JP5511813B2 - 静電放電に対する保護を有する放射放出半導体チップおよびその製造方法 - Google Patents

静電放電に対する保護を有する放射放出半導体チップおよびその製造方法 Download PDF

Info

Publication number
JP5511813B2
JP5511813B2 JP2011519023A JP2011519023A JP5511813B2 JP 5511813 B2 JP5511813 B2 JP 5511813B2 JP 2011519023 A JP2011519023 A JP 2011519023A JP 2011519023 A JP2011519023 A JP 2011519023A JP 5511813 B2 JP5511813 B2 JP 5511813B2
Authority
JP
Japan
Prior art keywords
semiconductor
layer
radiation
semiconductor layer
semiconductor chip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2011519023A
Other languages
English (en)
Japanese (ja)
Other versions
JP2011528855A (ja
JP2011528855A5 (enExample
Inventor
カール エンゲル
ベルトホールド ハーン
クラウス シュトロイベル
マルクス クライン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ams Osram International GmbH
Original Assignee
Osram Opto Semiconductors GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Osram Opto Semiconductors GmbH filed Critical Osram Opto Semiconductors GmbH
Publication of JP2011528855A publication Critical patent/JP2011528855A/ja
Publication of JP2011528855A5 publication Critical patent/JP2011528855A5/ja
Application granted granted Critical
Publication of JP5511813B2 publication Critical patent/JP5511813B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H29/00Integrated devices, or assemblies of multiple devices, comprising at least one light-emitting semiconductor element covered by group H10H20/00
    • H10H29/10Integrated devices comprising at least one light-emitting semiconductor component covered by group H10H20/00
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D89/00Aspects of integrated devices not covered by groups H10D84/00 - H10D88/00
    • H10D89/60Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD]
    • H10D89/601Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD] for devices having insulated gate electrodes, e.g. for IGFETs or IGBTs
    • H10D89/611Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD] for devices having insulated gate electrodes, e.g. for IGFETs or IGBTs using diodes as protective elements
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80Constructional details
    • H10H20/81Bodies
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80Constructional details
    • H10H20/83Electrodes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80Constructional details
    • H10H20/83Electrodes
    • H10H20/831Electrodes characterised by their shape
    • H10H20/8312Electrodes characterised by their shape extending at least partially through the bodies
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80Constructional details
    • H10H20/85Packages
    • H10H20/857Interconnections, e.g. lead-frames, bond wires or solder balls
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Led Devices (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Semiconductor Lasers (AREA)
JP2011519023A 2008-07-24 2009-06-25 静電放電に対する保護を有する放射放出半導体チップおよびその製造方法 Active JP5511813B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102008034560.1 2008-07-24
DE102008034560.1A DE102008034560B4 (de) 2008-07-24 2008-07-24 Strahlungsemittierender Halbleiterchip und Verfahren zur Herstellung eines strahlungsemittierenden Halbleiterchips
PCT/DE2009/000885 WO2010009690A1 (de) 2008-07-24 2009-06-25 Strahlungemittierender halbleiterchip mit schutz gegen elektrostatische entladungen und entsprechendes herstellungsverfahren

Publications (3)

Publication Number Publication Date
JP2011528855A JP2011528855A (ja) 2011-11-24
JP2011528855A5 JP2011528855A5 (enExample) 2012-08-09
JP5511813B2 true JP5511813B2 (ja) 2014-06-04

Family

ID=41254639

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011519023A Active JP5511813B2 (ja) 2008-07-24 2009-06-25 静電放電に対する保護を有する放射放出半導体チップおよびその製造方法

Country Status (7)

Country Link
US (1) US8710537B2 (enExample)
EP (2) EP3128555B1 (enExample)
JP (1) JP5511813B2 (enExample)
KR (2) KR101632082B1 (enExample)
CN (1) CN101971344B (enExample)
DE (1) DE102008034560B4 (enExample)
WO (1) WO2010009690A1 (enExample)

Families Citing this family (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008034560B4 (de) 2008-07-24 2022-10-27 OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung Strahlungsemittierender Halbleiterchip und Verfahren zur Herstellung eines strahlungsemittierenden Halbleiterchips
DE102009006177A1 (de) * 2008-11-28 2010-06-02 Osram Opto Semiconductors Gmbh Strahlungsemittierender Halbleiterchip
DE102009032486A1 (de) 2009-07-09 2011-01-13 Osram Opto Semiconductors Gmbh Optoelektronisches Bauelement
DE102010013494A1 (de) 2010-03-31 2011-10-06 Osram Opto Semiconductors Gmbh Optoelektronischer Halbleiterchip
DE102010027679A1 (de) 2010-07-20 2012-01-26 Osram Opto Semiconductors Gmbh Optoelektronisches Bauelement
KR101692410B1 (ko) * 2010-07-26 2017-01-03 삼성전자 주식회사 발광소자 및 그 제조방법
KR101154320B1 (ko) * 2010-12-20 2012-06-13 엘지이노텍 주식회사 발광소자, 발광소자 패키지 및 이를 포함하는 조명 장치
TWI435477B (zh) * 2010-12-29 2014-04-21 Lextar Electronics Corp 高亮度發光二極體
DE102011011378B4 (de) * 2011-02-16 2025-10-30 OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung Halbleiterchip und Verfahren zur Herstellung von Halbleiterchips
TW201240146A (en) * 2011-03-16 2012-10-01 Hon Hai Prec Ind Co Ltd Light-emitting semiconductor chip
TW201240147A (en) * 2011-03-22 2012-10-01 Hon Hai Prec Ind Co Ltd Light-emitting semiconductor chip
CN102694098A (zh) * 2011-03-25 2012-09-26 鸿富锦精密工业(深圳)有限公司 半导体发光芯片
JP5887638B2 (ja) * 2011-05-30 2016-03-16 億光電子工業股▲ふん▼有限公司Everlight Electronics Co.,Ltd. 発光ダイオード
KR101973608B1 (ko) * 2011-06-30 2019-04-29 엘지이노텍 주식회사 발광소자
US9490239B2 (en) 2011-08-31 2016-11-08 Micron Technology, Inc. Solid state transducers with state detection, and associated systems and methods
US8809897B2 (en) 2011-08-31 2014-08-19 Micron Technology, Inc. Solid state transducer devices, including devices having integrated electrostatic discharge protection, and associated systems and methods
KR101868537B1 (ko) * 2011-11-07 2018-06-19 엘지이노텍 주식회사 발광소자 및 이를 포함하는 발광 소자 패키지
CN102522400B (zh) * 2011-11-30 2014-11-26 晶科电子(广州)有限公司 一种防静电损伤的垂直发光器件及其制造方法
DE102011056888A1 (de) 2011-12-22 2013-06-27 Osram Opto Semiconductors Gmbh Anzeigevorrichtung und Verfahren zur Herstellung einer Anzeigevorrichtung
DE102012105176B4 (de) * 2012-06-14 2021-08-12 OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung Optoelektronischer Halbleiterchip
DE102012108627B4 (de) * 2012-09-14 2021-06-10 OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung Optoelektronische Halbleitervorrichtung und Trägerverbund
TWI661578B (zh) 2013-06-20 2019-06-01 Epistar Corporation 發光裝置及發光陣列
TWI536605B (zh) * 2013-08-20 2016-06-01 隆達電子股份有限公司 發光二極體
DE102013112881A1 (de) * 2013-11-21 2015-05-21 Osram Opto Semiconductors Gmbh Optoelektronischer Halbleiterchip
JP6351531B2 (ja) 2015-03-23 2018-07-04 株式会社東芝 半導体発光素子
DE102015108532A1 (de) * 2015-05-29 2016-12-01 Osram Opto Semiconductors Gmbh Anzeigevorrichtung mit einer Mehrzahl getrennt voneinander betreibbarer Bildpunkte
DE102015111485A1 (de) 2015-07-15 2017-01-19 Osram Opto Semiconductors Gmbh Optoelektronisches Halbleiterbauelement
DE102015111487A1 (de) 2015-07-15 2017-01-19 Osram Opto Semiconductors Gmbh Verfahren zur Herstellung eines optoelektronischen Halbleiterchips und optoelektronischer Halbleiterchip
DE102017104735B4 (de) 2017-03-07 2021-09-02 OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung Strahlungsemittierender Halbleiterchip
DE102017112223A1 (de) 2017-06-02 2018-12-06 Osram Opto Semiconductors Gmbh Halbleiterlaser-Bauteil und Verfahren zur Herstellung eines Halbleiterlaser-Bauteils
DE102018119688B4 (de) * 2018-08-14 2024-06-27 OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung Optoelektronisches Halbleiterbauelement mit einem ersten Kontaktelement, welches einen ersten und einen zweiten Abschnitt aufweist sowie Verfahren zur Herstellung des optoelektronischen Halbleiterbauelements
WO2021038635A1 (ja) * 2019-08-23 2021-03-04 シャープ株式会社 発光素子、表示装置、および発光素子の製造方法
JP7761771B2 (ja) * 2022-02-08 2025-10-28 エイエムエス-オスラム インターナショナル ゲーエムベーハー レーザダイオード部品
EP4328985A1 (en) 2022-08-24 2024-02-28 Albert-Ludwigs-Universität Freiburg Micro led, neural implant, and method of fabricating a micro led

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19945134C2 (de) 1999-09-21 2003-08-14 Osram Opto Semiconductors Gmbh Lichtemittierendes Halbleiterbauelement hoher ESD-Festigkeit und Verfahren zu seiner Herstellung
TW492202B (en) 2001-06-05 2002-06-21 South Epitaxy Corp Structure of III-V light emitting diode (LED) arranged in flip chip configuration having structure for preventing electrostatic discharge
DE10147886B4 (de) 2001-09-28 2006-07-13 Osram Opto Semiconductors Gmbh Lumineszenzdiode mit vergrabenem Kontakt und Herstellungsverfahren
TWI220578B (en) 2003-09-16 2004-08-21 Opto Tech Corp Light-emitting device capable of increasing light-emitting active region
DE102004005269B4 (de) 2003-11-28 2005-09-29 Osram Opto Semiconductors Gmbh Lichtemittierendes Halbleiterbauelement mit einer Schutzdiode
TWI223457B (en) 2004-01-20 2004-11-01 Opto Tech Corp Light-emitting device to increase the area of active region
US7064353B2 (en) 2004-05-26 2006-06-20 Philips Lumileds Lighting Company, Llc LED chip with integrated fast switching diode for ESD protection
CN100386891C (zh) * 2004-07-02 2008-05-07 北京工业大学 高抗静电高效发光二极管及制作方法
JP2006086300A (ja) 2004-09-15 2006-03-30 Sanken Electric Co Ltd 保護素子を有する半導体発光装置及びその製造方法
KR100576872B1 (ko) 2004-09-17 2006-05-10 삼성전기주식회사 정전기 방전 방지기능을 갖는 질화물 반도체 발광소자
TWI244748B (en) * 2004-10-08 2005-12-01 Epistar Corp A light-emitting device with a protecting structure
KR20060062715A (ko) * 2004-12-06 2006-06-12 삼성전기주식회사 정전방전 보호 다이오드를 구비한 GaN 계열 반도체발광 소자
US7754507B2 (en) * 2005-06-09 2010-07-13 Philips Lumileds Lighting Company, Llc Method of removing the growth substrate of a semiconductor light emitting device
TWI257186B (en) 2005-09-29 2006-06-21 Formosa Epitaxy Inc Light-emitting diode chip
US7994514B2 (en) 2006-04-21 2011-08-09 Koninklijke Philips Electronics N.V. Semiconductor light emitting device with integrated electronic components
JP5044986B2 (ja) 2006-05-17 2012-10-10 サンケン電気株式会社 半導体発光装置
CN100530622C (zh) 2007-05-14 2009-08-19 金芃 垂直结构的半导体芯片或器件及制造方法
DE102008034560B4 (de) 2008-07-24 2022-10-27 OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung Strahlungsemittierender Halbleiterchip und Verfahren zur Herstellung eines strahlungsemittierenden Halbleiterchips

Also Published As

Publication number Publication date
JP2011528855A (ja) 2011-11-24
CN101971344A (zh) 2011-02-09
EP3128555A1 (de) 2017-02-08
WO2010009690A1 (de) 2010-01-28
US20120018763A1 (en) 2012-01-26
EP2304799A1 (de) 2011-04-06
EP2304799B1 (de) 2016-10-26
US8710537B2 (en) 2014-04-29
KR101710849B1 (ko) 2017-02-27
EP3128555B1 (de) 2021-08-18
DE102008034560B4 (de) 2022-10-27
KR20110031897A (ko) 2011-03-29
DE102008034560A1 (de) 2010-02-04
KR101632082B1 (ko) 2016-06-20
KR20160075810A (ko) 2016-06-29
CN101971344B (zh) 2012-10-17

Similar Documents

Publication Publication Date Title
JP5511813B2 (ja) 静電放電に対する保護を有する放射放出半導体チップおよびその製造方法
JP5890498B2 (ja) 放射放出半導体チップ
JP5479461B2 (ja) 放射を放出する半導体チップ
JP6104158B2 (ja) オプトエレクトロニクス半導体チップ、およびオプトエレクトロニクス半導体チップの製造方法
JP2013511142A (ja) 保護ダイオード構造を備える薄膜半導体デバイス、および薄膜半導体デバイスを製造する方法
JP5813138B2 (ja) キャリア基板、および半導体チップの製造方法
TWI639250B (zh) 具有反射式層序列的發光二極體晶片
US20170018694A1 (en) Light emitting element and light emitting device
KR20150062179A (ko) 확장된 반사층을 가진 발광 다이오드
JP2005276900A (ja) 発光素子
KR20100067441A (ko) 정전기 보호 기능을 갖는 수직구조 반도체 발광소자

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20120619

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20120619

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20130820

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20130821

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20131121

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20140220

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20140311

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20140325

R150 Certificate of patent or registration of utility model

Ref document number: 5511813

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250