JP5451150B2 - Ｘ線用線源格子、ｘ線位相コントラスト像の撮像装置 - Google Patents

Ｘ線用線源格子、ｘ線位相コントラスト像の撮像装置 Download PDF

Info

Publication number
JP5451150B2
JP5451150B2 JP2009094998A JP2009094998A JP5451150B2 JP 5451150 B2 JP5451150 B2 JP 5451150B2 JP 2009094998 A JP2009094998 A JP 2009094998A JP 2009094998 A JP2009094998 A JP 2009094998A JP 5451150 B2 JP5451150 B2 JP 5451150B2
Authority
JP
Japan
Prior art keywords
ray
grating
partial
phase
ray source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2009094998A
Other languages
English (en)
Japanese (ja)
Other versions
JP2009276342A (ja
JP2009276342A5 (enExample
Inventor
英之助 伊藤
好克 市村
高士 中村
彩 今田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2009094998A priority Critical patent/JP5451150B2/ja
Publication of JP2009276342A publication Critical patent/JP2009276342A/ja
Publication of JP2009276342A5 publication Critical patent/JP2009276342A5/ja
Application granted granted Critical
Publication of JP5451150B2 publication Critical patent/JP5451150B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/02—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators
    • G21K1/025—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators using multiple collimators, e.g. Bucky screens; other devices for eliminating undesired or dispersed radiation
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K7/00—Gamma- or X-ray microscopes
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K2207/00—Particular details of imaging devices or methods using ionizing electromagnetic radiation such as X-rays or gamma rays
    • G21K2207/005—Methods and devices obtaining contrast from non-absorbing interaction of the radiation with matter, e.g. phase contrast

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP2009094998A 2008-04-15 2009-04-09 Ｘ線用線源格子、ｘ線位相コントラスト像の撮像装置 Expired - Fee Related JP5451150B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009094998A JP5451150B2 (ja) 2008-04-15 2009-04-09 Ｘ線用線源格子、ｘ線位相コントラスト像の撮像装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2008105355 2008-04-15
JP2008105355 2008-04-15
JP2009094998A JP5451150B2 (ja) 2008-04-15 2009-04-09 Ｘ線用線源格子、ｘ線位相コントラスト像の撮像装置

Publications (3)

Publication Number Publication Date
JP2009276342A JP2009276342A (ja) 2009-11-26
JP2009276342A5 JP2009276342A5 (enExample) 2012-06-07
JP5451150B2 true JP5451150B2 (ja) 2014-03-26

Family

ID=40758687

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009094998A Expired - Fee Related JP5451150B2 (ja) 2008-04-15 2009-04-09 Ｘ線用線源格子、ｘ線位相コントラスト像の撮像装置

Country Status (5)

Country Link
US (1) US8243879B2 (enExample)
EP (1) EP2248135A1 (enExample)
JP (1) JP5451150B2 (enExample)
CN (1) CN102047344B (enExample)
WO (1) WO2009128550A1 (enExample)

Families Citing this family (81)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5587985B2 (ja) * 2009-05-19 2014-09-10 コーニンクレッカ フィリップス エヌ ヴェ 位相コントラストイメージング用格子
JP5459659B2 (ja) * 2009-10-09 2014-04-02 キヤノン株式会社 Ｘ線位相コントラスト像の撮像に用いられる位相格子、該位相格子を用いた撮像装置、ｘ線コンピューター断層撮影システム
CN102651994A (zh) * 2009-12-10 2012-08-29 皇家飞利浦电子股份有限公司 微分相位对比成像系统的校准
JP5578868B2 (ja) * 2010-01-26 2014-08-27 キヤノン株式会社 光源格子、該光源格子を備えたｘ線位相コントラスト像の撮像装置、ｘ線コンピューター断層撮影システム
US8532252B2 (en) * 2010-01-27 2013-09-10 Canon Kabushiki Kaisha X-ray shield grating, manufacturing method therefor, and X-ray imaging apparatus
JP2012068225A (ja) * 2010-08-25 2012-04-05 Fujifilm Corp 放射線画像撮影用グリッド及びその製造方法
JP5504104B2 (ja) * 2010-08-31 2014-05-28 株式会社東芝 Ｍｏコリメータおよびそれを用いたＸ線検出器並びにＣＴ装置
WO2012032950A1 (en) * 2010-09-08 2012-03-15 Canon Kabushiki Kaisha X-ray differential phase contrast imaging using a two-dimensional source grating with pinhole apertures and two-dimensional phase and absorption gratings
JP2012103237A (ja) * 2010-10-14 2012-05-31 Canon Inc 撮像装置
RU2573114C2 (ru) * 2010-10-19 2016-01-20 Конинклейке Филипс Электроникс Н.В. Формирование изображений методом дифференциального фазового контраста
RU2572644C2 (ru) * 2010-10-19 2016-01-20 Конинклейке Филипс Электроникс Н.В. Формирование дифференциальных фазово-контрастных изображений
JP2012095865A (ja) * 2010-11-02 2012-05-24 Fujifilm Corp 放射線撮影装置、放射線撮影システム
RU2013126110A (ru) * 2010-11-08 2014-12-20 Конинклейке Филипс Электроникс Н.В. Дифракционная решетка для получения фазоконтрастного изображения
US10734128B2 (en) * 2011-02-01 2020-08-04 Koninklijke Philips N.V. Differential phase-contrast imaging with focussing deflection structure plates
US9287017B2 (en) * 2011-02-07 2016-03-15 Koninklijke Philips N.V. Differential phase-contrast imaging with increased dynamic range
JP5930614B2 (ja) * 2011-06-02 2016-06-08 キヤノン株式会社 Ｘ線撮像装置
US20150117599A1 (en) 2013-10-31 2015-04-30 Sigray, Inc. X-ray interferometric imaging system
US9826949B2 (en) * 2012-03-05 2017-11-28 University Of Rochester Methods and apparatus for differential phase-contrast cone-beam CT and hybrid cone-beam CT
US20130259194A1 (en) * 2012-03-30 2013-10-03 Kwok L. Yip Hybrid slot-scanning grating-based differential phase contrast imaging system for medical radiographic imaging
WO2013187970A2 (en) * 2012-05-14 2013-12-19 The General Hospital Corporation Method for coded-source phase contrast x-ray imaging
FI20126119L (fi) 2012-10-29 2014-04-30 Teknologian Tutkimuskeskus Vtt Oy Interferometrinen dynaamihila-kuvannusmenetelmä, diffraktiohila ja kuvannuslaitteisto
US8989347B2 (en) 2012-12-19 2015-03-24 General Electric Company Image reconstruction method for differential phase contrast X-ray imaging
US9724063B2 (en) 2012-12-21 2017-08-08 Carestream Health, Inc. Surrogate phantom for differential phase contrast imaging
US9357975B2 (en) 2013-12-30 2016-06-07 Carestream Health, Inc. Large FOV phase contrast imaging based on detuned configuration including acquisition and reconstruction techniques
US9907524B2 (en) 2012-12-21 2018-03-06 Carestream Health, Inc. Material decomposition technique using x-ray phase contrast imaging system
US10096098B2 (en) 2013-12-30 2018-10-09 Carestream Health, Inc. Phase retrieval from differential phase contrast imaging
US9494534B2 (en) 2012-12-21 2016-11-15 Carestream Health, Inc. Material differentiation with phase contrast imaging
US9700267B2 (en) 2012-12-21 2017-07-11 Carestream Health, Inc. Method and apparatus for fabrication and tuning of grating-based differential phase contrast imaging system
US10578563B2 (en) 2012-12-21 2020-03-03 Carestream Health, Inc. Phase contrast imaging computed tomography scanner
US9014333B2 (en) 2012-12-31 2015-04-21 General Electric Company Image reconstruction methods for differential phase contrast X-ray imaging
DE102013205406A1 (de) * 2013-03-27 2014-10-16 Siemens Aktiengesellschaft Röntgenaufnahmesystem zur Röntgenbildgebung bei hohen Bildfrequenzen eines Untersuchungsobjekts mittels direkter Messung des Interferenzmusters
EP2827339A1 (en) * 2013-07-16 2015-01-21 Canon Kabushiki Kaisha Source grating, interferometer, and object information acquisition system
JP6362103B2 (ja) * 2013-09-04 2018-07-25 キヤノン株式会社 遮蔽格子及びトールボット干渉計
US10269528B2 (en) 2013-09-19 2019-04-23 Sigray, Inc. Diverging X-ray sources using linear accumulation
US10297359B2 (en) 2013-09-19 2019-05-21 Sigray, Inc. X-ray illumination system with multiple target microstructures
US10295485B2 (en) 2013-12-05 2019-05-21 Sigray, Inc. X-ray transmission spectrometer system
EP3042383A1 (de) 2013-10-07 2016-07-13 Siemens Healthcare GmbH Phasenkontrast-röntgenbildgebungsvorrichtung und phasengitter für eine solche
US10304580B2 (en) 2013-10-31 2019-05-28 Sigray, Inc. Talbot X-ray microscope
USRE48612E1 (en) 2013-10-31 2021-06-29 Sigray, Inc. X-ray interferometric imaging system
US20150325322A1 (en) * 2014-05-08 2015-11-12 General Electric Company X-ray anti-scatter grid
US10401309B2 (en) 2014-05-15 2019-09-03 Sigray, Inc. X-ray techniques using structured illumination
DE102014221599A1 (de) * 2014-10-23 2016-04-28 Siemens Aktiengesellschaft Vorrichtung und Verfahren zur Röntgen-Phasenkontrast-Bildgebung
CN105628718A (zh) 2014-11-04 2016-06-01 同方威视技术股份有限公司 多能谱x射线光栅成像系统与成像方法
JP6633087B2 (ja) 2015-01-28 2020-01-22 レイア、インコーポレイテッドＬｅｉａ Ｉｎｃ． ３次元（３ｄ）電子ディスプレイ
CN106033133B (zh) * 2015-03-11 2019-09-17 同方威视技术股份有限公司 一种光栅、制造方法和辐射成像装置
US10352880B2 (en) 2015-04-29 2019-07-16 Sigray, Inc. Method and apparatus for x-ray microscopy
US10541061B2 (en) * 2015-06-29 2020-01-21 Koninklijke Philips N.V. System for generating and collimating an X-ray beam
US10295486B2 (en) 2015-08-18 2019-05-21 Sigray, Inc. Detector for X-rays with high spatial and high spectral resolution
US20180001111A1 (en) * 2016-06-30 2018-01-04 The Johns Hopkins University Method for optimizing radiation beam intensity profile shape using dual multiple aperture devices
EP3520697B1 (en) * 2016-09-27 2021-04-14 Shimadzu Corporation Radiation phase-contrast imaging device
US10247683B2 (en) 2016-12-03 2019-04-02 Sigray, Inc. Material measurement techniques using multiple X-ray micro-beams
JP6753342B2 (ja) * 2017-03-15 2020-09-09 株式会社島津製作所 放射線格子検出器およびｘ線検査装置
WO2018175570A1 (en) 2017-03-22 2018-09-27 Sigray, Inc. Method of performing x-ray spectroscopy and x-ray absorption spectrometer system
WO2019087605A1 (ja) * 2017-10-31 2019-05-09 株式会社島津製作所 Ｘ線位相差撮像システム
US10578566B2 (en) 2018-04-03 2020-03-03 Sigray, Inc. X-ray emission spectrometer system
WO2019236384A1 (en) 2018-06-04 2019-12-12 Sigray, Inc. Wavelength dispersive x-ray spectrometer
JP7117452B2 (ja) 2018-07-26 2022-08-12 シグレイ、インコーポレイテッド 高輝度反射型ｘ線源
US10656105B2 (en) 2018-08-06 2020-05-19 Sigray, Inc. Talbot-lau x-ray source and interferometric system
US10962491B2 (en) 2018-09-04 2021-03-30 Sigray, Inc. System and method for x-ray fluorescence with filtering
DE112019004478T5 (de) 2018-09-07 2021-07-08 Sigray, Inc. System und verfahren zur röntgenanalyse mit wählbarer tiefe
WO2021046059A1 (en) 2019-09-03 2021-03-11 Sigray, Inc. System and method for computed laminography x-ray fluorescence imaging
CN110833427B (zh) * 2019-11-29 2021-01-29 清华大学 光栅成像系统及其扫描方法
US11175243B1 (en) 2020-02-06 2021-11-16 Sigray, Inc. X-ray dark-field in-line inspection for semiconductor samples
US11217357B2 (en) 2020-02-10 2022-01-04 Sigray, Inc. X-ray mirror optics with multiple hyperboloidal/hyperbolic surface profiles
CN115667896B (zh) 2020-05-18 2024-06-21 斯格瑞公司 使用晶体分析器和多个检测元件的x射线吸收光谱的系统和方法
US11549895B2 (en) 2020-09-17 2023-01-10 Sigray, Inc. System and method using x-rays for depth-resolving metrology and analysis
WO2022126071A1 (en) 2020-12-07 2022-06-16 Sigray, Inc. High throughput 3d x-ray imaging system using a transmission x-ray source
US12480892B2 (en) 2020-12-07 2025-11-25 Sigray, Inc. High throughput 3D x-ray imaging system using a transmission x-ray source
CN113205899B (zh) * 2021-04-25 2023-02-28 中国工程物理研究院激光聚变研究中心 一种x射线折射闪耀光栅及制备方法
CN114371529B (zh) * 2022-01-30 2024-01-09 珠海莫界科技有限公司 一种堆叠光栅及ar显示装置
WO2023168204A1 (en) 2022-03-02 2023-09-07 Sigray, Inc. X-ray fluorescence system and x-ray source with electrically insulative target material
DE112023001408T5 (de) 2022-03-15 2025-02-13 Sigray, Inc. System und verfahren für die kompakte laminographie unter verwendung einer mikrofokus-transmissionsröntgenquelle und eines röntgendetektors mit variabler vergrösserung
CN119173759A (zh) 2022-05-02 2024-12-20 斯格瑞公司 X射线顺序阵列波长色散光谱仪
US12055737B2 (en) 2022-05-18 2024-08-06 GE Precision Healthcare LLC Aligned and stacked high-aspect ratio metallized structures
DE112024000873T5 (de) 2023-02-16 2026-01-15 Sigray, Inc. Röntgen-detektorsystem mit mindestens zwei gestapelten flachen bragg-diffraktoren
US12181423B1 (en) 2023-09-07 2024-12-31 Sigray, Inc. Secondary image removal using high resolution x-ray transmission sources
WO2025101530A1 (en) 2023-11-07 2025-05-15 Sigray, Inc. System and method for x-ray absorption spectroscopy using spectral information from two orthogonal planes
US12429436B2 (en) 2024-01-08 2025-09-30 Sigray, Inc. X-ray analysis system with focused x-ray beam and non-x-ray microscope
WO2025155719A1 (en) 2024-01-18 2025-07-24 Sigray, Inc. Sequential array of x-ray imaging detectors
WO2025174966A1 (en) 2024-02-15 2025-08-21 Sigray, Inc. System and method for generating a focused x‑ray beam
CN118131380A (zh) * 2024-04-03 2024-06-04 清华大学 高深宽比x射线光栅的制造方法及高深宽比x射线光栅

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4327966A (en) 1980-02-25 1982-05-04 Bell Telephone Laboratories, Incorporated Variable attenuator for laser radiation
US5812629A (en) 1997-04-30 1998-09-22 Clauser; John F. Ultrahigh resolution interferometric x-ray imaging
US6175615B1 (en) 1999-04-12 2001-01-16 General Electric Company Radiation imager collimator
DE102006037254B4 (de) * 2006-02-01 2017-08-03 Paul Scherer Institut Fokus-Detektor-Anordnung zur Erzeugung projektiver oder tomographischer Phasenkontrastaufnahmen mit röntgenoptischen Gittern, sowie Röntgen-System, Röntgen-C-Bogen-System und Röntgen-Computer-Tomographie-System
DE102006037281A1 (de) * 2006-02-01 2007-08-09 Siemens Ag Röntgenoptisches Durchstrahlungsgitter einer Fokus-Detektor-Anordnung einer Röntgenapparatur zur Erzeugung projektiver oder tomographischer Phasenkontrastaufnahmen von einem Untersuchungsobjekt
DE102006015356B4 (de) * 2006-02-01 2016-09-22 Siemens Healthcare Gmbh Verfahren zur Erzeugung projektiver und tomographischer Phasenkontrastaufnahmen mit einem Röntgen-System
CN101044987A (zh) * 2006-02-01 2007-10-03 西门子公司 产生投影的和断层造影的相位对比照片的x射线ct系统
US7400703B2 (en) * 2006-08-11 2008-07-15 General Electric Company Method and system for controlling radiation intensity of an imaging system

Also Published As

Publication number Publication date
WO2009128550A9 (en) 2011-01-27
CN102047344A (zh) 2011-05-04
US8243879B2 (en) 2012-08-14
CN102047344B (zh) 2013-11-06
US20100246764A1 (en) 2010-09-30
JP2009276342A (ja) 2009-11-26
EP2248135A1 (en) 2010-11-10
WO2009128550A1 (en) 2009-10-22

Similar Documents

Publication Publication Date Title
JP5451150B2 (ja) Ｘ線用線源格子、ｘ線位相コントラスト像の撮像装置
JP5459659B2 (ja) Ｘ線位相コントラスト像の撮像に用いられる位相格子、該位相格子を用いた撮像装置、ｘ線コンピューター断層撮影システム
CN106535769B (zh) X射线干涉成像系统
JP5896999B2 (ja) Ｘ線装置
US10352880B2 (en) Method and apparatus for x-ray microscopy
JP6460226B2 (ja) Ｘ線撮影装置
US20110013743A1 (en) Phase grating used for x-ray phase imaging, imaging apparatus for x-ray phase contrast image using phase grating, and x-ray computed tomography system
EP3465182A1 (en) Method and apparatus for x-ray microscopy
JP2010249533A (ja) タルボ・ロー干渉計用の線源格子
JP2013536403A (ja) 少なくとも二つの材料から成るｘ線撮像用の格子
JP2012093117A (ja) 放射線画像撮影用グリッド及びその製造方法、並びに放射線画像撮影システム
US20120148029A1 (en) Grid for use in radiation imaging, method for producing the same, and radiation imaging system
EP3538879B1 (en) Grating-based phase contrast imaging
JP2012122840A (ja) 放射線画像撮影用グリッド及びその製造方法、並びに、放射線画像撮影システム
JP5258504B2 (ja) Ｘ線位相イメージングに用いられる位相格子及びその製造方法、該位相格子を用いたｘ線位相コントラスト像の撮像装置、ｘ線コンピューター断層撮影システム
WO2012081376A1 (ja) 放射線画像撮影用グリッド及び放射線画像撮影システム
JP7442458B2 (ja) 均一なイメージングのための集束型シンチレータ構造のｘ線検出器
JP2012132793A (ja) 放射線画像撮影用グリッド及びその製造方法、並びに放射線画像撮影システム
WO2018168621A1 (ja) 放射線画像生成装置
JP2020038153A (ja) 放射線画像生成装置
JP2012130503A (ja) 放射線画像撮影用グリッド及びその製造方法、並びに放射線画像撮影システム
JP2012145539A (ja) 放射線画像撮影用グリッド及びその製造方法、並びに放射線画像撮影システム

Legal Events

Date Code Title Description
RD04 Notification of resignation of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7424

Effective date: 20100201

RD01 Notification of change of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7421

Effective date: 20100630

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20120409

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20120420

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20131203

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20131226

LAPS Cancellation because of no payment of annual fees