JP5256002B2 - フォトレジスト現像排水の排水処理システム - Google Patents

フォトレジスト現像排水の排水処理システム Download PDF

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Publication number
JP5256002B2
JP5256002B2 JP2008299657A JP2008299657A JP5256002B2 JP 5256002 B2 JP5256002 B2 JP 5256002B2 JP 2008299657 A JP2008299657 A JP 2008299657A JP 2008299657 A JP2008299657 A JP 2008299657A JP 5256002 B2 JP5256002 B2 JP 5256002B2
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water
wastewater
anion exchange
organic fluorine
anion
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Japanese (ja)
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JP2010125352A (ja
JP2010125352A5 (enExample
Inventor
理 中森
高志 二ツ木
義宣 小野
一重 高橋
太郎 大江
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Organo Corp
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Organo Corp
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  • Separation Using Semi-Permeable Membranes (AREA)
  • Treatment Of Water By Ion Exchange (AREA)
  • Treatment Of Water By Oxidation Or Reduction (AREA)
  • Water Treatment By Electricity Or Magnetism (AREA)
JP2008299657A 2008-11-25 2008-11-25 フォトレジスト現像排水の排水処理システム Expired - Fee Related JP5256002B2 (ja)

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JP2008299657A JP5256002B2 (ja) 2008-11-25 2008-11-25 フォトレジスト現像排水の排水処理システム

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JP2008299657A JP5256002B2 (ja) 2008-11-25 2008-11-25 フォトレジスト現像排水の排水処理システム

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JP2010125352A JP2010125352A (ja) 2010-06-10
JP2010125352A5 JP2010125352A5 (enExample) 2011-09-22
JP5256002B2 true JP5256002B2 (ja) 2013-08-07

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12275661B2 (en) 2023-07-14 2025-04-15 Claros Technologies Inc. Methods and systems of iodine capture from aqueous solutions

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JP6526506B2 (ja) * 2015-07-07 2019-06-05 リファインホールディングス株式会社 アニオン性界面活性剤を含有する水の水処理方法
CA3035672A1 (en) * 2016-09-12 2018-05-31 Aecom (Delaware Corporation) Use of electrochemical oxidation for treatment of per-and polyfluoroalkyl substances (pfas) in waste generated from sorbent and resin regeneration processes
JP7494216B2 (ja) * 2019-06-07 2024-06-03 エヴォクア ウォーター テクノロジーズ エルエルシー 分離および電気化学的排除を使用したｐｆａｓ処理スキーム
US11401180B2 (en) * 2019-06-28 2022-08-02 Battelle Memorial Institute Destruction of PFAS via an oxidation process and apparatus suitable for transportation to contaminated sites
CA3180965A1 (en) * 2020-08-06 2022-02-10 Stephen H. Rosansky Salt separation and destruction of pfas utilizing reverse osmosis and salt separation
TW202423849A (zh) 2022-08-25 2024-06-16 日商東京威力科創股份有限公司 處理系統及處理方法
JP2024151434A (ja) 2023-04-12 2024-10-25 東京エレクトロン株式会社 処理システム及び処理方法
JP2024151433A (ja) 2023-04-12 2024-10-25 東京エレクトロン株式会社 処理システム及び処理方法
WO2025234057A1 (ja) * 2024-05-09 2025-11-13 東京エレクトロン株式会社 処理システム及び処理方法

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JP3656338B2 (ja) * 1996-09-13 2005-06-08 オルガノ株式会社 フォトレジスト現像廃液の処理方法
JP3543915B2 (ja) * 1996-11-21 2004-07-21 オルガノ株式会社 フォトレジスト現像廃液の再生処理方法
JP3663804B2 (ja) * 1997-01-24 2005-06-22 オルガノ株式会社 フォトレジスト現像廃液の処理方法
DE19824615A1 (de) * 1998-06-02 1999-12-09 Dyneon Gmbh Verfahren zur Rückgewinnung von fluorierten Alkansäuren aus Abwässern
DE19824614A1 (de) * 1998-06-02 1999-12-09 Dyneon Gmbh Verfahren zur Rückgewinnung von fluorierten Alkansäuren aus Abwässern
JP3801793B2 (ja) * 1998-10-15 2006-07-26 オルガノ株式会社 有機成分の回収装置
JP3968678B2 (ja) * 1998-10-26 2007-08-29 オルガノ株式会社 テトラアルキルアンモニウムイオン含有液の処理方法
DE19932771A1 (de) * 1999-07-14 2001-01-18 Dyneon Gmbh Verfahren zur Eluierung fluorierter Emulgatoren
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JP2001239142A (ja) * 1999-12-20 2001-09-04 Japan Organo Co Ltd 超臨界水酸化分解処理装置
JP2003190949A (ja) * 2001-12-27 2003-07-08 Tokuyama Corp フォトレジスト現像廃液の再生処理方法
JP2003215810A (ja) * 2002-01-22 2003-07-30 Japan Organo Co Ltd フォトレジスト現像廃液からの現像液の回収方法
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JP2005175118A (ja) * 2003-12-10 2005-06-30 Japan Organo Co Ltd フォトレジスト現像廃液の再生処理装置
JP2005173402A (ja) * 2003-12-12 2005-06-30 Japan Organo Co Ltd フォトレジスト現像廃液の再生処理装置
JP2005215627A (ja) * 2004-02-02 2005-08-11 Japan Organo Co Ltd レジスト剥離廃液の再生処理方法及び装置
JP4561967B2 (ja) * 2004-05-19 2010-10-13 オルガノ株式会社 テトラアルキルアンモニウムイオン含有排水から水を回収する方法及び装置
EP1700869A1 (en) * 2005-03-11 2006-09-13 3M Innovative Properties Company Recovery of fluorinated surfactants from a basic anion exchange resin having quaternary ammonium groups
WO2007043278A1 (ja) * 2005-10-14 2007-04-19 Asahi Glass Company, Limited 塩基性陰イオン交換樹脂の再生方法
US7666929B2 (en) * 2006-05-31 2010-02-23 E.I. Du Pont De Nemours And Company Process for reducing fluorosurfactant content of fluropolymer dispersions using anionic surfactant-treated anion exchange resin
WO2008101137A1 (en) * 2007-02-16 2008-08-21 3M Innovative Properties Company System and process for the removal of fluorochemicals from water
TWI399342B (zh) * 2007-04-25 2013-06-21 Tokuyama Corp Process for the preparation of waste liquid containing tetraalkylammonium ion
JP4859863B2 (ja) * 2008-03-24 2012-01-25 オルガノ株式会社 水処理方法および水処理装置
JP5298639B2 (ja) * 2008-05-26 2013-09-25 栗田工業株式会社 水溶性樹脂成分含有アルカリ廃液の処理方法および処理装置
JP5051004B2 (ja) * 2008-05-30 2012-10-17 栗田工業株式会社 水溶性樹脂成分含有アルカリ廃液の処理方法および処理装置
JP5062093B2 (ja) * 2008-08-06 2012-10-31 栗田工業株式会社 アミノ基を有する水溶性有機溶媒の回収方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12275661B2 (en) 2023-07-14 2025-04-15 Claros Technologies Inc. Methods and systems of iodine capture from aqueous solutions
US12351498B2 (en) 2023-07-14 2025-07-08 Claros Technologies Inc. Methods and systems of PFAS destruction using UV irradiation at 222 nanometers
US12473222B2 (en) 2023-07-14 2025-11-18 Claros Technologies Inc. Methods and systems for recycling materials during PFAS destruction

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