JP5251864B2 - 半導体装置及びその製造方法 - Google Patents
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- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
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- SYQBFIAQOQZEGI-UHFFFAOYSA-N osmium atom Chemical compound [Os] SYQBFIAQOQZEGI-UHFFFAOYSA-N 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B53/00—Ferroelectric RAM [FeRAM] devices comprising ferroelectric memory capacitors
- H10B53/30—Ferroelectric RAM [FeRAM] devices comprising ferroelectric memory capacitors characterised by the memory core region
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/40—Capacitors
- H01L28/55—Capacitors with a dielectric comprising a perovskite structure material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/40—Capacitors
- H01L28/60—Electrodes
- H01L28/65—Electrodes comprising a noble metal or a noble metal oxide, e.g. platinum (Pt), ruthenium (Ru), ruthenium dioxide (RuO2), iridium (Ir), iridium dioxide (IrO2)
Description
、印加電圧を取り去っても自発分極を保持する。印加電圧の極性を反転すれば、自発分極の極性も反転する。従って、この自発分極を検出すれば、情報を読み出すことができる。
図1〜図6は、本発明の第1実施形態に係る半導体装置の形成工程を示す断面図である。なお、本実施形態における半導体装置は、強誘電体メモリであって、便宜上、その構造については、製造方法と共に説明する。
次に、図2(c)に示すように、金属膜11c上に水素拡散防止用の金属窒化化合物膜11dを50〜100nmの厚さに形成する。金属窒化化合物膜11dとして、例えば、窒化チタンアルミニウム(TiAlN)膜、TaAlN(窒化タンタルアルミニウム)膜、TiAlON(窒化酸化チタンアルミニウム)膜、TaAlON(窒化酸化タンタルアルミニウム)膜、TiN膜、TaN膜、その他の導電性窒化金属化合物膜がある。
利点がある。
極めて好適である。
以下、本発明の実施形態について説明する。但し、ここでは、便宜上、強誘電体メモリの各メモリセルの断面構造については、その製造方法と共に説明する。
図19、図20は、本発明の第3実施形態に係る強誘電体メモリ(半導体装置)及びその製造方法を示す断面図である。なお、図19、図20において、図8〜図17と同じ符号は同じ要素を示している。
図21、図22は、本発明の第4実施形態に係る半導体装置の形成工程を示す断面図である。なお、図21、図22において、図8〜図17と同じ符号は同じ要素を示している。
図23、図24は、本発明の第5実施形態に係る半導体装置の形成工程を示す断面図である。なお、図23、図24において、図8〜図17と同じ符号は同じ要素を示している
。
Claims (9)
- 半導体基板上に形成された強誘電体キャパシタを有する半導体装置において、前記強誘電体キャパシタは、下部電極と、前記下部電極上に形成された強誘電体膜と、前記強誘電体膜上に形成された上部電極とを有し、
前記上部電極は、第1の導電性貴金属酸化物から形成される第1導電膜と、前記第1導電膜上に形成される金属窒化化合物から形成される第4導電膜とを少なくとも含む積層構造であり、
前記第1導電膜と前記第4導電膜の間に形成される貴金属の第3導電膜と、
前記第1導電膜と前記第3導電膜の間に形成される第2の導電性貴金属酸化物の第2導電膜とをさらに有する
ことを特徴とする半導体装置。 - 前記第1導電膜は、成膜当初の組成パラメータx1を使って化学式AOx1(A:金属元素、O:酸素)で表され実際の組成が組成パラメータx2を使って化学式AOx2で表される第1酸化物膜であり、
前記第2導電膜は、前記第1導電膜上に形成され、成膜当初の組成パラメータy1を使って化学式BOy1で表され実際の組成が組成パラメータy2を使って化学式BOy2(B:金属元素、O:酸素)で表され、石垣状或いは柱状の結晶からなり、前記第1酸化物膜より酸化の割合が高く、前記組成パラメータx1、x2、y1およびy2の間には、関係(y2/y1)>(x2/x1)が成立する第2酸化物膜である
ことを特徴とする請求項1に記載の半導体装置。 - 前記第1導電膜と前記第2導電膜の少なくとも一方に含まれる金属元素はイリジウム又はルテニウムであることを特徴とする請求項1又は請求項2に記載の半導体装置。
- 前記第4導電膜は、TiAlN膜、TiAlON膜、TaAlN膜、TaAlON膜から選択されることを特徴とする請求項1乃至請求項3のいずれか1項に記載の半導体装置。
- 前記第3導電膜の材料は、イリジウム膜、プラチナ膜、ルテニウム膜、ロジウム膜及びパラジウム膜から選択されることを特徴とする請求項1乃至請求項4のいずれか1項に記載の半導体装置。
- 半導体基板の上方に下部電極を形成する工程と、
前記下部電極上に強誘電体膜を形成する工程と、
前記強誘電体膜上に上部電極を形成する工程とを含み、
前記上部電極を形成する工程は、
前記強誘電体膜上に第1の貴金属酸化膜からなる第1導電膜を形成する工程と、
前記第1導電膜の上に、第2の貴金属酸化膜からなる第2導電膜を形成する工程と、
前記第2導電膜の上に貴金属膜からなる第3導電膜を形成する工程と、
前記第3導電膜の上に窒素を含有する金属化合物からなる第4導電膜を形成する工程と
を有することを特徴とする半導体装置の製造方法。 - 前記第4導電膜を形成する工程は、スパッタ法を用いることを特徴とする請求項6に記載の半導体装置の製造方法。
- 前記第1導電膜を形成する工程の後に、前記第1導電膜の形成時に比べてアルゴン流量に対する酸素流量の割合が大きいガス流量のスパッタ条件により前記第1導電膜よりも酸化の割合を高くすることにより前記第2の貴金属酸化膜からなる前記第2導電膜を前記第1導電膜上に形成する工程と、
前記第2導電膜を形成した後に、前記半導体基板を不活性ガスと酸化性ガスの混合雰囲気中において熱処理する工程を含むことを特徴とする請求項6又は請求項7に記載の半導体装置の製造方法。 - 前記強誘電体膜を形成した後であって前記第1導電膜を形成する前において、前記強誘電体膜を不活性ガスと酸化性ガスを含む雰囲気中で第1の温度で熱処理する工程と、
前記強誘電体膜より薄いアモルファス強誘電体膜を前記強誘電体膜上に形成する工程と、
前記第1導電膜を前記アモルファス強誘電体膜上に形成した後に、酸素を含む雰囲気中において前記第1の温度よりも高い温度で前記強誘電体膜を熱処理して前記強誘電体膜を結晶化する工程と、
を含むことを特徴とする請求項6乃至請求項8のいずれか1項に記載の半導体装置の製造方法。
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US20130214289A1 (en) * | 2012-02-16 | 2013-08-22 | Texas Instruments Incorporated | Short-Resistant Metal-Gate MOS Transistor and Method of Forming the Transistor |
US9659814B2 (en) | 2013-02-01 | 2017-05-23 | Applied Materials, Inc. | Doping control of metal nitride films |
US9105578B2 (en) * | 2013-03-12 | 2015-08-11 | Taiwan Semiconductor Manufacturing Company, Ltd. | Interface for metal gate integration |
US9263275B2 (en) | 2013-03-12 | 2016-02-16 | Taiwan Semiconductor Manufacturing Company, Ltd. | Interface for metal gate integration |
US9589974B2 (en) * | 2013-09-11 | 2017-03-07 | Kabushiki Kaisha Toshiba | Nonvolatile semiconductor memory device and method for manufacturing same |
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US10109350B2 (en) * | 2016-07-29 | 2018-10-23 | AP Memory Corp., USA | Ferroelectric memory device |
US10622070B2 (en) | 2016-07-29 | 2020-04-14 | AP Memory Corp, USA | Ferroelectric memory device |
US10861929B2 (en) * | 2018-06-27 | 2020-12-08 | Taiwan Semiconductor Manufacturing Co., Ltd. | Electronic device including a capacitor |
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