WO2009031416A1 - クリーン搬送システム - Google Patents

クリーン搬送システム Download PDF

Info

Publication number
WO2009031416A1
WO2009031416A1 PCT/JP2008/064986 JP2008064986W WO2009031416A1 WO 2009031416 A1 WO2009031416 A1 WO 2009031416A1 JP 2008064986 W JP2008064986 W JP 2008064986W WO 2009031416 A1 WO2009031416 A1 WO 2009031416A1
Authority
WO
WIPO (PCT)
Prior art keywords
housing
conveyance system
opening
conveyance
floor
Prior art date
Application number
PCT/JP2008/064986
Other languages
English (en)
French (fr)
Inventor
Kensuke Hirata
Yoshiyuki Wada
Kai Tanaka
Susumu Murayama
Original Assignee
Ihi Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ihi Corporation filed Critical Ihi Corporation
Priority to KR1020107007057A priority Critical patent/KR101130154B1/ko
Priority to CN200880105255A priority patent/CN101796625A/zh
Publication of WO2009031416A1 publication Critical patent/WO2009031416A1/ja

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706Mechanical details, e.g. roller, belt
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063Transporting devices for sheet glass
    • B65G49/064Transporting devices for sheet glass in a horizontal position
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063Transporting devices for sheet glass
    • B65G49/064Transporting devices for sheet glass in a horizontal position
    • B65G49/065Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/6776Continuous loading and unloading into and out of a processing chamber, e.g. transporting belts within processing chambers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04Arrangements of vacuum systems or suction cups
    • B65G2249/045Details of suction cups suction cups

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Ventilation (AREA)

Abstract

 搬送システムは床面上に設置されて対象物を搬送する。前記搬送システムは、操作可能に閉塞しうる第1の開口と、操作可能に閉塞しうる第2の開口と、を有し、前記床面上に設置されて前記第1の開口と前記第2の開口が閉塞されると内部に密閉空間を囲むべく構成されたハウジングと、前記ハウジング内に設けられ、前記第1の開口から前記第2の開口に向けて前記対象物を搬送するべく構成された搬送装置と、前記ハウジング内に設けられ、前記密閉空間内の空気を清浄化し、清浄化された空気を供給する送風装置と、を備える。
PCT/JP2008/064986 2007-09-05 2008-08-22 クリーン搬送システム WO2009031416A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
KR1020107007057A KR101130154B1 (ko) 2007-09-05 2008-08-22 반송 시스템
CN200880105255A CN101796625A (zh) 2007-09-05 2008-08-22 无尘输送系统

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-230382 2007-09-05
JP2007230382A JP5233212B2 (ja) 2007-09-05 2007-09-05 クリーン搬送システム

Publications (1)

Publication Number Publication Date
WO2009031416A1 true WO2009031416A1 (ja) 2009-03-12

Family

ID=40428736

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/064986 WO2009031416A1 (ja) 2007-09-05 2008-08-22 クリーン搬送システム

Country Status (5)

Country Link
JP (1) JP5233212B2 (ja)
KR (1) KR101130154B1 (ja)
CN (2) CN101796625A (ja)
TW (1) TW200931575A (ja)
WO (1) WO2009031416A1 (ja)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5446403B2 (ja) * 2009-04-07 2014-03-19 株式会社Ihi 搬送方向転換装置及び浮上搬送システム
JP5088591B2 (ja) * 2010-04-15 2012-12-05 株式会社ダイフク 板状体搬送装置
CN112079049B (zh) * 2020-09-03 2022-07-12 广州小鹏汽车科技有限公司 一种运输方法和装置、介质
CN114671217A (zh) * 2020-12-24 2022-06-28 志圣工业股份有限公司 自体清洁的输送装置及包含输送装置的加热设备

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06298360A (ja) * 1993-04-12 1994-10-25 Hitachi Ltd 気流式搬送装置
JP2001315960A (ja) * 2000-05-09 2001-11-13 Meidensha Corp 基板搬送装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI327985B (en) * 2003-04-14 2010-08-01 Daifuku Kk Apparatus for transporting plate-shaped work piece
JP4214468B2 (ja) * 2003-07-03 2009-01-28 株式会社ダイフク 搬送装置
TWI295659B (en) * 2003-08-29 2008-04-11 Daifuku Kk Transporting apparatus
JP2005167083A (ja) * 2003-12-04 2005-06-23 Daifuku Co Ltd ガラス基板用の搬送設備

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06298360A (ja) * 1993-04-12 1994-10-25 Hitachi Ltd 気流式搬送装置
JP2001315960A (ja) * 2000-05-09 2001-11-13 Meidensha Corp 基板搬送装置

Also Published As

Publication number Publication date
KR101130154B1 (ko) 2012-03-28
CN101796625A (zh) 2010-08-04
TW200931575A (en) 2009-07-16
JP2009064900A (ja) 2009-03-26
TWI379375B (ja) 2012-12-11
JP5233212B2 (ja) 2013-07-10
KR20100053674A (ko) 2010-05-20
CN103247561A (zh) 2013-08-14

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