JP5301470B2 - X線分析機器 - Google Patents
X線分析機器 Download PDFInfo
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- JP5301470B2 JP5301470B2 JP2009552103A JP2009552103A JP5301470B2 JP 5301470 B2 JP5301470 B2 JP 5301470B2 JP 2009552103 A JP2009552103 A JP 2009552103A JP 2009552103 A JP2009552103 A JP 2009552103A JP 5301470 B2 JP5301470 B2 JP 5301470B2
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
- G01N23/20008—Constructional details of analysers, e.g. characterised by X-ray source, detector or optical system; Accessories therefor; Preparing specimens therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
- G01N23/207—Diffractometry using detectors, e.g. using a probe in a central position and one or more displaceable detectors in circumferential positions
- G01N23/2076—Diffractometry using detectors, e.g. using a probe in a central position and one or more displaceable detectors in circumferential positions for spectrometry, i.e. using an analysing crystal, e.g. for measuring X-ray fluorescence spectrum of a sample with wavelength-dispersion, i.e. WDXFS
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/2206—Combination of two or more measurements, at least one measurement being that of secondary emission, e.g. combination of secondary electron [SE] measurement and back-scattered electron [BSE] measurement
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/07—Investigating materials by wave or particle radiation secondary emission
- G01N2223/076—X-ray fluorescence
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- Physics & Mathematics (AREA)
- General Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Crystallography & Structural Chemistry (AREA)
- Dispersion Chemistry (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Description
15 真空チャンバ
20 XRD構成要素
30 XRF構成要素
40 XRD管
50 XRD検出器
60 XRDゴニオメータ
70 ゴニオメータ駆動機構
80 冷却/電力ダクト
90 XRF管
100 試料ホルダ
110 XRF検出器
120 XRFゴニオメータ
Claims (10)
- 結晶試料のX線回折(XRD)分析と蛍光X線(XRF)分析の両方を実行するための装置であって、
排気可能チャンバと、
前記排気可能チャンバ内に配置され、前記結晶試料を分析できるように取り付けるための試料ホルダと、
前記排気可能チャンバ内に配置され、前記結晶試料にX線を照射するためのXRF用X線源と、
前記排気可能チャンバ内に配置され、前記XRF用X線源からのX線の照射の結果として前記結晶試料の前記表面から放射された二次X線を検出するためのXRF検出機構と、
前記排気可能チャンバ内に前記XRF用X線源から分離されて配置されており、前記結晶試料にX線を照射するためのXRD用X線源と、
前記排気可能チャンバ内に配置され、前記結晶試料によって回折された固有波長のX線を検出するためのXRD検出機構と、
前記排気可能チャンバ内に配置され、前記XRD用X線源と前記試料ホルダ間の相対運動のために前記XRD用X線源を取り付けるように構成された第1の部分と、前記XRD検出機構と前記試料ホルダ間の相対運動のために前記XRD検出機構を取り付けるように構成された第2の部分とを有する可動式XRD支持アッセンブリと、
前記真空チャンバの外部から前記XRD用X線源に結合されて前記XRD用X線源に冷却を提供する冷却手段と、
前記真空チャンバの外部から前記XRD用X線源に結合されて前記XRD用X線源に電力を供給する電源接続と、
を有し、
前記冷却手段と前記電源接続はそれぞれ、使用中に前記XRD用X線源が前記真空チャンバに対して動くときに前記XRD用X線源に対する電力と冷却を維持するためにその少なくとも一部分が柔軟である、装置。 - 前記可動式支持アッセンブリの前記第1の部分は、前記XRD用X線源を前記試料ホルダに対して複数の角度位置で回転運動可能に取り付けるように構成され、前記可動式支持アッセンブリの前記第2の部分は、前記XRD検出器を前記試料ホルダに対して複数の角度位置で回転運動可能に取り付けるように構成された、請求項1に記載の装置。
- 前記可動式支持アッセンブリは、ゴニオメータを有し、前記可動式支持アッセンブリの前記第1の部分は、前記ゴニオメータの第1のアームを有し、前記可動式支持アッセンブリの前記第2の部分は、前記ゴニオメータの第2のアームを有する、請求項2に記載の装置。
- 前記試料ホルダのまわりの前記XRD用X線源と前記XRD検出機構のそれぞれの弧状運動を第1と第2の停止位置の間で制御するために、前記第1と第2のゴニオメータ・アームのそれぞれを駆動するゴニオメータ駆動手段を更に有する、請求項3に記載の装置。
- 前記試料ホルダは、前記排気可能チャンバ内の水平面を画定し、前記XRD用X線源の前記第1と第2の停止位置がそれぞれ、前記水平面に対して約3度と40度の角度をなし、前記XRD検出機構の前記第1と第2の停止位置はそれぞれ、前記水平面に対して約3度と40度の角度をなす、請求項4に記載の装置。
- 前記XRF用X線源は、前記試料ホルダと前記真空チャンバに対して一定位置に取り付けられる、請求項1〜5のいずれか1つに記載の装置。
- 前記XRF用X線源は、前記試料ホルダと交差する縦軸を有する、請求項6に記載の装置。
- 前記試料ホルダは、軸のまわりに回転可能である、請求項1〜7のいずれか1つに記載の装置。
- 前記XRF検出機構は、可動式XRF支持アッセンブリ上に取り付けられる、請求項1〜8のいずれか1つに記載の装置。
- 前記XRD用X線源は、単色X線ビームを生成するように構成され、前記XRF用X線源は、多色X線ビームを生成するように構成される、請求項1〜9のいずれか1つに記載の装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0704322.7A GB2447252B (en) | 2007-03-06 | 2007-03-06 | X-ray analysis instrument |
GB0704322.7 | 2007-03-06 | ||
PCT/EP2008/001566 WO2008107108A1 (en) | 2007-03-06 | 2008-02-28 | X-ray analysis instrument |
Publications (2)
Publication Number | Publication Date |
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JP2010520467A JP2010520467A (ja) | 2010-06-10 |
JP5301470B2 true JP5301470B2 (ja) | 2013-09-25 |
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Application Number | Title | Priority Date | Filing Date |
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JP2009552103A Expired - Fee Related JP5301470B2 (ja) | 2007-03-06 | 2008-02-28 | X線分析機器 |
Country Status (8)
Country | Link |
---|---|
US (1) | US7983386B2 (ja) |
EP (1) | EP2126553B1 (ja) |
JP (1) | JP5301470B2 (ja) |
CN (1) | CN101669024B (ja) |
GB (1) | GB2447252B (ja) |
RU (1) | RU2450261C2 (ja) |
WO (1) | WO2008107108A1 (ja) |
ZA (1) | ZA200905811B (ja) |
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US7092843B2 (en) * | 2003-10-21 | 2006-08-15 | X-Ray Optical Systems, Inc. | Apparatus and method for suppressing insignificant variations in measured sample composition data, including data measured from dynamically changing samples using x-ray analysis techniques |
JP3912606B2 (ja) * | 2004-10-26 | 2007-05-09 | 株式会社リガク | X線薄膜検査装置と、プロダクトウエーハの薄膜検査装置およびその方法 |
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2007
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EP2126553B1 (en) | 2016-04-13 |
JP2010520467A (ja) | 2010-06-10 |
GB2447252B (en) | 2012-03-14 |
US20100111251A1 (en) | 2010-05-06 |
EP2126553A1 (en) | 2009-12-02 |
WO2008107108A1 (en) | 2008-09-12 |
CN101669024A (zh) | 2010-03-10 |
WO2008107108A8 (en) | 2009-09-11 |
RU2009136636A (ru) | 2011-04-20 |
RU2450261C2 (ru) | 2012-05-10 |
GB2447252A (en) | 2008-09-10 |
CN101669024B (zh) | 2012-10-31 |
US7983386B2 (en) | 2011-07-19 |
ZA200905811B (en) | 2010-06-30 |
GB0704322D0 (en) | 2007-04-11 |
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