JP5577040B2 - プローブカード - Google Patents

プローブカード Download PDF

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Publication number
JP5577040B2
JP5577040B2 JP2009014520A JP2009014520A JP5577040B2 JP 5577040 B2 JP5577040 B2 JP 5577040B2 JP 2009014520 A JP2009014520 A JP 2009014520A JP 2009014520 A JP2009014520 A JP 2009014520A JP 5577040 B2 JP5577040 B2 JP 5577040B2
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JP
Japan
Prior art keywords
probe
substrate
positioning
probes
holes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2009014520A
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English (en)
Japanese (ja)
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JP2010169637A5 (cg-RX-API-DMAC7.html
JP2010169637A (ja
Inventor
敬二 松岡
秀明 志賀
一真 小室
新吾 佐藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Electronic Materials Corp
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Japan Electronic Materials Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Japan Electronic Materials Corp filed Critical Japan Electronic Materials Corp
Priority to JP2009014520A priority Critical patent/JP5577040B2/ja
Publication of JP2010169637A publication Critical patent/JP2010169637A/ja
Publication of JP2010169637A5 publication Critical patent/JP2010169637A5/ja
Application granted granted Critical
Publication of JP5577040B2 publication Critical patent/JP5577040B2/ja
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  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP2009014520A 2009-01-26 2009-01-26 プローブカード Active JP5577040B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009014520A JP5577040B2 (ja) 2009-01-26 2009-01-26 プローブカード

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009014520A JP5577040B2 (ja) 2009-01-26 2009-01-26 プローブカード

Publications (3)

Publication Number Publication Date
JP2010169637A JP2010169637A (ja) 2010-08-05
JP2010169637A5 JP2010169637A5 (cg-RX-API-DMAC7.html) 2011-08-18
JP5577040B2 true JP5577040B2 (ja) 2014-08-20

Family

ID=42701916

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009014520A Active JP5577040B2 (ja) 2009-01-26 2009-01-26 プローブカード

Country Status (1)

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JP (1) JP5577040B2 (cg-RX-API-DMAC7.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9244018B2 (en) 2012-07-13 2016-01-26 Mpi Corporation Probe holding structure and optical inspection device equipped with the same

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6815176B2 (ja) * 2016-12-01 2021-01-20 ニデック エス ブイ プローブ プライベート リミテッドＮｉｄｅｃ Ｓｖ Ｐｒｏｂｅ Ｐｔｅ． Ｌｔｄ． プローブカード
CN115343513B (zh) * 2021-05-14 2025-03-18 台湾中华精测科技股份有限公司 探针卡装置及其抛弃式调整片
CN113721045B (zh) * 2021-07-26 2024-01-26 湖北汉丹机电有限公司 一种引信电路功能检测仪
KR102586832B1 (ko) * 2023-07-12 2023-10-11 김왕균 프로브 카드의 제조방법

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05267405A (ja) * 1992-03-19 1993-10-15 Data Puroobu:Kk プローブカード
JPH05307049A (ja) * 1992-04-30 1993-11-19 Nec Kansai Ltd 半導体ウェーハ特性測定装置
JP3240793B2 (ja) * 1993-12-15 2001-12-25 ソニー株式会社 プローブ集合体、その製造方法及びそれを用いたｉｃ測定用プローブカード
JP4010588B2 (ja) * 1996-12-19 2007-11-21 株式会社日本マイクロニクス 検査用ヘッド
JP2004047648A (ja) * 2002-07-10 2004-02-12 Japan Electronic Materials Corp 縦型プローブカード
JP4789675B2 (ja) * 2006-03-29 2011-10-12 京セラ株式会社 貫通孔を有する配線基板、その製造方法、ならびに該配線基板を有するプローブカード。

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9244018B2 (en) 2012-07-13 2016-01-26 Mpi Corporation Probe holding structure and optical inspection device equipped with the same

Also Published As

Publication number Publication date
JP2010169637A (ja) 2010-08-05

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