JP5238164B2 - パターン形成方法 - Google Patents
パターン形成方法 Download PDFInfo
- Publication number
- JP5238164B2 JP5238164B2 JP2007016803A JP2007016803A JP5238164B2 JP 5238164 B2 JP5238164 B2 JP 5238164B2 JP 2007016803 A JP2007016803 A JP 2007016803A JP 2007016803 A JP2007016803 A JP 2007016803A JP 5238164 B2 JP5238164 B2 JP 5238164B2
- Authority
- JP
- Japan
- Prior art keywords
- mold
- substrate
- pattern
- mold release
- processed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
- B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
- B29C59/022—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing characterised by the disposition or the configuration, e.g. dimensions, of the embossments or the shaping tools therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
- B29C59/002—Component parts, details or accessories; Auxiliary operations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/033—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers
- H01L21/0334—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane
- H01L21/0337—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane characterised by the process involved to create the mask, e.g. lift-off masks, sidewalls, or to modify the mask, e.g. pre-treatment, post-treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
- B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
- B29C59/022—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing characterised by the disposition or the configuration, e.g. dimensions, of the embossments or the shaping tools therefor
- B29C2059/023—Microembossing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
- B29L2031/00—Other particular articles
- B29L2031/34—Electrical apparatus, e.g. sparking plugs or parts thereof
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Nanotechnology (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Crystallography & Structural Chemistry (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Mathematical Physics (AREA)
- Theoretical Computer Science (AREA)
- Inorganic Chemistry (AREA)
- Shaping Of Tube Ends By Bending Or Straightening (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Description
する工程において、パターンが固化されたインプリント材とモールドとを剥離する際にパ
ターンの破壊や下地基板における膜の剥がれを防止し、歩留まり向上に寄与し得るパター
ン形成方法を提供することを目的とする。
ーン欠陥の発生を防止し、歩留まり向上に寄与することが可能である。
2 移動部
3 把持部
4 制御部
101 被加工基板
102 インプリント材
103 モールド
Claims (2)
- パターンが形成されたモールドを、被加工基板の被加工面上のインプリント材に接触さ
せて前記パターンを転写するパターン形成方法であって、
試験用の前記被加工基板から前記モールドが離型するように前記モールドを移動させる
際に、離型速度、前記モールドと前記被加工基板との間の離型角度を含む離型条件の少な
くとも一つを変化させて、インプリントを行う工程と、
インプリントされた前記被加工基板における欠陥を検査し、前記欠陥の個数と前記離型
条件との関連を調べて最適な離型条件を設定する工程と、
前記最適な離型条件に従って、製品用の前記被加工基板にインプリントを行う工程と、
を備えることを特徴とするパターン形成方法。 - 前記試験用の被加工基板にインプリントを行う工程において、ショット毎あるいは前記被
加工基板毎に、前記離型条件の少なくとも1つを変化させることを特徴とする請求項1記
載のパターン形成方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007016803A JP5238164B2 (ja) | 2007-01-26 | 2007-01-26 | パターン形成方法 |
US12/180,168 US20090045539A1 (en) | 2007-01-26 | 2008-07-25 | Pattern forming method and pattern forming apparatus |
US14/311,404 US9403316B2 (en) | 2007-01-26 | 2014-06-23 | Pattern forming method and pattern forming apparatus |
US15/206,705 US9944014B2 (en) | 2007-01-26 | 2016-07-11 | Pattern forming method and pattern forming apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007016803A JP5238164B2 (ja) | 2007-01-26 | 2007-01-26 | パターン形成方法 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013019260A Division JP5456187B2 (ja) | 2013-02-04 | 2013-02-04 | パターン形成装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008183731A JP2008183731A (ja) | 2008-08-14 |
JP5238164B2 true JP5238164B2 (ja) | 2013-07-17 |
Family
ID=39727081
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007016803A Expired - Fee Related JP5238164B2 (ja) | 2007-01-26 | 2007-01-26 | パターン形成方法 |
Country Status (2)
Country | Link |
---|---|
US (3) | US20090045539A1 (ja) |
JP (1) | JP5238164B2 (ja) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010160854A (ja) | 2009-01-08 | 2010-07-22 | Fujifilm Corp | Dtm用モールド構造物、インプリント方法、並びにdtmの製造方法及びdtm |
JP4792096B2 (ja) * | 2009-03-19 | 2011-10-12 | 株式会社東芝 | テンプレートパターンの設計方法、テンプレートの製造方法及び半導体装置の製造方法。 |
JP5563243B2 (ja) * | 2009-06-01 | 2014-07-30 | キヤノン株式会社 | インプリント装置、および、物品の製造方法 |
JP2011009250A (ja) * | 2009-06-23 | 2011-01-13 | Toshiba Corp | 基板処理方法、半導体装置の製造方法及びインプリント装置 |
WO2011027882A1 (ja) * | 2009-09-07 | 2011-03-10 | 東洋合成工業株式会社 | パターン形成用光硬化性組成物及びこれを用いた膜厚測定方法 |
JP5669377B2 (ja) * | 2009-11-09 | 2015-02-12 | キヤノン株式会社 | インプリント装置及び物品の製造方法 |
JP5190497B2 (ja) * | 2010-09-13 | 2013-04-24 | 株式会社東芝 | インプリント装置及び方法 |
JP2014064022A (ja) * | 2013-11-11 | 2014-04-10 | Canon Inc | インプリント装置 |
JP5933060B2 (ja) * | 2015-03-13 | 2016-06-08 | キヤノン株式会社 | インプリント装置および方法ならびに物品製造方法 |
JP6611450B2 (ja) * | 2015-03-31 | 2019-11-27 | キヤノン株式会社 | インプリント装置、インプリント方法、及び物品の製造方法 |
US11472212B2 (en) * | 2016-09-05 | 2022-10-18 | Ev Group E. Thallner Gmbh | Device and method for embossing micro- and/or nanostructures |
JP6978877B2 (ja) * | 2017-09-04 | 2021-12-08 | キヤノン株式会社 | インプリント装置および物品製造方法 |
KR102441428B1 (ko) * | 2020-11-27 | 2022-09-08 | 주식회사 기가레인 | 디몰더 장치 및 이를 이용한 패턴 기판 생산 방법 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5772905A (en) * | 1995-11-15 | 1998-06-30 | Regents Of The University Of Minnesota | Nanoimprint lithography |
JPH11147236A (ja) * | 1997-11-18 | 1999-06-02 | Ube Ind Ltd | 表皮材インサート成形の成形条件設定方法および装置 |
JP2000194142A (ja) | 1998-12-25 | 2000-07-14 | Fujitsu Ltd | パタ―ン形成方法及び半導体装置の製造方法 |
EP1072954A3 (en) | 1999-07-28 | 2002-05-22 | Lucent Technologies Inc. | Lithographic process for device fabrication |
US7432634B2 (en) * | 2000-10-27 | 2008-10-07 | Board Of Regents, University Of Texas System | Remote center compliant flexure device |
AU2001297642A1 (en) * | 2000-10-12 | 2002-09-04 | Board Of Regents, The University Of Texas System | Template for room temperature, low pressure micro- and nano-imprint lithography |
JP2003077807A (ja) | 2001-09-04 | 2003-03-14 | Matsushita Electric Ind Co Ltd | モールド、モールドの製造方法、および、パターン形成方法 |
US6900881B2 (en) * | 2002-07-11 | 2005-05-31 | Molecular Imprints, Inc. | Step and repeat imprint lithography systems |
JP2005153091A (ja) * | 2003-11-27 | 2005-06-16 | Hitachi Ltd | 転写方法及び転写装置 |
WO2006082867A1 (ja) * | 2005-02-02 | 2006-08-10 | Scivax Corporation | ハイブリッド接離システム |
JP2008091782A (ja) * | 2006-10-04 | 2008-04-17 | Toshiba Corp | パターン形成用テンプレート、パターン形成方法、及びナノインプリント装置 |
-
2007
- 2007-01-26 JP JP2007016803A patent/JP5238164B2/ja not_active Expired - Fee Related
-
2008
- 2008-07-25 US US12/180,168 patent/US20090045539A1/en not_active Abandoned
-
2014
- 2014-06-23 US US14/311,404 patent/US9403316B2/en not_active Expired - Fee Related
-
2016
- 2016-07-11 US US15/206,705 patent/US9944014B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US20090045539A1 (en) | 2009-02-19 |
US20160318234A1 (en) | 2016-11-03 |
US20140300018A1 (en) | 2014-10-09 |
US9944014B2 (en) | 2018-04-17 |
US9403316B2 (en) | 2016-08-02 |
JP2008183731A (ja) | 2008-08-14 |
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