JP5568265B2 - ショットキーダイオードの製造方法 - Google Patents
ショットキーダイオードの製造方法 Download PDFInfo
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- JP5568265B2 JP5568265B2 JP2009191545A JP2009191545A JP5568265B2 JP 5568265 B2 JP5568265 B2 JP 5568265B2 JP 2009191545 A JP2009191545 A JP 2009191545A JP 2009191545 A JP2009191545 A JP 2009191545A JP 5568265 B2 JP5568265 B2 JP 5568265B2
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- 238000004519 manufacturing process Methods 0.000 title claims description 13
- 238000009792 diffusion process Methods 0.000 claims description 56
- 239000000758 substrate Substances 0.000 claims description 13
- 239000004065 semiconductor Substances 0.000 claims description 11
- 229910021332 silicide Inorganic materials 0.000 claims description 11
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims description 11
- 230000005684 electric field Effects 0.000 claims description 7
- 238000005468 ion implantation Methods 0.000 claims description 7
- 238000005530 etching Methods 0.000 claims description 6
- 150000002500 ions Chemical class 0.000 claims description 2
- 230000015556 catabolic process Effects 0.000 description 17
- 238000000034 method Methods 0.000 description 6
- 239000002184 metal Substances 0.000 description 5
- 230000003071 parasitic effect Effects 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
- H01L29/861—Diodes
- H01L29/872—Schottky diodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66083—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by variation of the electric current supplied or the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched, e.g. two-terminal devices
- H01L29/6609—Diodes
- H01L29/66143—Schottky diodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
- H01L21/26586—Bombardment with radiation with high-energy radiation producing ion implantation characterised by the angle between the ion beam and the crystal planes or the main crystal surface
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
- H01L29/0607—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration
- H01L29/0611—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices
- H01L29/0615—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE]
- H01L29/0619—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE] with a supplementary region doped oppositely to or in rectifying contact with the semiconductor containing or contacting region, e.g. guard rings with PN or Schottky junction
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Electrodes Of Semiconductors (AREA)
Description
Claims (5)
- 半導体基板上に第1導電型埋め込み拡散層及び第1導電型エピタキシャル層を形成する工程と、
前記第1導電型エピタキシャル層内に、前記第1導電型埋め込み拡散層に接続された第1導電型拡散層を形成する工程と、
前記第1導電型エピタキシャル層上に絶縁膜を形成する工程と、
前記絶縁膜を除去し前記第1導電型エピタキシャル層を露出する開口部を形成する工程と、
レジスト膜と前記絶縁膜とをマスクとした斜めイオン注入により、前記第1導電型エピタキシャル層の前記開口部に対応する領域の外縁部にショットキーダイオード端部の電界集中を緩和する第2導電型拡散層を形成する工程と、
前記第2導電型拡散層の上部に、シリサイド層を形成する工程と、
前記絶縁膜内に、前記第1導電型拡散層に接続されるコンタクトを形成する工程と、
前記絶縁膜上に前記コンタクトと接続される配線層を形成する工程とを含むことを特徴とするショットキーダイオードの製造方法。 - 前記第2導電型拡散層を形成する際に、ショットキー端部にのみイオンが注入され、中央部には注入されないようにすることを特徴とする請求項1に記載のショットキーダイオードの製造方法。
- 前記シリサイド層を形成する前記第1導電型エピタキシャル層の部分をトレンチ構造で形成し、トレンチ表面全体に前記シリサイド層を形成することを特徴とする請求項1又は請求項2記載のショットキーダイオードの製造方法。
- 半導体基板と、
前記半導体基板上に形成された第1導電型埋め込み拡散層と、
前記半導体基板上に形成された第1導電型エピタキシャル層と、
前記第1導電型エピタキシャル層内において、前記第1導電型埋め込み拡散層に接続された第1導電型拡散層と、
エッチングにより開口された前記第1導電型エピタキシャル層を露出する開口部を備え、前記第1導電型エピタキシャル層上に形成されたフィールド酸化膜と、
前記フィールド酸化膜をマスクとした斜めイオン注入により、ショットキーダイオード端部の電界集中を緩和すべく前記開口部の外縁部に形成された第2導電型拡散層と、
前記第2導電型拡散層の上部に形成されたシリサイド層と、
前記フィールド酸化膜内において、前記第1導電型拡散層に接続されるコンタクトと、
前記フィールド酸化膜上において前記コンタクトと接続される配線層とを備え、
前記第2導電型拡散層と前記第1導電型埋め込み拡散層との深さ方向における距離が、前記第2導電型拡散層と前記第1導電型拡散層との水平方向における距離よりも大きいことを特徴とするショットキーダイオード。 - 前記シリサイド層が形成される前記第1導電型エピタキシャル層の部分がトレンチ構造で形成され、トレンチ表面全体に前記シリサイド層が形成されたことを特徴とする請求項4記載のショットキーダイオード。
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JP2009191545A JP5568265B2 (ja) | 2009-08-21 | 2009-08-21 | ショットキーダイオードの製造方法 |
US12/860,409 US8278198B2 (en) | 2009-08-21 | 2010-08-20 | Semiconductor device and method of producing the same |
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JP2009191545A JP5568265B2 (ja) | 2009-08-21 | 2009-08-21 | ショットキーダイオードの製造方法 |
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JP2011044573A JP2011044573A (ja) | 2011-03-03 |
JP5568265B2 true JP5568265B2 (ja) | 2014-08-06 |
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Publication number | Priority date | Publication date | Assignee | Title |
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US8492255B2 (en) * | 2011-01-06 | 2013-07-23 | National Semiconductor Corporation | Trenched Schottky diode and method of forming a trenched Schottky diode |
KR20140026846A (ko) | 2012-08-23 | 2014-03-06 | 삼성전자주식회사 | 광소자 |
US10727070B2 (en) | 2016-03-21 | 2020-07-28 | International Business Machines Corporation | Liner-less contact metallization |
US20170271512A1 (en) * | 2016-03-21 | 2017-09-21 | International Business Machines Corporation | Liner-less contact metallization |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH0251274A (ja) * | 1988-08-15 | 1990-02-21 | Nec Corp | ショットキダイオードの製造方法 |
JPH02262372A (ja) * | 1989-04-03 | 1990-10-25 | Fujitsu Ltd | 半導体装置およびその製造方法 |
JPH04365378A (ja) * | 1991-06-13 | 1992-12-17 | Nec Corp | 半導体集積回路 |
JPH09116142A (ja) * | 1995-10-23 | 1997-05-02 | Denso Corp | 半導体装置およびその製造方法 |
JP3826828B2 (ja) | 2001-11-27 | 2006-09-27 | 日産自動車株式会社 | 炭化珪素半導体を用いた電界効果トランジスタ |
JP4485153B2 (ja) * | 2003-06-12 | 2010-06-16 | パナソニック株式会社 | 半導体装置およびその製造方法 |
US7750426B2 (en) * | 2007-05-30 | 2010-07-06 | Intersil Americas, Inc. | Junction barrier Schottky diode with dual silicides |
JP5101985B2 (ja) * | 2007-10-23 | 2012-12-19 | 株式会社日立製作所 | ジャンクションバリアショットキーダイオード |
KR20090071805A (ko) * | 2007-12-28 | 2009-07-02 | 주식회사 동부하이텍 | 반도체 소자의 쇼트키 다이오드 및 그의 제조 방법 |
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US20110042775A1 (en) | 2011-02-24 |
JP2011044573A (ja) | 2011-03-03 |
US8278198B2 (en) | 2012-10-02 |
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