JP5546473B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP5546473B2 JP5546473B2 JP2011023841A JP2011023841A JP5546473B2 JP 5546473 B2 JP5546473 B2 JP 5546473B2 JP 2011023841 A JP2011023841 A JP 2011023841A JP 2011023841 A JP2011023841 A JP 2011023841A JP 5546473 B2 JP5546473 B2 JP 5546473B2
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Description
(1)第1に、プローブ痕とボンディング位置が同じであることに問題がある。探針によりプロービング工程を行うと、ボンディングパッドの表面が荒れる。プローブ痕の上でワイヤーボンディングを行うと、接合が不安定になる。上記従来例では、ボンディングパッドが単列である場合を例示したが、ボンディングパッドが千鳥状で複列であっても同じ問題がある。
また、本発明は、半導体チップの複数のボンディングパッドと基板の複数のフィンガーとがワイヤーで接合された半導体装置において、前記ボンディングパッドが、前記半導体チップの外縁に沿って少なくとも一部分が整列して配置され、
同列に配置された前記複数のボンディングパッドに接合する複数の前記ワイヤーのうち隣り合う2本のワイヤーからなる第1のワイヤー対は、2本の前記ワイヤーのボンディングパッド側接合点が前記外縁に向かう方向に互いにずれておらず、前記複数のワイヤーのうち隣り合う2本のワイヤーからなる第2のワイヤー対は、前記基板面上において前記外縁と垂直な直線からの傾斜角度が前記第1のワイヤー対よりも大きく、かつ2本の前記ワイヤーのボンディングパッド側接合点が前記外縁に向かう方向に互いにずれていることを特徴とする、半導体装置が提供される。
12,32,42,52 ボンディングパッド
14 半導体チップ
16,34,44 フィンガー
18 基板
20,36,46 ワイヤー
Claims (9)
- 主面と、前記主面の辺と、前記辺に沿って配置された複数の矩形フィンガーとを含む矩形の基板と、
第1主面と、前記第1主面とは反対側の第2主面と、前記第1主面上の第1辺と、前記第1辺と向かい合う前記第1主面上の第2辺と、前記第1辺および前記第2辺と交わる第3辺および第4辺と、前記第1主面に配置された複数のパッドとを含む矩形の半導体チップと、
複数のワイヤーと、
を含み、
前記半導体チップは、前記第2主面が前記基板の前記主面に向かい合うよう前記基板上に搭載されており、
前記複数の矩形フィンガーは、それぞれが第1短辺と、前記第1短辺と向かい合う第2短辺と、前記第1短辺および前記第2短辺と交差する第1長辺および第2長辺とを有し、前記基板の前記辺と前記半導体チップの前記第1辺との間に一列で配置され、それぞれの前記第2短辺は前記辺に沿って配置され、かつそれぞれの前記第1短辺は前記第1辺に沿って配置されており、
前記複数のパッドは、それぞれ第1パッド短辺と第2パッド短辺を有し、前記半導体チップの前記第1辺に沿って配置され、かつ前記第1パッド短辺は前記第2パッド短辺と前記第1辺の間に配置されており、
前記複数の矩形フィンガーのピッチは、前記複数のパッドのピッチより広く、
前記複数のフィンガーの前記第1長辺および前記第2長辺は、前記第1辺に対して傾斜しており、
各前記矩形フィンガーは、互いに異なる前記ワイヤーを介して互いに異なる前記パッドに接続されており、
前記複数のワイヤーは、
それぞれが一端と他端を有し、かつ
前記一端が前記矩形フィンガーの前記第2短辺よりも前記第1短辺に近い位置に接続され、前記他端が前記パッドの前記第2パッド短辺よりも前記第1パッド短辺に近い位置に接続された第1ワイヤーと、前記一端が前記矩形フィンガーの前記第1短辺よりも前記第2短辺に近い位置に接続され、前記他端が前記パッドの前記第1パッド短辺よりも前記第2パッド短辺に近い位置に接続された第2ワイヤーと、を含み、
前記第1ワイヤーと前記第2ワイヤーは前記辺に沿って隣り合って配置された半導体装置。 - 前記第1ワイヤーの長さは前記第2ワイヤーの長さより短い請求項1記載の半導体装置。
- 前記第1ワイヤーの前記他端は、前記パッドの前記第2パッド短辺よりも前記第1パッド短辺に近い位置に接続されており、
前記第1ワイヤーに接続する前記パッドの前記第1パッド短辺よりも前記第2パッド短辺に近い位置には、プローブ痕が形成されている請求項1または請求項2に記載の半導体装置。 - 平面視において、前記第1ワイヤーと前記第2ワイヤーは互いに重ならない請求項1乃至請求項3いずれか一項に記載の半導体装置。
- 前記第1ワイヤーと前記第2ワイヤーが前記基板の前記辺に沿って、交互に配置されている請求項1乃至請求項4いずれか一項に記載の半導体装置。
- 各前記矩形フィンガーの前記ワイヤーに接続する接続点は、前記基板の前記辺に沿って千鳥配置されている請求項1乃至請求項5いずれか一項に記載の半導体装置。
- 前記第1ワイヤーの前記一端は、第1接続点において前記矩形フィンガーと接続しており、
前記第1ワイヤーの前記他端は、第2接続点において前記パッドと接続しており、
前記第1短辺から前記第1接続点までの長さは、前記第1接続点から前記第2短辺までの長さよりも短く、
前記第1パッド短辺から前記第2接続点までの長さは、前記第2接続点から前記第2パッド短辺までの長さよりも短い請求項1乃至請求項6いずれか一項に記載の半導体装置。 - 前記第2ワイヤーの前記一端は、第3接続点において前記矩形フィンガーと接続しており、
前記第2ワイヤーの前記他端は、第4接続点において前記パッドと接続しており、
前記第1短辺から前記第3接続点までの長さは、前記第3接続点から前記第2短辺までの長さよりも長く、
前記第1パッド短辺から前記第4接続点までの長さは、前記第4接続点から前記第2パッド短辺までの長さよりも長い請求項1乃至請求項7いずれか一項に記載の半導体装置。 - 断面視において、前記基板の前記主面上から前記第2ワイヤーの高さが前記第1ワイヤーの高さより高い請求項1乃至請求項8いずれか一項に記載の半導体装置。
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