JP5311772B2 - 接着フィルム - Google Patents
接着フィルム Download PDFInfo
- Publication number
- JP5311772B2 JP5311772B2 JP2007168964A JP2007168964A JP5311772B2 JP 5311772 B2 JP5311772 B2 JP 5311772B2 JP 2007168964 A JP2007168964 A JP 2007168964A JP 2007168964 A JP2007168964 A JP 2007168964A JP 5311772 B2 JP5311772 B2 JP 5311772B2
- Authority
- JP
- Japan
- Prior art keywords
- adhesive layer
- adhesive
- conductive particles
- electrical component
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000002313 adhesive film Substances 0.000 title claims description 42
- 239000012790 adhesive layer Substances 0.000 claims description 136
- 239000002245 particle Substances 0.000 claims description 91
- 239000000758 substrate Substances 0.000 claims description 49
- 229920005989 resin Polymers 0.000 claims description 23
- 239000011347 resin Substances 0.000 claims description 23
- 229920001187 thermosetting polymer Polymers 0.000 claims description 20
- 239000010410 layer Substances 0.000 claims description 18
- 238000000034 method Methods 0.000 claims description 5
- 239000000853 adhesive Substances 0.000 description 20
- 230000001070 adhesive effect Effects 0.000 description 20
- 239000003795 chemical substances by application Substances 0.000 description 13
- 230000000052 comparative effect Effects 0.000 description 9
- 239000000463 material Substances 0.000 description 9
- 239000011248 coating agent Substances 0.000 description 8
- 238000000576 coating method Methods 0.000 description 8
- 239000011521 glass Substances 0.000 description 8
- 238000002156 mixing Methods 0.000 description 8
- 102100023620 Neutrophil cytosol factor 1 Human genes 0.000 description 7
- 101710120102 Neutrophil cytosol factor 1 Proteins 0.000 description 7
- 229920000647 polyepoxide Polymers 0.000 description 7
- 229920005992 thermoplastic resin Polymers 0.000 description 7
- 102100023618 Neutrophil cytosol factor 2 Human genes 0.000 description 6
- 101710120095 Neutrophil cytosol factor 2 Proteins 0.000 description 6
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 6
- 239000003822 epoxy resin Substances 0.000 description 6
- 229920006287 phenoxy resin Polymers 0.000 description 6
- 239000013034 phenoxy resin Substances 0.000 description 6
- 239000011230 binding agent Substances 0.000 description 5
- 239000011256 inorganic filler Substances 0.000 description 5
- 229910003475 inorganic filler Inorganic materials 0.000 description 5
- 239000007788 liquid Substances 0.000 description 5
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 238000003825 pressing Methods 0.000 description 4
- 239000002904 solvent Substances 0.000 description 4
- 239000004593 Epoxy Substances 0.000 description 3
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- 239000006087 Silane Coupling Agent Substances 0.000 description 3
- 238000009413 insulation Methods 0.000 description 3
- 238000006116 polymerization reaction Methods 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 239000004809 Teflon Substances 0.000 description 2
- 229920006362 Teflon® Polymers 0.000 description 2
- 150000001412 amines Chemical class 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- HTVITOHKHWFJKO-UHFFFAOYSA-N Bisphenol B Chemical compound C=1C=C(O)C=CC=1C(C)(CC)C1=CC=C(O)C=C1 HTVITOHKHWFJKO-UHFFFAOYSA-N 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 125000002091 cationic group Chemical group 0.000 description 1
- 238000002788 crimping Methods 0.000 description 1
- 125000003983 fluorenyl group Chemical group C1(=CC=CC=2C3=CC=CC=C3CC12)* 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 239000003094 microcapsule Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 150000001451 organic peroxides Chemical class 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920001225 polyester resin Polymers 0.000 description 1
- 239000004645 polyester resin Substances 0.000 description 1
- 238000010526 radical polymerization reaction Methods 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000002076 thermal analysis method Methods 0.000 description 1
- 229920006230 thermoplastic polyester resin Polymers 0.000 description 1
- 229920002803 thermoplastic polyurethane Polymers 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
- H01R4/00—Electrically-conductive connections between two or more conductive members in direct contact, i.e. touching one another; Means for effecting or maintaining such contact; Electrically-conductive connections having two or more spaced connecting locations for conductors and using contact members penetrating insulation
- H01R4/04—Electrically-conductive connections between two or more conductive members in direct contact, i.e. touching one another; Means for effecting or maintaining such contact; Electrically-conductive connections having two or more spaced connecting locations for conductors and using contact members penetrating insulation using electrically conductive adhesives
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J7/00—Adhesives in the form of films or foils
- C09J7/30—Adhesives in the form of films or foils characterised by the adhesive composition
- C09J7/35—Heat-activated
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J7/00—Adhesives in the form of films or foils
- C09J7/10—Adhesives in the form of films or foils without carriers
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J7/00—Adhesives in the form of films or foils
- C09J7/20—Adhesives in the form of films or foils characterised by their carriers
- C09J7/22—Plastics; Metallised plastics
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J9/00—Adhesives characterised by their physical nature or the effects produced, e.g. glue sticks
- C09J9/02—Electrically-conducting adhesives
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B5/00—Non-insulated conductors or conductive bodies characterised by their form
- H01B5/16—Non-insulated conductors or conductive bodies characterised by their form comprising conductive material in insulating or poorly conductive material, e.g. conductive rubber
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L24/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
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- H01L24/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
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- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
- H05K3/321—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by conductive adhesives
- H05K3/323—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by conductive adhesives by applying an anisotropic conductive adhesive layer over an array of pads
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- C09J2203/00—Applications of adhesives in processes or use of adhesives in the form of films or foils
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- C—CHEMISTRY; METALLURGY
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- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J2203/00—Applications of adhesives in processes or use of adhesives in the form of films or foils
- C09J2203/326—Applications of adhesives in processes or use of adhesives in the form of films or foils for bonding electronic components such as wafers, chips or semiconductors
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J2301/00—Additional features of adhesives in the form of films or foils
- C09J2301/20—Additional features of adhesives in the form of films or foils characterized by the structural features of the adhesive itself
- C09J2301/208—Additional features of adhesives in the form of films or foils characterized by the structural features of the adhesive itself the adhesive layer being constituted by at least two or more adjacent or superposed adhesive layers, e.g. multilayer adhesive
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- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
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- C09J2301/00—Additional features of adhesives in the form of films or foils
- C09J2301/30—Additional features of adhesives in the form of films or foils characterized by the chemical, physicochemical or physical properties of the adhesive or the carrier
- C09J2301/304—Additional features of adhesives in the form of films or foils characterized by the chemical, physicochemical or physical properties of the adhesive or the carrier the adhesive being heat-activatable, i.e. not tacky at temperatures inferior to 30°C
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J2301/00—Additional features of adhesives in the form of films or foils
- C09J2301/30—Additional features of adhesives in the form of films or foils characterized by the chemical, physicochemical or physical properties of the adhesive or the carrier
- C09J2301/314—Additional features of adhesives in the form of films or foils characterized by the chemical, physicochemical or physical properties of the adhesive or the carrier the adhesive layer and/or the carrier being conductive
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
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- C09J2301/00—Additional features of adhesives in the form of films or foils
- C09J2301/40—Additional features of adhesives in the form of films or foils characterized by the presence of essential components
- C09J2301/408—Additional features of adhesives in the form of films or foils characterized by the presence of essential components additives as essential feature of the adhesive layer
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- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
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- H01L2224/293—Base material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
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Description
基板の端子が配置された面と、電気部品の端子が配置された面の間に異方導電性接着剤を配置し、加熱押圧すると、軟化したバインダーが基板の端子と電気部品の端子の間から押し退けられ、導電性粒子が基板の端子と電気部品の端子の間に挟みこまれ、基板と電気部品が電気的に接続される。
また、導電性粒子が基板の端子と電気部品の端子との間から押し退けられると、基板の端子と電気部品の端子とで、導電性粒子が挟み込まれる数が少なくなり、導通信頼性も劣る。
本発明は2層構造を有する接着フィルムであって、前記第二の接着剤層の前記最低粘度は、前記導電性粒子が含有された状態の前記第一の接着剤層の前記最低粘度の0.05倍以上0.2倍以下にされた2層構造を有する接着フィルムである。
本発明は2層構造を有する接着フィルムであって、前記導電性粒子の捕捉効率が70%以上である2層構造を有する接着フィルムである。
本発明は2層構造を有する接着フィルムであって、前記導電性粒子が膜厚方向に2個以上積み重ならない2層構造を有する接着フィルムである。
本発明は、熱硬化性樹脂を含有し、互いに密着された第一、第二の接着剤層を有し、前記第一の接着剤層は、硬化が開始する硬化開始温度以下での最低粘度が、前記第二の接着剤層の、硬化が開始する硬化開始温度以下での最低粘度よりも高くされ、前記第一、第二の接着剤層を基板側と電気部品側にそれぞれ向け、前記基板と前記電気部品同士を加熱押圧すると、前記電気部品が前記基板に接続される接着フィルムであって、前記第一の接着剤層には導電性粒子が分散され、前記第一の接着剤層の膜厚は、前記導電性粒子の平均粒径の2倍未満にされ、前記第二の接着剤層の前記最低粘度は、前記導電性粒子が含有された状態の前記第一の接着剤層の前記最低粘度の0.05倍以上0.2倍以下にされ、前記導電性粒子が膜厚方向に2個以上積み重ならない接着フィルムである。
本発明は上記いずれかの接着フィルムを前記基板と前記電気部品の間に配置し、前記第一の接着剤層を前記基板の第一の端子が設けられた面に接触させ、前記第二の接着剤層を前記電気部品の第二の端子が設けられた面に接触させて前記基板と前記電気部品同士を加熱押圧し、前記電気部品を前記基板に接着すると共に、前記第一の端子と前記第二の端子を前記導電性粒子によって電気的に接続する電気部品の搭載方法である。
本発明は上記いずれかの接着フィルムと、前記基板と、前記電気部品とを有し、前記第一の接着剤層は前記基板の第一の端子が設けられた面に接触され、前記第二の接着剤層は前記電気部品の第二の端子が設けられた面に接触されて前記電気部品は前記基板に接着され、前記第一の端子と前記第二の端子は前記導電性粒子によって電気的に接続された電気部品搭載基板である。
熱硬化性樹脂を含有する接着剤が昇温すると、図5に示すように、接着剤はある温度範囲までは、温度が高くなる程粘度が低下するが、ある温度(ここでは約100℃)を超えると、熱硬化性樹脂の重合が開始して接着剤が硬化するため、粘度が上昇に転じる。
図5の符号Aは導電性粒子が分散された状態の接着剤(第一の接着剤層)の粘度と温度の関係を示し、同図の符号Nは導電性粒子が分散されていない接着剤(第二の接着剤層)の粘度と温度の関係を示している。
接着フィルム10は、第一の接着剤層11と、第一の接着剤層11の表面に配置された第二の接着剤層12と、第一の接着剤層11に分散された導電性粒子15とを有している。導電性粒子15は第一の接着剤層11だけに分散されており、第二の接着剤層12には導電性粒子は分散されていない。
切り出した接着フィルム10に剥離フィルム19が密着している場合は、仮貼り前、又は仮貼り後に、剥離フィルム19を剥離し、第二の接着剤層12表面を露出させる。
しかも、第一の接着剤層11の最低粘度は第二の接着剤層12の最低粘度よりも高いから、第一の接着剤層11はより一層隣接する第一の端子35間に流れ込み難い。
固形樹脂であるフェノキシ樹脂を溶剤(トルエン/酢酸エチル=1/1)に溶解させて固形分30重量%の溶解品を得た。
次いで、溶解品に、硬化剤と、エポキシ樹脂と、無機フィラーと、シランカップリング剤と、導電性粒子とを、フェノキシ樹脂に対する配合割合が、下記表1の「ACF」の欄に記載した配合割合になるように添加、混合し、最終的に固形分が40重量%になるようトルエンで調整した接続材料の溶解品を作成した。
上記表1のACF、NCF−1、NCF−2に示す配合割合で作成した接着剤層をそれぞれ重ね合わせて100μm厚にした物を用いて、応力制御型レオメーター(Haake社製RS150)を用い、最低粘度と、最低粘度に到達するときの温度(到達温度)とを測定した。尚、コーンとしては直径8mm、角度2度のものを使用し、測定範囲は30℃〜250℃とした。測定結果を下記表2に記載する。
膜厚4μmのACFと、膜厚14μmのNCF−1、NCF−2を、下記表3の組み合わせで貼り合わせて、実施例1、比較例2の接着フィルムを作成した。
被着体として、ICチップ(評価用IC、材質:シリコン、寸法:6.0mm×6.0mm、厚さ:0.4mm、バンプ:金スタッド、バンプ厚:20μm、バンプ面積:60μm×60μm、バンプ間スペース20μm、ピッチ:80μm)と、ITOコーティングガラス(評価用ITOガラス、コーニング社製、品名:1737F、ガラスサイズ:縦50mm×横30mm×厚さ0.5mm、ITOパッドサイズ:60μm×60μm、ピッチ:80μm)を用意した。
尚、バンプとITOパッドは表面の大きさが60μm×60μmであるから、バンプとITOパッドが接続される接続面積は3600μm2である。
本圧着後に、20個のバンプについて、各バンプの下に残っている導電性粒子を数えた。
捕捉効率は、本圧着後に何個の粒子がどれだけ捕捉されたかをパーセンテージで示した値である。具体的には、ICチップを仮固定した際に、20個のバンプについて、各バンプ下に存在する導電性粒子の数(平均)を調べ、その導電性粒子の数と、本圧着後の粒子捕捉数(平均)とを下記式(1)に代入し、求めた。
[導通抵抗]
本圧着後に、ICチップのバンプとITOパッド間の導通抵抗(単位:Ω)を求めた。「粒子捕捉数」の最大値、最小値、平均と、「捕捉効率」と、「導通抵抗」の測定結果を下記表4に記載する。
実施例1、2、比較例1、2の接着フィルムを用いて、上記ICチップとITOコーティングガラスを接続する際に、バンプとITOパッドとが水平方向に10μm離れるようにミスアライメントした以外は、上記「実装工程」と同じ条件で接続体を作成した。隣接するITOパッド間に30Vの電圧を加え絶縁抵抗を測定し、絶縁抵抗が1.0×10-6Ω以下をショートとし、ショート発生数を数えた(初期)。
例えば、第二の接着剤層12の材料を溶剤に溶解又は分散させた塗液を作成し、該塗液を第一の接着剤層11の表面に塗布後、乾燥すれば、第二の接着剤層12を第一の接着剤層11表面に密着配置することができる。
第一、第二の接着剤層11、12は、同じ剥離フィルム19の表面と裏面に密着する場合に限定されず、それぞれ別々の剥離フィルム19に密着させてもよい。
第一、第二の接着剤層11、12の材料は、上記表1に記載されたものに限定されない。例えば、熱硬化性樹脂としては、エポキシ樹脂以外にも、ウレタン樹脂、熱硬化性ポリエステル樹脂等種々のものを用いることができる。
硬化剤も特に限定されず、例えば熱硬化性樹脂がエポキシ樹脂の場合、マイクロカプセル化されたアミン系硬化剤を用いればエポキシ樹脂がアニオン重合し、オニウム塩を硬化剤に用いればエポキシ樹脂がカチオン重合し、また熱硬化性ポリエステルの場合は有機過酸化物を硬化剤に用いればラジカル重合する。
導電性粒子15も特に限定されず、金属粒子、樹脂粒子の表面に金属メッキ層が形成されたもの等種々のものを用いることができる。
第一の接着剤層11の膜厚は特に限定されないが、導電性粒子15の平均粒径の2倍未満が望ましく、特に導電性粒子15の平均粒径の50%以上150%以下が望ましい。
Claims (7)
- 熱硬化性樹脂を含有し、互いに密着された第一、第二の接着剤層を有し、
前記第一の接着剤層は、硬化が開始する硬化開始温度以下での最低粘度が、前記第二の接着剤層の、硬化が開始する硬化開始温度以下での最低粘度よりも高くされ、
前記第一、第二の接着剤層を基板側と電気部品側にそれぞれ向け、前記基板と前記電気部品同士を加熱押圧すると、前記電気部品が前記基板に接続される2層構造を有する接着フィルムであって、
前記第一の接着剤層には導電性粒子が分散され、
前記第一の接着剤層の膜厚は、前記導電性粒子の平均粒径の2倍未満にされ、
前記第一の接着剤層が前記最低粘度となる温度と、前記第二の接着剤層が前記最低粘度となる温度の差が10℃以下である2層構造を有し、
前記導電性粒子が膜厚方向に2個以上積み重ならないようにされた接着フィルム。 - 前記第二の接着剤層の前記最低粘度は、前記導電性粒子が含有された状態の前記第一の接着剤層の前記最低粘度の0.05倍以上0.2倍以下にされた請求項1記載の2層構造を有する接着フィルム。
- 前記導電性粒子の捕捉効率が70%以上である請求項1記載の2層構造を有する接着フィルム。
- 前記導電性粒子が膜厚方向に2個以上積み重ならない請求項1記載の2層構造を有する接着フィルム。
- 熱硬化性樹脂を含有し、互いに密着された第一、第二の接着剤層を有し、
前記第一の接着剤層は、硬化が開始する硬化開始温度以下での最低粘度が、前記第二の接着剤層の、硬化が開始する硬化開始温度以下での最低粘度よりも高くされ、
前記第一、第二の接着剤層を基板側と電気部品側にそれぞれ向け、前記基板と前記電気部品同士を加熱押圧すると、前記電気部品が前記基板に接続される接着フィルムであって、
前記第一の接着剤層には導電性粒子が分散され、
前記第一の接着剤層の膜厚は、前記導電性粒子の平均粒径の2倍未満にされ、
前記第二の接着剤層の前記最低粘度は、前記導電性粒子が含有された状態の前記第一の接着剤層の前記最低粘度の0.05倍以上0.2倍以下にされ、
前記導電性粒子が膜厚方向に2個以上積み重ならない接着フィルム。 - 請求項1乃至請求項5のいずれか1項記載の接着フィルムを前記基板と前記電気部品の間に配置し、
前記第一の接着剤層を前記基板の第一の端子が設けられた面に接触させ、前記第二の接着剤層を前記電気部品の第二の端子が設けられた面に接触させて前記基板と前記電気部品同士を加熱押圧し、前記電気部品を前記基板に接着すると共に、前記第一の端子と前記第二の端子を前記導電性粒子によって電気的に接続する電気部品の搭載方法。 - 請求項1乃至請求項5のいずれか1項記載の接着フィルムと、
前記基板と、
前記電気部品とを有し、
前記第一の接着剤層は前記基板の第一の端子が設けられた面に接触され、前記第二の接着剤層は前記電気部品の第二の端子が設けられた面に接触されて前記電気部品は前記基板に接着され、前記第一の端子と前記第二の端子は前記導電性粒子によって電気的に接続された電気部品搭載基板。
Priority Applications (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007168964A JP5311772B2 (ja) | 2007-06-27 | 2007-06-27 | 接着フィルム |
PCT/JP2008/061320 WO2009001771A1 (ja) | 2007-06-27 | 2008-06-20 | 接着フィルム、接続方法及び接合体 |
KR1020107001236A KR101193735B1 (ko) | 2007-06-27 | 2008-06-20 | 접착필름, 접속방법 및 접합체 |
KR1020127013969A KR101263623B1 (ko) | 2007-06-27 | 2008-06-20 | 접착 필름, 접속 방법 및 접합체 |
CN200880021279.4A CN101755022B (zh) | 2007-06-27 | 2008-06-20 | 粘合薄膜、连接方法及接合体 |
TW097123600A TWI386475B (zh) | 2007-06-27 | 2008-06-24 | 接著薄膜、連接方法及接合體 |
US12/645,883 US8796557B2 (en) | 2007-06-27 | 2009-12-23 | Adhesive film, connecting method, and joined structure |
HK10108212.3A HK1141826A1 (en) | 2007-06-27 | 2010-08-30 | Adhesive film, connecting method, and joined structure |
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JP (1) | JP5311772B2 (ja) |
KR (2) | KR101193735B1 (ja) |
CN (1) | CN101755022B (ja) |
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KR101651718B1 (ko) * | 2012-05-14 | 2016-08-29 | 주식회사 엘지화학 | 점착 제품의 제조 방법 |
KR20140139902A (ko) * | 2013-05-28 | 2014-12-08 | 삼성디스플레이 주식회사 | 이방성 도전 필름 적층체, 이를 포함하는 표시 장치 및 표시 장치 제조 방법 |
JP6307308B2 (ja) * | 2014-03-06 | 2018-04-04 | デクセリアルズ株式会社 | 接続構造体の製造方法、及び回路接続材料 |
JP6297381B2 (ja) * | 2014-03-26 | 2018-03-20 | デクセリアルズ株式会社 | 接着フィルム、フィルム巻装体、接続体の製造方法 |
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2008
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- 2008-06-20 KR KR1020107001236A patent/KR101193735B1/ko active IP Right Grant
- 2008-06-20 KR KR1020127013969A patent/KR101263623B1/ko active IP Right Grant
- 2008-06-20 WO PCT/JP2008/061320 patent/WO2009001771A1/ja active Application Filing
- 2008-06-24 TW TW097123600A patent/TWI386475B/zh active
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WO2009001771A1 (ja) | 2008-12-31 |
TW200914569A (en) | 2009-04-01 |
KR101193735B1 (ko) | 2012-10-22 |
TWI386475B (zh) | 2013-02-21 |
US8796557B2 (en) | 2014-08-05 |
US20100096175A1 (en) | 2010-04-22 |
KR20100021530A (ko) | 2010-02-24 |
KR20120060923A (ko) | 2012-06-12 |
JP2009007443A (ja) | 2009-01-15 |
CN101755022B (zh) | 2014-04-30 |
CN101755022A (zh) | 2010-06-23 |
KR101263623B1 (ko) | 2013-05-10 |
HK1141826A1 (en) | 2010-11-19 |
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