JP2013040949A - 測定プローブ - Google Patents
測定プローブ Download PDFInfo
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- JP2013040949A JP2013040949A JP2012198868A JP2012198868A JP2013040949A JP 2013040949 A JP2013040949 A JP 2013040949A JP 2012198868 A JP2012198868 A JP 2012198868A JP 2012198868 A JP2012198868 A JP 2012198868A JP 2013040949 A JP2013040949 A JP 2013040949A
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- probe
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/004—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points
- G01B7/008—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points using coordinate measuring machines
- G01B7/012—Contact-making feeler heads therefor
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
- Machine Tool Sensing Apparatuses (AREA)
- Investigating Or Analysing Biological Materials (AREA)
- Cold Cathode And The Manufacture (AREA)
- Magnetic Heads (AREA)
- Surgical Instruments (AREA)
Abstract
【解決手段】位置決定装置用のプローブは、プローブ本体18および加工対象物に接触するスタイラス14を有する。ひずみ感受性構造体は、プローブ本体18およびスタイラス14を接続し、そして、曲げられる部材30を含む。曲げられる部材30は、例えば長方形の横断面を有する。曲げられる部材30の曲げに基づく信号を提供するように、一対のひずみ検出要素33が曲げられる部材の反対側に位置する側部に取り付けられる。これは、ひずみ感受性構造体に、頑丈さと、曲げに対して感度が良いことの両方を可能にする。
【選択図】図1
Description
Claims (6)
- 位置決定装置用のプローブであって、
プローブ本体と、
加工対象物に接触するスタイラスと、
前記本体と前記スタイラスとを接続するひずみ感受性構造体であって、軸を有し、そして、前記スタイラスが加工対象物に接触するとき前記軸に対して曲げられる少なくとも1つの部材を含む、ひずみ感受性構造体と、
前記曲げられる部材の反対側に位置する側部に、その曲げに基づくそれぞれの信号を提供するように、取り付けられた一対のひずみ検出要素と、そして、
前記信号を受け、そして、組み合わされた出力信号を生み出すようにそれらを区別をつけて処理する回路と
を備え、
前記少なくとも1つの曲げられる部材は長方形の横断面を有し、前記一対のひずみ検出要素は前記長方形の横断面の反対側の短い縁部に取り付けられる、
ことを特徴とするプローブ。 - 横方向部材は、全横断面が十字形であるように、前記少なくとも1つの曲げられる部材の前記長方形の横断面を増大させることを特徴とする請求項1に記載のプローブ。
- 前記信号を受け、そして、組み合わされた出力信号を生み出すようにそれらを区別をつけて処理する前記回路は、差動増幅器を備えることを特徴とする請求項1または2に記載のプローブ。
- 前記プローブ本体に対して径方向に延在する複数の曲げられる部材を備える請求項1から3のいずれかに記載のプローブ。
- 3つの曲げられる部材を備える請求項4に記載のプローブ。
- 前記複数の曲げられる部材は1つの面内に実質的に延在することを特徴とする請求項4または5に記載のプローブ。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0506158.5 | 2005-03-24 | ||
GBGB0506158.5A GB0506158D0 (en) | 2005-03-24 | 2005-03-24 | Measurement probe |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008502486A Division JP5308811B2 (ja) | 2005-03-24 | 2006-03-24 | 測定プローブ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2013040949A true JP2013040949A (ja) | 2013-02-28 |
JP5611297B2 JP5611297B2 (ja) | 2014-10-22 |
Family
ID=34566496
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008502486A Active JP5308811B2 (ja) | 2005-03-24 | 2006-03-24 | 測定プローブ |
JP2012198868A Active JP5611297B2 (ja) | 2005-03-24 | 2012-09-10 | 測定プローブ |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008502486A Active JP5308811B2 (ja) | 2005-03-24 | 2006-03-24 | 測定プローブ |
Country Status (8)
Country | Link |
---|---|
US (1) | US7603789B2 (ja) |
EP (2) | EP2154471B1 (ja) |
JP (2) | JP5308811B2 (ja) |
CN (1) | CN101142461B (ja) |
AT (2) | ATE556294T1 (ja) |
DE (1) | DE602006011861D1 (ja) |
GB (1) | GB0506158D0 (ja) |
WO (1) | WO2006100508A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102338467B1 (ko) * | 2020-08-05 | 2021-12-10 | 고택성 | 측정 프로브 |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB0508388D0 (en) | 2005-04-26 | 2005-06-01 | Renishaw Plc | Surface sensing device with optical sensor |
GB0509394D0 (en) | 2005-05-10 | 2005-06-15 | Renishaw Plc | Dimensional measurement probe |
GB0512138D0 (en) | 2005-06-15 | 2005-07-20 | Renishaw Plc | Method of determining measurement probe orientation |
GB0804467D0 (en) | 2008-03-11 | 2008-04-16 | Renishaw Plc | Touch trigger measurement probe |
US8104189B2 (en) | 2009-06-30 | 2012-01-31 | Hexagon Metrology Ab | Coordinate measurement machine with vibration detection |
US8374670B2 (en) * | 2010-01-22 | 2013-02-12 | Biosense Webster, Inc. | Catheter having a force sensing distal tip |
IT1402715B1 (it) * | 2010-10-29 | 2013-09-18 | Marposs Spa | Sonda di tastaggio |
IT1403845B1 (it) * | 2010-10-29 | 2013-11-08 | Marposs Spa | Sonda di tastaggio e relativo metodo di controllo |
CN102169159A (zh) * | 2011-01-04 | 2011-08-31 | 豪勉科技股份有限公司 | 具应变规的点测装置 |
DE102011079738A1 (de) * | 2011-07-25 | 2013-01-31 | Dr. Johannes Heidenhain Gmbh | Tastkopf |
US9528824B2 (en) * | 2015-03-31 | 2016-12-27 | Mitutoyo Corporation | Tactile probing system |
JP6611168B2 (ja) * | 2015-04-07 | 2019-11-27 | 株式会社ミツトヨ | プローブ測定力調整装置 |
US9851818B2 (en) | 2015-10-19 | 2017-12-26 | Microsoft Technology Licensing, Llc | Handheld input apparatus |
US9886092B2 (en) | 2015-10-19 | 2018-02-06 | Microsoft Technology Licensing, Llc | Haptics for a handheld input apparatus |
JP6216400B2 (ja) * | 2016-02-26 | 2017-10-18 | 株式会社ミツトヨ | 測定プローブ |
JP6212148B2 (ja) * | 2016-02-26 | 2017-10-11 | 株式会社ミツトヨ | 測定プローブ |
US10663274B2 (en) | 2017-01-27 | 2020-05-26 | Faro Technologies, Inc | Articulated arm coordinate measuring machine |
KR101874828B1 (ko) | 2017-09-26 | 2018-07-05 | 주식회사 광익기술단 | 콘크리트 구조물의 공용내하력 측정장치 및 측정방법 |
EP3460384A1 (en) | 2017-09-26 | 2019-03-27 | Renishaw PLC | Measurement probe |
EP4148372A1 (en) | 2021-09-09 | 2023-03-15 | Renishaw PLC | Measurement probe |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5844302A (ja) * | 1981-06-30 | 1983-03-15 | レニショウ パブリック リミテッド カンパニー | 測定プロ−ブ |
JPS6020102A (ja) * | 1983-07-14 | 1985-02-01 | Kawaguchiko Seimitsu Kk | 歪ゲ−ジ式測長器 |
JPH10288502A (ja) * | 1997-02-17 | 1998-10-27 | Mitsutoyo Corp | タッチ信号プローブ |
Family Cites Families (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4934375Y1 (ja) * | 1973-06-16 | 1974-09-18 | ||
US4136458A (en) * | 1976-10-01 | 1979-01-30 | The Bendix Corporation | Bi-axial probe |
JPS5733301A (en) * | 1980-08-08 | 1982-02-23 | Mitsutoyo Mfg Co Ltd | Copying probe for coordinate measuring machine |
US4553001A (en) * | 1983-12-05 | 1985-11-12 | Gte Valeron Corporation | Touch probe having nonconductive contact carriers |
JPS60140110A (ja) * | 1983-12-28 | 1985-07-25 | Mitsubishi Electric Corp | 物体表面の法線方向の測定方法及び装置 |
JPS62239001A (ja) * | 1986-04-11 | 1987-10-19 | Amada Co Ltd | タツチプロ−ブ |
DE3920716C1 (ja) * | 1989-06-24 | 1990-11-29 | Wild Leitz Gmbh, 6330 Wetzlar, De | |
US5209131A (en) * | 1989-11-03 | 1993-05-11 | Rank Taylor Hobson | Metrology |
JPH0431710A (ja) * | 1990-05-28 | 1992-02-03 | Toshiba Corp | 三次元測定プローブ |
JPH07117363B2 (ja) * | 1990-11-24 | 1995-12-18 | レニショウ パブリック リミテッド カンパニー | 接触プローブ |
EP0521703B1 (en) * | 1991-07-03 | 1995-11-02 | Renishaw Metrology Limited | Signal processing circuit for trigger probe |
US5327657A (en) * | 1991-07-11 | 1994-07-12 | Renishaw Metrology Ltd. | Touch probe |
DE4123081C2 (de) * | 1991-07-12 | 2001-05-17 | Zeiss Carl | Tastkopf vom schaltenden Typ |
DE69323289T3 (de) * | 1992-12-24 | 2003-04-24 | Renishaw Plc, Wotton-Under-Edge | Tastsonde und Signalverarbeitungsschaltung dafür |
JP3323081B2 (ja) * | 1995-09-25 | 2002-09-09 | 株式会社ミツトヨ | タッチ信号プローブ |
JPH09251026A (ja) * | 1996-03-15 | 1997-09-22 | Toshiba Corp | 走査プローブ顕微鏡 |
CN1155803C (zh) | 1997-02-17 | 2004-06-30 | 株式会社三丰 | 无方向性接触信号探测器 |
JPH10239006A (ja) * | 1997-02-25 | 1998-09-11 | Mitsutoyo Corp | タッチ信号プローブ |
JP3352055B2 (ja) * | 1999-06-16 | 2002-12-03 | 株式会社ミツトヨ | タッチ信号プローブの着座機構 |
JP3784273B2 (ja) * | 2000-05-01 | 2006-06-07 | 株式会社ミツトヨ | ワーク形状測定センサおよびワーク形状測定装置 |
US6718647B2 (en) * | 2000-06-14 | 2004-04-13 | Renishaw Plc | Force sensing probe |
DE10108774A1 (de) | 2001-02-23 | 2002-09-05 | Zeiss Carl | Koordinatenmessgerät zum Antasten eines Werkstücks, Tastkopf für ein Koordinatenmessgerät und Verfahren zum Betrieb eines Koordinatenmessgerätes |
JP3763124B2 (ja) * | 2001-05-31 | 2006-04-05 | 株式会社ミツトヨ | タッチ信号プローブの信号処理装置および信号処理方法 |
GB0228368D0 (en) | 2002-12-05 | 2003-01-08 | Renishaw Plc | Probe for high speed scanning |
DE102004011730A1 (de) * | 2004-03-05 | 2005-09-22 | Carl Zeiss Industrielle Messtechnik Gmbh | Tastkopf für ein Koordinatenmessgerät |
EP1610087B1 (fr) * | 2004-06-22 | 2010-01-20 | Tesa SA | Palpeur avec déclencheur |
-
2005
- 2005-03-24 GB GBGB0506158.5A patent/GB0506158D0/en not_active Ceased
-
2006
- 2006-03-24 EP EP09015025A patent/EP2154471B1/en active Active
- 2006-03-24 JP JP2008502486A patent/JP5308811B2/ja active Active
- 2006-03-24 AT AT09015025T patent/ATE556294T1/de active
- 2006-03-24 CN CN2006800083864A patent/CN101142461B/zh active Active
- 2006-03-24 DE DE602006011861T patent/DE602006011861D1/de active Active
- 2006-03-24 US US11/885,545 patent/US7603789B2/en active Active
- 2006-03-24 EP EP06726507A patent/EP1866602B1/en active Active
- 2006-03-24 WO PCT/GB2006/001095 patent/WO2006100508A1/en not_active Application Discontinuation
- 2006-03-24 AT AT06726507T patent/ATE456021T1/de not_active IP Right Cessation
-
2012
- 2012-09-10 JP JP2012198868A patent/JP5611297B2/ja active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5844302A (ja) * | 1981-06-30 | 1983-03-15 | レニショウ パブリック リミテッド カンパニー | 測定プロ−ブ |
JPS6020102A (ja) * | 1983-07-14 | 1985-02-01 | Kawaguchiko Seimitsu Kk | 歪ゲ−ジ式測長器 |
JPH10288502A (ja) * | 1997-02-17 | 1998-10-27 | Mitsutoyo Corp | タッチ信号プローブ |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102338467B1 (ko) * | 2020-08-05 | 2021-12-10 | 고택성 | 측정 프로브 |
Also Published As
Publication number | Publication date |
---|---|
GB0506158D0 (en) | 2005-05-04 |
ATE456021T1 (de) | 2010-02-15 |
CN101142461B (zh) | 2010-07-28 |
EP2154471B1 (en) | 2012-05-02 |
DE602006011861D1 (de) | 2010-03-11 |
JP5308811B2 (ja) | 2013-10-09 |
WO2006100508A1 (en) | 2006-09-28 |
JP2008537107A (ja) | 2008-09-11 |
JP5611297B2 (ja) | 2014-10-22 |
US7603789B2 (en) | 2009-10-20 |
EP1866602B1 (en) | 2010-01-20 |
EP2154471A1 (en) | 2010-02-17 |
US20080163507A1 (en) | 2008-07-10 |
ATE556294T1 (de) | 2012-05-15 |
CN101142461A (zh) | 2008-03-12 |
EP1866602A1 (en) | 2007-12-19 |
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