JP5479236B2 - ロータリーエンコーダ - Google Patents

ロータリーエンコーダ Download PDF

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Publication number
JP5479236B2
JP5479236B2 JP2010136294A JP2010136294A JP5479236B2 JP 5479236 B2 JP5479236 B2 JP 5479236B2 JP 2010136294 A JP2010136294 A JP 2010136294A JP 2010136294 A JP2010136294 A JP 2010136294A JP 5479236 B2 JP5479236 B2 JP 5479236B2
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JP
Japan
Prior art keywords
pattern
detection
sensor unit
spiral
signal
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Expired - Fee Related
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JP2010136294A
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English (en)
Japanese (ja)
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JP2012002592A5 (enExample
JP2012002592A (ja
Inventor
千裕 名倉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
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Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2010136294A priority Critical patent/JP5479236B2/ja
Priority to US13/158,523 priority patent/US8497469B2/en
Publication of JP2012002592A publication Critical patent/JP2012002592A/ja
Publication of JP2012002592A5 publication Critical patent/JP2012002592A5/ja
Application granted granted Critical
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/3473—Circular or rotary encoders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D2205/00—Indexing scheme relating to details of means for transferring or converting the output of a sensing member
    • G01D2205/20—Detecting rotary movement
    • G01D2205/26—Details of encoders or position sensors specially adapted to detect rotation beyond a full turn of 360°, e.g. multi-rotation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D2205/00—Indexing scheme relating to details of means for transferring or converting the output of a sensing member
    • G01D2205/70—Position sensors comprising a moving target with particular shapes, e.g. of soft magnetic targets
    • G01D2205/77—Specific profiles
    • G01D2205/773—Spiral profiles

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
JP2010136294A 2010-06-15 2010-06-15 ロータリーエンコーダ Expired - Fee Related JP5479236B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2010136294A JP5479236B2 (ja) 2010-06-15 2010-06-15 ロータリーエンコーダ
US13/158,523 US8497469B2 (en) 2010-06-15 2011-06-13 Rotary encoder that detects rotation angle

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010136294A JP5479236B2 (ja) 2010-06-15 2010-06-15 ロータリーエンコーダ

Publications (3)

Publication Number Publication Date
JP2012002592A JP2012002592A (ja) 2012-01-05
JP2012002592A5 JP2012002592A5 (enExample) 2013-07-25
JP5479236B2 true JP5479236B2 (ja) 2014-04-23

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010136294A Expired - Fee Related JP5479236B2 (ja) 2010-06-15 2010-06-15 ロータリーエンコーダ

Country Status (2)

Country Link
US (1) US8497469B2 (enExample)
JP (1) JP5479236B2 (enExample)

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* Cited by examiner, † Cited by third party
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JP5479236B2 (ja) * 2010-06-15 2014-04-23 キヤノン株式会社 ロータリーエンコーダ
JP5574899B2 (ja) * 2010-09-24 2014-08-20 キヤノン株式会社 ロータリーエンコーダ及びこれを備えた光学機器
US8835832B2 (en) * 2012-01-17 2014-09-16 Avago Technologies General Ip (Singapore) Pte. Ltd. Optical encoder with signal offset correction system
CN102589579B (zh) * 2012-02-22 2015-07-01 三一重工股份有限公司 旋转编码器和测量角度的方法
JP6147038B2 (ja) * 2013-03-15 2017-06-14 キヤノン株式会社 位置検出装置、レンズ装置、撮像システム、および、工作装置
JP6421410B2 (ja) * 2013-11-28 2018-11-14 株式会社ニコン エンコーダ用スケール、エンコーダ、駆動装置、及びステージ装置
US10119842B1 (en) * 2014-08-05 2018-11-06 X Development Llc Encoder design and use
US9851225B2 (en) * 2015-05-06 2017-12-26 Rockwell Automation Technologies, Inc. Nonvolatile multitum rotation sensor with magnetic particle following a spiral track
WO2017014189A1 (ja) * 2015-07-17 2017-01-26 株式会社ニコン エンコーダ装置、駆動装置、ステージ装置、ロボット装置、回転情報取得方法及び回転情報取得プログラム
JP2018059714A (ja) * 2016-09-30 2018-04-12 キヤノン株式会社 偏芯算出方法、ロータリエンコーダ、ロボットアーム及びロボット装置
CN108426593A (zh) * 2017-02-15 2018-08-21 何锋 一种高响应高分辨率双编码系统绝对值编码器
EP3428751A1 (en) * 2017-07-12 2019-01-16 Koninklijke Philips N.V. Measuring position of motion stage
JP6959835B2 (ja) * 2017-11-06 2021-11-05 株式会社東海理化電機製作所 回転検出装置
JP7075784B2 (ja) * 2018-03-08 2022-05-26 Dmg森精機株式会社 エンコーダ
US10969246B2 (en) * 2018-07-27 2021-04-06 Samsung Electro-Mechanics Co., Ltd. Apparatus for sensing rotating device
JP6924419B2 (ja) 2019-09-06 2021-08-25 株式会社安川電機 エンコーダ、サーボモータ、サーボシステム
JP2021076587A (ja) * 2019-10-31 2021-05-20 株式会社ニコン エンコーダ装置、その使用方法、その位置決め方法、及び位置検出方法
JP7284923B2 (ja) * 2021-04-09 2023-06-01 株式会社安川電機 エンコーダ、サーボモータ、サーボシステム
JP2023043487A (ja) * 2021-09-16 2023-03-29 株式会社ミツトヨ 角度検出器および位置測定装置

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JPS62105012A (ja) * 1985-10-31 1987-05-15 Ebara Res Co Ltd 回転検出器付軸受装置
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JPH0769190B2 (ja) 1987-08-12 1995-07-26 オムロン株式会社 ロ−タリィ・エンコ−ダ
US5214426A (en) * 1988-07-12 1993-05-25 Furuno Electric Company, Limited Rotary encoder having absolute angle patterns and relative angle patterns
JP2754635B2 (ja) 1988-12-22 1998-05-20 株式会社ニコン アブソリュートエンコーダ
US5017776A (en) * 1989-03-10 1991-05-21 Hewlett-Packard Company Apparatus for and methods of optical encoding having spiral shaped light modulator
JPH04208810A (ja) * 1990-12-03 1992-07-30 Omron Corp 変位信号出力装置
JPH06341858A (ja) * 1993-06-02 1994-12-13 Copal Co Ltd 光学式変位検出装置
US5691646A (en) * 1994-12-07 1997-11-25 Mitutoya Corporation Capacitance-type displacement measuring device with electrodes having spiral patterns
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JPH11108698A (ja) * 1997-09-30 1999-04-23 Ishikawajima Harima Heavy Ind Co Ltd 光学式位置検出装置の検出器
DE19820014A1 (de) * 1998-05-06 1999-11-11 Heidenhain Gmbh Dr Johannes Multiturn-Codedrehgeber
DE19944004A1 (de) * 1999-09-14 2001-03-15 Kostal Leopold Gmbh & Co Kg Optoelektronischer Drehwinkelsensor
JP4724282B2 (ja) * 1999-10-12 2011-07-13 キヤノン株式会社 回転角検出装置
JP4433240B2 (ja) * 2000-03-16 2010-03-17 株式会社安川電機 ロータリエンコーダおよびその偏心補正方法
JP4768164B2 (ja) * 2001-08-10 2011-09-07 株式会社リコー ロータリーエンコーダ装置
SE528486C2 (sv) * 2004-05-24 2006-11-28 Audiodev Ab Kvalitetstestningsmetod för optiska databärare
US7298678B2 (en) * 2004-08-19 2007-11-20 Seagate Technology Llc Rotating recorder with dual encoder arrangement having eccentricity compensation
JP4908764B2 (ja) 2005-02-04 2012-04-04 キヤノン株式会社 光学式エンコーダ
JP4504331B2 (ja) * 2006-04-27 2010-07-14 東芝ストレージデバイス株式会社 ヘッド位置制御方法、ヘッド位置制御装置及びディスク装置
JP5198761B2 (ja) * 2006-12-11 2013-05-15 株式会社ミツトヨ 回転変位補正装置、および、変位検出装置
US7875844B2 (en) * 2008-09-02 2011-01-25 Delta Electronics, Inc. Absolute-type encoder and method for detecting absolute position
JP5170046B2 (ja) * 2009-09-18 2013-03-27 株式会社安川電機 ロータリエンコーダ、ロータリモータ、ロータリモータシステム、ディスク及びロータリエンコーダの製造方法
JP5436578B2 (ja) * 2009-12-17 2014-03-05 キヤノン株式会社 ロータリエンコーダ及びそれを有する回転機構
US8309906B2 (en) * 2010-06-10 2012-11-13 Mitutoyo Corporation Absolute optical encoder with long range intensity modulation on scale
JP5479236B2 (ja) * 2010-06-15 2014-04-23 キヤノン株式会社 ロータリーエンコーダ
JP5574899B2 (ja) * 2010-09-24 2014-08-20 キヤノン株式会社 ロータリーエンコーダ及びこれを備えた光学機器

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Publication number Publication date
US8497469B2 (en) 2013-07-30
JP2012002592A (ja) 2012-01-05
US20110303831A1 (en) 2011-12-15

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