JP2010169637A5 - - Google Patents

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Publication number
JP2010169637A5
JP2010169637A5 JP2009014520A JP2009014520A JP2010169637A5 JP 2010169637 A5 JP2010169637 A5 JP 2010169637A5 JP 2009014520 A JP2009014520 A JP 2009014520A JP 2009014520 A JP2009014520 A JP 2009014520A JP 2010169637 A5 JP2010169637 A5 JP 2010169637A5
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JP
Japan
Prior art keywords
probe
rear end
tip
bent
positioning member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2009014520A
Other languages
English (en)
Japanese (ja)
Other versions
JP5577040B2 (ja
JP2010169637A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2009014520A priority Critical patent/JP5577040B2/ja
Priority claimed from JP2009014520A external-priority patent/JP5577040B2/ja
Publication of JP2010169637A publication Critical patent/JP2010169637A/ja
Publication of JP2010169637A5 publication Critical patent/JP2010169637A5/ja
Application granted granted Critical
Publication of JP5577040B2 publication Critical patent/JP5577040B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2009014520A 2009-01-26 2009-01-26 プローブカード Active JP5577040B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009014520A JP5577040B2 (ja) 2009-01-26 2009-01-26 プローブカード

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009014520A JP5577040B2 (ja) 2009-01-26 2009-01-26 プローブカード

Publications (3)

Publication Number Publication Date
JP2010169637A JP2010169637A (ja) 2010-08-05
JP2010169637A5 true JP2010169637A5 (cg-RX-API-DMAC7.html) 2011-08-18
JP5577040B2 JP5577040B2 (ja) 2014-08-20

Family

ID=42701916

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009014520A Active JP5577040B2 (ja) 2009-01-26 2009-01-26 プローブカード

Country Status (1)

Country Link
JP (1) JP5577040B2 (cg-RX-API-DMAC7.html)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103543298B (zh) 2012-07-13 2016-03-23 旺矽科技股份有限公司 探针固持结构及其光学检测装置
JP6815176B2 (ja) * 2016-12-01 2021-01-20 ニデック エス ブイ プローブ プライベート リミテッドＮｉｄｅｃ Ｓｖ Ｐｒｏｂｅ Ｐｔｅ． Ｌｔｄ． プローブカード
CN115343513B (zh) * 2021-05-14 2025-03-18 台湾中华精测科技股份有限公司 探针卡装置及其抛弃式调整片
CN113721045B (zh) * 2021-07-26 2024-01-26 湖北汉丹机电有限公司 一种引信电路功能检测仪
KR102586832B1 (ko) * 2023-07-12 2023-10-11 김왕균 프로브 카드의 제조방법

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05267405A (ja) * 1992-03-19 1993-10-15 Data Puroobu:Kk プローブカード
JPH05307049A (ja) * 1992-04-30 1993-11-19 Nec Kansai Ltd 半導体ウェーハ特性測定装置
JP3240793B2 (ja) * 1993-12-15 2001-12-25 ソニー株式会社 プローブ集合体、その製造方法及びそれを用いたｉｃ測定用プローブカード
JP4010588B2 (ja) * 1996-12-19 2007-11-21 株式会社日本マイクロニクス 検査用ヘッド
JP2004047648A (ja) * 2002-07-10 2004-02-12 Japan Electronic Materials Corp 縦型プローブカード
JP4789675B2 (ja) * 2006-03-29 2011-10-12 京セラ株式会社 貫通孔を有する配線基板、その製造方法、ならびに該配線基板を有するプローブカード。

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