JP5344120B2 - アクチュエータ装置及びその製造方法並びに液体噴射ヘッド - Google Patents
アクチュエータ装置及びその製造方法並びに液体噴射ヘッド Download PDFInfo
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Description
(実施形態1)
図1は、本発明の実施形態1に係る液体噴射ヘッドの一例であるインクジェット式記録ヘッドの概略構成を示す分解斜視図であり、図2は、図1の平面図及びそのA−A′断面図である。
実施形態1では、弾性膜50上にTi膜52及びZr膜54を形成し、それらを熱酸化して中間膜53及び絶縁体膜55を同時に形成するようにしたが、弾性膜50上に酸化チタンからなる中間層を形成した後、Zr膜54を形成し、そのZr膜54を熱酸化して絶縁体膜55を形成してもよい。
上述した実施形態では、弾性膜50と絶縁体膜55との間に、酸化チタンからなる中間膜53を設けたが、例えば酸化アルミニウム(Al2O3)、酸化イットリウム(Y2O3)や、酸化セリウム(CeO2)を含むランタノイド酸化物からなる群から選択される少なくとも1種の材料からなる中間層を設け、その中間層と酸化ジルコニウムからなる絶縁体膜との間にそれらの拡散反応により生じた部分安定化ジルコニウム膜(層)を設けてもよい。
以上、上述した実施形態1では、アクチュエータ装置を備えた液体噴射ヘッドの一例としてインクジェット式記録ヘッドを挙げて説明したが、本発明は広く液体噴射ヘッド全般を対象としたものであり、インク以外の液体を噴射する液体噴射ヘッドにも勿論適用することができる。その他の液体噴射ヘッドとしては、例えば、プリンタ等の画像記録装置に用いられる各種の記録ヘッド、液晶ディスプレー等のカラーフィルタの製造に用いられる色材噴射ヘッド、有機ELディスプレー、FED(電界放出ディスプレー)等の電極形成に用いられる電極材料噴射ヘッド、バイオchip製造に用いられる生体有機物噴射ヘッド等が挙げられる。
Claims (8)
- 熱酸化によって生成されたケイ素酸化物層を少なくとも表面の一部に有する基板上にジルコニウム酸化物層を介して変位可能に設けられた下電極、圧電体層及び上電極からなる圧電素子を具備し、
前記ケイ素酸化物層と前記ジルコニウム酸化物層との間に、チタン酸化物、ハフニウム酸化物、アルミニウム酸化物、カルシウム酸化物及び希土類酸化物からなる群から選択される少なくとも1種の材料からなる中間層が設けられていることを特徴とするアクチュエータ装置。 - 前記中間層が、アルミニウム酸化物、カルシウム酸化物及び希土類酸化物からなる群から選択される少なくとも1種の材料からなり、
前記中間層と前記ジルコニウム酸化物層との間にそれらの拡散反応により生じた部分安定化ジルコニウム層が設けられていることを特徴とする請求項1に記載のアクチュエータ装置。 - 前記中間層は、非晶質であることを特徴とする請求項1又は2記載のアクチュエータ装置。
- 前記中間層の厚さが5〜50nmであることを特徴とする請求項1〜3の何れか一項に記載のアクチュエータ装置。
- 液体を噴射するノズル開口に連通する圧力発生室が設けられた流路形成基板と、該流路形成基板の一方面側に前記圧力発生室に圧力変化を生じさせる圧力発生手段として請求項1〜4の何れか一項に記載のアクチュエータ装置を具備することを特徴とする液体噴射ヘッド。
- 熱酸化によって基板の少なくとも表面の一部にケイ素酸化物層を形成する工程と、
前記ケイ素酸化物層上にチタン酸化物、ハフニウム酸化物、アルミニウム酸化物、カルシウム酸化物及び希土類酸化物からなる群から選択される少なくとも1種の材料からなる中間層を形成する工程と、
前記中間層上に前記ジルコニウム酸化物層を形成する工程と、
前記ジルコニウム酸化物層上に、下電極、圧電体層及び上電極を有する圧電素子を形成する工程と、を具備することを特徴とするアクチュエータ装置の製造方法。 - 前記中間層はチタン酸化物からなり、
前記ケイ素酸化物層上にチタン層を設けると共に該チタン層上にジルコニウム層を設けた後、前記チタン層と前記ジルコニウム層とに熱酸化処理を行い、
前記熱酸化処理にて前記中間層と前記ジルコニウム酸化物層とを同時に形成することを特徴とする請求項6に記載のアクチュエータ装置の製造方法。 - 前記中間層は、アルミニウム酸化物、カルシウム酸化物、希土類酸化物及びこれらの酸化物からなる群から選択される少なくとも1種の材料からなり、
前記ケイ素酸化物層上に、前記材料を構成する金属からなる金属層を形成し、該金属層上にジルコニウム層を設けた後、前記金属層と前記ジルコニウム層とに熱酸化処理を行い、
前記熱酸化処理にて前記中間層と、前記ジルコニウム酸化物層と、前記中間層と前記ジルコニウム酸化物層との間に前記中間層と前記ジルコニウム酸化物層との拡散反応により生じた部分安定化ジルコニウム層と、を形成することを特徴とする請求項6に記載のアクチュエータ装置の製造方法。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
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JP2008169799A JP5344120B2 (ja) | 2007-07-05 | 2008-06-30 | アクチュエータ装置及びその製造方法並びに液体噴射ヘッド |
US12/166,943 US8007080B2 (en) | 2007-07-05 | 2008-07-02 | Actuator device, method of manufacturing the same and liquid-jet head |
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JP5828368B2 (ja) * | 2010-12-14 | 2015-12-02 | セイコーエプソン株式会社 | 液体噴射ヘッド、液体噴射装置、圧電素子及び圧電センサー |
JP2012215518A (ja) * | 2011-04-01 | 2012-11-08 | Rohm Co Ltd | 圧電薄膜構造および角速度検出装置 |
JP5909656B2 (ja) * | 2011-04-21 | 2016-04-27 | パナソニックIpマネジメント株式会社 | 誘電体素子用基材とその製造方法、並びにこの誘電体素子用基材を用いた圧電体素子 |
US9188442B2 (en) * | 2012-03-13 | 2015-11-17 | Bei Sensors & Systems Company, Inc. | Gyroscope and devices with structural components comprising HfO2-TiO2 material |
JP6476633B2 (ja) * | 2014-07-31 | 2019-03-06 | セイコーエプソン株式会社 | 圧電デバイス |
JP6948763B2 (ja) * | 2015-12-21 | 2021-10-13 | セイコーエプソン株式会社 | 圧電素子応用デバイス |
CN110601673B (zh) * | 2019-08-12 | 2021-08-13 | 清华大学 | 基于铪系铁电薄膜的声表面波器件及薄膜体声波器件 |
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US5933167A (en) * | 1995-04-03 | 1999-08-03 | Seiko Epson Corporation | Printer head for ink jet recording |
JP4340048B2 (ja) * | 2001-08-28 | 2009-10-07 | セイコーエプソン株式会社 | 液体噴射ヘッド及び液体噴射装置 |
JP2003110158A (ja) | 2001-09-28 | 2003-04-11 | Seiko Epson Corp | 圧電体薄膜素子およびその製造方法、ならびにこれを用いたインクジェット記録ヘッド及びインクジェットプリンタ |
JP4645024B2 (ja) | 2003-11-28 | 2011-03-09 | セイコーエプソン株式会社 | アクチュエータ装置の製造方法 |
JP4590854B2 (ja) * | 2003-10-28 | 2010-12-01 | セイコーエプソン株式会社 | 圧電体デバイスの製造方法 |
JP4737375B2 (ja) | 2004-03-11 | 2011-07-27 | セイコーエプソン株式会社 | アクチュエータ装置の製造方法及び液体噴射ヘッドの製造方法並びに液体噴射装置の製造方法 |
JP2006216685A (ja) * | 2005-02-02 | 2006-08-17 | Seiko Epson Corp | 単結晶強誘電体薄膜並びにこれを用いた液体噴射ヘッド及び液体噴射装置 |
JP2006245247A (ja) * | 2005-03-02 | 2006-09-14 | Seiko Epson Corp | 圧電素子及びその製造方法、液体噴射ヘッド及びその製造方法並びに液体噴射装置 |
JP2007116005A (ja) * | 2005-10-21 | 2007-05-10 | Seiko Epson Corp | アクチュエータ装置の製造方法、及び液体噴射ヘッドの製造方法 |
JP4831304B2 (ja) * | 2005-11-11 | 2011-12-07 | セイコーエプソン株式会社 | 圧電体膜、圧電素子、圧電アクチュエータ、液体噴射ヘッド、表面弾性波素子およびデバイス |
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