JP5421825B2 - 接合システム、接合方法、プログラム及びコンピュータ記憶媒体 - Google Patents
接合システム、接合方法、プログラム及びコンピュータ記憶媒体 Download PDFInfo
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- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
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- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
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- H01L21/67748—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a single workpiece
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- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
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- Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Robotics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Pressure Welding/Diffusion-Bonding (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Description
2 搬入出ステーション
3 処理ステーション
30 表面活性化装置
40 表面親水化装置
41 接合装置
60 ウェハ搬送領域
70 処理部
71 搬入出部
72 搬送部
300 制御装置
310 検査装置
350 熱処理装置
WU 上ウェハ
WU1 表面
WL 下ウェハ
WL1 表面
WT 重合ウェハ
Claims (14)
- 基板同士を接合する接合システムであって、
基板に所定の処理を行い、基板同士を接合する処理ステーションと、
基板又は基板同士が接合された重合基板をそれぞれ複数保有可能で、且つ前記処理ステーションに対して基板又は重合基板を搬入出する搬入出ステーションと、を備え、
前記処理ステーションは、
基板の接合される表面を活性化する表面活性化装置と、
前記表面活性化装置で活性化された基板の表面を親水化する表面親水化装置と、
前記表面親水化装置で表面が親水化された基板同士を接合する接合装置と、
前記表面活性化装置、前記表面親水化装置及び前記接合装置に対して、基板又は重合基板を搬送するための搬送領域と、を有し、
前記接合装置内の圧力は、前記搬送領域内の圧力に対して陽圧であり、
前記搬送領域内の圧力は、前記表面活性化装置内の圧力、前記表面親水化装置内の圧力及び前記搬入出ステーション内の圧力に対して陽圧であることを特徴とする、接合システム。 - 前記表面親水化装置は、基板の表面に純水を供給し、当該表面を親水化すると共に当該表面を洗浄することを特徴とする、請求項1に記載の接合システム。
- 前記搬送領域内の圧力は大気圧以上であることを特徴とする、請求項1または2のいずれかに記載の接合システム。
- 前記表面活性化装置は、基板の表面を活性化するための処理を行う処理部と、前記搬送領域との間で基板を搬入出するための搬入出部と、前記処理部と前記搬入出部との間で基板を搬送する搬送部と、を有し、
前記処理部内の圧力及び前記搬入出部内の圧力は、前記搬送部内の圧力に対して陽圧であることを特徴とする、請求項1〜3のいずれかに記載の接合システム。 - 前記接合装置で接合された重合基板を検査する検査装置を有することを特徴とする、請求項1〜4のいずれかに記載の接合システム。
- 前記接合装置で接合された重合基板を熱処理する熱処理装置を有することを特徴とする、請求項1〜5のいずれかに記載の接合システム。
- 基板同士を接合する方法であって、
表面活性化装置において、基板の接合される表面を活性化する表面活性化工程と、
その後、搬送領域を介して表面親水化装置に基板を搬送し、当該表面親水化装置において、基板の表面を親水化する表面親水化工程と、
その後、搬送領域を介して接合装置に基板を搬送し、当該接合装置において、前記表面活性化工程及び前記表面親水化工程が行われた基板同士を、ファンデルワールス力及び水素結合によって接合する接合工程と、を有し、
前記表面活性化工程、表面親水化工程及び接合工程を複数の基板に対して連続して行い、
前記接合装置内の圧力は、前記搬送領域内の圧力に対して陽圧であり、
前記搬送領域内の圧力は、前記表面活性化装置内の圧力及び前記表面親水化装置内の圧力に対して陽圧であることを特徴とする、接合方法。 - 前記表面親水化工程において、基板の表面に純水を供給し、当該表面を親水化すると共に当該表面を洗浄することを特徴とする、請求項7に記載の接合方法。
- 前記搬送領域内の圧力は大気圧以上であることを特徴とする、請求項7または8のいずれかに記載の接合方法。
- 前記表面活性化装置は、基板の表面を活性化するための処理を行う処理部と、前記搬送領域との間で基板を搬入出するための搬入出部と、前記処理部と前記搬入出部との間で基板を搬送する搬送部と、を有し、
前記処理部内の圧力及び前記搬入出部内の圧力は、前記搬送部内の圧力に対して陽圧であることを特徴とする、請求項7〜9のいずれかに記載の接合方法。 - 前記接合工程後、重合基板を検査する検査工程を有することを特徴とする、請求項7〜10のいずれかに記載の接合方法。
- 前記接合工程後、重合基板を熱処理する熱処理工程を有することを特徴とする、請求項7〜11のいずれかに記載の接合方法。
- 請求項7〜12のいずかに記載の接合方法を接合システムによって実行させるために、当該接合システムを制御する制御装置のコンピュータ上で動作するプログラム。
- 請求項13に記載のプログラムを格納した読み取り可能なコンピュータ記憶媒体。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
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JP2010051911A JP5421825B2 (ja) | 2010-03-09 | 2010-03-09 | 接合システム、接合方法、プログラム及びコンピュータ記憶媒体 |
SG2012061321A SG183391A1 (en) | 2010-03-09 | 2011-03-01 | Joint system, joint method, program and computer storage medium |
US13/581,353 US8795463B2 (en) | 2010-03-09 | 2011-03-01 | Joint system, joint method, program and computer storage medium |
CN201180006442.1A CN102714139B (zh) | 2010-03-09 | 2011-03-01 | 接合系统和接合方法 |
KR1020127023413A KR101430852B1 (ko) | 2010-03-09 | 2011-03-01 | 접합 시스템, 접합 방법, 프로그램 및 컴퓨터 기억 매체 |
PCT/JP2011/054606 WO2011111565A1 (ja) | 2010-03-09 | 2011-03-01 | 接合システム、接合方法、プログラム及びコンピュータ記憶媒体 |
TW100107736A TWI482254B (zh) | 2010-03-09 | 2011-03-08 | Bonding system, bonding method and computer memory media |
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JP2010051911A JP5421825B2 (ja) | 2010-03-09 | 2010-03-09 | 接合システム、接合方法、プログラム及びコンピュータ記憶媒体 |
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JP5421825B2 true JP5421825B2 (ja) | 2014-02-19 |
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US (1) | US8795463B2 (ja) |
JP (1) | JP5421825B2 (ja) |
KR (1) | KR101430852B1 (ja) |
CN (1) | CN102714139B (ja) |
SG (1) | SG183391A1 (ja) |
TW (1) | TWI482254B (ja) |
WO (1) | WO2011111565A1 (ja) |
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US10381254B2 (en) * | 2011-11-29 | 2019-08-13 | Taiwan Semiconductor Manufacturing Co., Ltd. | Wafer debonding and cleaning apparatus and method |
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