JP5403200B2 - 圧力センサ - Google Patents

圧力センサ Download PDF

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Publication number
JP5403200B2
JP5403200B2 JP2006161434A JP2006161434A JP5403200B2 JP 5403200 B2 JP5403200 B2 JP 5403200B2 JP 2006161434 A JP2006161434 A JP 2006161434A JP 2006161434 A JP2006161434 A JP 2006161434A JP 5403200 B2 JP5403200 B2 JP 5403200B2
Authority
JP
Japan
Prior art keywords
diaphragm
pressure sensor
pressure
flexible
thick
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2006161434A
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English (en)
Japanese (ja)
Other versions
JP2007327922A (ja
JP2007327922A5 (enExample
Inventor
俊信 櫻井
潤 渡辺
幸浩 海野
教史 清水
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2006161434A priority Critical patent/JP5403200B2/ja
Publication of JP2007327922A publication Critical patent/JP2007327922A/ja
Publication of JP2007327922A5 publication Critical patent/JP2007327922A5/ja
Application granted granted Critical
Publication of JP5403200B2 publication Critical patent/JP5403200B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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  • Measuring Fluid Pressure (AREA)
JP2006161434A 2006-06-09 2006-06-09 圧力センサ Expired - Fee Related JP5403200B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006161434A JP5403200B2 (ja) 2006-06-09 2006-06-09 圧力センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006161434A JP5403200B2 (ja) 2006-06-09 2006-06-09 圧力センサ

Publications (3)

Publication Number Publication Date
JP2007327922A JP2007327922A (ja) 2007-12-20
JP2007327922A5 JP2007327922A5 (enExample) 2008-06-26
JP5403200B2 true JP5403200B2 (ja) 2014-01-29

Family

ID=38928484

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006161434A Expired - Fee Related JP5403200B2 (ja) 2006-06-09 2006-06-09 圧力センサ

Country Status (1)

Country Link
JP (1) JP5403200B2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013250063A (ja) * 2012-05-30 2013-12-12 Seiko Epson Corp 圧力センサー素子および電子機器

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5305028B2 (ja) * 2008-10-16 2013-10-02 セイコーエプソン株式会社 圧力センサー
JP4973718B2 (ja) * 2009-01-27 2012-07-11 セイコーエプソン株式会社 圧力検出ユニット、及び圧力センサー
JP4998860B2 (ja) 2009-02-26 2012-08-15 セイコーエプソン株式会社 圧力センサー素子、圧力センサー
JP2010230401A (ja) * 2009-03-26 2010-10-14 Seiko Epson Corp 圧力センサー
JP5293413B2 (ja) * 2009-06-02 2013-09-18 セイコーエプソン株式会社 圧力センサー及びその製造方法
JP2011221007A (ja) 2010-03-25 2011-11-04 Seiko Epson Corp 圧力検出装置
CN115234697B (zh) * 2022-08-11 2023-10-13 苏州协昌环保科技股份有限公司 电磁脉冲阀

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54162491A (en) * 1978-06-13 1979-12-24 Mitsubishi Electric Corp Semiconductor pressure transducer
JPH01102736U (enExample) * 1987-12-25 1989-07-11
JPH04204226A (ja) * 1990-11-30 1992-07-24 Fujikura Ltd 半導体圧力センサ
JPH06241930A (ja) * 1993-02-17 1994-09-02 Fuji Electric Co Ltd 半導体圧力センサ
JP2585639Y2 (ja) * 1993-03-30 1998-11-25 株式会社ワコー 圧電素子を用いた加速度センサ
GB9321398D0 (en) * 1993-10-16 1993-12-08 Lucas Ind Plc Differential pressure transducer
JPH07209121A (ja) * 1994-01-26 1995-08-11 Omron Corp 圧力センサ及びその製造方法
JP4540775B2 (ja) * 1999-10-27 2010-09-08 キヤノンアネルバ株式会社 サーボ式静電容量型真空センサ
JP2004053329A (ja) * 2002-07-18 2004-02-19 Hitachi Ltd 半導体センサ組み立て体およびタイヤモニタセンサ
JP2004132913A (ja) * 2002-10-11 2004-04-30 Toyo Commun Equip Co Ltd 感圧素子、及びこれを用いた圧力センサ
JP4828804B2 (ja) * 2003-06-26 2011-11-30 京セラ株式会社 セラミックダイアフラム及びその製法並びに圧力センサ
JP2006126127A (ja) * 2004-11-01 2006-05-18 Alps Electric Co Ltd 静電容量型圧力センサ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013250063A (ja) * 2012-05-30 2013-12-12 Seiko Epson Corp 圧力センサー素子および電子機器

Also Published As

Publication number Publication date
JP2007327922A (ja) 2007-12-20

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