JP5291310B2 - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法 Download PDFInfo
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- JP5291310B2 JP5291310B2 JP2007222660A JP2007222660A JP5291310B2 JP 5291310 B2 JP5291310 B2 JP 5291310B2 JP 2007222660 A JP2007222660 A JP 2007222660A JP 2007222660 A JP2007222660 A JP 2007222660A JP 5291310 B2 JP5291310 B2 JP 5291310B2
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- insulating film
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- 239000004065 semiconductor Substances 0.000 title claims description 27
- 238000004519 manufacturing process Methods 0.000 title claims description 12
- 239000010408 film Substances 0.000 claims description 79
- 230000004888 barrier function Effects 0.000 claims description 41
- 239000010410 layer Substances 0.000 claims description 41
- 239000002184 metal Substances 0.000 claims description 41
- 239000011229 interlayer Substances 0.000 claims description 33
- 239000000463 material Substances 0.000 claims description 29
- 238000005530 etching Methods 0.000 claims description 23
- 239000000758 substrate Substances 0.000 claims description 16
- 238000000151 deposition Methods 0.000 claims description 10
- 230000001681 protective effect Effects 0.000 claims description 10
- 239000005380 borophosphosilicate glass Substances 0.000 claims description 5
- 239000010409 thin film Substances 0.000 claims description 5
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 3
- 238000009413 insulation Methods 0.000 claims description 2
- 238000000059 patterning Methods 0.000 claims 2
- 238000000034 method Methods 0.000 description 15
- 239000011241 protective layer Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- 229910018125 Al-Si Inorganic materials 0.000 description 3
- 229910018520 Al—Si Inorganic materials 0.000 description 3
- 229910018594 Si-Cu Inorganic materials 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 229910008465 Si—Cu Inorganic materials 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000003475 lamination Methods 0.000 description 3
- 238000000206 photolithography Methods 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- 229910000967 As alloy Inorganic materials 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76802—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics
- H01L21/76804—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics by forming tapered via holes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76829—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing characterised by the formation of thin functional dielectric layers, e.g. dielectric etch-stop, barrier, capping or liner layers
- H01L21/76831—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing characterised by the formation of thin functional dielectric layers, e.g. dielectric etch-stop, barrier, capping or liner layers in via holes or trenches, e.g. non-conductive sidewall liners
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76841—Barrier, adhesion or liner layers
- H01L21/76868—Forming or treating discontinuous thin films, e.g. repair, enhancement or reinforcement of discontinuous thin films
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Description
次に、等方性エッチングをある深さまで行い、コンタクトホールの開口部を広げ、その後、異方性エッチングを行い、コンタクトホールを形成する[図4(b)]。さらに、熱処理を施しコンタクトホール開口部の角を丸めるという方法もある。これらの方法により、配線材の断線やカバレジを向上せしめることができる。
このスパッタ工程において、コンタクトホール側壁が滑らかでないと、バリアメタル層が局所的に薄くなり、あるいは、バリアメタルが断線した状態になり、上層の配線材中のシリコンが半導体基板中に染み出すことになる。これを解消するために、バリアメタル層をスパッタで堆積させた後に絶縁膜からなる保護膜105を堆積させる[図4(d)]。この保護膜にはBPSG膜やNSG膜等を用いるのがよい。次に、異方性エッチングでこの保護膜105を部分的に取り除く。異方性エッチングで行うことにより、フォトマスクを使用することなく、コンタクトホール側壁のバリアメタル層表面、および、コンタクトホール側壁とコンタクトホール底面の接合部にあたるコンタクトホール側底面のバリアメタル層表面に絶縁膜を残すことが出来る[図4(e)]。これにより、コンタクトホール内部のバリアメタル層表面が滑らかになり、以降の配線材のカバレジを向上させる効果がある。
上記の第一の実施例において、半導体基板と第1の層間絶縁膜の間に、第1の層間絶縁膜よりエッチングされやすい薄膜が存在している場合は、図3に示すように局所的にバリアメタル層が薄い部分が存在する。これに絶縁膜からなる保護膜を堆積させる。次いで、異方性エッチングを行うことで、コンタクトホール側壁のバリアメタル層表面、および、コンタクトホール側壁とコンタクトホール底面の接合部にあたるコンタクト側底面のバリアメタル層表面に絶縁膜を残すことができる。これにより、コンタクトホール内部のバリアメタル層表面が滑らかになり、以降の配線材のカバレジを向上させる効果がある。
102 第1の層間絶縁膜
103 半導体基板
104 バリアメタル層
105 絶縁膜からなる保護膜
106 配線材
107 レジスト膜
108 シリコン酸化膜
A 課題における、バリアメタル層が薄膜化している個所
Claims (4)
- 半導体基板の表面上に、第1の層間絶縁膜を形成する工程と、
前記第1の層間絶縁膜の表面に前記第1の層間絶縁膜と材質の異なる第2の層間絶縁膜を形成する工程と、
前記第2の層間絶縁膜表面に塗布されたレジスト膜にパターニングを行う工程と、
前記レジスト膜をマスクとして、前記第2の層間絶縁膜の厚さ方向の途中までを等方性エッチングし、次いで、前記第2の層間絶縁膜の残部と前記第1の層間絶縁膜を異方性エッチングして、前記半導体基板表面まで達するコンタクトホールを形成する工程と、
前記コンタクトホールの凹凸のある内壁、および前記第2の層間絶縁膜表面にバリアメタル層を形成する工程と、
前記バリアメタル層表面に、絶縁膜からなる保護膜を堆積する工程と、
前記保護膜に異方性エッチングを行い、前記コンタクトホール側壁のバリアメタル層表面、および、前記コンタクトホール側壁と前記コンタクトホール底面の接合部にあたる前記コンタクトホール側底面のバリアメタル層表面を覆うようにサイドウォール状の絶縁膜を残す工程と、
前記サイドウォール状の絶縁膜、前記バリアメタル層、前記第2の層間絶縁膜表面上に配線材を堆積する工程と、
前記バリアメタルと前記配線材を所望の形状にエッチングする工程と、からなることを特徴とする半導体装置の製造方法。 - 半導体基板の表面上に、絶縁薄膜を形成する工程と、
前記絶縁薄膜の表面に前記絶縁薄膜と材質の異なる第1の層間絶縁膜を形成する工程と、
前記第1の層間絶縁膜の表面に前記第1の層間絶縁膜と材質の異なる第2の層間絶縁膜を形成する工程と、
前記第2の層間絶縁膜表面に塗布されたレジスト膜にパターニングを行う工程と、
前記レジスト膜をマスクとして、前記第2の層間絶縁膜の厚さ方向の途中までを等方性エッチングし、次いで、前記第2の層間絶縁膜の残部と前記第1の層間絶縁膜と前記絶縁薄膜を異方性エッチングして、前記半導体基板表面まで達するコンタクトホールを形成する工程と、
前記コンタクトホールの凹凸のある内壁、および前記第2の層間絶縁膜表面にバリアメタル層を形成する工程と、
前記バリアメタル層表面に、絶縁膜からなる保護膜を堆積する工程と、
前記保護膜に異方性エッチングを行い、前記コンタクトホール側壁のバリアメタル層表面、および、前記コンタクトホール側壁と前記コンタクトホール底面の接合部にあたる前記コンタクトホール側底面のバリアメタル層表面を覆うようにサイドウォール状の絶縁膜を残す工程と、
前記サイドウォール状の絶縁膜、前記バリアメタル層、前記第2の層間絶縁膜表面上に配線材を堆積する工程と、
前記バリアメタルと前記配線材を所望の形状にエッチングする工程と、からなることを特徴とする半導体装置の製造方法。 - 前記保護膜がBPSG膜あるいはNSG膜からなることを特徴とする請求項1または2に記載の半導体装置の製造方法。
- 前記バリアメタル層がTiあるいはTiとTiNの2層膜からなることを特徴とする請求項1または2に記載の半導体装置の製造方法。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007222660A JP5291310B2 (ja) | 2007-08-29 | 2007-08-29 | 半導体装置の製造方法 |
US12/229,808 US7737027B2 (en) | 2007-08-29 | 2008-08-27 | Method of manufacturing a semiconductor device |
KR20080084577A KR101491150B1 (ko) | 2007-08-29 | 2008-08-28 | 반도체 장치의 제조 방법 |
TW097132911A TWI495039B (zh) | 2007-08-29 | 2008-08-28 | Semiconductor device manufacturing method |
CN200810213401.XA CN101378035B (zh) | 2007-08-29 | 2008-08-29 | 半导体装置的制造方法 |
Applications Claiming Priority (1)
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JP2007222660A JP5291310B2 (ja) | 2007-08-29 | 2007-08-29 | 半導体装置の製造方法 |
Publications (2)
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JP2009054947A JP2009054947A (ja) | 2009-03-12 |
JP5291310B2 true JP5291310B2 (ja) | 2013-09-18 |
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JP2007222660A Expired - Fee Related JP5291310B2 (ja) | 2007-08-29 | 2007-08-29 | 半導体装置の製造方法 |
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US (1) | US7737027B2 (ja) |
JP (1) | JP5291310B2 (ja) |
KR (1) | KR101491150B1 (ja) |
CN (1) | CN101378035B (ja) |
TW (1) | TWI495039B (ja) |
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DE102010029504B4 (de) * | 2010-05-31 | 2014-02-27 | Robert Bosch Gmbh | Bauelement mit einer Durchkontaktierung und Verfahren zu dessen Herstellung |
DE102010063294B4 (de) * | 2010-12-16 | 2019-07-11 | Globalfoundries Dresden Module One Limited Liability Company & Co. Kg | Verfahren zur Herstellung von Metallisierungssystemen von Halbleiterbauelementen, die eine Kupfer/Silizium-Verbindung als ein Barrierenmaterial aufweisen |
JP6759004B2 (ja) * | 2016-08-29 | 2020-09-23 | 東京エレクトロン株式会社 | 被処理体を処理する方法 |
KR20180088187A (ko) * | 2017-01-26 | 2018-08-03 | 삼성전자주식회사 | 저항 구조체를 갖는 반도체 소자 |
JP6963396B2 (ja) * | 2017-02-28 | 2021-11-10 | キヤノン株式会社 | 電子部品の製造方法 |
US20210020455A1 (en) * | 2019-07-17 | 2021-01-21 | Nanya Technology Corporation | Conductive via structure |
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JPH1032247A (ja) * | 1996-07-17 | 1998-02-03 | Sony Corp | 半導体装置及びその製造方法 |
JP2005033173A (ja) * | 2003-06-16 | 2005-02-03 | Renesas Technology Corp | 半導体集積回路装置の製造方法 |
KR100641362B1 (ko) * | 2005-01-13 | 2006-10-31 | 삼성전자주식회사 | 이중 확산방지막을 갖는 배선구조 및 그 제조방법 |
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2007
- 2007-08-29 JP JP2007222660A patent/JP5291310B2/ja not_active Expired - Fee Related
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2008
- 2008-08-27 US US12/229,808 patent/US7737027B2/en not_active Expired - Fee Related
- 2008-08-28 KR KR20080084577A patent/KR101491150B1/ko active IP Right Grant
- 2008-08-28 TW TW097132911A patent/TWI495039B/zh not_active IP Right Cessation
- 2008-08-29 CN CN200810213401.XA patent/CN101378035B/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
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CN101378035B (zh) | 2014-06-25 |
TW200929440A (en) | 2009-07-01 |
CN101378035A (zh) | 2009-03-04 |
KR20090023231A (ko) | 2009-03-04 |
TWI495039B (zh) | 2015-08-01 |
US20090061620A1 (en) | 2009-03-05 |
US7737027B2 (en) | 2010-06-15 |
KR101491150B1 (ko) | 2015-02-06 |
JP2009054947A (ja) | 2009-03-12 |
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