) * | 1983-12-05 | 1985-11-12 | Gte Valeron Corporation | Touch probe having nonconductive contact carriers |
JPS60140110A (ja) * | 1983-12-28 | 1985-07-25 | Mitsubishi Electric Corp | 物体表面の法線方向の測定方法及び装置 |
JPS62239001A (ja) * | 1986-04-11 | 1987-10-19 | Amada Co Ltd | タツチプロ−ブ |
DE3920716C1 (ja) * | 1989-06-24 | 1990-11-29 | Wild Leitz Gmbh, 6330 Wetzlar, De | |
US5209131A (en) * | 1989-11-03 | 1993-05-11 | Rank Taylor Hobson | Metrology |
JPH0431710A (ja) * | 1990-05-28 | 1992-02-03 | Toshiba Corp | 三次元測定プローブ |
US5319858A (en) * | 1990-11-24 | 1994-06-14 | Renishaw Plc | Touch probe |
EP0521703B1 (en) | 1991-07-03 | 1995-11-02 | Renishaw Metrology Limited | Signal processing circuit for trigger probe |
US5327657A (en) | 1991-07-11 | 1994-07-12 | Renishaw Metrology Ltd. | Touch probe |
DE4123081C2 (de) * | 1991-07-12 | 2001-05-17 | Zeiss Carl | Tastkopf vom schaltenden Typ |
DE69323289T3 (de) * | 1992-12-24 | 2003-04-24 | Renishaw Plc, Wotton-Under-Edge | Tastsonde und Signalverarbeitungsschaltung dafür |
JP3323081B2 (ja) * | 1995-09-25 | 2002-09-09 | 株式会社ミツトヨ | タッチ信号プローブ |
JPH09251026A (ja) * | 1996-03-15 | 1997-09-22 | Toshiba Corp | 走査プローブ顕微鏡 |
JP3285320B2 (ja) * | 1997-02-17 | 2002-05-27 | 株式会社ミツトヨ | タッチ信号プローブ |
WO1998036241A1 (fr) | 1997-02-17 | 1998-08-20 | Mitutoyo Corporation | Sonde d'injection de signaux tactiles non directionnels |
JPH10239006A (ja) * | 1997-02-25 | 1998-09-11 | Mitsutoyo Corp | タッチ信号プローブ |
JP3352055B2 (ja) * | 1999-06-16 | 2002-12-03 | 株式会社ミツトヨ | タッチ信号プローブの着座機構 |
JP3784273B2 (ja) * | 2000-05-01 | 2006-06-07 | 株式会社ミツトヨ | ワーク形状測定センサおよびワーク形状測定装置 |
US6718647B2 (en) * | 2000-06-14 | 2004-04-13 | Renishaw Plc | Force sensing probe |
DE10108774A1 (de) * | 2001-02-23 | 2002-09-05 | Zeiss Carl | Koordinatenmessgerät zum Antasten eines Werkstücks, Tastkopf für ein Koordinatenmessgerät und Verfahren zum Betrieb eines Koordinatenmessgerätes |
JP3763124B2 (ja) * | 2001-05-31 | 2006-04-05 | 株式会社ミツトヨ | タッチ信号プローブの信号処理装置および信号処理方法 |
GB0228368D0 (en) | 2002-12-05 | 2003-01-08 | Renishaw Plc | Probe for high speed scanning |
DE102004011730A1 (de) * | 2004-03-05 | 2005-09-22 | Carl Zeiss Industrielle Messtechnik Gmbh | Tastkopf für ein Koordinatenmessgerät |
EP1610087B1 (fr) * | 2004-06-22 | 2010-01-20 | Tesa SA | Palpeur avec déclencheur |
-
2005
- 2005-03-24 GB GBGB0506158.5A patent/GB0506158D0/en not_active Ceased
-
2006
- 2006-03-24 CN CN2006800083864A patent/CN101142461B/zh active Active
- 2006-03-24 EP EP06726507A patent/EP1866602B1/en active Active
- 2006-03-24 AT AT09015025T patent/ATE556294T1/de active
- 2006-03-24 EP EP09015025A patent/EP2154471B1/en active Active
- 2006-03-24 US US11/885,545 patent/US7603789B2/en active Active
- 2006-03-24 JP JP2008502486A patent/JP5308811B2/ja active Active
- 2006-03-24 WO PCT/GB2006/001095 patent/WO2006100508A1/en not_active Application Discontinuation
- 2006-03-24 DE DE602006011861T patent/DE602006011861D1/de active Active
- 2006-03-24 AT AT06726507T patent/ATE456021T1/de not_active IP Right Cessation
-
2012
- 2012-09-10 JP JP2012198868A patent/JP5611297B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
DE602006011861D1 (de) | 2010-03-11 |
ATE456021T1 (de) | 2010-02-15 |
EP2154471B1 (en) | 2012-05-02 |
JP5308811B2 (ja) | 2013-10-09 |
JP2013040949A (ja) | 2013-02-28 |
CN101142461B (zh) | 2010-07-28 |
ATE556294T1 (de) | 2012-05-15 |
US20080163507A1 (en) | 2008-07-10 |
GB0506158D0 (en) | 2005-05-04 |
US7603789B2 (en) | 2009-10-20 |
EP1866602A1 (en) | 2007-12-19 |
WO2006100508A1 (en) | 2006-09-28 |
CN101142461A (zh) | 2008-03-12 |
EP2154471A1 (en) | 2010-02-17 |
EP1866602B1 (en) | 2010-01-20 |
JP2008537107A (ja) | 2008-09-11 |
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