JP5279858B2 - 酸化アルミニウム前駆体ゾル、および光学用部材の製造方法 - Google Patents

酸化アルミニウム前駆体ゾル、および光学用部材の製造方法 Download PDF

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JP5279858B2
JP5279858B2 JP2011054420A JP2011054420A JP5279858B2 JP 5279858 B2 JP5279858 B2 JP 5279858B2 JP 2011054420 A JP2011054420 A JP 2011054420A JP 2011054420 A JP2011054420 A JP 2011054420A JP 5279858 B2 JP5279858 B2 JP 5279858B2
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aluminum oxide
aluminum
precursor sol
film
oxide precursor
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JP2011251890A (ja
JP2011251890A5 (https=
Inventor
憲治 槇野
慶子 阿部
寛晴 中山
法重 掛川
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Canon Inc
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Canon Inc
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Priority to JP2011054420A priority Critical patent/JP5279858B2/ja
Priority to EP11003610.0A priority patent/EP2390229B1/en
Priority to US13/101,927 priority patent/US8580026B2/en
Priority to CN201110119548.4A priority patent/CN102267711B/zh
Publication of JP2011251890A publication Critical patent/JP2011251890A/ja
Publication of JP2011251890A5 publication Critical patent/JP2011251890A5/ja
Application granted granted Critical
Publication of JP5279858B2 publication Critical patent/JP5279858B2/ja
Priority to US14/053,960 priority patent/US9442221B2/en
Priority to US15/236,711 priority patent/US10598826B2/en
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/118—Anti-reflection coatings having sub-optical wavelength surface structures designed to provide an enhanced transmittance, e.g. moth-eye structures
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D5/00—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures
    • B05D5/06—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures to obtain multicolour or other optical effects
    • B05D5/061—Special surface effect
    • B05D5/063—Reflective effect
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C1/00—Ingredients generally applicable to manufacture of glasses, glazes, or vitreous enamels
    • C03C1/006—Ingredients generally applicable to manufacture of glasses, glazes, or vitreous enamels to produce glass through wet route
    • C03C1/008—Ingredients generally applicable to manufacture of glasses, glazes, or vitreous enamels to produce glass through wet route for the production of films or coatings
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/006—Surface treatment of glass, not in the form of fibres or filaments, by coating with materials of composite character
    • C03C17/007—Surface treatment of glass, not in the form of fibres or filaments, by coating with materials of composite character containing a dispersed phase, e.g. particles, fibres or flakes, in a continuous phase
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23—Oxides
    • C03C17/25—Oxides by deposition from the liquid phase
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/28—Surface treatment of glass, not in the form of fibres or filaments, by coating with organic material
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D5/00—Coating compositions, e.g. paints, varnishes or lacquers, characterised by their physical nature or the effects produced; Filling pastes
    • C09D5/006—Anti-reflective coatings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/02—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of crystals, e.g. rock-salt, semi-conductors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/113—Anti-reflection coatings using inorganic layer materials only
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D2203/00—Other substrates
    • B05D2203/30—Other inorganic substrates, e.g. ceramics, silicon
    • B05D2203/35—Glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D2401/00—Form of the coating product, e.g. solution, water dispersion, powders or the like
    • B05D2401/10—Organic solvent
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/212—TiO2
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/213—SiO2
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/214—Al2O3
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/40—Coatings comprising at least one inhomogeneous layer
    • C03C2217/425—Coatings comprising at least one inhomogeneous layer consisting of a porous layer
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/40—Coatings comprising at least one inhomogeneous layer
    • C03C2217/43—Coatings comprising at least one inhomogeneous layer consisting of a dispersed phase in a continuous phase
    • C03C2217/46—Coatings comprising at least one inhomogeneous layer consisting of a dispersed phase in a continuous phase characterized by the dispersed phase
    • C03C2217/465—Coatings comprising at least one inhomogeneous layer consisting of a dispersed phase in a continuous phase characterized by the dispersed phase having a specific shape
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/70—Properties of coatings
    • C03C2217/73—Anti-reflective coatings with specific characteristics
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/70—Properties of coatings
    • C03C2217/73—Anti-reflective coatings with specific characteristics
    • C03C2217/732—Anti-reflective coatings with specific characteristics made of a single layer
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/70—Properties of coatings
    • C03C2217/77—Coatings having a rough surface
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/11—Deposition methods from solutions or suspensions
    • C03C2218/113—Deposition methods from solutions or suspensions by sol-gel processes
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/11—Deposition methods from solutions or suspensions
    • C03C2218/116—Deposition methods from solutions or suspensions by spin-coating, centrifugation
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/30—Aspects of methods for coating glass not covered above
    • C03C2218/32—After-treatment
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24355—Continuous and nonuniform or irregular surface on layer or component [e.g., roofing, etc.]

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  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Inorganic Chemistry (AREA)
  • Dispersion Chemistry (AREA)
  • Composite Materials (AREA)
  • Wood Science & Technology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
  • Laminated Bodies (AREA)
  • Surface Treatment Of Glass (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
JP2011054420A 2010-05-07 2011-03-11 酸化アルミニウム前駆体ゾル、および光学用部材の製造方法 Active JP5279858B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2011054420A JP5279858B2 (ja) 2010-05-07 2011-03-11 酸化アルミニウム前駆体ゾル、および光学用部材の製造方法
EP11003610.0A EP2390229B1 (en) 2010-05-07 2011-05-03 Precursor sol of aluminum oxide, optical member, and method for producing optical member
US13/101,927 US8580026B2 (en) 2010-05-07 2011-05-05 Precursor sol of aluminum oxide, optical member, and method for producing optical member
CN201110119548.4A CN102267711B (zh) 2010-05-07 2011-05-06 氧化铝的前体溶胶、光学部件和制备光学部件的方法
US14/053,960 US9442221B2 (en) 2010-05-07 2013-10-15 Precursor sol of aluminum oxide, optical member, and method for producing optical member
US15/236,711 US10598826B2 (en) 2010-05-07 2016-08-15 Precursor sol of aluminum oxide optical member and method for producing optical member

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2010107704 2010-05-07
JP2010107704 2010-05-07
JP2011054420A JP5279858B2 (ja) 2010-05-07 2011-03-11 酸化アルミニウム前駆体ゾル、および光学用部材の製造方法

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JP2011251890A JP2011251890A (ja) 2011-12-15
JP2011251890A5 JP2011251890A5 (https=) 2013-02-14
JP5279858B2 true JP5279858B2 (ja) 2013-09-04

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US (3) US8580026B2 (https=)
EP (1) EP2390229B1 (https=)
JP (1) JP5279858B2 (https=)
CN (1) CN102267711B (https=)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5645435B2 (ja) * 2009-03-31 2014-12-24 キヤノン株式会社 酸化アルミニウム前駆体ゾル及び光学用部材の製造方法
JP5867325B2 (ja) * 2011-07-12 2016-02-24 株式会社デンソー 撥水性基材の製造方法
EP2644661B1 (en) 2012-03-29 2018-12-05 Canon Kabushiki Kaisha Precursor sol of aluminum oxide and method for manufacturing the same, method for manufacturing optical member, optical member, and optical system
JP6071318B2 (ja) 2012-08-09 2017-02-01 キヤノン株式会社 光学部材および光学部材の製造方法
KR102123996B1 (ko) 2013-02-25 2020-06-17 삼성전자주식회사 알루미늄 전구체, 이를 이용한 박막 형성 방법 및 커패시터 형성 방법
CN104211724A (zh) * 2013-05-29 2014-12-17 北京化工大学 β-二酮亚胺基烷氧基氢化铝化合物和其合成方法及应用
JP6468696B2 (ja) * 2013-06-21 2019-02-13 キヤノン株式会社 光学用部材およびその製造方法
JP2015114381A (ja) * 2013-12-09 2015-06-22 東京エレクトロン株式会社 反射防止機能を有する部材およびその製造方法
JP6385155B2 (ja) * 2014-06-03 2018-09-05 小林　博 熱伝導性ペーストの製造方法
KR101697008B1 (ko) * 2014-06-26 2017-01-16 주식회사 엘지화학 리튬 이차전지
CN105623320B (zh) * 2014-11-07 2018-02-13 罗门哈斯电子材料有限公司 有机铝材料
CN107113372A (zh) * 2014-12-26 2017-08-29 旭硝子株式会社 光学滤波器和摄像装置
KR101895116B1 (ko) * 2016-03-29 2018-09-04 주식회사 엘지화학 음극 슬러리의 제조방법
WO2018198936A1 (ja) * 2017-04-27 2018-11-01 日本板硝子株式会社 低反射膜付き透明基板、光電変換装置、低反射膜付き透明基板の低反射膜を形成するための塗工液及び低反射膜付き透明基板の製造方法
CN107024779B (zh) * 2017-04-27 2019-05-10 新昌县大市聚镇金丰五金厂 智能防护眼镜
CN107244814B (zh) * 2017-07-07 2020-07-03 云南开放大学(云南国防工业职业技术学院) 一种疏水耐摩擦半透明氧化铝薄膜的制备方法
JPWO2019026539A1 (ja) * 2017-08-01 2020-06-18 石原産業株式会社 立体構造物及びその製造方法並びに被覆処理装置
CN108996917A (zh) * 2018-09-01 2018-12-14 苏州汉力新材料有限公司 一种超疏水氧化铝涂层的制备方法
JP7385364B2 (ja) * 2019-03-08 2023-11-22 キヤノン株式会社 光学部材、光学部材の製造方法、光学機器、及び撮像装置
US12320953B2 (en) * 2022-04-27 2025-06-03 Dai Nippon Printing Co., Ltd. Optical film, image display panel, and image display device

Family Cites Families (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1462618A (en) 1973-05-10 1977-01-26 Secretary Industry Brit Reducing the reflectance of surfaces to radiation
US4252843A (en) * 1977-02-18 1981-02-24 Minnesota Mining And Manufacturing Company Process for forming a microstructured transmission and reflectance modifying coating
US4202870A (en) 1979-04-23 1980-05-13 Union Carbide Corporation Process for producing alumina
CA1217927A (en) * 1983-04-15 1987-02-17 Tsutomu Nanao Inorganic composite material and process for preparing the same
DE3486416T2 (de) * 1983-05-20 1996-08-01 Toagosei Co Grundierungsmittel.
US4610866A (en) * 1985-10-11 1986-09-09 Battelle Memorial Institute Method for producing beta-aluminas
JPH01275763A (ja) * 1988-04-27 1989-11-06 Mitsui Toatsu Chem Inc ゾルーゲル法によるアルミナ含有薄膜の製造方法
US5133918A (en) 1988-07-20 1992-07-28 Jung Hyung J Process for manufacturing a polycrystalline alumina fiber
KR910000294B1 (ko) * 1988-07-20 1991-01-24 한국과학기술원 비수용액에서 중합알루미나졸의 합성방법 및 그를 이용한 알루미나 다결정질 무기섬유 제조방법
JP3282882B2 (ja) * 1993-05-07 2002-05-20 ナミックス株式会社 誘電体保護剤
JPH07267633A (ja) * 1994-03-31 1995-10-17 Kyocera Corp ベーマイトゾルの作製法並びにそれを用いたアルミナ質多孔質体の作製法
JPH09202649A (ja) 1996-01-24 1997-08-05 Central Glass Co Ltd 花弁状透明アルミナ膜及びその形成法
US6210858B1 (en) * 1997-04-04 2001-04-03 Fuji Photo Film Co., Ltd. Anti-reflection film and display device using the same
JP3291563B2 (ja) * 1999-03-25 2002-06-10 三菱マテリアル株式会社 光触媒塗料とその製造方法および用途
JP4528896B2 (ja) * 1999-04-09 2010-08-25 三菱マテリアル株式会社 アルミナ−シリカ複合塗料およびその塗膜と光触媒被膜
JP3975612B2 (ja) * 1999-06-07 2007-09-12 コニカミノルタホールディングス株式会社 金属酸化物含有皮膜の製造方法
JP4247354B2 (ja) * 1999-07-08 2009-04-02 財団法人大阪産業振興機構 表面微細凹凸組織の低温形成法および当該組織を有する基体
JP4045707B2 (ja) * 1999-12-06 2008-02-13 日亜化学工業株式会社 金属酸化物微粒子の製造方法
EP1391476B1 (en) * 2001-04-09 2015-12-09 Sekisui Chemical Co., Ltd. Photoreactive composition
JP2004244608A (ja) * 2002-08-07 2004-09-02 Showa Denko Kk 加水分解重縮合物溶液およびその製造方法、ならびにそれを用いた透明皮膜形成用組成物
JP4182236B2 (ja) * 2004-02-23 2008-11-19 キヤノン株式会社 光学部材および光学部材の製造方法
JP2006171430A (ja) * 2004-12-16 2006-06-29 Canon Inc 光学素子及びそれを有する光学系
JP4520418B2 (ja) * 2005-02-18 2010-08-04 キヤノン株式会社 光学用透明部材及びそれを用いた光学系
EP1947486B9 (en) * 2007-01-22 2012-03-14 Canon Kabushiki Kaisha Optical member with antireflection coating and method of manufacturing the same
JP4857290B2 (ja) * 2007-01-22 2012-01-18 キヤノン株式会社 光学部材及び光学部材の製造方法
JP4639241B2 (ja) * 2007-02-20 2011-02-23 キヤノン株式会社 光学用部材、それを用いた光学系及び光学用部材の製造方法
EP2000289A3 (en) * 2007-06-06 2016-04-06 Canon Kabushiki Kaisha Method of manufacturing optical element, and optical element
JP5645435B2 (ja) * 2009-03-31 2014-12-24 キヤノン株式会社 酸化アルミニウム前駆体ゾル及び光学用部材の製造方法
JP5814512B2 (ja) * 2009-03-31 2015-11-17 キヤノン株式会社 光学用部材、その製造方法及び光学系
JP5511307B2 (ja) * 2009-10-23 2014-06-04 キヤノン株式会社 光学部材、及びその製造方法

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