JP5526945B2 - 圧電組成物、圧電磁器、振動子、及び超音波モータ - Google Patents
圧電組成物、圧電磁器、振動子、及び超音波モータ Download PDFInfo
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- 239000000919 ceramic Substances 0.000 title claims description 72
- 239000000203 mixture Substances 0.000 title claims description 52
- 150000001875 compounds Chemical class 0.000 claims description 22
- 239000011572 manganese Substances 0.000 description 26
- 239000010936 titanium Substances 0.000 description 24
- 230000000052 comparative effect Effects 0.000 description 19
- 239000000843 powder Substances 0.000 description 10
- 239000002994 raw material Substances 0.000 description 10
- 229910052797 bismuth Inorganic materials 0.000 description 7
- 230000020169 heat generation Effects 0.000 description 7
- 230000010287 polarization Effects 0.000 description 7
- 229910052782 aluminium Inorganic materials 0.000 description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 6
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 239000000470 constituent Substances 0.000 description 5
- 230000005684 electric field Effects 0.000 description 5
- 230000007613 environmental effect Effects 0.000 description 5
- 238000011156 evaluation Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 238000000465 moulding Methods 0.000 description 5
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 4
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 4
- 239000010931 gold Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 238000002156 mixing Methods 0.000 description 4
- 238000006467 substitution reaction Methods 0.000 description 4
- 238000009694 cold isostatic pressing Methods 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 3
- 238000010304 firing Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 238000005245 sintering Methods 0.000 description 3
- 229910015902 Bi 2 O 3 Inorganic materials 0.000 description 2
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- 229910000416 bismuth oxide Inorganic materials 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- TYIXMATWDRGMPF-UHFFFAOYSA-N dibismuth;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Bi+3].[Bi+3] TYIXMATWDRGMPF-UHFFFAOYSA-N 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 235000019441 ethanol Nutrition 0.000 description 2
- 239000011888 foil Substances 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- BDAGIHXWWSANSR-NJFSPNSNSA-N hydroxyformaldehyde Chemical compound O[14CH]=O BDAGIHXWWSANSR-NJFSPNSNSA-N 0.000 description 2
- XMWCXZJXESXBBY-UHFFFAOYSA-L manganese(ii) carbonate Chemical compound [Mn+2].[O-]C([O-])=O XMWCXZJXESXBBY-UHFFFAOYSA-L 0.000 description 2
- 239000003960 organic solvent Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052573 porcelain Inorganic materials 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 239000006104 solid solution Substances 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 239000007858 starting material Substances 0.000 description 2
- 229910052712 strontium Inorganic materials 0.000 description 2
- 229910000018 strontium carbonate Inorganic materials 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 238000007088 Archimedes method Methods 0.000 description 1
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 description 1
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 1
- 101100513612 Microdochium nivale MnCO gene Proteins 0.000 description 1
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 150000001340 alkali metals Chemical class 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 1
- AYJRCSIUFZENHW-UHFFFAOYSA-L barium carbonate Chemical compound [Ba+2].[O-]C([O-])=O AYJRCSIUFZENHW-UHFFFAOYSA-L 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 238000001354 calcination Methods 0.000 description 1
- 239000011575 calcium Substances 0.000 description 1
- 229910000019 calcium carbonate Inorganic materials 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000002706 hydrostatic effect Effects 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 230000028161 membrane depolarization Effects 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000009774 resonance method Methods 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000012856 weighed raw material Substances 0.000 description 1
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- C04B35/46—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates
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- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
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- H02N2/001—Driving devices, e.g. vibrators
- H02N2/0045—Driving devices, e.g. vibrators using longitudinal or radial modes combined with torsion or shear modes
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Description
本実施形態の圧電組成物は、主成分として、一般式:Bi4Ti3O12−SrBi4Ti4O15で表される化合物を含み、副成分としてMn又はMn化合物を含み、Mn含有量が主成分量を基準として1.0質量%未満である。
本実施形態の圧電磁器は、上記のような組成物を用いて製造されるため、優れた機械的品質係数(Qm)を発揮し、振動時の速度が大きく、共振周波数変動の小さいこと、換言すれば圧電特性に優れることで、駆動時の発熱の少ない圧電磁器である。本実施形態の圧電磁器は、例えば、以下のようにして製造される。
本実施形態の振動子は、上述の圧電磁器を使用して得られる。その例として、2つのタイプの振動子について説明する。
図3は、本実施形態の超音波モータの一例を示す斜視図及びその分解斜視図である。超音波モータ30は、上述の振動子を使用して得られる。超音波モータ30は、ランジュバン振動子部分40と、当該部分40と連結するねじり結合子50とを備える。ランジュバン振動子部分40は、アルミシリンダ42、振動子44a、44b、スペーサー46、及びアルミホーン48により構成され、これらを図3に示すように順次連結してなる。
本実施形態及び比較例に係る振動子を作製し、評価した。なお、本実施形態によるものが実施例である。比較例は、従来例を示すものではない。
(実施例1〜5及び比較例1〜4)
出発原料として、市販の酸化ビスマス(Bi2O3)、酸化チタン(TiO2)、炭酸ストロンチウム(SrCO3)及び炭酸マンガン(MnCO3)の各粉末原料を準備した。これらの各粉末原料を、表1の組成となるように秤量した。なお、Mnの添加量は、主成分量を基準としたものである。
出発原料として、市販の酸化ビスマス(Bi2O3)、酸化チタン(TiO2)、炭酸ストロンチウム(SrCO3)、炭酸バリウム(BaCO3)、炭酸カルシウム(CaCO3)及び炭酸マンガン(MnCO3)の各粉末原料を準備した。これらの各粉末原料を、表2の組成となるように秤量した。なお、Mnの添加量は、主成分量を基準としたものである。
(実施例1〜5)
表1〜3から明らかなように、MnCO3を用いてMnを0.2質量%以上0.8質量%以下添加した、実施例1〜5に係る振動子については、機械的品質係数(Qm)が十分に高く、振動速度が概ね2m/s以上であり、さらに共振周波数振動が−0.007%未満に抑えられていることが判る。特に、Mnを0.2質量%添加した実施例1に係る振動子では、機械的品質係数(Qm)が5000近い値を示し、振動速度も高い値(2.4m/s)を示した。
また、SrBi4Ti4O15の20mol%又は40mol%をBaBi4Ti4O15に置換した実施例6、7に係る振動子においても、Mn含有量が同じであってBaによる置換がなされていない実施例1に係る振動子と同様に、全ての評価項目(機械的品質係数、振動速度、及び共振周波数変動)について優れた結果を示すことが判る。
これに対し、実施例1〜5の主成分のうちの一方Bi4Ti3O12のみを主成分とする比較例1に係る振動子については、圧電磁器の抵抗率が低く、分極処理時に電流が流れてしまい当該処理ができないことから、振動速度及び共振周波数変動について測定できなかった。また、実施例1〜5の主成分のうちの他方SrBi4Ti4O15のみを主成分とする比較例2に係る振動子については、比較的大きな機械的品質係数(Qm)(約2500)を示したが、振動子の密度も低く振動速度が非常に小さいため、振動速度及び共振周波数変動については正確に測定できなかった。
また、実施例1〜5の主成分においてMnを含まない比較例3に係る振動子については、機械的品質係数(Qm)が3000を上回り、比較例1、2に対し、比較例1、2の成分を併せ持ったことに対する効果が実証されているが、振動速度及び共振周波数変動については実施例1〜7と同等の結果が得られていないことが判る。また、実施例1〜5のMn添加量を1.0質量%に変更した、比較例4に係る振動子については、機械的品質係数(Qm)が2000未満となるばかりでなく、実施例1〜5に対し振動速度が大きく低下し、しかも共振周波数変動も大きくなることが判る。
加えて、実施例6、7のBaBi4Ti4O15置換量を60mol%に変更した、比較例5に係る振動子については、分極処理ができないことから、振動速度及び共振周波数変動について測定できなかった。また、実施例6における置換物質BaBi4Ti4O15をCaBi4Ti4O15に同量にて変更した、比較例6に係る振動子については、全ての評価項目(機械的品質係数、振動速度、及び共振周波数変動)について、実施例6に係る振動子に比べて優れた結果が得られておらず、Caを含む酸化物を使用することに効果はないことが判る。
12、22 圧電磁器
14、16、24、26 電極
30 超音波モータ
40 ランジュバン振動子部分
42 アルミシリンダ
44a、44b 振動子
46 スペーサー
48 アルミホーン
50 ねじり結合子
50X 本体
50Y つまみ部
50a、50b 足部
50c 切り欠き部
50d 上端面部
52 レーザー照射装置
54 ファンクションジェネレータ
56 パワーアンプ
62、64 ばね端子
66、68 アルミホイル
Claims (3)
- 主成分として、一般式:Bi4Ti3O12−SrBi4Ti4O15で表される化合物を含み、副成分としてMn又はMn化合物を含み、Mn含有量が主成分量を基準として1.0質量%未満であることを特徴とする圧電組成物を用いる圧電磁器と電極とを備え、機械的品質係数が1000以上であることを特徴とする振動子。
- 前記SrBi4Ti4O15の40mol%以下を、BaBi4Ti4O15で置換した前記圧電組成物を用いる圧電磁器と電極とを備えることを特徴とする請求項1記載の振動子。
- 請求項1または請求項2に記載の振動子を備えることを特徴とする超音波モータ。
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