JP5233212B2 - クリーン搬送システム - Google Patents

クリーン搬送システム Download PDF

Info

Publication number
JP5233212B2
JP5233212B2 JP2007230382A JP2007230382A JP5233212B2 JP 5233212 B2 JP5233212 B2 JP 5233212B2 JP 2007230382 A JP2007230382 A JP 2007230382A JP 2007230382 A JP2007230382 A JP 2007230382A JP 5233212 B2 JP5233212 B2 JP 5233212B2
Authority
JP
Japan
Prior art keywords
clean
unit
transport
support frame
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2007230382A
Other languages
English (en)
Japanese (ja)
Other versions
JP2009064900A (ja
Inventor
賢輔 平田
芳幸 和田
刈入 田中
晋 村山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IHI Corp
Original Assignee
IHI Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by IHI Corp filed Critical IHI Corp
Priority to JP2007230382A priority Critical patent/JP5233212B2/ja
Priority to CN200880105255A priority patent/CN101796625A/zh
Priority to KR1020107007057A priority patent/KR101130154B1/ko
Priority to PCT/JP2008/064986 priority patent/WO2009031416A1/ja
Priority to CN2013101428074A priority patent/CN103247561A/zh
Priority to TW097133742A priority patent/TW200931575A/zh
Publication of JP2009064900A publication Critical patent/JP2009064900A/ja
Application granted granted Critical
Publication of JP5233212B2 publication Critical patent/JP5233212B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3202—Mechanical details, e.g. rollers or belts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/33—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations into and out of processing chamber
    • H10P72/3314—Continuous loading and unloading into and out of a processing chamber, e.g. transporting belts within processing chambers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/36—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations using air tracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Ventilation (AREA)
JP2007230382A 2007-09-05 2007-09-05 クリーン搬送システム Expired - Fee Related JP5233212B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2007230382A JP5233212B2 (ja) 2007-09-05 2007-09-05 クリーン搬送システム
CN200880105255A CN101796625A (zh) 2007-09-05 2008-08-22 无尘输送系统
KR1020107007057A KR101130154B1 (ko) 2007-09-05 2008-08-22 반송 시스템
PCT/JP2008/064986 WO2009031416A1 (ja) 2007-09-05 2008-08-22 クリーン搬送システム
CN2013101428074A CN103247561A (zh) 2007-09-05 2008-08-22 无尘输送系统
TW097133742A TW200931575A (en) 2007-09-05 2008-09-03 Clean conveyance system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007230382A JP5233212B2 (ja) 2007-09-05 2007-09-05 クリーン搬送システム

Publications (2)

Publication Number Publication Date
JP2009064900A JP2009064900A (ja) 2009-03-26
JP5233212B2 true JP5233212B2 (ja) 2013-07-10

Family

ID=40428736

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007230382A Expired - Fee Related JP5233212B2 (ja) 2007-09-05 2007-09-05 クリーン搬送システム

Country Status (5)

Country Link
JP (1) JP5233212B2 (https=)
KR (1) KR101130154B1 (https=)
CN (2) CN101796625A (https=)
TW (1) TW200931575A (https=)
WO (1) WO2009031416A1 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5446403B2 (ja) * 2009-04-07 2014-03-19 株式会社Ｉｈｉ 搬送方向転換装置及び浮上搬送システム
JP5088591B2 (ja) * 2010-04-15 2012-12-05 株式会社ダイフク 板状体搬送装置
CN112079049B (zh) * 2020-09-03 2022-07-12 广州小鹏汽车科技有限公司 一种运输方法和装置、介质
CN114671217A (zh) * 2020-12-24 2022-06-28 志圣工业股份有限公司 自体清洁的输送装置及包含输送装置的加热设备

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06298360A (ja) * 1993-04-12 1994-10-25 Hitachi Ltd 気流式搬送装置
JP2001315960A (ja) * 2000-05-09 2001-11-13 Meidensha Corp 基板搬送装置
TWI327985B (en) * 2003-04-14 2010-08-01 Daifuku Kk Apparatus for transporting plate-shaped work piece
JP4214468B2 (ja) * 2003-07-03 2009-01-28 株式会社ダイフク 搬送装置
TWI295659B (en) * 2003-08-29 2008-04-11 Daifuku Kk Transporting apparatus
JP2005167083A (ja) * 2003-12-04 2005-06-23 Daifuku Co Ltd ガラス基板用の搬送設備

Also Published As

Publication number Publication date
JP2009064900A (ja) 2009-03-26
KR101130154B1 (ko) 2012-03-28
CN103247561A (zh) 2013-08-14
TW200931575A (en) 2009-07-16
TWI379375B (https=) 2012-12-11
KR20100053674A (ko) 2010-05-20
WO2009031416A1 (ja) 2009-03-12
CN101796625A (zh) 2010-08-04

Similar Documents

Publication Publication Date Title
CN100488855C (zh) 输送车、制造装置、及输送系统
CN100482555C (zh) 板状体输送装置
JP4807579B2 (ja) 基板収納設備及び基板処理設備
JP5233212B2 (ja) クリーン搬送システム
JP4217963B2 (ja) 板状体搬送装置
JP3882139B2 (ja) クリーン搬送車
CN101271836A (zh) 输送车、制造装置、及输送系统
JP4251279B2 (ja) 板状体搬送装置
JP2004269214A (ja) 浄化空気通風式の保管設備
JP4186129B2 (ja) 板状体搬送装置
JP5200868B2 (ja) 浮上搬送装置
JP5088591B2 (ja) 板状体搬送装置
JP2009126677A (ja) 搬送装置
JP4253850B2 (ja) 走行装置およびロボット
JP4715383B2 (ja) 搬送台車
JP4214468B2 (ja) 搬送装置
JP4116928B2 (ja) 物品搬送車及び搬送システム
JP5604940B2 (ja) 浮上搬送装置
JP4320936B2 (ja) 搬送車
JP4368169B2 (ja) クリーン室間における物体移送用通路
JP6685834B2 (ja) 浮上搬送装置
CN102556565B (zh) 板状体搬送装置
HK1124431A (en) Conveying vehicle,manufacturing apparatus and conveying system

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20100722

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20120124

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20120229

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20120508

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20120611

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20121002

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20121227

A911 Transfer to examiner for re-examination before appeal (zenchi)

Free format text: JAPANESE INTERMEDIATE CODE: A911

Effective date: 20130108

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20130226

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20130311

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20160405

Year of fee payment: 3

LAPS Cancellation because of no payment of annual fees