JP5482250B2 - 振動体および振動デバイス - Google Patents

振動体および振動デバイス Download PDF

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Publication number
JP5482250B2
JP5482250B2 JP2010020945A JP2010020945A JP5482250B2 JP 5482250 B2 JP5482250 B2 JP 5482250B2 JP 2010020945 A JP2010020945 A JP 2010020945A JP 2010020945 A JP2010020945 A JP 2010020945A JP 5482250 B2 JP5482250 B2 JP 5482250B2
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JP
Japan
Prior art keywords
vibrating
base
vibration
vibrating body
arms
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2010020945A
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English (en)
Japanese (ja)
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JP2011160250A5 (enExample
JP2011160250A (ja
Inventor
明法 山田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2010020945A priority Critical patent/JP5482250B2/ja
Priority to US13/005,798 priority patent/US8310317B2/en
Priority to CN201110031419.XA priority patent/CN102142827B/zh
Publication of JP2011160250A publication Critical patent/JP2011160250A/ja
Priority to US13/645,095 priority patent/US8810327B2/en
Publication of JP2011160250A5 publication Critical patent/JP2011160250A5/ja
Application granted granted Critical
Publication of JP5482250B2 publication Critical patent/JP5482250B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
    • H03H9/1021—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device the BAW device being of the cantilever type
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
    • H03B5/30—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
    • H03B5/30—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator
    • H03B5/32—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator being a piezoelectric resonator
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/0538—Constructional combinations of supports or holders with electromechanical or other electronic elements
    • H03H9/0547—Constructional combinations of supports or holders with electromechanical or other electronic elements consisting of a vertical arrangement
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/21—Crystal tuning forks

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2010020945A 2010-02-02 2010-02-02 振動体および振動デバイス Expired - Fee Related JP5482250B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2010020945A JP5482250B2 (ja) 2010-02-02 2010-02-02 振動体および振動デバイス
US13/005,798 US8310317B2 (en) 2010-02-02 2011-01-13 Vibrating member, vibrating device, and electronic apparatus
CN201110031419.XA CN102142827B (zh) 2010-02-02 2011-01-26 振动体、振动装置以及电子设备
US13/645,095 US8810327B2 (en) 2010-02-02 2012-10-04 Vibrating member, vibrating device, and electronic apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010020945A JP5482250B2 (ja) 2010-02-02 2010-02-02 振動体および振動デバイス

Publications (3)

Publication Number Publication Date
JP2011160250A JP2011160250A (ja) 2011-08-18
JP2011160250A5 JP2011160250A5 (enExample) 2013-02-14
JP5482250B2 true JP5482250B2 (ja) 2014-05-07

Family

ID=44341096

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010020945A Expired - Fee Related JP5482250B2 (ja) 2010-02-02 2010-02-02 振動体および振動デバイス

Country Status (3)

Country Link
US (2) US8310317B2 (enExample)
JP (1) JP5482250B2 (enExample)
CN (1) CN102142827B (enExample)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5482250B2 (ja) * 2010-02-02 2014-05-07 セイコーエプソン株式会社 振動体および振動デバイス
CN102629861A (zh) 2011-02-02 2012-08-08 精工爱普生株式会社 振动片、振子、振荡器以及电子设备
JP5685962B2 (ja) 2011-02-02 2015-03-18 セイコーエプソン株式会社 振動片、振動子、発振器及び電子機器
JP5772286B2 (ja) * 2011-06-24 2015-09-02 セイコーエプソン株式会社 屈曲振動片及び電子機器
JP5806547B2 (ja) * 2011-08-05 2015-11-10 日本電波工業株式会社 圧電デバイス及び圧電デバイスの製造方法
EP2613440B1 (en) * 2012-01-09 2019-07-10 Micro Crystal AG Small-sized piezoelectric tuning-fork resonator
JP2013192013A (ja) * 2012-03-13 2013-09-26 Seiko Epson Corp 振動素子、振動デバイスおよび電子機器
JP6127377B2 (ja) * 2012-04-10 2017-05-17 セイコーエプソン株式会社 ジャイロセンサーおよび電子機器
JP6094083B2 (ja) * 2012-07-26 2017-03-15 セイコーエプソン株式会社 振動片、振動子、発振器および電子機器
JP2014086933A (ja) * 2012-10-25 2014-05-12 Seiko Epson Corp 振動片、振動子、発振器、電子機器及び移動体
JP2014165573A (ja) * 2013-02-22 2014-09-08 Seiko Epson Corp 振動片、振動子、電子デバイス、電子機器、および移動体
CN105379115B (zh) 2013-05-13 2017-10-13 株式会社村田制作所 振动装置
SG11201508861WA (en) 2013-05-13 2015-11-27 Murata Manufacturing Co Vibrating device
JP6209886B2 (ja) * 2013-07-18 2017-10-11 セイコーエプソン株式会社 振動片、振動子、発振器、電子機器および移動体
JP6482169B2 (ja) 2013-07-19 2019-03-13 セイコーエプソン株式会社 振動片、振動子、発振器、電子機器及び移動体
KR101569007B1 (ko) * 2013-09-23 2015-11-13 삼성전기주식회사 진동발생장치
WO2016052260A1 (ja) 2014-09-29 2016-04-07 株式会社村田製作所 共振装置
JP6536685B2 (ja) * 2015-10-13 2019-07-03 株式会社村田製作所 共振子及び共振装置
WO2017090380A1 (ja) * 2015-11-24 2017-06-01 株式会社村田製作所 共振装置及びその製造方法
WO2017110126A1 (ja) * 2015-12-21 2017-06-29 株式会社村田製作所 共振子及び共振装置
WO2017195416A1 (ja) * 2016-05-10 2017-11-16 株式会社村田製作所 共振子及び共振装置
JP6957921B2 (ja) * 2017-03-23 2021-11-02 セイコーエプソン株式会社 振動デバイス、角速度センサー、電子機器および移動体
US20210254976A1 (en) * 2018-06-13 2021-08-19 Kyocera Corporation Sensor element and angular velocity sensor
CN115940876A (zh) * 2022-10-11 2023-04-07 泰晶科技股份有限公司 一种微型石英音叉晶片

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5437488A (en) * 1977-07-20 1979-03-19 Seiko Epson Corp Tuning fork type crystal oscillator
JPS5866411A (ja) * 1981-10-16 1983-04-20 Seiko Instr & Electronics Ltd 音又型水晶振動子
JPS58105612A (ja) * 1981-12-17 1983-06-23 Seiko Instr & Electronics Ltd 音叉型振動子
US6065339A (en) * 1996-03-29 2000-05-23 Ngk Insulators, Ltd. Vibration gyro sensor, combined sensor and method for producing vibration gyro sensor
JP2001196891A (ja) * 2000-01-07 2001-07-19 Citizen Watch Co Ltd 振動子
JP3972790B2 (ja) * 2001-11-27 2007-09-05 松下電器産業株式会社 薄膜微小機械式共振子および薄膜微小機械式共振子ジャイロ
JP4206975B2 (ja) * 2003-09-01 2009-01-14 セイコーエプソン株式会社 振動子、電子機器および振動子の周波数調整方法
JP2006058101A (ja) * 2004-08-19 2006-03-02 Seiko Epson Corp 振動片、振動子および応用機器
DE602004027033D1 (de) * 2004-09-03 2010-06-17 Eta Sa Mft Horlogere Suisse Quartzresonator mit sehr kleinen Abmessungen
JP4301200B2 (ja) * 2004-10-20 2009-07-22 セイコーエプソン株式会社 圧電振動片および圧電デバイス
JP2006208124A (ja) * 2005-01-27 2006-08-10 Citizen Watch Co Ltd 振動体デバイス及び振動体デバイスの製造方法
JP2007163200A (ja) * 2005-12-12 2007-06-28 Epson Toyocom Corp 振動片、角速度センサ
JP2008166903A (ja) 2006-12-27 2008-07-17 Epson Toyocom Corp 輪郭振動子
JP5245358B2 (ja) * 2007-02-14 2013-07-24 セイコーエプソン株式会社 圧電振動体、圧電アクチュエータ、および携帯機器
JP2008224627A (ja) * 2007-03-15 2008-09-25 Sony Corp 角速度センサ、角速度センサの製造方法及び電子機器
JP2008228195A (ja) 2007-03-15 2008-09-25 Epson Toyocom Corp 輪郭滑り振動片、輪郭滑り振動デバイスおよび輪郭滑り振動片の製造方法
JP2008249489A (ja) * 2007-03-30 2008-10-16 Tdk Corp 角速度センサ素子および角速度センサ装置
JP5067033B2 (ja) * 2007-06-20 2012-11-07 セイコーエプソン株式会社 音叉型振動子、発振器
JP5071058B2 (ja) * 2007-11-07 2012-11-14 セイコーエプソン株式会社 圧電振動片
JP2010071758A (ja) * 2008-09-17 2010-04-02 Sony Corp 角速度センサ素子、角速度センサ及び電子機器
JP5454134B2 (ja) 2008-12-27 2014-03-26 セイコーエプソン株式会社 振動片、振動子、センサー及び電子部品
JP5482250B2 (ja) * 2010-02-02 2014-05-07 セイコーエプソン株式会社 振動体および振動デバイス

Also Published As

Publication number Publication date
CN102142827A (zh) 2011-08-03
JP2011160250A (ja) 2011-08-18
US8310317B2 (en) 2012-11-13
US20130038171A1 (en) 2013-02-14
CN102142827B (zh) 2015-01-07
US20110187470A1 (en) 2011-08-04
US8810327B2 (en) 2014-08-19

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