WO2009031416A1 - クリーン搬送システム - Google Patents

クリーン搬送システム Download PDF

Info

Publication number
WO2009031416A1
WO2009031416A1 PCT/JP2008/064986 JP2008064986W WO2009031416A1 WO 2009031416 A1 WO2009031416 A1 WO 2009031416A1 JP 2008064986 W JP2008064986 W JP 2008064986W WO 2009031416 A1 WO2009031416 A1 WO 2009031416A1
Authority
WO
WIPO (PCT)
Prior art keywords
housing
conveyance system
opening
conveyance
floor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/064986
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
Kensuke Hirata
Yoshiyuki Wada
Kai Tanaka
Susumu Murayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IHI Corp
Original Assignee
IHI Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by IHI Corp filed Critical IHI Corp
Priority to CN200880105255A priority Critical patent/CN101796625A/zh
Priority to KR1020107007057A priority patent/KR101130154B1/ko
Publication of WO2009031416A1 publication Critical patent/WO2009031416A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3202—Mechanical details, e.g. rollers or belts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/33—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations into and out of processing chamber
    • H10P72/3314—Continuous loading and unloading into and out of a processing chamber, e.g. transporting belts within processing chambers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/36—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations using air tracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Ventilation (AREA)
PCT/JP2008/064986 2007-09-05 2008-08-22 クリーン搬送システム Ceased WO2009031416A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN200880105255A CN101796625A (zh) 2007-09-05 2008-08-22 无尘输送系统
KR1020107007057A KR101130154B1 (ko) 2007-09-05 2008-08-22 반송 시스템

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007230382A JP5233212B2 (ja) 2007-09-05 2007-09-05 クリーン搬送システム
JP2007-230382 2007-09-05

Publications (1)

Publication Number Publication Date
WO2009031416A1 true WO2009031416A1 (ja) 2009-03-12

Family

ID=40428736

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/064986 Ceased WO2009031416A1 (ja) 2007-09-05 2008-08-22 クリーン搬送システム

Country Status (5)

Country Link
JP (1) JP5233212B2 (https=)
KR (1) KR101130154B1 (https=)
CN (2) CN101796625A (https=)
TW (1) TW200931575A (https=)
WO (1) WO2009031416A1 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5446403B2 (ja) * 2009-04-07 2014-03-19 株式会社Ｉｈｉ 搬送方向転換装置及び浮上搬送システム
JP5088591B2 (ja) * 2010-04-15 2012-12-05 株式会社ダイフク 板状体搬送装置
CN112079049B (zh) * 2020-09-03 2022-07-12 广州小鹏汽车科技有限公司 一种运输方法和装置、介质
CN114671217A (zh) * 2020-12-24 2022-06-28 志圣工业股份有限公司 自体清洁的输送装置及包含输送装置的加热设备

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06298360A (ja) * 1993-04-12 1994-10-25 Hitachi Ltd 気流式搬送装置
JP2001315960A (ja) * 2000-05-09 2001-11-13 Meidensha Corp 基板搬送装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI327985B (en) * 2003-04-14 2010-08-01 Daifuku Kk Apparatus for transporting plate-shaped work piece
JP4214468B2 (ja) * 2003-07-03 2009-01-28 株式会社ダイフク 搬送装置
TWI295659B (en) * 2003-08-29 2008-04-11 Daifuku Kk Transporting apparatus
JP2005167083A (ja) * 2003-12-04 2005-06-23 Daifuku Co Ltd ガラス基板用の搬送設備

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06298360A (ja) * 1993-04-12 1994-10-25 Hitachi Ltd 気流式搬送装置
JP2001315960A (ja) * 2000-05-09 2001-11-13 Meidensha Corp 基板搬送装置

Also Published As

Publication number Publication date
JP2009064900A (ja) 2009-03-26
KR101130154B1 (ko) 2012-03-28
CN103247561A (zh) 2013-08-14
TW200931575A (en) 2009-07-16
TWI379375B (https=) 2012-12-11
JP5233212B2 (ja) 2013-07-10
KR20100053674A (ko) 2010-05-20
CN101796625A (zh) 2010-08-04

Similar Documents

Publication Publication Date Title
ZA201100347B (en) Clean room suit and the like
GB2457837A (en) Equipment cabinet with a ventilation system
EP2060495A4 (en) TRANSPORT DEVICE, AND DEVICE AND SYSTEM FOR PACKAGING RELATED BOX
AU2012266292A8 (en) An exercise device
EP2083223A4 (en) Device for diluting discharged vapor and cooker with the same
WO2012027210A3 (en) Ventilation system for engine and aftertreatment compartments and components
EP1966366A4 (en) AMPLIFICATION SYSTEM AND METHODS FOR MOLECULAR DIAGNOSIS
PL2165172T3 (pl) Urządzenia, układy i sposoby wykrywania osadów tłuszczowych
EP2050495A4 (en) EXHAUST GAS CATALYST AND DEVICE FOR PROCESSING EXHAUST GASES USING THIS CATALYST
WO2007101195A3 (en) Air cleaner including ozone removal
WO2008045751A3 (en) Computer chassis with service fan tray
GB0910724D0 (en) Shield system
TW200801406A (en) Filter-fan unit
USD631901S1 (en) Portable apparatus for determining leaks in air ducts
WO2012072775A3 (de) Kraftfahrzeugklimaanlage
WO2009031416A1 (ja) クリーン搬送システム
GB0806451D0 (en) Computer inlet device and method for operating the same
EP2072463A4 (en) ACTIVE CHARCOAL AND ACTIVE CHARCOAL TANK AND INTAKE AIR FILTER USING THE SAME
EP1984683A4 (en) BLAS TURBO FAN AND COOLING DEVICE THEREWITH
WO2009084947A3 (en) Air extraction system
WO2009088733A3 (en) Fan hub integrated vacuum pump system
TW200702563A (en) Fan apparatus with adapting device
DK1887997T3 (da) Kolostomiindretninger
GB0514389D0 (en) Video processing apparatus and computer system integrated with the same
HU0700853D0 (en) Device and method for preventing, air-flow on the flange of openings

Legal Events

Date Code Title Description
WWE Wipo information: entry into national phase

Ref document number: 200880105255.7

Country of ref document: CN

121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 08829673

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

ENP Entry into the national phase

Ref document number: 20107007057

Country of ref document: KR

Kind code of ref document: A

122 Ep: pct application non-entry in european phase

Ref document number: 08829673

Country of ref document: EP

Kind code of ref document: A1