JP5320006B2 - 露光描画装置 - Google Patents

露光描画装置 Download PDF

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Publication number
JP5320006B2
JP5320006B2 JP2008258110A JP2008258110A JP5320006B2 JP 5320006 B2 JP5320006 B2 JP 5320006B2 JP 2008258110 A JP2008258110 A JP 2008258110A JP 2008258110 A JP2008258110 A JP 2008258110A JP 5320006 B2 JP5320006 B2 JP 5320006B2
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Japan
Prior art keywords
discharge lamp
light
line
exposure drawing
drawing apparatus
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JP2008258110A
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Japanese (ja)
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JP2010085954A5 (https=
JP2010085954A (ja
Inventor
康彦 屋木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Orc Manufacturing Co Ltd
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Orc Manufacturing Co Ltd
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Application filed by Orc Manufacturing Co Ltd filed Critical Orc Manufacturing Co Ltd
Priority to JP2008258110A priority Critical patent/JP5320006B2/ja
Publication of JP2010085954A publication Critical patent/JP2010085954A/ja
Publication of JP2010085954A5 publication Critical patent/JP2010085954A5/ja
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  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Discharge Lamps And Accessories Thereof (AREA)
JP2008258110A 2008-10-03 2008-10-03 露光描画装置 Active JP5320006B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008258110A JP5320006B2 (ja) 2008-10-03 2008-10-03 露光描画装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008258110A JP5320006B2 (ja) 2008-10-03 2008-10-03 露光描画装置

Publications (3)

Publication Number Publication Date
JP2010085954A JP2010085954A (ja) 2010-04-15
JP2010085954A5 JP2010085954A5 (https=) 2011-11-04
JP5320006B2 true JP5320006B2 (ja) 2013-10-23

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ID=42249932

Family Applications (1)

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JP2008258110A Active JP5320006B2 (ja) 2008-10-03 2008-10-03 露光描画装置

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JP (1) JP5320006B2 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5723652B2 (ja) 2011-03-30 2015-05-27 株式会社オーク製作所 測光装置および露光装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53678A (en) * 1976-06-23 1978-01-06 Hitachi Ltd Metal steam discharge lamp
JPS5397279A (en) * 1977-02-04 1978-08-25 Toshiba Corp Metal halide lamp
JPH03171546A (ja) * 1989-11-29 1991-07-25 Iwasaki Electric Co Ltd メタルハライドランプ
JP3177230B2 (ja) * 1999-05-25 2001-06-18 松下電子工業株式会社 金属蒸気放電ランプ
JP2007026675A (ja) * 2003-06-24 2007-02-01 Matsushita Electric Ind Co Ltd 光照射装置、光照射装置用ランプおよび光照射方法
JP2006344383A (ja) * 2003-06-24 2006-12-21 Matsushita Electric Ind Co Ltd 光照射装置
JP4400125B2 (ja) * 2003-07-30 2010-01-20 ウシオ電機株式会社 ショートアーク型放電ランプ点灯装置
JP4345401B2 (ja) * 2003-08-13 2009-10-14 ウシオ電機株式会社 高圧水銀ランプ装置
JP2006073538A (ja) * 2005-09-14 2006-03-16 Harison Toshiba Lighting Corp メタルハライドランプ、メタルハライドランプ点灯装置および自動車用前照灯装置
JP2008191252A (ja) * 2007-02-01 2008-08-21 Phoenix Denki Kk 露光用光源ならびにこれを用いた露光装置

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Publication number Publication date
JP2010085954A (ja) 2010-04-15

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