WO2017014189A1 - エンコーダ装置、駆動装置、ステージ装置、ロボット装置、回転情報取得方法及び回転情報取得プログラム - Google Patents
エンコーダ装置、駆動装置、ステージ装置、ロボット装置、回転情報取得方法及び回転情報取得プログラム Download PDFInfo
- Publication number
- WO2017014189A1 WO2017014189A1 PCT/JP2016/071006 JP2016071006W WO2017014189A1 WO 2017014189 A1 WO2017014189 A1 WO 2017014189A1 JP 2016071006 W JP2016071006 W JP 2016071006W WO 2017014189 A1 WO2017014189 A1 WO 2017014189A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- rotation
- pattern
- information
- unit
- scale
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims description 12
- 238000001514 detection method Methods 0.000 claims abstract description 177
- 238000010586 diagram Methods 0.000 description 12
- 230000005540 biological transmission Effects 0.000 description 6
- 230000008859 change Effects 0.000 description 6
- 238000005286 illumination Methods 0.000 description 6
- 239000003638 chemical reducing agent Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/3473—Circular or rotary encoders
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J18/00—Arms
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/24471—Error correction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34776—Absolute encoders with analogue or digital scales
- G01D5/34784—Absolute encoders with analogue or digital scales with only analogue scales or both analogue and incremental scales
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S901/00—Robots
- Y10S901/19—Drive system for arm
- Y10S901/23—Electric motor
Definitions
- the present invention relates to an encoder device, a drive device, a stage device, a robot device, a rotation information acquisition method, and a rotation information acquisition program.
- the encoder device that detects rotation information is mounted on various devices such as a drive device (eg, a motor device) (see, for example, Patent Document 1 below).
- a drive device eg, a motor device
- the encoder device detects light from a scale provided on the rotation shaft, and acquires rotation information.
- the encoder device can acquire rotation information with high accuracy.
- the accuracy of the rotation information acquired may be deteriorated due to the positional deviation between the rotation shaft and the scale.
- the relative position between the scale having the first pattern and the second pattern and the first pattern and the second pattern changes with the rotation of the rotation shaft
- a detection unit for detecting one pattern and a second pattern
- a rotation information calculation unit for calculating rotation information using a detection result of the detection unit
- a storage unit for storing eccentric information of the rotation axis and the scale
- storage A correction unit that corrects the rotation information based on the eccentricity information and the detection result output from the unit, and the storage unit detects a signal corresponding to the first detection result when the detection unit detects the first pattern
- a detection An encoder device is provided that stores eccentricity information of a scale calculated based on a phase difference from a signal corresponding to a second detection result obtained when the unit detects a second pattern.
- the relative position between the scale having the first pattern and the second pattern and the first pattern and the second pattern changes with the rotation of the rotation shaft
- a detection unit that detects one pattern and a second pattern
- a rotation information calculation unit that calculates rotation information of the rotation shaft using a detection result of the detection unit, and a first detection result in which the detection unit detects the first pattern
- An eccentricity information calculating unit that calculates eccentricity information between the rotation axis and the scale based on a phase difference between the corresponding signal and a signal according to the second detection result of the detection unit detecting the second pattern
- An encoder device is provided that includes a correction unit that corrects rotation information based on a detection result.
- the drive unit is controlled using the encoder device according to the first or second aspect, the drive unit that supplies driving force to the rotation shaft, and the rotation information corrected by the correction unit. And a drive unit including the control unit.
- a stage apparatus including a moving body and the driving apparatus according to the third aspect that moves the moving body.
- a robot apparatus including the driving device according to the third aspect and an arm moved by the driving device.
- a rotation information acquisition method for acquiring rotation information of a rotating shaft using an encoder device including a detection unit that detects one pattern and a second pattern, wherein the detection unit detects the first pattern and the second pattern.
- the rotation information of the rotating shaft is calculated using the detection result of the detection unit, the signal corresponding to the first detection result when the detection unit detects the first pattern, and the detection unit detects the second pattern Calculating eccentric information between the rotation axis and the scale based on the phase difference with the signal corresponding to the second detection result, and correcting the rotation information based on the eccentric information and the detection result.
- Rotation Acquisition method is provided.
- the relative position between the scale having the first pattern and the second pattern and the first pattern and the second pattern changes with the rotation of the rotation shaft
- a rotation information acquisition program for acquiring rotation information of a rotation shaft using an encoder device including a detection unit for detecting one pattern and a second pattern, wherein the first pattern and the second pattern are detected by the computer.
- the rotation information of the rotation shaft is calculated using the detection result detected by the step, the signal corresponding to the first detection result that the detection unit detects the first pattern, and the second that the detection unit detects the second pattern Calculating eccentric information between the rotation axis and scale based on the phase difference from the signal according to the detection result, and correcting the rotation information based on the eccentric information and the detection result Rotation information acquiring program that is provided.
- FIG. 1 is a diagram illustrating an example of an encoder device EC according to the present embodiment.
- the encoder device EC corrects the rotation information of the rotation shaft 2 of the drive unit 1 using the eccentric information between the rotation shaft 2 and the scale 3.
- the encoder device EC includes a scale 3, a detection unit 4, and an EC control unit 5.
- the drive unit 1 is, for example, a part of the drive device MTR shown later in FIG.
- the drive unit 1 rotationally drives the rotary shaft 2.
- the drive unit 1 is, for example, an electric motor, but may not be an electric motor.
- the drive unit 1 may rotate the rotating shaft using hydraulic pressure or pneumatic pressure.
- the rotation shaft 2 extends in the + Z direction and the Z direction from the drive unit 1 and rotates around an axis AX1 (rotation center axis) parallel to the Z direction by the drive force (torque) of the drive unit 1.
- the rotating shaft 2 is a shaft (rotor) of the driving unit 1, but may be an axis connected to the shaft of the driving unit 1.
- the rotating shaft 2 may be a shaft in a power transmission unit such as a transmission connected to the shaft of the driving unit 1.
- the rotating shaft 2 may be a shaft connected to the shaft of the drive unit 1 via a power transmission unit.
- the rotating shaft 2 may be a shaft connected to the load 6.
- the scale 3 is connected to the rotary shaft 2 of the drive unit 1 via a bearing, for example, and has a predetermined pattern P.
- the scale 3 is provided, for example, on the opposite side (reverse output shaft side) of the rotary shaft 2 to the side connected to the load 6.
- dirt eg, oil
- the scale 3 is, for example, a disk-shaped member, and the upper surface in the + Z direction and the lower surface in the ⁇ Z direction are parallel to the XY plane.
- the scale 3 is arranged so that it is perpendicular to the rotation axis 2 (parallel to the XY plane) and the axis AX1 (the rotation center axis of the rotation axis 2) passes through the center C1 of the scale 3.
- the scale 3 is a transmission type in which light transmitted through the scale 3 is used for acquiring rotation information, but may be a reflection type in which light reflected by the scale 3 is used for acquisition of rotation information.
- the predetermined pattern P of the scale 3 includes, for example, an incremental pattern P1 (second pattern) and an absolute pattern P2 (first pattern).
- the incremental pattern P1 and the absolute pattern P2 are each provided in an annular shape (ring shape) on the upper surface of the scale 3.
- the absolute pattern P ⁇ b> 2 and the incremental pattern P ⁇ b> 1 are different from each other in the radial direction with respect to the rotation axis 2 from the distance from the rotation axis 2 (the radial position with respect to the rotation axis 2).
- the incremental pattern P1 and the absolute pattern P2 are provided concentrically, and their centers substantially coincide with the center C1 of the scale 3.
- the incremental pattern P1 is provided on the outer side with respect to the absolute pattern P2, but the incremental pattern P1 may be provided on the inner side with respect to the absolute pattern P2.
- an illumination unit 7 for irradiating light to the incremental pattern P1 and the absolute pattern P2 is provided.
- the illumination unit 7 includes, for example, a solid light source such as a light emitting diode (LED).
- the illumination unit 7 may include a solid light source (eg, a laser diode) other than the light emitting diode, or may include a lamp light source.
- a detection unit 4 is provided below the scale 3 (on the opposite side of the illumination unit 7 with respect to the scale 3). As the rotation shaft 2 rotates, the detection unit 4 changes its relative position with the incremental pattern P1 and relative position with the absolute pattern P2. The detection unit 4 detects the incremental pattern P1 and the absolute pattern P2. In the case of the transmission type, the detection unit 4 detects light that has passed through the incremental pattern P1 and light that has passed through the absolute pattern P2 out of the light emitted from the illumination unit 7. The detection unit 4 may detect an image of the incremental pattern P1, and may detect an image of the absolute pattern P2. The detection unit 4 may be connected to the rotating shaft 2 and the incremental pattern P1 and the absolute pattern P2 may not be connected to the rotating shaft 2. Also in this case, the detection unit 4 changes the relative position with the incremental pattern P1 and the absolute pattern P2 as the rotation shaft 2 rotates.
- FIG. 2 is a diagram illustrating an example of the incremental pattern P1 and the absolute pattern P2.
- the incremental pattern P1 includes a plurality of slits 8a.
- Each of the plurality of slits 8a is a rectangular figure extending radially with respect to the center C1 of the scale 3 (see FIG. 1).
- the plurality of slits 8a are arranged at a constant angular interval in the circumferential direction of the scale 3, for example.
- the absolute pattern P2 includes a plurality of slits 8b.
- Each of the plurality of slits 8b is a rectangular figure extending radially with respect to the center C1 of the scale 3 (see FIG. 1).
- the plurality of slits 8b are arranged at non-uniform angular intervals in the circumferential direction of the scale 3, for example.
- the arrangement pattern of the continuous slits 8 b is associated with the rotational position on the scale 3.
- the encoder device EC can identify the rotational position (absolute position) of the scale 3 by detecting the arrangement pattern of the continuous slits 8b, for example.
- FIG. 3 is a diagram illustrating an example of the detection unit 4.
- 3A is a diagram illustrating the detection unit 4 viewed from the + Z direction
- FIG. 3B is a diagram illustrating an image Im1 of the incremental pattern P1 and an image Im2 of the absolute pattern P2 on the detection unit 4. is there.
- the detection unit 4 includes, for example, a detection unit 4a and a detection unit 4b.
- the detection unit 4a includes a plurality of strip-shaped light receiving sensors 9a.
- the plurality of light receiving sensors 9a are arranged in a circular arc (a part of a ring) region so as to correspond to the incremental pattern P1.
- the detection unit 4b includes a plurality of strip-shaped light receiving sensors 9b.
- the plurality of light receiving sensors 9b are arranged in an arcuate region so as to correspond to the absolute pattern P2.
- the detection area by the light receiving sensor 9a and the detection area by the light receiving sensor 9b are respectively rectangular areas. That is, the detection area of the detection unit 4 includes a plurality of rectangular areas arranged in the circumferential direction of the rotating shaft 2.
- an image Im1 is formed on the plurality of light receiving sensors 9a by light transmitted through the incremental pattern P1.
- Each of the plurality of light receiving sensors 9a outputs a voltage corresponding to the amount of received light (hereinafter referred to as an output voltage).
- the detection unit 4a outputs the output voltages of the plurality of light receiving sensors 9a to the EC control unit 5 as the detection result.
- An image Im2 is formed on the plurality of light receiving sensors 9b by the light transmitted through the absolute pattern P2.
- Each of the plurality of light receiving sensors 9b outputs a voltage corresponding to the amount of received light (hereinafter referred to as an output voltage).
- the detection unit 4b outputs the output voltages of the plurality of light receiving sensors 9b to the EC control unit 5 as the detection result.
- the EC control unit 5 includes, for example, a rotation information calculation unit 10, an eccentricity information calculation unit 11, and a correction unit 12.
- the EC control unit 5 may further include a storage unit 13 (eccentric information storage unit, eccentricity correction amount storage unit).
- the EC control unit 5 includes a rotation information calculation unit 10, a correction unit 12, and a storage unit 13.
- the EC control unit 5 may further include an eccentricity information calculation unit 11.
- the rotation information calculation unit 10 calculates the rotation information of the rotation shaft 2 using the detection result of the detection unit 4.
- the eccentricity information calculation unit 11 calculates eccentricity information between the rotating shaft 2 and the scale 3 using the detection result of the detection unit 4.
- the correction unit 12 corrects the rotation information by using the eccentric information between the rotation shaft 2 and the scale 3.
- the rotation information calculation unit 10 includes, for example, a signal processing circuit (not shown).
- the rotation information calculation unit 10 calculates the rotation information of the rotating shaft 2 based on, for example, the output voltage of the light receiving sensor 9a of the detection unit 4a and the output voltage of the light reception sensor 9b of the detection unit 4b.
- the rotation information calculation unit 10 amplifies and AD converts the output voltage of the light receiving sensor 9b of the detection unit 4b to generate a digital absolute signal.
- the rotation information calculation unit 10 calculates the rotation position of the rotation shaft 2 using an absolute signal and a reference table.
- the reference table is, for example, information in which the absolute signal “0” and “1” arrangement patterns are associated with the rotational position of the rotary shaft 2.
- the rotation information calculation unit 10 compares the absolute signal with a reference table to calculate a first rotation position representing the rotation position of the rotation shaft 2 with a first resolution.
- the rotation information calculation unit 10 performs a predetermined interpolation process based on the output voltage of the light receiving sensor 9a of the detection unit 4a (for example, using the A phase signal and the B phase signal), for example, A rotation angle (amount of change in rotational position) represented by a second resolution higher than the resolution is calculated.
- the rotation information calculation unit 10 synthesizes the first rotation position represented by the first resolution and the rotation angle represented by the second resolution, and has a second resolution higher than the first rotation position. Calculate the rotational position.
- the rotation information is information related to the rotation of the rotation shaft 2 and includes the rotation position of the rotation shaft 2.
- the rotation information includes, for example, at least one of a rotation position (angular position), a rotation angle (change amount of the rotation position), an angular velocity, and an angular acceleration of the rotation shaft 2.
- the rotation position of the rotation shaft 2 is, for example, a rotation angle from a reference position.
- the rotation information may be information that does not distinguish the number of rotations (hereinafter referred to as single rotation information) or information that distinguishes the number of rotations (hereinafter referred to as multi-rotation information).
- the single rotation information is represented by a value of 40 ° in any case where the amount of change in the rotational position is represented by the same value as when the rotation amount is 40 °.
- the multi-rotation information is represented by a value of 400 ° or one rotation and 40 ° when the change amount of the rotation position is 400 °, for example.
- the rotation information is represented by a binary number having a predetermined number of bits, for example, and may be a value converted to degrees (deg) or a value converted to radians (rad).
- the scale 3 may be eccentric with respect to the rotating shaft 2 due to manufacturing errors, mounting errors, aging, and the like. If the scale 3 is eccentric with respect to the rotation shaft 2, an error occurs in the rotation information obtained from the detection result of the detection unit 4.
- the encoder device EC can correct the error due to the eccentricity as described above.
- the eccentricity information calculation unit 11 calculates an error correction amount due to eccentricity as the eccentricity information.
- the correction unit 12 corrects the rotation information calculated by the rotation information calculation unit 10 using the correction amount calculated by the eccentricity information calculation unit 11.
- the correction amount calculated by the eccentricity information calculation unit 11 may be temporarily stored in the storage unit 13. In this case, the correction unit 12 corrects the rotation information calculated by the rotation information calculation unit 10 using the correction amount stored in the storage unit 13.
- the correction unit 12 may correct the rotation information calculated by the rotation information calculation unit 10 based on the eccentricity information output from the storage unit 13 without using the correction amount calculated by the eccentricity information calculation unit. .
- the EC control unit 5 outputs the rotation information corrected by the correction unit 12 to the outside.
- a method for correcting an error due to eccentricity will be described, and then the eccentricity information calculation unit 11, the storage unit 13, and the correction unit 12 will be described.
- FIG. 4 is a diagram showing the positional relationship between the rotary shaft 2 and the scale 3.
- symbol C2 is an intersection of the same plane as the detection unit 4 (detection unit 4a, detection unit 4b) and the rotation center axis (axis AX1 in FIG. 1).
- this intersection is referred to as the rotation center C2.
- Reference numeral C3 is the center of the scale 3 projected on the same plane as the detection unit 4 (the light receiving sensor 4a and the light receiving sensor 4b).
- this center is referred to as a scale center C3.
- FIG. 4A shows a state where the scale 3 is not eccentric with respect to the axis AX1 (see FIG.
- FIG. 4B shows a state where the scale 3 is eccentric with respect to the rotation center axis (axis AX1) (hereinafter referred to as an eccentric state). In the eccentric state, the scale center C3 does not coincide with the rotation center C2.
- the symbol ⁇ is a distance (hereinafter referred to as an eccentricity amount) between the scale center C3 and the rotation center C2 in a plane (XY plane) perpendicular to the rotation center axis (axis AX1) of the rotation shaft 2. .
- FIG. 5 is a diagram showing a positional relationship between the image Im1 and the light receiving sensor 9a.
- 5A corresponds to the non-eccentric state
- FIGS. 5B and 5C correspond to the eccentric state.
- the alternate long and short dash line represented by the symbol L1 is the center line of the image Im1
- the alternate long and short dash line represented by the symbol L2 is the center line of the light receiving sensor 9a.
- the scale center C3 coincides with the rotation center C2, and the image Im1 rotates around the rotation center C2 as the rotation shaft 2 rotates.
- the scale center C3 is deviated from the rotation center C2 by an eccentric amount ⁇ in the Y direction.
- the rotational position of the rotary shaft 2 (the rotational position of the scale 3) is the same as that in FIG. 5A, but the scale 3 is decentered so that the image Im1 and the light receiving sensor 9a The overlapping area is not maximized. That is, although the rotational position of the rotary shaft 2 is the same in FIG. 5A and FIG. 5B, the timing at which the output voltage of the light receiving sensor 9a peaks is shifted.
- the eccentricity information of the scale is obtained from the timing shift between the peak of the first detection signal where the detection unit has detected the first pattern and the peak of the second detection signal where the detection unit has detected the second pattern.
- FIG. 5C shows a state in which the rotating shaft 2 is rotated by ⁇ ° clockwise from the state of FIG. 5B, and the overlapping area of the image Im1 and the light receiving sensor 9a is maximized. That is, when the influence of eccentricity is not taken into account, the rotational position of the rotary shaft 2 is obtained as the rotational position of FIG. 5A by the output voltage of the light receiving sensor 9a in the state of FIG. An error of minutes occurs. In other words, in the state of FIG. 5C, the rotation information obtained by reducing the error can be obtained by correcting the rotation position obtained by the output voltage of the light receiving sensor 9a by ⁇ °.
- ⁇ is referred to as an eccentric error.
- the eccentricity error ⁇ is calculated using the phase difference D of the signal based on the absolute pattern with respect to the signal based on the incremental pattern.
- 6A and 6B are diagrams showing the relationship between the amount of eccentricity ⁇ and the eccentricity error ⁇ .
- the eccentricity error ⁇ is expressed by the following equation (1) using the eccentricity ⁇ and the radius R of the scale 3 (incremental pattern P1). ).
- the eccentricity information calculation unit 11 calculates the eccentricity information by using the first detection result that the detection unit 4 detects the incremental pattern P1 and the second detection result that the detection unit 4 detects the absolute pattern P2.
- FIG. 7 is a diagram illustrating an example of the signal S1 according to the first detection result and the signal S2 according to the second detection result.
- the signal S1 is a signal corresponding to the average of the results of detecting two or more of the plurality of rectangular figures of the incremental pattern P1.
- the signal S1 corresponds to a signal obtained by integrating (integrating) the output voltages of the plurality of light receiving sensors 9a of the detection unit 4a that detects the incremental pattern P1.
- the signal S2 is a signal corresponding to a detection result corresponding to one of a plurality of rectangular regions (a plurality of light receiving sensors 9b) among the detection regions of the detection unit 4.
- the signal S2 corresponds to the output voltage of the light receiving sensor 9b of one (for example, the bit at the end) of the detection unit 4b that detects the absolute pattern P2.
- the eccentricity information calculation unit 11 calculates the eccentricity information using the phase difference D between the signal S1 and the signal S2. For example, the eccentricity information calculation unit 11 calculates, as the phase difference D, the shift amount of the signal peak position according to the detection result of the detection unit 4 caused by the eccentricity between the rotating shaft 2 and the scale 3. The eccentricity information calculation unit 11 calculates the phase difference D, and calculates the eccentricity error ⁇ using the calculated phase difference D. The eccentricity information calculation unit 11 calculates the phase difference D based on the following formula (3), for example.
- T is the period of the signal S1
- T1 is the phase at which the signal S1 becomes an extreme value (eg, local minimum)
- T2 is the signal S2 at an extreme value (eg, local minimum). Of the phases, this is the phase closest to T1.
- the distance that the scale 3 moves in the + Y direction with respect to the detection unit 4 is defined as d.
- the moving amount d becomes equal to the eccentric amount ⁇ . Therefore, the correction value ⁇ can be obtained by obtaining the movement amount d using the phase difference D and substituting it for ⁇ in the equation (2).
- the relationship between the movement amount d and the phase difference D will be described below.
- FIG. 8 is an explanatory diagram showing the relationship between the phase difference D and the amount of eccentricity ⁇ .
- the image Im2 is enlarged as compared with the absolute pattern P2, and the enlargement magnification is a.
- “a” is a value unique to the encoder determined by the distance between the illumination unit 7, the scale 3, and the detection unit 4.
- the image Im2 on the light receiving sensor moves a distance ad in the + Y direction.
- the vertices of the image Im2 formed on one light receiving sensor 9b are A1, B1, C1, and D1.
- the vertices of the image Im2 on the light receiving sensor 9b after the movement of the scale 3 are A2, B2, C2, and D2.
- Let h be the distance between the side between the vertex A1 and the vertex B1 and the side between the vertex A2 and the vertex B2. If the angle between the side between the vertex A1 and the vertex B1 and the Y direction is ⁇ , the distance between the vertex A1 and the vertex A2 is ad, and therefore h is expressed by the following equation (4).
- the phase difference D is expressed by the following equation (5). Is done.
- Equation (6) d can be obtained using D and the eigenvalue of the encoder.
- the phase difference D is affected by the number of rotations of the rotating shaft 2, the shape and size of the light receiving sensor, the direction in which the scale center C3 is displaced from the rotating shaft 2, and the like. Even when receiving these influences, the phase difference D is proportional to the moving amount d of the scale 3. Therefore, the phase difference D taking the above influence into consideration is expressed by the following equation (8) using the coefficient k.
- This coefficient k is determined by the number of rotations of the rotating shaft 2, the shape and dimensions of the light receiving sensor, and the like. Therefore, k values when these parameters are systematically changed are stored in advance in the form of table data or the like, and by referring to this information, the movement amount d is calculated from the phase difference D obtained from the detection result. Can be sought.
- the coefficient k is calculated for each product before shipment and stored in the storage unit 13. Then, an eccentric error is calculated based on k stored in advance according to the rotational speed, and the rotational information is corrected.
- the rotation speed and the eccentric direction of the rotating shaft 2 can be calculated from, for example, rotation information before correction based on the current detection result or rotation information after correction based on the previous detection result.
- the eccentricity information calculation unit 11 calculates the eccentricity information using, for example, a detection result when the detection unit 4 detects after the encoder device EC is activated.
- the eccentricity information calculation unit 11 represents, as the eccentricity information, a coefficient k when the rotational speed and the eccentric direction change systematically as table data, and stores the table data in the storage unit 13.
- the timing at which the eccentricity information calculation unit 11 calculates the eccentricity information is arbitrary.
- the calculation of the phase difference by the eccentricity information calculation unit 11 may be performed every predetermined time while the drive unit 1 is operating, or may be performed only once every time the drive unit 1 is started. 1 may be performed every time it is activated a predetermined number of times.
- the storage unit 13 stores eccentricity information (eg, correction amount).
- the storage unit 13 stores the correction amount table data calculated by the eccentricity information calculation unit 11.
- the storage unit 13 stores a program necessary for the operation of the encoder device EC and data calculated by each unit.
- the storage unit 13 is, for example, a nonvolatile memory such as a flash memory.
- the correction unit 12 corrects the rotation information by using the eccentric information between the rotating shaft 2 and the scale 3. For example, the correction unit 12 acquires the rotation information calculated by the rotation information calculation unit 10 and acquires eccentric information (eg, correction amount) corresponding to the rotation information from the storage unit 13. For example, the correction unit 12 corrects the rotation information (for example, the rotation position) by a correction amount determined in the eccentricity information.
- the eccentricity information calculation unit 11 calculates information (e.g., eccentricity amount) before the correction amount as eccentricity information, and the correction unit 12 calculates the correction amount based on the calculation result of the eccentricity information calculation unit 11.
- the rotation information may be corrected by calculation. For example, the correction unit 12 may calculate the correction amount based on the eccentricity amount ⁇ calculated by the eccentricity information calculation unit 11.
- the correction unit 12 outputs the corrected rotation information to the outside (for example, the control unit of the drive unit 1).
- the drive unit 1 is controlled by, for example, corrected rotation information.
- parameters such as the dimension of the scale 3 and the coefficient k are values for convenience of explanation, and are not necessarily the same as actual values.
- the detection radius is 10 mm and the eccentricity ⁇ is 15 ⁇ m (0.015 mm).
- the eccentricity error ⁇ in this case is 10.3 (max.)
- 10 mm of the detection radius is substituted for R in the above equation (2) and 0.015 mm is substituted for the eccentricity ⁇ . Calculated as minutes (minute of ⁇ arc).
- the rotation speed of the scale is 100 [rpm]
- the coefficient k shown in the above equation (8) is 0.065 [deg / ⁇ m].
- the phase difference P1 and the phase difference P2 are calculated.
- the value of the eccentric error ⁇ includes an error, and this error depends on the detection accuracy of the phase difference.
- the detection accuracy of the phase difference is ⁇ 0.1 [deg]
- the detection accuracy of the phase difference is ⁇ 0.1 [deg]
- the absolute value of the error is added to each of P1 and P2 with the sign reversed.
- the eccentricity error is considered to be random within a range of ⁇ 0.1 [deg].
- an average value or the like may be used as the amount of eccentricity calculated from P1 and P2.
- the eccentricity error ⁇ is calculated by the following equation (10).
- the eccentricity error ⁇ is calculated by the following equation (11).
- the calculated eccentricity ⁇ has a maximum deviation from the true value. Therefore, for example, if the detection accuracy of the phase difference D is within ⁇ 0.1 [deg], the eccentric error of 10 minutes can be reduced to about 1 minute, and the eccentric error ⁇ can be reduced to about 1/10. be able to.
- FIG. 9 is a flowchart showing the operation of the encoder device EC.
- the detection unit 4 detects a predetermined pattern P of the scale 3 provided on the rotation shaft 2 of the drive unit 1. For example, the detection unit 4 detects the incremental scale P1 and the absolute pattern P2 of the scale 3 respectively.
- the rotation information calculation unit 10 calculates the rotation information of the rotation shaft 2 using the detection result of the detection unit 4.
- the eccentricity information calculation unit 11 calculates eccentricity information.
- the eccentricity information calculation unit 11 calculates the eccentricity information using, for example, the first detection result that the detection unit 4b detects the absolute pattern P2 and the second detection result that the detection unit 4a detects the incremental pattern P1.
- the eccentricity information calculation unit 11 calculates, for example, at least one of the eccentricity amount and the eccentricity error using the phase difference D between the signal S1 corresponding to the first detection result and the signal S2 corresponding to the second detection result. . Further, the eccentricity information calculation unit 11 calculates a correction amount corresponding to the eccentricity error ⁇ as, for example, eccentricity information.
- step S ⁇ b> 4 the eccentricity information calculation unit 11 stores the calculation result (eccentric information) in the storage unit 13.
- the eccentricity information calculation unit 11 stores, for example, the calculated eccentricity amount and eccentricity error (eg, correction amount) in the storage unit 13.
- the correction unit 12 corrects the rotation information using the eccentricity information between the rotation shaft 2 and the scale 3.
- the correction unit 12 corrects the rotation information based on the amount of eccentricity calculated by the eccentricity information calculation unit 11 in step S6.
- the correction unit 12 corrects the rotation information using an eccentricity error ⁇ (correction amount) based on the eccentricity amount ⁇ calculated by the eccentricity information calculation unit 11 stored in the storage unit 13.
- the corrected rotation information is output to the correction unit 12.
- the EC control unit 5 outputs the rotation information corrected by the correction unit 12 to a control unit that controls the drive unit 1, and the control unit controls the drive unit 1 based on the corrected rotation information.
- the EC control unit 5 includes, for example, a computer (eg, a microcomputer) including a general-purpose arithmetic unit such as a CPU and a work memory, and a nonvolatile memory (eg, the storage unit 13).
- a computer eg, a microcomputer
- the eccentricity information calculation unit 11, and the correction unit 12 are configured such that, for example, the computer executes various processes according to a program stored in a nonvolatile memory.
- the rotation information acquisition program changes the relative position between the scale having the first pattern and the second pattern, and the relative position between the first pattern and the second pattern in accordance with the rotation of the rotation axis.
- a rotation information acquisition program for acquiring rotation information of a rotation shaft using an encoder device including a detection unit for detecting a pattern, and a detection result obtained by detecting a first pattern and a second pattern by a detection unit in a computer Is used to calculate the rotation information, store the eccentric information of the rotation axis and the scale in the storage unit, and correct the rotation information based on the eccentric information output from the storage unit and the detection result.
- the storage unit outputs a signal corresponding to the first detection result of the detection unit detecting the first pattern, and the second detection result of the detection unit detecting the second pattern. Storing the eccentricity information of the scale calculated based on the phase difference between the response signals.
- the rotation information acquisition program may be provided by being recorded on a computer-readable storage medium.
- the encoder device EC, the rotation information acquisition method, and the rotation information acquisition program according to the present embodiment can acquire rotation information with high accuracy. Since the encoder device EC can detect the amount of eccentricity and generate a correction value by itself, the encoder device EC does not need a calibration encoder. Since the encoder apparatus EC corrects the eccentricity error by itself, the cost and labor required for reducing the eccentricity error during manufacturing can be reduced. There is no need for a high-precision calibration encoder, and the accuracy can be corrected easily at low cost. Further, since the encoder device EC corrects the eccentricity error by itself, the allowable amount of the eccentricity error becomes high.
- the eccentricity error correction is performed based on the phase difference of the pattern P on the scale 3, it is not necessary to separately provide a detection unit (reference angle detection unit) that detects the eccentricity error or the like.
- the phase difference does not need to be attached to a dedicated tool, and can be measured in an actual use environment.
- the encoder device EC can perform correction including the influence of the eccentric deflection angle of the counterpart shaft in the final mounted state.
- the amount of eccentricity ⁇ is measured in advance before the rotation information calculation unit 10 calculates the rotation information, and the correction unit 12 corrects the rotation information based on the amount of eccentricity ⁇ .
- the eccentricity ⁇ is measured by an inspection device or the like when the encoder device EC is manufactured.
- the eccentricity information (eg, eccentricity error ⁇ , correction amount) is calculated based on the measurement result and stored in the storage unit 13 illustrated in FIG.
- the correction unit 12 (see FIG. 1) corrects the rotation information based on the eccentricity information stored in the storage unit 13. If the eccentricity amount ⁇ is stored in the storage unit 13 as the eccentricity information, the eccentricity information calculation unit 11 or the correction unit 12 may calculate the correction amount using the eccentricity amount ⁇ stored in the storage unit 13. Good. When the correction amount is stored as the eccentricity information in the storage unit 13, the correction unit 12 may correct the rotation information using the correction amount stored in the storage unit 13. In this case, for example, the encoder device EC may not include the eccentricity information calculation unit 11.
- FIG. 10 is a flowchart showing the operation of the encoder device EC.
- the detection unit 4 detects a predetermined pattern P of the scale 3 provided on the rotation shaft 2 of the drive unit 1. For example, the detection unit 4 detects the incremental scale P1 and the absolute pattern P2 of the scale 3 respectively.
- the rotation information calculation unit 10 calculates the rotation information of the rotation shaft 2 using the detection result of the detection unit 4.
- the correction unit 12 corrects the rotation information using the eccentricity information between the rotation shaft 2 and the scale 3. As described above, the eccentricity information is stored in advance in the storage unit 13 before the rotation information calculation unit 10 calculates the rotation information in step S8.
- the correction unit 12 corrects the rotation information based on the eccentricity ⁇ stored in the storage unit 13.
- the corrected rotation information is output to the correction unit 12.
- the EC control unit 5 outputs the rotation information corrected by the correction unit 12 to a control unit that controls the drive unit 1, and the control unit controls the drive unit 1 based on the corrected rotation information. Even in this case, the encoder device EC can acquire the rotation information with high accuracy.
- FIG. 11 is a diagram illustrating an example of the driving device MTR.
- the drive device MTR is a motor device including an electric motor.
- the drive device MTR includes a rotation shaft 2, a main body (drive unit) BD that rotationally drives the rotation shaft 2, an encoder device EC that detects rotation information of the rotation shaft 2, and a control unit MC that controls the main body BD. .
- the rotating shaft 2 has a load side end portion SFa and an anti-load side end portion SFb.
- the load side end portion SFa is connected to another power transmission mechanism such as a speed reducer.
- a scale (not shown) is fixed to the non-load side end portion SFb via a fixing portion.
- the encoder device EC is the encoder device described in the above embodiment.
- the control unit MC controls the main body BD using the detection result of the encoder device EC (rotation information after correction). Since the drive device MTR controls the main body BD using the rotation information in which the eccentricity error is reduced by the correction, the rotation position of the rotation shaft 2 can be controlled with high accuracy.
- the drive device MTR is not limited to a motor device, and may be another drive device having a shaft portion that rotates using hydraulic pressure or pneumatic pressure.
- FIG. 12 is a diagram showing a stage apparatus STG.
- This stage device STG has a configuration in which a rotary table (moving object) TB is attached to the load side end portion SFa of the rotary shaft 2 of the drive device MTR shown in FIG.
- components that are the same as or equivalent to those in the above-described embodiment are denoted by the same reference numerals, and description thereof is omitted or simplified.
- the stage device STG rotates the rotary shaft 2 by driving the drive device MTR, this rotation is transmitted to the rotary table TB.
- the encoder device EC detects rotation information (eg, rotation position) of the rotation shaft 2 and the like. Therefore, the angular position of the rotary table TB can be detected by using the output from the encoder device EC.
- a reduction gear or the like may be disposed between the load side end SFa of the drive device MTR and the rotary table TB.
- the stage device STG can control the position of the rotary table TB with high accuracy because the eccentricity error is reduced in the rotation information output from the encoder device EC.
- the stage apparatus STG can be applied to a rotary table provided in a machine tool such as a lathe.
- FIG. 13 is a perspective view showing the robot apparatus RBT.
- FIG. 13 schematically shows a part (joint part) of the robot apparatus RBT.
- the robot apparatus RBT includes a first arm AR1, a second arm AR2, and a joint portion JT.
- the first arm AR1 is connected to the second arm AR2 via the joint portion JT.
- the first arm AR1 includes an arm portion 101, a bearing 101a, and a bearing 101b.
- the second arm AR2 has an arm portion 102 and a connection portion 102a.
- the connecting portion 102a is disposed between the bearing 101a and the bearing 101b in the joint portion JT.
- the connection part 102a is provided integrally with the rotation SF2.
- the rotation shaft SF2 is inserted into both the bearing 101a and the bearing 101b in the joint portion JT.
- the end of the rotary shaft SF2 on the side inserted into the bearing 101b passes through the bearing 101b and is connected to the speed reducer RG.
- the reduction gear RG is connected to the drive device MTR, and decelerates the rotation of the drive device MTR to, for example, 1/100 and transmits it to the rotary shaft SF2.
- the load side end portion of the rotation shaft 2 of the drive device MTR is connected to the speed reducer RG.
- a scale (not shown) of the encoder device EC is attached to the opposite end of the rotating shaft 2 of the drive device MTR.
- the robot device RBT drives the driving device MTR to rotate the rotating shaft 2
- this rotation is transmitted to the rotating shaft 2 via the speed reducer RG.
- the connecting portion 102a rotates integrally, whereby the second arm AR2 rotates relative to the first arm AR1.
- the encoder device EC detects rotation information (for example, a rotation position) of the rotation shaft 2. Therefore, the angular position of the second arm AR2 can be detected by using the output from the encoder device EC.
- the robot apparatus RBT outputs the rotation information with the eccentricity error reduced by the encoder apparatus EC, so that the relative position between the first arm AR1 and the second arm AR2 can be accurately controlled.
- the robot apparatus RBT is not limited to the above configuration, and the drive apparatus MTR can be applied to various robot apparatuses having joints.
- EC encoder device, 1 ... drive unit, 2 ... rotation axis, 3 ... scale, 4, 4a, 4b ... detection unit, 10 ... rotation information calculation unit, 11 ... ⁇ Eccentric information calculation unit, 12... Correction unit, 13... Storage unit, P... Pattern, P1... Incremental pattern, P2. ⁇ Stage device, RBT ... Robot device
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Optical Transform (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
Abstract
Description
以下、本発明の実施形態について図面を参照しながら説明する。ただし、本発明はこれに限定されるものではない。また、図面において、一部分を大きくまたは強調して記載するなど適宜縮尺を変更して表現する。また、以下の各図に示すXYZ座標系を適宜用いて方向を説明する。X方向、Y方向及びZ方向のそれぞれは、適宜、図中の矢印の方向が+方向(例、+X方向)であり、その反対方向が-方向(-X方向)であるとする。
移動量dと位相差Dとの関係を以下に説明する。
P1=-0.065[deg/μm]×15[μm]=-0.975[deg]
P2= 0.065[deg/μm]×15[μm]= 0.975[deg]
d=P1+0.1/-0.065=-0.875/-0.065=13.5[μm]
d=P2-0.1/+0.065=0.875/0.065=13.5[μm]
第2実施形態について説明する。本実施形態において、上述の実施形態と同様の構成については、同じ符号を付してその説明を省略あるいは簡略化する。
次に、駆動装置について説明する。図11は、駆動装置MTRの一例を示す図である。以下の説明において、上記した実施形態と同一または同等の構成部分については同一符号を付けて説明を省略または簡略化する。この駆動装置MTRは、電動モータを含むモータ装置である。駆動装置MTRは、回転軸2と、回転軸2を回転駆動する本体部(駆動部)BDと、回転軸2の回転情報を検出するエンコーダ装置ECと、本体部BDを制御する制御部MCと、を備える。
Claims (15)
- 第1パターンおよび第2パターンを有するスケールと、
回転軸の回転に伴って前記スケールとの相対位置が変化し、前記第1パターンおよび前記第2パターンを検出する検出部と、
前記検出部の検出結果を用いて、前記回転軸の回転情報を算出する回転情報算出部と、
前記回転軸と前記スケールとの偏心情報を記憶する記憶部と、
前記記憶部から出力される前記偏心情報と前記検出結果とに基づき、前記回転情報を補正する補正部と、を備え、
前記記憶部は、前記検出部が前記第1パターンを検出した第1検出結果に応じた信号と、前記検出部が前記第2パターンを検出した第2検出結果に応じた信号との位相差に基づいて算出された前記スケールの偏心情報を記憶するエンコーダ装置。 - 前記第1検出結果および前記第2検出結果を用いて前記偏心情報を算出する偏心情報算出部を備える、
請求項1に記載のエンコーダ装置。 - 第1パターンおよび第2パターンを有するスケールと、
回転軸の回転に伴って前記スケールとの相対位置が変化し、前記第1パターンおよび前記第2パターンを検出する検出部と、
前記検出部の検出結果を用いて、前記回転軸の回転情報を算出する回転情報算出部と、
前記検出部が前記第1パターンを検出した第1検出結果に応じた信号と、前記検出部が前記第2パターンを検出した第2検出結果に応じた信号との位相差に基づいて、前記回転軸と前記スケールとの偏心情報を算出する偏心情報算出部と、
前記偏心情報と前記検出結果とに基づき、前記回転情報を補正する補正部と、を備えるエンコーダ装置。 - 前記偏心情報を記憶する記憶部を備え、
前記補正部は、前記記憶部から出力される前記偏心情報と前記検出結果とに基づき、前記回転情報を補正する、
請求項3に記載のエンコーダ装置。 - 前記偏心情報算出部は、前記位相差として、前記回転軸と前記スケールとの偏心により生じる前記検出部の検出結果に応じた信号のピーク位置のずれ量を算出する、
請求項2から請求項4に記載のエンコーダ装置。 - 前記第1パターンと前記第2パターンとは、前記回転軸に関する放射方向において、前記回転軸からの距離が互いに異なる、
請求項1~請求項5のいずれか一項に記載のエンコーダ装置。 - 前記第1パターンは、インクリメンタルパターンを含み、
前記第2パターンは、アブソリュートパターンを含み、前記回転軸に関する放射方向において前記インクリメンタルパターンよりも内側に配置される、
請求項6に記載のエンコーダ装置。 - 前記検出部の検出領域は、前記回転軸を中心とする円の周方向に配列される複数の矩形状の領域を含み、
前記インクリメンタルパターンおよび前記アブソリュートパターンは、それぞれ、前記回転軸を中心とする円の周方向に配列される複数の矩形状の図形を含み、
前記第1の検出結果に応じた信号は、前記インクリメンタルパターンの前記複数の矩形状の図形を検出した結果の平均に相当する信号であり、
前記第2の検出結果に応じた信号は、前記検出領域のうち前記複数の矩形状の領域の1つに対応する検出結果に相当する信号である、
請求項7に記載のエンコーダ装置。 - 前記偏心情報算出部は、以下の式にしたがって補正値θを算出する、請求項2~請求項8のいずれか一項に記載のエンコーダ装置。
θ=tan-1(dsinφ/R)
[式中、dは、スケールの回転軸の回転中心に対する所定方向の移動量を示し、φは、前記回転軸の回転中心と前記スケール中心を結ぶ線が、前記回転中心を通る所定の直線となす角度を示し、Rは、前記スケールの半径を示し、
dは、以下の式から求められる:
d=D/k
(式中、Dは、前記第1検出結果に応じた信号と、前記第2検出結果に応じた信号との位相差を示し、kは、エンコーダによって決まる固有値を示す。) - 前記回転情報は、前記回転軸の回転位置を含み、
前記補正部は、前記偏心情報に基づいて、前記回転位置の補正量を算出する、
請求項1~請求項9のいずれか一項に記載のエンコーダ装置。 - 請求項1~請求項10のいずれか一項に記載のエンコーダ装置と、
前記回転軸に駆動力を供給する駆動部と、
前記補正部が補正した回転情報を用いて前記駆動部を制御する制御部と、を備える駆動装置。 - 移動体と、
前記移動体を移動させる請求項11に記載の駆動装置と、を備えるステージ装置。 - 請求項11に記載の駆動装置と、
前記駆動装置によって移動するアームを備えるロボット装置。 - 第1パターンおよび第2パターンを有するスケールと、回転軸の回転に伴って前記スケールとの相対位置が変化し、前記第1パターンおよび前記第2パターンを検出する検出部と、を備えるエンコーダ装置を用いて、前記回転軸の回転情報を取得する回転情報取得方法であって、
前記第1パターンおよび前記第2パターンを前記検出部により検出することと、
前記検出部の検出結果を用いて、前記回転軸の回転情報を算出することと、
前記検出部が前記第1パターンを検出した第1検出結果に応じた信号と、前記検出部が前記第2パターンを検出した第2検出結果に応じた信号との位相差に基づいて、前記回転軸と前記スケールとの偏心情報を算出することと、
前記偏心情報と前記検出結果とに基づき、前記回転情報を補正することと、を含む回転情報取得方法。 - 第1パターンおよび第2パターンを有するスケールと、回転軸の回転に伴って前記スケールとの相対位置が変化し、前記第1パターンおよび前記第2パターンを検出する検出部と、を備えるエンコーダ装置を用いて、前記回転軸の回転情報を取得する回転情報取得プログラムであって、
コンピュータに、
前記第1パターンおよび前記第2パターンを前記検出部により検出した検出結果を用いて、前記回転軸の回転情報を算出することと、
前記検出部が前記第1パターンを検出した第1検出結果に応じた信号と、前記検出部が前記第2パターンを検出した第2検出結果に応じた信号との位相差に基づいて、前記回転軸と前記スケールとの偏心情報を算出することと、
前記偏心情報と前記検出結果とに基づき、前記回転情報を補正することと、を実行させる回転情報取得プログラム。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201680041728.6A CN107850466B (zh) | 2015-07-17 | 2016-07-15 | 编码器装置、驱动装置、旋转信息取得方法以及记录介质 |
JP2017529880A JP6717305B2 (ja) | 2015-07-17 | 2016-07-15 | エンコーダ装置、駆動装置、ステージ装置、ロボット装置、回転情報取得方法及び回転情報取得プログラム |
US15/745,653 US10914614B2 (en) | 2015-07-17 | 2016-07-15 | Encoder apparatus and method for calculating eccentricity information based on a phase difference between an incremental detection signal and an absolute detection signal used to correct rotational information |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015142971 | 2015-07-17 | ||
JP2015-142971 | 2015-07-17 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2017014189A1 true WO2017014189A1 (ja) | 2017-01-26 |
Family
ID=57834469
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2016/071006 WO2017014189A1 (ja) | 2015-07-17 | 2016-07-15 | エンコーダ装置、駆動装置、ステージ装置、ロボット装置、回転情報取得方法及び回転情報取得プログラム |
Country Status (4)
Country | Link |
---|---|
US (1) | US10914614B2 (ja) |
JP (1) | JP6717305B2 (ja) |
CN (1) | CN107850466B (ja) |
WO (1) | WO2017014189A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2018179745A (ja) * | 2017-04-13 | 2018-11-15 | 株式会社ニコン | 誤差検出方法、誤差検出プログラム、誤差検出装置、エンコーダ装置の製造方法、エンコーダ装置、駆動装置、ステージ装置、及びロボット装置 |
CN117207249A (zh) * | 2023-11-09 | 2023-12-12 | 江苏苏亿盟智能科技有限公司 | 一种机器人的编码器校准方法及其系统 |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7173010B2 (ja) * | 2017-07-27 | 2022-11-16 | 株式会社ニコン | 校正装置、エンコーダ装置、駆動装置、ステージ装置、ロボット装置、エンコーダ装置の製造方法、及び校正プログラム |
EP3441712A1 (de) * | 2017-08-08 | 2019-02-13 | Klingelnberg AG | Koordinaten-messvorrichtung mit optischem sensor und entsprechendes verfahren |
WO2020066431A1 (ja) * | 2018-09-24 | 2020-04-02 | 株式会社ニコン | エンコーダ、駆動装置、ロボット装置、制御システム及びその制御方法 |
JP6989540B2 (ja) * | 2019-01-29 | 2022-01-05 | ファナック株式会社 | ロボット |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2011074103A1 (ja) * | 2009-12-17 | 2011-06-23 | キヤノン株式会社 | ロータリエンコーダ及びそれを有する回転機構 |
JP2012002592A (ja) * | 2010-06-15 | 2012-01-05 | Canon Inc | ロータリーエンコーダ |
JP2015105829A (ja) * | 2013-11-28 | 2015-06-08 | 株式会社ニコン | エンコーダ用スケール、エンコーダ、駆動装置、及びステージ装置 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07134045A (ja) * | 1993-11-11 | 1995-05-23 | Nikon Corp | アブソリュートエンコーダ |
JP2002250640A (ja) * | 2000-12-22 | 2002-09-06 | Alps Electric Co Ltd | 回転角検出装置 |
JP2004318439A (ja) | 2003-04-15 | 2004-11-11 | Sendai Nikon:Kk | エンコーダ装置、ロボットシステム |
JP5146366B2 (ja) * | 2009-03-09 | 2013-02-20 | 株式会社安川電機 | 光学式エンコーダ |
JP5538870B2 (ja) * | 2009-12-24 | 2014-07-02 | キヤノン株式会社 | ロータリーエンコーダ |
JP4945674B2 (ja) * | 2010-11-08 | 2012-06-06 | 株式会社安川電機 | 反射型エンコーダ、サーボモータ及びサーボユニット |
JP6147038B2 (ja) * | 2013-03-15 | 2017-06-14 | キヤノン株式会社 | 位置検出装置、レンズ装置、撮像システム、および、工作装置 |
EP3023746B1 (en) | 2013-07-16 | 2018-11-21 | NTN Corporation | Magnetic encoder device and rotation detection device |
JP6227972B2 (ja) * | 2013-10-16 | 2017-11-08 | Ntn株式会社 | 磁気エンコーダ装置および回転検出装置 |
JP2015232448A (ja) * | 2014-06-09 | 2015-12-24 | 株式会社安川電機 | エンコーダ、サーボシステム、エンコーダの位置データ生成方法 |
-
2016
- 2016-07-15 WO PCT/JP2016/071006 patent/WO2017014189A1/ja active Application Filing
- 2016-07-15 CN CN201680041728.6A patent/CN107850466B/zh active Active
- 2016-07-15 US US15/745,653 patent/US10914614B2/en active Active
- 2016-07-15 JP JP2017529880A patent/JP6717305B2/ja active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2011074103A1 (ja) * | 2009-12-17 | 2011-06-23 | キヤノン株式会社 | ロータリエンコーダ及びそれを有する回転機構 |
JP2012002592A (ja) * | 2010-06-15 | 2012-01-05 | Canon Inc | ロータリーエンコーダ |
JP2015105829A (ja) * | 2013-11-28 | 2015-06-08 | 株式会社ニコン | エンコーダ用スケール、エンコーダ、駆動装置、及びステージ装置 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2018179745A (ja) * | 2017-04-13 | 2018-11-15 | 株式会社ニコン | 誤差検出方法、誤差検出プログラム、誤差検出装置、エンコーダ装置の製造方法、エンコーダ装置、駆動装置、ステージ装置、及びロボット装置 |
CN117207249A (zh) * | 2023-11-09 | 2023-12-12 | 江苏苏亿盟智能科技有限公司 | 一种机器人的编码器校准方法及其系统 |
CN117207249B (zh) * | 2023-11-09 | 2024-02-06 | 江苏苏亿盟智能科技有限公司 | 一种机器人的编码器校准方法及其系统 |
Also Published As
Publication number | Publication date |
---|---|
US10914614B2 (en) | 2021-02-09 |
JP6717305B2 (ja) | 2020-07-01 |
CN107850466A (zh) | 2018-03-27 |
JPWO2017014189A1 (ja) | 2018-03-29 |
US20180245952A1 (en) | 2018-08-30 |
CN107850466B (zh) | 2021-01-08 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
WO2017014189A1 (ja) | エンコーダ装置、駆動装置、ステージ装置、ロボット装置、回転情報取得方法及び回転情報取得プログラム | |
JP6477933B2 (ja) | 回転角度検出装置及び回転角度検出方法 | |
CN107883892B (zh) | 偏心计算方法、旋转编码器、机器人臂和机器人装置 | |
JP5081553B2 (ja) | 回転検出装置および回転検出装置付き軸受 | |
JP6147038B2 (ja) | 位置検出装置、レンズ装置、撮像システム、および、工作装置 | |
EP2343510B1 (en) | Rotary encoder | |
JP7350559B2 (ja) | エンコーダ装置、駆動装置、ロボット装置、位置検出方法、物品の製造方法、プログラム、及び記録媒体 | |
JPWO2008050578A1 (ja) | 回転角度検出装置及び回転角度検出方法 | |
US11579001B2 (en) | Calibrator, encoder, driving device, stage device, robot, encoder manufacturing method, and calibration program | |
JPWO2021090551A5 (ja) | ||
JP2007051683A (ja) | 転がり軸受装置 | |
JP2006234723A (ja) | 回転角検出装置の回転角補正方法 | |
EP2546613B1 (en) | Method for working out the eccentricity and the angular position of a rotating element and Device for carrying out such a method | |
US11187516B2 (en) | Angle measuring device | |
US11486740B2 (en) | Angle measuring device and method for operating an angle measuring device | |
JP2019149874A (ja) | 駆動モータ及び完成品の検査方法 | |
JP2017187490A (ja) | 角度を測定するための装置及び方法 | |
JP2004333196A (ja) | 波動歯車装置の回転角度検出装置 | |
JP6953772B2 (ja) | 誤差検出方法、誤差検出プログラム、誤差検出装置、エンコーダ装置の製造方法、エンコーダ装置、駆動装置、ステージ装置、及びロボット装置 | |
JP6252437B2 (ja) | 回転角検出装置 | |
JP7447324B1 (ja) | ロータリーエンコーダ、及びロータリーエンコーダシステム、並びにロータリーエンコーダを用いた回転角度検出方法 | |
JP2005207948A (ja) | 多回転検出器 | |
JP2023167826A (ja) | 回転角度検出装置、動力伝達装置、回転角度検出方法、およびロボット | |
JP2005037285A (ja) | 多回転量検出装置および多回転量検出方法 | |
JP2009288124A (ja) | 回転検出装置付き軸受 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 16827749 Country of ref document: EP Kind code of ref document: A1 |
|
ENP | Entry into the national phase |
Ref document number: 2017529880 Country of ref document: JP Kind code of ref document: A |
|
NENP | Non-entry into the national phase |
Ref country code: DE |
|
WWE | Wipo information: entry into national phase |
Ref document number: 15745653 Country of ref document: US |
|
122 | Ep: pct application non-entry in european phase |
Ref document number: 16827749 Country of ref document: EP Kind code of ref document: A1 |